CN212316239U - Feeding and discharging mechanism for coating - Google Patents
Feeding and discharging mechanism for coating Download PDFInfo
- Publication number
- CN212316239U CN212316239U CN202020700981.1U CN202020700981U CN212316239U CN 212316239 U CN212316239 U CN 212316239U CN 202020700981 U CN202020700981 U CN 202020700981U CN 212316239 U CN212316239 U CN 212316239U
- Authority
- CN
- China
- Prior art keywords
- base plate
- substrate
- clamping mechanism
- vertical
- horizontal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Coating Apparatus (AREA)
Abstract
The utility model belongs to the technical field of the film preparation technique and specifically relates to a feeding and discharging mechanism in coating film, including base plate horizontal pushing mechanism, the vertical clamping mechanism of base plate, base plate horizontal clamping mechanism and the vertical pushing mechanism of base plate, wherein base plate horizontal pushing mechanism connects the vertical clamping mechanism of base plate, the vertical clamping mechanism of base plate can be along the horizontal direction displacement under the drive of base plate horizontal pushing mechanism, and its displacement stroke is located between the base plate installation position of coating film frame and the horizontal clamping mechanism of base plate, the vertical clamping mechanism of base plate is connected to the vertical pushing mechanism of base plate, the horizontal clamping mechanism of base plate can be along vertical direction displacement under the drive of the vertical pushing mechanism of base plate, and its displacement stroke is located between the base plate placement position of the vertical clamping mechanism of base plate and material frame. The utility model has the advantages that: the full-automatic feeding and discharging of the substrate are realized, the integral action beat of the mechanism is fast, the time required by the feeding and discharging process of the substrate can be shortened, the integral speed of a coating process is greatly improved, and the continuous vacuum coating can be realized.
Description
Technical Field
The utility model belongs to the technical field of the film preparation technique and specifically relates to a feeding and discharging mechanism for coating film.
Background
An automatic continuous vacuum coating equipment is becoming one of the trends in the development of coating equipment. One of the keys to realizing the automatic continuous operation of the vacuum coating equipment is the automation of the substrate loading and unloading mode. The design of the substrate automatic loading and unloading mechanism of the vacuum coating equipment needs to consider the compatibility with the coating process of the coating chamber and other front and back processes, and also considers the performance stability and the cost factor.
At present, a coating frame for loading a substrate is often provided with a certain height, which is limited by the integration of various devices required by vacuum coating equipment for realizing a coating process, and meanwhile, the substrate is generally placed in a centralized manner before or after coating, namely, the substrate is placed on a material frame in a centralized manner. Therefore, the material frame is substantially far away from the vacuum coating equipment and has obvious height difference. If a common multi-axis motion mechanism is adopted to carry out loading and unloading operation on the substrate, the mechanism needs to have extremely high precision requirement and control requirement, and the loading and unloading efficiency is extremely low, so that the further development of the coating equipment is not facilitated.
Disclosure of Invention
The utility model aims at providing a feeding and discharging mechanism in coating film according to above-mentioned prior art is not enough, carries out the centre gripping and cooperates push mechanism to handing-over to the base plate through the clamping mechanism who disposes different centre gripping directions, has realized the base plate at the coating film frame with expect the last unloading between the frame.
The utility model discloses the purpose is realized accomplishing by following technical scheme:
the utility model provides a unloading mechanism on coating film for install the base plate of leaving the non-coating film on the material frame to the coating frame and realize the material loading, and will the base plate that has accomplished the coating film on the coating frame lift off and put back on the material frame, its characterized in that: including horizontal push mechanism of base plate, the vertical clamping mechanism of base plate, horizontal clamping mechanism of base plate and the vertical push mechanism of base plate, wherein horizontal push mechanism of base plate connects the vertical clamping mechanism of base plate, the vertical clamping mechanism of base plate can along the horizontal direction displacement under horizontal push mechanism's the drive of base plate, and its displacement stroke is located the base plate installation position of coating frame with between the horizontal clamping mechanism of base plate, the vertical push mechanism of base plate connects horizontal clamping mechanism of base plate, horizontal clamping mechanism of base plate can along vertical direction displacement under vertical push mechanism's the drive of base plate, and its displacement stroke is located vertical clamping mechanism of base plate with between the base plate placement position of material frame.
The material frame is connected with a material frame pushing mechanism, and the material frame pushing mechanism can drive the material frame to move so as to realize the switching of the substrate placing positions relative to the substrate horizontal clamping mechanism.
The coating frame is connected with a rotating mechanism, and the rotating mechanism can drive the coating frame to rotate so as to realize the switching of the substrate mounting positions relative to the position of the substrate vertical clamping mechanism.
The vertical substrate clamping mechanism and the horizontal substrate clamping mechanism respectively refer to a clamping mechanism for clamping the substrate from two ends of the substrate in the vertical direction and a clamping mechanism for clamping the substrate from two ends of the substrate in the horizontal direction.
The utility model has the advantages that: the full-automatic loading and unloading of the substrate are realized, the substrate which is not coated can be arranged on a coating frame of the vacuum coating equipment from a material frame, and the coated substrate is unloaded from the coating frame and placed in a material returning space; the safety of the loading and unloading process of the substrate is high, and the quality of the substrate is ensured; the integral action beat of the mechanism is fast, the time required by the loading and unloading process of the substrate can be shortened, the integral speed of the coating process is greatly improved, and the continuous vacuum coating can be realized; simple structure is reasonable, adopts the modularized design, and the maintenance in the later stage of being convenient for is suitable for the popularization.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic perspective view of the present invention;
fig. 3 is a schematic structural view of a coating frame according to the present invention.
Detailed Description
The features of the present invention and other related features are described in further detail below by way of example in conjunction with the accompanying drawings to facilitate understanding by those skilled in the art:
as shown in fig. 1-3, the symbols 1-8 in the figures are respectively expressed as: the material frame pushing mechanism 1, the material frame 2, the substrate vertical pushing mechanism 3, the substrate horizontal clamping mechanism 4, the substrate horizontal pushing mechanism 5, the substrate vertical clamping mechanism 6, the substrate frame 7 and the substrate 8.
Example (b): as shown in fig. 1, the loading and unloading mechanism for coating in this embodiment is used for loading and unloading a substrate between a coating frame and a material frame of a vacuum coating apparatus, wherein the coating frame is used for loading the substrate and can rotate in the vacuum coating apparatus to coat a coated product on the substrate, and the material frame is used for storing an uncoated substrate before coating and a coated substrate after coating. The loading and unloading mechanism for coating in this embodiment can specifically realize the installation of the uncoated substrate from the material frame to the coating frame (loading) and the unloading of the coated substrate from the coating frame to the material returning frame (unloading).
Specifically, as shown in fig. 1 to 3, the coating loading and unloading mechanism in this embodiment includes a substrate vertical pushing mechanism 3, a substrate horizontal clamping mechanism 4, a substrate horizontal pushing mechanism 5, and a substrate vertical clamping mechanism 6. Wherein, the substrate vertical clamping mechanism 6 is arranged near one side of the substrate frame 7, and the height of the substrate vertical clamping mechanism is matched with the height of the substrate 8 loaded on the substrate frame 7. The substrate vertical clamping mechanism 6 is connected with the substrate horizontal pushing mechanism 5, so that the substrate horizontal pushing mechanism 5 can be driven to move along the horizontal direction.
In specific implementation, the substrate horizontal pushing mechanism 5 is driven, the substrate vertical clamping mechanism 6 can move to the film coating frame 7 along a horizontal direction and clamp the substrate 8 on the current mounting position, and the substrate horizontal pushing mechanism 5 drives the substrate vertical clamping mechanism 6 to move towards the opposite horizontal direction after clamping, so that the coated substrate 8 is detached from the current mounting position. When the disassembly is completed, the substrate horizontal pushing mechanism 5 continues to drive the substrate vertical clamping mechanism 6 and the substrate 8 clamped by the substrate vertical clamping mechanism to horizontally displace until the substrate vertical clamping mechanism is displaced to the position of the connection with the substrate horizontal clamping mechanism 4.
The substrate horizontal clamping mechanism 4 is arranged adjacent to one side of the material frame 2. The substrate horizontal clamping mechanism 4 is connected with the substrate vertical pushing mechanism 3, so that the substrate horizontal clamping mechanism can be driven by the substrate vertical pushing mechanism 3 to move along the vertical direction.
In specific implementation, since the substrate vertical pushing mechanism 5 has been displaced to the position of being handed over to the substrate horizontal clamping mechanism 4, the substrate horizontal clamping mechanism 4 clamps the substrate 8 at this time, and the substrate vertical pushing mechanism 3 drives the substrate horizontal clamping mechanism 4 and the substrate 8 clamped by the substrate horizontal clamping mechanism to vertically displace until the substrate horizontal clamping mechanism is displaced to the substrate placing position on the material frame 2, and then the substrate 8 can be released to return.
In the embodiment, in the specific operation: through set up material frame push mechanism 1 on material frame 2 and can realize the full-automatic unloading of going up of base plate, concrete step is as follows:
1) the substrate horizontal pushing mechanism 5 drives the substrate vertical clamping mechanism 6 to the substrate frame 7, retreats after clamping the coated substrate 8 on the substrate frame 7 at the current mounting position, and moves to the connection position with the substrate horizontal clamping mechanism 4 under the driving of the substrate horizontal pushing mechanism 5.
2) The substrate horizontal clamping mechanism 4 clamps the coated substrate 8 for delivery, and after the clamping of the substrate horizontal clamping mechanism 4 is completed, the substrate vertical clamping mechanism 6 releases the coated substrate 8. The substrate vertical pushing mechanism 3 drives the substrate horizontal clamping mechanism 4 to descend to send the coated substrate 8 to the substrate placing position vacant on the material frame 2, and then the substrate horizontal clamping mechanism 4 loosens the substrate to place the substrate on the substrate placing position to complete the blanking of the coated substrate 8.
3) The material frame pushing mechanism 1 pushes the material frame to move forward by a station, and the uncoated substrate is stored on the station. The substrate horizontal clamping mechanism 4 clamps the substrate 8 without coating, and the substrate vertical pushing mechanism 3 lifts the substrate 8 without coating to a delivery position with the substrate vertical clamping mechanism 6.
4) The substrate vertical clamping mechanism 6 clamps the substrate 8 which is not coated with a film for delivery, and after the clamping of the substrate vertical clamping mechanism 6 is completed, the substrate horizontal clamping mechanism 4 releases the substrate.
5) The substrate horizontal pushing mechanism 5 drives the substrate vertical clamping mechanism 6 to move to the current installation position of the substrate frame 7 and hang the substrate 8 which is not coated with a film to complete feeding.
6) The substrate holder 7 is rotated by its own rotating mechanism to the next station (substrate mounting station) where the coated substrate 8 is loaded, and the above-described operations are repeated until all the substrates 8 on the substrate holder 7 are replaced, that is, all the coated substrates on the substrate holder 7 are removed and placed back on the material frame 2, and all the non-coated substrates on the material frame 2 are mounted on the substrate holder 7.
In the embodiment, in specific implementation: the substrate horizontal clamping mechanism 4 and the substrate vertical clamping mechanism 6 are operation mechanisms that can clamp the substrate 8 from the horizontal direction (two horizontally opposing arrow directions of the substrate horizontal clamping mechanism 4 shown in fig. 2) or the vertical direction (two vertically opposing arrow directions of the substrate vertical clamping mechanism 6 shown in fig. 2) of the substrate 8, respectively.
Because the substrate horizontal clamping mechanism 4 and the substrate vertical clamping mechanism 6 can clamp the substrate 8 from two different directions, the substrate 8 is always in a holding force state clamped by at least one clamping mechanism in the process of being conveyed, and the safety and the stability of the substrate 8 during feeding and blanking are ensured. Meanwhile, the horizontal clamping mechanism 4 of the substrate is arranged firstly, and the vertical clamping mechanism 6 of the substrate is arranged later, so that the two clamping mechanisms are matched with each other and kept away from each other, the substrate 8 on the substrate frame 7 is effectively prevented from damaging the substrates on two sides when being dismounted, and the occupied space of the whole feeding and discharging mechanism can be effectively reduced.
In some embodiments, the substrate horizontal clamping mechanism 4 and the substrate vertical clamping mechanism 6 may be implemented using a robot, i.e. having two controllable clamping portions by which the substrate 8 may be effectively clamped.
The substrate vertical pushing mechanism 3 and the substrate horizontal pushing mechanism 5 can be realized by adopting a common driving mode. For example, a slide way is arranged on the substrate vertical pushing mechanism 3, the substrate horizontal clamping mechanism 4 can slide in the slide way, and the horizontal clamping mechanism 4 can slide in the slide way by matching with an air cylinder or other power parts, so that the displacement is realized.
The material frame pushing mechanism 1 can drive the material frame 2 to move in a driving mode such as a stepping motor, so that the switching of each substrate placing position on the material frame 2 compared with the substrate horizontal clamping mechanism 4 is realized. Similarly, the rotation mechanism of the substrate holder 7 is set to step-wise rotation at this time, so that the substrate mounting position on the substrate holder 7 can be switched easily compared with the substrate vertical chucking mechanism 6.
Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims, and therefore, the description thereof is not repeated herein.
Claims (4)
1. The utility model provides a unloading mechanism on coating film for install the base plate of leaving the non-coating film on the material frame to the coating frame and realize the material loading, and will the base plate that has accomplished the coating film on the coating frame lift off and put back on the material frame, its characterized in that: including horizontal push mechanism of base plate, the vertical clamping mechanism of base plate, horizontal clamping mechanism of base plate and the vertical push mechanism of base plate, wherein horizontal push mechanism of base plate connects the vertical clamping mechanism of base plate, the vertical clamping mechanism of base plate can along the horizontal direction displacement under horizontal push mechanism's the drive of base plate, and its displacement stroke is located the base plate installation position of coating frame with between the horizontal clamping mechanism of base plate, the vertical push mechanism of base plate connects horizontal clamping mechanism of base plate, horizontal clamping mechanism of base plate can along vertical direction displacement under vertical push mechanism's the drive of base plate, and its displacement stroke is located vertical clamping mechanism of base plate with between the base plate placement position of material frame.
2. The coating loading and unloading mechanism of claim 1, wherein: the material frame is connected with a material frame pushing mechanism, and the material frame pushing mechanism can drive the material frame to move so as to realize the switching of the substrate placing positions relative to the substrate horizontal clamping mechanism.
3. The coating loading and unloading mechanism of claim 1, wherein: the coating frame is connected with a rotating mechanism, and the rotating mechanism can drive the coating frame to rotate so as to realize the switching of the substrate mounting positions relative to the position of the substrate vertical clamping mechanism.
4. The coating loading and unloading mechanism of claim 1, wherein: the vertical substrate clamping mechanism and the horizontal substrate clamping mechanism respectively refer to a clamping mechanism for clamping the substrate from two ends of the substrate in the vertical direction and a clamping mechanism for clamping the substrate from two ends of the substrate in the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020700981.1U CN212316239U (en) | 2020-04-30 | 2020-04-30 | Feeding and discharging mechanism for coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020700981.1U CN212316239U (en) | 2020-04-30 | 2020-04-30 | Feeding and discharging mechanism for coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212316239U true CN212316239U (en) | 2021-01-08 |
Family
ID=74032164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020700981.1U Active CN212316239U (en) | 2020-04-30 | 2020-04-30 | Feeding and discharging mechanism for coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212316239U (en) |
-
2020
- 2020-04-30 CN CN202020700981.1U patent/CN212316239U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112224864B (en) | Tear film assembly line before equipment | |
| KR100989279B1 (en) | Substrate treatment apparatus | |
| CN107365980B (en) | A kind of graphite boat automatic loading and unloading piece equipment | |
| US20110248738A1 (en) | Testing apparatus for electronic devices | |
| CN110677998B (en) | Automatic dismounting device for PCB (printed circuit board) | |
| CN107322294B (en) | Loudspeaker manufacturing system and control method thereof | |
| CN210314473U (en) | Substrate conveying system of vacuum coating machine | |
| CN212316239U (en) | Feeding and discharging mechanism for coating | |
| CN109051764B (en) | Loading and unloading device and pad printing equipment | |
| CN108689112A (en) | Automatic charging device | |
| JP4137244B2 (en) | Transfer mechanism in substrate cleaning equipment | |
| CN111778488A (en) | Sputtering coating equipment compatible with substrates of different shapes | |
| JP3049981B2 (en) | Electrode formation system for chip parts | |
| CN107089508B (en) | Vehicle-mounted lens curing equipment | |
| CN212316232U (en) | Sputtering coating equipment compatible with substrates of different shapes | |
| CN115592571A (en) | Sand blasting automatic equipment | |
| CN112811165B (en) | Double-arm type crystal ring replacing mechanism | |
| CN210549298U (en) | Continuous feeding device for round nut lock washer and assembly line assembly equipment | |
| CN116193718A (en) | Soft winding displacement equipment of bending | |
| JPH11130250A (en) | Substrate carrying device attached with pitch change | |
| CN209853274U (en) | Novel feeding and discharging mechanism | |
| CN219928808U (en) | Feeding and discharging device for hanging tool | |
| CN215713354U (en) | Workpiece clamp conveying mechanism | |
| CN221048612U (en) | Breaking waste material device | |
| CN221234518U (en) | Multi-station feeding device for battery isolation pad |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |