CN210314473U - Substrate conveying system of vacuum coating machine - Google Patents
Substrate conveying system of vacuum coating machine Download PDFInfo
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- CN210314473U CN210314473U CN201921323434.XU CN201921323434U CN210314473U CN 210314473 U CN210314473 U CN 210314473U CN 201921323434 U CN201921323434 U CN 201921323434U CN 210314473 U CN210314473 U CN 210314473U
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Abstract
The utility model relates to a vacuum coating technical field especially relates to a vacuum coating machine's base plate removes system of sending, remove the device and remove the device including the base plate that does not coat the membrane and send the device including base plate hoisting device and the base plate clamping device that does not coat the membrane, base plate hoisting device's motion route is located a base plate material frame top that does not coat the membrane, does not coat the membrane base plate clamping device's motion route is located between base plate hoisting device and the coating room base plate position, and coated base plate removes the device and includes coated base plate clamping device, coated base plate clamping device's motion route is located a coated base plate material frame top and between the base plate position, do not coat the membrane base plate material frame, all be equipped with location locking device on the coated base plate material frame. The utility model has the advantages that: the utilization rate of a vacuum pumping system is reduced, and energy consumption is saved; the hand-over operation between the adjacent mechanical hands is visual, so that the monitoring is convenient; the operation of the upper and lower substrates of the manipulator is not influenced by the position offset of the substrates, and the working efficiency is high.
Description
Technical Field
The utility model relates to a vacuum coating technical field especially relates to a vacuum coating machine's base plate removes system of sending.
Background
Vacuum coating is a technology for obtaining a deposited film on the surface of an object by adopting a physical or chemical method under a vacuum condition, so that the surface of the object has a plurality of unique properties, such as the properties of electric conduction, magnetic conduction, insulation, abrasion resistance, radiation resistance, corrosion resistance, oxidation resistance and the like of a material can be greatly improved, the product quality is obviously improved, the service life is prolonged, energy sources are saved, and obvious economic benefits are obtained, therefore, the vacuum coating technology is regarded as one of the most important technologies at present.
The prior substrate conveying device still has a plurality of defects, for example, the substrate needs a mechanical pump to carry out primary vacuum pumping on a coating chamber before the coating process, and then the coating chamber is pumped to high vacuum by a molecular pump, the coating process is carried out under the high vacuum environment, and the time consumption for completing one-time vacuum pumping or breaking is very long due to the long start-stop time of the molecular pump, so the working efficiency is low, the energy cost is high, and the service life is short. Therefore, how to transport the substrate automatically and increase the working efficiency is an urgent issue to be improved.
Disclosure of Invention
The utility model aims at providing a vacuum coating machine's base plate removes system of sending according to above-mentioned prior art not enough, through the cooperation operation of each manipulator, sensor and controller, realizes the automatic loading and unloading of base plate, and the butt joint performance is good, improves work efficiency.
The utility model discloses the purpose is realized accomplishing by following technical scheme:
a substrate carrying system of a vacuum coating machine carries coated substrates and uncoated substrates in a coating chamber alternately before and after coating, and is characterized in that: the substrate conveying system comprises an uncoated substrate conveying device and a coated substrate conveying device, the uncoated substrate conveying device comprises a substrate lifting device and an uncoated substrate clamping device, the movement path of the substrate lifting device is located above an uncoated substrate material frame, the movement path of the uncoated substrate clamping device is located between the substrate lifting device and a substrate position in the coating chamber, the coated substrate conveying device comprises a coated substrate clamping device, the movement path of the coated substrate clamping device is located between the upper part of a coated substrate material frame and the substrate position, and the uncoated substrate material frame and the coated substrate material frame are both provided with positioning and locking devices.
The positioning and locking device comprises a position sensor and a positioning pin, the position sensor detects the in-place conditions of the uncoated substrate material frame and the coated substrate material frame in real time, the position sensor and the positioning pin are both connected with a controller, and the controller controls the positioning pin to be self-locked or retracted according to information fed back by the position sensor.
The substrate conveying system further comprises a grabbing device, the movement path of the grabbing device is located between the uncoated substrate clamping device and the coated substrate clamping device and the substrate position, the movement path of the uncoated substrate clamping device is located between the substrate lifting device and the grabbing device, and the movement path of the coated substrate clamping device is located between the coated substrate material frame and the grabbing device.
The substrate conveying system also comprises a thermal expansion monitoring sensor, the thermal expansion monitoring sensor and a rotating mechanism for driving the substrate to rotate are connected with a controller, and the controller controls the rotating radius of the rotating mechanism according to data fed back by the thermal expansion monitoring sensor.
The uncoated substrate conveying device and the coated substrate conveying device both comprise pushing mechanisms, and the movement paths of the pushing mechanisms are positioned between the substrate lifting device and the coated substrate clamping device and between the uncoated substrate clamping device and the grabbing device.
The uncoated substrate clamping device, the coated substrate clamping device, the substrate lifting device, the pushing mechanism and the grabbing device are all connected with a ball screw, the ball screw is driven by a driving mechanism to drive the uncoated substrate clamping device, the coated substrate clamping device, the substrate lifting device, the pushing mechanism and the grabbing device to move, the arrangement position of the ball screw is satisfied, the substrate lifting device and the pushing mechanism are provided with a handing-over position, the pushing mechanism, the uncoated substrate clamping device and the coated substrate clamping device are provided with a handing-over position, and the uncoated substrate clamping device, the coated substrate clamping device and the grabbing device are provided with a handing-over position.
The uncoated substrate clamping device, the coated substrate clamping device, the substrate lifting device, the pushing mechanism and the grabbing device respectively comprise a mechanical arm, the mechanical arm is connected with an air cylinder, the air cylinder and a sensor are connected with a controller, and the controller controls the air cylinder to stretch and retract according to feedback information of the sensor so as to control the mechanical arm to clamp or loosen.
The utility model has the advantages that: the structure is simple, the utilization rate of a vacuum pumping system is reduced, and the energy consumption is saved; the hand-over operation between the adjacent mechanical hands is visual, so that the monitoring is convenient; the operation of the upper and lower substrates of the manipulator is not influenced by the position offset of the substrates, and the working efficiency is high.
Drawings
FIG. 1 is a schematic plan view of the application of the present invention to a vacuum coater;
FIG. 2 is a schematic front view of the coating chamber and the transfer chamber shown in FIG. 1;
FIG. 3 is a schematic front view of the film-feed chamber of FIG. 1.
Detailed Description
The features of the present invention and other related features are described in further detail below by way of example in conjunction with the accompanying drawings to facilitate understanding by those skilled in the art:
as shown in fig. 1-3, the labels 1-30 are shown as: the device comprises a wafer feeding chamber 1, an uncoated substrate clamping device 2, a pushing mechanism 3, an uncoated substrate 4, an uncoated substrate material frame 5, a ball screw 6, a wafer feeding chamber cavity door 7, a coating chamber 8, a substrate hub frame 9, a substrate position 10, a rotating mechanism 11, a conveying chamber 12, a conveying chamber airtight door 13, a grabbing device 14, a coated substrate clamping device 15, a wafer discharging chamber 16, a coated substrate material frame 17, a pushing mechanism 18, a wafer discharging chamber cavity door 19, a motor 20, a mechanical hand 21, a cylinder 22, a thermal expansion monitoring sensor 23, a ball screw 24, a motor 25, a ball screw 26, a motor 27, a ball screw 28, a motor 29 and a substrate installation detection sensor 30.
Example (b): the embodiment is a substrate conveying system of a vacuum coating machine, which realizes the automatic loading and unloading of substrates through the matching operation of each mechanical arm, a sensor and a controller, has good butt joint performance and improves the working efficiency.
As shown in fig. 1, the substrate carrying system includes an uncoated substrate carrying device and a coated substrate carrying device.
The uncoated substrate conveying device is arranged in the film feeding chamber 1, a film feeding chamber cavity door 7 is arranged on the film feeding chamber 1, and the film feeding chamber cavity door 7 is quickly opened and closed through a rodless cylinder and a pressing cylinder. When the film feeding chamber cavity door 7 is in an open state, the uncoated substrate material frame 5 can be pushed into or pulled out of the film feeding chamber 1. The film feeding chamber 1 is connected with a vacuum-pumping system, when the uncoated substrate material frame 5 is in the film feeding chamber 1 and the film feeding chamber cavity door 7 is in a closed state, the vacuum-pumping system is opened, so that the vacuum degree of the film feeding chamber 1 reaches a set value.
As shown in fig. 1 and 3, a plurality of uncoated substrates 4 are placed on the uncoated substrate frame 5, so that the number of times of opening the chamber door 7 of the wafer feeding chamber is greatly reduced, the vacuum degree in the wafer feeding chamber 1 is maintained, the utilization rate of a vacuum-pumping system is reduced, and the energy consumption is saved. The uncoated substrate material frame 5 is provided with a positioning locking device, and when the uncoated substrate material frame 5 reaches the designated position in the film inlet chamber 1, the uncoated substrate material frame 5 is fixed, so that the uncoated substrate material frame 5 is prevented from deviating, and the uncoated substrate conveying device is ensured to always grab the uncoated substrate 4. Specifically, the positioning and locking device comprises a position sensor and a positioning pin, the position sensor and the positioning pin are both connected with the controller, the position sensor is used for monitoring whether the uncoated substrate material frame 5 reaches a specified position and transmitting the information to the controller, and when the uncoated substrate material frame 5 does not reach the specified position or the uncoated substrate material frame 5 needs to be pulled out of the film feeding chamber 1, the controller controls the positioning pin to be in a retraction state; when the uncoated substrate material frame 5 reaches the designated position, the controller controls the positioning pin to lock the uncoated substrate material frame 5.
Referring to fig. 1 and 3, the uncoated substrate transfer apparatus includes a substrate lifting device (not shown), a pushing mechanism 3, and an uncoated substrate clamping device 2. The substrate lifting device comprises a manipulator, the manipulator is connected with the cylinder, and the manipulator is in a grabbing state or an idle state by controlling the expansion and contraction of the cylinder. The manipulator is connected with a ball screw 24 and a vertical ball screw, the ball screw 24 is arranged along the length direction of the uncoated substrate material frame 5, the ball screw 24 is connected with a motor 25 serving as a driving mechanism, and the ball screw 24 is driven by the motor 25 to extend or shorten along the length direction of the uncoated substrate material frame 5, so that the manipulator is driven to move along the length direction of the uncoated substrate material frame 5, and the manipulator can move right above each uncoated substrate 4. The vertical ball screw is arranged along the height direction of the uncoated substrate material frame 5, and the vertical ball screw is driven by the motor to extend or shorten along the height direction of the uncoated substrate material frame 5, so that the manipulator is driven to move along the height direction of the uncoated substrate material frame 5, and the uncoated substrate 4 can be taken out of the uncoated substrate material frame 5 by the manipulator.
The pushing mechanism 3 comprises a manipulator, the manipulator is connected with the cylinder, and the manipulator is in a grabbing state or an idle state by controlling the expansion and contraction of the cylinder. The pushing mechanism 3 is connected with a ball screw 26, the ball screw 26 is arranged along the length direction of the uncoated substrate frame 5, the ball screw 26 is connected with a motor 27, and the ball screw 26 is extended or shortened under the driving of the motor 27, so that the pushing mechanism 3 is driven to move. The robot in the substrate lifting device and the robot in the pushing mechanism 3 have a transfer position, and the ball screws 24 and 26 are driven by controlling the motors 25 and 27 to move towards the transfer position, so that the robot in the substrate lifting device with the uncoated substrate 4 and the robot in the pushing mechanism 3 in an idle state are driven to move towards the transfer position. The sensor is arranged at the joint position, the sensor and the cylinder for controlling the state of the manipulator in the substrate lifting device are connected with each other through the controller, and the sensor is used for monitoring whether the manipulator of the pushing mechanism 3 clamps the uncoated substrate 4 or not and transmitting the information to the controller. The hand-over operation is visualized, and the monitoring is convenient. If the uncoated substrate 4 is clamped on the manipulator, the controller drives the cylinder connected with the manipulator in the substrate lifting device to extend, so that the manipulator in the substrate lifting device is in an idle state, and the handing-over operation of the uncoated substrate 4 is further completed. If the uncoated substrate 4 is not clamped on the manipulator, the controller drives the cylinder connected with the manipulator in the substrate lifting device to be in a contraction state continuously, and the uncoated substrate 4 is prevented from falling.
As shown in fig. 1, the clamping device 2 for an uncoated substrate comprises a manipulator, wherein the manipulator is connected with a cylinder, and the manipulator is in a grabbing state or an idle state by controlling the expansion and contraction of the cylinder. The uncoated substrate clamping device 2 is connected with a ball screw 28, the ball screw 28 is arranged along the width direction of the uncoated substrate material frame 5, the ball screw 28 is connected with a motor 29, and the ball screw 28 is driven by the motor 29 to extend or shorten, so that the manipulator is driven to displace. The robot in the pushing mechanism 3 and the robot in the uncoated substrate clamping device 2 have a joint position, and the ball screw 26 is driven by the control motor 27 to move towards the joint position, so that the robot in the pushing mechanism 3 with the uncoated substrate 4 is driven to move towards the robot in the uncoated substrate clamping device 2 in an idle state. This handing-over position department is equipped with the sensor, the equal controller of cylinder of the manipulator state in this sensor and the control push mechanism 3 links to each other, the sensor is used for monitoring whether accompany uncoated substrate 4 and give the controller with this information transmission on uncoated substrate clamping device 2's the manipulator, if accompany uncoated substrate 4 on the manipulator, the controller drive and the continuous cylinder extension of manipulator in the push mechanism 3 for the manipulator in the push mechanism 3 is in idle state, and then accomplishes the handing-over operation of uncoated substrate 4. If the uncoated substrate 4 is not clamped on the manipulator, the controller drives the cylinder connected with the manipulator in the pushing mechanism 3 to be in a contraction state continuously, and the uncoated substrate 4 is prevented from falling.
As shown in fig. 1, the sheet feeding chamber 1 communicates with a conveying chamber 12, and a gripping device 14 is provided in the conveying chamber 12. As shown in fig. 2, the gripping device 14 includes a manipulator 21, the manipulator 21 is connected to a cylinder 22, and the manipulator 21 is in a gripping state or an idle state by controlling the expansion and contraction of the cylinder 22. The gripping device 14 is connected with a ball screw 6, and the ball screw 6 is arranged along the length direction of the uncoated substrate material frame 5. The ball screw 6 is connected to a motor 20, and the ball screw 6 is extended or shortened by the driving of the motor 20, so as to drive the manipulator 21 to displace. The robot in the uncoated substrate clamping device 2 and the robot in the gripper device 14 have a joint position, and the ball screw 28 is driven by the control motor 29 to move towards the joint position, so that the robot in the uncoated substrate clamping device 2 with the uncoated substrate 4 is driven to move towards the robot in the gripper device 14 in an idle state. The sensor is arranged at the connection position, the sensor and the cylinder for controlling the state of the manipulator in the uncoated substrate clamping device 2 are connected through the controller, the sensor is used for monitoring whether the uncoated substrate 4 is clamped on the manipulator 21 or not and transmitting the information to the controller, if the uncoated substrate 4 is clamped on the manipulator 21, the controller drives the cylinder connected with the manipulator in the uncoated substrate clamping device 2 to extend, so that the manipulator in the pushing mechanism 3 is in an idle state, and the connection operation of the uncoated substrate 4 is further completed. If the robot arm 21 does not clamp the uncoated substrate 4, the controller drives the cylinder connected to the robot arm in the uncoated substrate clamping device 2 to continue to be in the contracted state, thereby preventing the uncoated substrate 4 from falling.
As shown in fig. 1 and 2, the transfer chamber 12 and the single coating chamber 8 are connected by a transfer chamber airtight door 13, and the communication state between the transfer chamber 12 and the coating chamber 8 is controlled by switching the opening and closing of the transfer chamber airtight door 13. A substrate hub frame 9 is arranged in the film coating chamber 8, and a plurality of substrate positions 10 are arranged on the substrate hub frame 9, so that mass production is realized. The substrate hub 9 is connected with the rotating mechanism 11, and by driving the rotating mechanism 11 to rotate, each substrate position 11 can rotate to the extension direction of the manipulator 21, so that the manipulator 21 can conveniently carry out the loading or unloading operation. When the substrate needs to be replaced, the transfer chamber airtight door 13 is in an open state; when coating is performed, the airtight door 13 of the conveying chamber is in a closed state, so that the vacuum degree in the conveying chamber 12 is ensured to meet the requirement, and the coating quality is ensured.
As shown in fig. 2, the substrate transport system further includes a thermal expansion monitoring sensor 23 for monitoring the coefficient of expansion of the substrate station 10. The thermal expansion monitoring sensor 23 and the rotating mechanism 11 are both connected with the controller, the thermal expansion monitoring sensor 23 transmits the monitored expansion coefficient to the controller, and the controller controls the rotating radius of the rotating mechanism 11 according to the information, so that the substrate position 10 is always positioned in the operating range of the manipulator 21, and the situation that the manipulator 21 cannot align the substrate position 10 due to the fact that the substrate position 10 deviates in the high-vacuum environment of the coating chamber 8 is effectively avoided.
As shown in fig. 1, one side of the conveying chamber 12 is communicated with a sheet discharge chamber 16, and the structural composition of the sheet discharge chamber 16 is the same as that of the sheet feeding chamber 1. The film discharging chamber 16 is provided with a coated substrate conveying device and a coated substrate frame 17, and the coated substrate conveying device comprises a coated substrate clamping device 15 and a pushing mechanism 18. The connection relationship among the coated substrate material frame 17, the coated substrate clamping device 15 and the pushing mechanism 18 is consistent with the connection relationship among the uncoated substrate material frame 5, the uncoated substrate clamping device 2 and the pushing mechanism 3 in the film feeding chamber 1.
The specific operation steps of this embodiment are as follows:
1) when loading the substrate: opening a cavity door 7 of the film feeding chamber, and pushing an uncoated substrate material frame 5 which is loaded with a plurality of uncoated substrates 4 by an external automatic loading system to a specified position in the film feeding chamber 1;
2) starting a position sensor, detecting whether the uncoated substrate material frame 5 reaches the specified position, and if the uncoated substrate material frame 5 reaches the specified position, controlling a positioning pin to lock the uncoated substrate material frame 5 by a controller; closing the cavity door 7 of the film inlet chamber and starting a vacuumizing system;
3) a manipulator in the substrate lifting device lifts a certain substrate 4 which is not coated with a film out of the substrate material frame 5 which is not coated with a film through a ball screw 24 and a vertical ball screw; the robot in the substrate lifting device and the robot in the pushing mechanism 3 are displaced to the joint position of the robot and the substrate lifting device through the ball screws 24 and 26;
4) starting a sensor at the joint position, controlling the manipulator to grab or carry no load according to the sensor, and ensuring that the uncoated substrate 4 is smoothly jointed to the manipulator in the pushing mechanism 3 from the manipulator in the substrate lifting device;
5) the manipulator in the pushing mechanism 3 is displaced towards the manipulator in the uncoated substrate clamping device 2 through the ball screw 26, and the uncoated substrate 4 is ensured to be smoothly switched from the manipulator in the pushing mechanism 3 to the manipulator in the uncoated substrate clamping device 2 through the sensor;
6) the robot in the uncoated substrate clamping device 2 is displaced towards the robot 21 in the gripping device 14 by the ball screw 28, and the sensor ensures that the uncoated substrate 4 is smoothly handed over from the robot in the uncoated substrate clamping device 2 to the robot 21 in the gripping device 14;
7) opening the air-tight door 13 of the conveying chamber, driving the rotating mechanism 11 to rotate, enabling the substrate position 11 to rotate to the extension direction of the mechanical arm 21, enabling the mechanical arm 21 to enter the coating chamber 8 through the ball screw 6, and hanging the uncoated substrate 4 on the substrate position 10;
8) circulating the steps 3) -7), starting the expansion monitoring sensor 23 before the step 7), adjusting the rotating radius of the rotating mechanism 11 according to the expansion coefficient, and ensuring that the manipulator 21 can smoothly hang the uncoated substrate 4 on the substrate position 10;
9) when all the substrate positions 10 are hung with the substrates 4 which are not coated with films, closing the airtight door 13 of the conveying chamber and starting coating;
10) when unloading the substrate: opening the airtight door 13 of the conveying chamber, starting the expansion monitoring sensor 23, adjusting the rotating radius of the rotating mechanism 11 according to the expansion coefficient, and ensuring that the substrate position 10 is positioned in the extending direction of the manipulator 21; the manipulator 21 enters the coating chamber 8 through the ball screw 6 and takes the uncoated substrate 4 off the substrate position 10 and returns to the conveying chamber 12;
11) the manipulator in the coated substrate clamping device 15 moves to the manipulator 21 under the driving of the ball screw, and the coated substrate is ensured to be smoothly switched from the manipulator 21 to the manipulator in the coated substrate clamping device 15 through a sensor;
12) the manipulator in the pushing mechanism 18 moves to the manipulator in the coated substrate clamping device 15 under the driving of the ball screw, and the coated substrate is ensured to be smoothly crossed from the manipulator in the coated substrate clamping device 15 to the manipulator in the pushing mechanism 18 through a sensor;
13) a manipulator in a pushing mechanism 18 clamping the coated substrate is shifted to the position right above a coated substrate material frame 17 through a ball screw, and the manipulator is controlled by a cylinder to release the coated substrate, so that the coated substrate falls into the coated substrate material frame 17;
14) repeating the steps 10) -13), and opening the film outlet chamber door 19 when all the coated substrates fall into the coated substrate material frame 17; the controller controls the locating pin to retract, the coated substrate material frame 17 is pulled out of the film discharging chamber 16, and the coated substrate is unloaded through an external automatic blanking system;
15) and circulating the steps until the coating operation of all the uncoated substrates 4 is finished.
In the embodiment, in specific implementation:
as shown in fig. 2, the substrate transportation system further includes a substrate mounting detection sensor 30 for detecting whether the uncoated substrate 4 on the substrate station 10 is mounted in place, and if the uncoated substrate 4 is not mounted in place, the robot 21 takes away the uncoated substrate 4, and the robot 21 mounts the uncoated substrate 4 on the substrate station 10 again after the rotation mechanism 11 is finely adjusted according to the data detected by the thermal expansion monitoring sensor 23.
Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims.
Claims (7)
1. A substrate carrying system of a vacuum coating machine carries coated substrates and uncoated substrates in a coating chamber alternately before and after coating, and is characterized in that: the substrate conveying system comprises an uncoated substrate conveying device and a coated substrate conveying device, the uncoated substrate conveying device comprises a substrate lifting device and an uncoated substrate clamping device, the movement path of the substrate lifting device is located above an uncoated substrate material frame, the movement path of the uncoated substrate clamping device is located between the substrate lifting device and a substrate position in the coating chamber, the coated substrate conveying device comprises a coated substrate clamping device, the movement path of the coated substrate clamping device is located between the upper part of a coated substrate material frame and the substrate position, and the uncoated substrate material frame and the coated substrate material frame are both provided with positioning and locking devices.
2. The substrate conveying system of a vacuum coater according to claim 1, wherein: the positioning and locking device comprises a position sensor and a positioning pin, the position sensor detects the in-place conditions of the uncoated substrate material frame and the coated substrate material frame in real time, the position sensor and the positioning pin are both connected with a controller, and the controller controls the positioning pin to be self-locked or retracted according to information fed back by the position sensor.
3. The substrate conveying system of a vacuum coater according to claim 1, wherein: the substrate conveying system further comprises a grabbing device, the movement path of the grabbing device is located between the uncoated substrate clamping device and the coated substrate clamping device and the substrate position, the movement path of the uncoated substrate clamping device is located between the substrate lifting device and the grabbing device, and the movement path of the coated substrate clamping device is located between the coated substrate material frame and the grabbing device.
4. The substrate conveying system of a vacuum coater according to claim 3, wherein: the substrate conveying system also comprises a thermal expansion monitoring sensor, the thermal expansion monitoring sensor and a rotating mechanism for driving the substrate to rotate are connected with a controller, and the controller controls the rotating radius of the rotating mechanism according to data fed back by the thermal expansion monitoring sensor.
5. The substrate conveying system of a vacuum coater according to claim 3, wherein: the uncoated substrate conveying device and the coated substrate conveying device both comprise pushing mechanisms, and the movement paths of the pushing mechanisms are positioned between the substrate lifting device and the coated substrate clamping device and between the uncoated substrate clamping device and the grabbing device.
6. The substrate conveying system of a vacuum coater according to claim 5, wherein: the uncoated substrate clamping device, the coated substrate clamping device, the substrate lifting device, the pushing mechanism and the grabbing device are all connected with a ball screw, the ball screw is driven by a driving mechanism to drive the uncoated substrate clamping device, the coated substrate clamping device, the substrate lifting device, the pushing mechanism and the grabbing device to move, the arrangement position of the ball screw is satisfied, the substrate lifting device and the pushing mechanism are provided with a handing-over position, the pushing mechanism, the uncoated substrate clamping device and the coated substrate clamping device are provided with a handing-over position, and the uncoated substrate clamping device, the coated substrate clamping device and the grabbing device are provided with a handing-over position.
7. The substrate conveying system of a vacuum coater according to claim 6, wherein: the uncoated substrate clamping device, the coated substrate clamping device, the substrate lifting device, the pushing mechanism and the grabbing device respectively comprise a mechanical arm, the mechanical arm is connected with an air cylinder, the air cylinder and a sensor are connected with a controller, and the controller controls the air cylinder to stretch and retract according to feedback information of the sensor so as to control the mechanical arm to clamp or loosen.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921323434.XU CN210314473U (en) | 2019-08-15 | 2019-08-15 | Substrate conveying system of vacuum coating machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921323434.XU CN210314473U (en) | 2019-08-15 | 2019-08-15 | Substrate conveying system of vacuum coating machine |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111778488A (en) * | 2020-08-24 | 2020-10-16 | 光驰科技(上海)有限公司 | Sputtering coating equipment compatible with substrates of different shapes |
| CN113278941A (en) * | 2021-04-16 | 2021-08-20 | 布勒莱宝光学设备（北京）有限公司 | Automatic film coating system |
| CN115818230A (en) * | 2022-12-28 | 2023-03-21 | 广东拓斯达科技股份有限公司 | Feeding and discharging equipment for coating |
-
2019
- 2019-08-15 CN CN201921323434.XU patent/CN210314473U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111778488A (en) * | 2020-08-24 | 2020-10-16 | 光驰科技(上海)有限公司 | Sputtering coating equipment compatible with substrates of different shapes |
| CN113278941A (en) * | 2021-04-16 | 2021-08-20 | 布勒莱宝光学设备（北京）有限公司 | Automatic film coating system |
| CN113278941B (en) * | 2021-04-16 | 2022-04-29 | 布勒莱宝光学设备（北京）有限公司 | Automatic film coating system |
| CN115818230A (en) * | 2022-12-28 | 2023-03-21 | 广东拓斯达科技股份有限公司 | Feeding and discharging equipment for coating |
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