CN211839290U - Chip cleaning machine and feeding and discharging mechanism thereof - Google Patents
Chip cleaning machine and feeding and discharging mechanism thereof Download PDFInfo
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- CN211839290U CN211839290U CN202020023853.8U CN202020023853U CN211839290U CN 211839290 U CN211839290 U CN 211839290U CN 202020023853 U CN202020023853 U CN 202020023853U CN 211839290 U CN211839290 U CN 211839290U
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Abstract
The utility model discloses a chip cleaning machine and go up unloading mechanism thereof is applied to the chip cleaning machine on, this chip cleaning machine has the frame and sets up the belt cleaning device in the frame, should go up unloading mechanism and include: the transplanting mechanism is arranged on the cleaning device and used for automatically feeding and discharging materials for the cleaning device; the feeding module is arranged on the rack and used for storing chips; and the material taking mechanism is perpendicular to the transplanting mechanism and is used for grabbing the chips on the feeding module, positioning the chips and placing the cleaned chips. The utility model discloses a carry out drying process to the chip after the cleanness after the nitrogen gas heating, remaining water stain water mark on can effectually detaching the chip, the chip after the drying is placed and still does not take place to milden and rot for several months, and drying effect is good to can be accurate realization is fit for using widely to the location material loading of chip.
Description
Technical Field
The utility model relates to a cleaning equipment field, in particular to chip cleaning machine and go up unloading mechanism thereof.
Background
A chip generally refers to a carrier for an integrated circuit, and is the result of the integrated circuit after design, fabrication, packaging, and testing, and is usually a stand-alone entity that can be used immediately. Since there are some metal fragments and other stains on the chip surface during the production process, the chip needs to be cleaned in the final step of chip production.
Current chinese patent application is good 201910310896.6, the name is a full self-cleaning device that is used for the full self-cleaning device of chip and washing process discloses, though can realize cleaning the chip, but can't realize the accurate material loading to the core at clean material loading in-process, lead to that the workstation can't carry out higher speed rotation in the cleaning process, lead to inefficiency, the chip after the cleanness sees totally on the surface in addition, actually still has the water mark, and the use that influences the chip is very easily taken place to milden and rot after the chip is placed a period of time after the cleanness.
Therefore, a chip cleaning machine which can quickly and accurately position the loading and unloading mechanism and can effectively dry the chip is urgently needed to be researched and developed.
Disclosure of Invention
The utility model provides an automatic degree is high, simple structure, convenient operation and the superior chip cleaning machine of comprehensive properties and go up unloading mechanism thereof to solve technical problem such as above-mentioned now.
In order to solve the technical problem, the utility model provides a following technical scheme: the utility model provides a go up unloading mechanism, is applied to on the chip cleaning machine, and this chip cleaning machine has the frame and sets up the belt cleaning device in the frame, should go up unloading mechanism and include:
the transplanting mechanism is arranged on the cleaning device and used for automatically feeding and discharging materials for the cleaning device;
the feeding module is arranged on the rack and used for storing chips; and
the material taking mechanism is perpendicular to the transplanting mechanism and used for grabbing the chips on the feeding module, positioning and placing the cleaned chips; the material taking mechanism comprises a first linear module, a second linear module and a secondary positioning mechanism; the first linear module and the second linear module are arranged vertically to each other, and the first linear module can drive the second linear module to reciprocate back and forth; the secondary positioning mechanism is fixedly arranged on the second linear module, and the second linear module can drive the secondary positioning mechanism to reciprocate along the vertical direction;
the secondary positioning mechanism grabs the chips stored on the feeding module and positions the chips during working, and the transplanting mechanism grabs the positioned chips and then transports the chips to the cleaning device for cleaning.
Furthermore, the transplanting mechanism comprises a bracket, a third linear module, a sucker mechanism, a first power source and a second power source; the third linear module is arranged on the bracket; the number of the third linear modules is two, wherein one of the third linear modules is fixedly connected with the first power source, and the other one of the third linear modules is fixedly connected with the second power source; the sucker mechanism is arranged at the output ends of the first power source and the second power source; the first power source can drive the sucker mechanism to move up and down, and the second power source can drive the sucker mechanism to move up and down.
Further, first power supply and second power supply are the cylinder, the cylinder is fixed in through the mounting panel on the third straight line module, corresponding to the initial position of the telescopic link of cylinder all is provided with position sensor with the extended position.
Further, the secondary positioning mechanism comprises a bottom plate;
the fourth linear module is arranged on the bottom plate and used for providing power;
the clamping component is arranged on the fourth linear module, and the fourth linear module can drive the clamping component to reciprocate back and forth;
the first barrier strip is fixedly arranged on the bottom plate and used for guiding the movement of the chip;
the second barrier strip component is arranged on the bottom plate in a sliding manner and used for guiding the movement of the chip; and
the first sensor is arranged between the first blocking strip and the second blocking strip part and used for positioning the chip;
furthermore, the secondary positioning mechanism also comprises a code reader and an optical sensor, wherein the code reader is arranged on the bottom plate and used for identifying chip information; the optical sensor is arranged on the bottom plate and used for detecting a chip of the feeding module.
Further, the pan feeding module includes: the storage device comprises a storage bottom plate, a limiting block and a storage frame, wherein the storage frame is arranged above the storage bottom plate, and the limiting block is arranged above the storage bottom plate and used for limiting the storage frame; the inside wall of storage frame is equipped with the recess that is used for the card to establish the chip.
A chip cleaning machine comprising:
a frame;
the cleaning device is arranged on the rack and used for bearing and cleaning the chip;
the feeding and discharging mechanism is applied;
the drying device is arranged on the rack, is connected with the cleaning device through a pipeline and is used for drying the cleaned chip; and
and the liquid medicine supply device is arranged on the rack and is used for supplying liquid medicine to the cleaning device.
Further, the cleaning device includes: the water tank is arranged in the rack, the input end of the first pump body is connected with the water tank, and the output end of the first pump body is connected with the cleaning mechanism.
Further, the drying device includes: the drying device comprises a drying pipe, a heater, an input connector and an output connector, wherein the heater is sleeved in the hollow drying pipe, the input connector is arranged above the drying pipe, and the output connector is arranged below the drying pipe.
Further, the liquid medicine supply device includes: liquid medicine storage box and the second pump body, liquid medicine storage box sets up in the frame, and the input of the second pump body is connected with liquid medicine storage box, and the output of the second pump body is connected with belt cleaning device.
Compared with the prior art, the utility model has the advantages of it is following:
1) the secondary positioning mechanism grabs and positions the chips stored on the feeding module, and the transplanting mechanism grabs and positions the positioned chips and then transports the chips to the cleaning device for cleaning, so that the chips are automatically fed and cleaned; the adjusting cylinder drives the connecting plate to move so as to drive the second baffle plate to move along the slide rail slide block device, and further adjust the gap between the second baffle plate and the first barrier strip, so that the gap between the second baffle plate and the first barrier strip can be suitable for chips with different widths and different models; the secondary positioning mechanism is beneficial to accurate chip feeding; the utility model has simple structure, is suitable for cleaning and processing chips with different models, has stable operation and is beneficial to popularization and use;
2) the cleaned chip is dried after being heated by nitrogen, residual water stain water marks on the chip can be effectively discharged, the dried chip still does not mildew after being placed for months, the drying effect is good,
3) structurally, the four-way electromagnetic valve is adopted to automatically switch liquid medicine spraying, pure water spraying and high-temperature nitrogen drying, so that the whole structure is more simplified and convenient to maintain.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the feeding module of the present invention;
FIG. 3 is a schematic structural view of the secondary positioning mechanism of the present invention;
fig. 4 is a schematic structural view of the cleaning device of the present invention.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Exemplary embodiments according to the present application will now be described in more detail with reference to the accompanying drawings. These exemplary embodiments may, however, be embodied in many different forms and should not be construed as limited to only the embodiments set forth herein. It is to be understood that these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art, in the drawings, it is possible to enlarge the thicknesses of layers and regions for clarity, and the same devices are denoted by the same reference numerals, and thus the description thereof will be omitted.
Referring now to FIG. 1:
the utility model provides a go up unloading mechanism, is applied to on the chip cleaning machine, and this chip cleaning machine has frame 1 and sets up belt cleaning device 2 in frame 1, should go up unloading mechanism and include:
the transplanting mechanism 3 is arranged on the cleaning device 2 and used for automatically feeding and discharging materials for the cleaning device 2;
the feeding module 4 is arranged on the rack 1 and used for storing chips; and
the material taking mechanism 5 is perpendicular to the transplanting mechanism 3 and used for grabbing the chips on the feeding module 4, positioning the chips and placing the cleaned chips; the material taking mechanism 5 comprises a first linear module 51, a second linear module 52 and a secondary positioning mechanism 53; the first linear module 51 and the second linear module 55 are arranged perpendicular to each other, and the first linear module 51 can drive the second linear module 52 to reciprocate back and forth; the secondary positioning mechanism 53 is fixedly arranged on the second linear module 52, and the second linear module 52 can drive the secondary positioning mechanism 53 to reciprocate along the vertical direction;
during operation, the secondary positioning mechanism 53 picks and positions the chips stored on the feeding module 4, and the transplanting mechanism 3 picks and positions the chips and then transports the chips to the cleaning device 2 for cleaning.
Referring now to FIG. 2:
the transplanting mechanism 3 comprises a bracket 31, a third linear module 32, a sucker mechanism 33, a first power source 34 and a second power source 35; the third linear module 32 is mounted on the bracket 31; two third linear modules 32 are arranged, wherein one of the third linear modules is fixedly connected with a first power source 34, and the other one of the third linear modules is fixedly connected with a second power source 35; the sucker mechanism 33 is arranged at the output ends of the first power source 34 and the second power source 35; the first power source 34 can drive the suction cup mechanism 33 to move up and down, and the second power source 35 can drive the suction cup mechanism 33 to move up and down.
The third linear module 32 above the bracket 31 drives the first power source 34 to reciprocate between the material taking mechanism and the cleaning device 2, the first power source 34 drives the suction cup mechanism 33 to move up and down, and the chip to be cleaned is conveyed to the cleaning device 2 from the material taking mechanism 5; the third linear module 32 below the bracket 31 drives the second power source 35 to reciprocate between the cleaning device 2 and the material taking mechanism 5, the second power source 35 drives the suction cup mechanism 33 to move up and down, and the cleaned chip is taken out of the cleaning device 2 and conveyed to the material taking mechanism 5.
Referring now to FIG. 3:
the secondary positioning mechanism 53 includes a bottom plate 531;
the fourth linear module 532 is arranged on the bottom plate and used for providing power;
a clamping component 533 arranged on the fourth linear module, wherein the fourth linear module can drive the clamping component to reciprocate back and forth;
specifically, the clamping component 533 includes: the clamping plate 5331 is connected with the fourth linear module 532, the clamping cylinder 5332 is connected with the clamping plate 5331, the output end of the clamping cylinder 5332 is connected with the clamping block 5333, the clamping block 5333 and the lower edge of the clamping plate 5331 are arranged up and down correspondingly, and the clamping cylinder 5332 drives the clamping block 5333 to move downwards so as to clamp a chip;
the first barrier strips 534 are fixedly arranged on the bottom plate and used for guiding the movement of the chip;
a second bar blocking member 535 slidably disposed on the bottom plate for guiding the movement of the chip; the second bar stopper 535 further includes: the device comprises a second baffle 5351, a slide rail sliding block device 5352, a connecting plate 5353 and an adjusting cylinder 5354, wherein the slide rail sliding block device 5352 is arranged above the bottom plate 531, the second baffle 5351 is arranged above the slide rail sliding block device 5352, the connecting plate 5353 is arranged on the side wall of the second baffle 5351, the adjusting cylinder 5354 is connected with the bottom plate 531, and the output end of the adjusting cylinder 5354 is connected with the connecting plate 5353; the adjusting cylinder 5354 moves to drive the connecting plate 5353 to move, and further drive the second baffle 5351 to move along the sliding rail slider 5352, and further adjust the gap between the second baffle 5351 and the first barrier strip 534, so that the gap between the second baffle 5351 and the first barrier strip 534 can be suitable for chips with different widths;
a first sensor 536 disposed between the first bar and the second bar blocking member for positioning the chip;
when a chip is taken, the second linear module 52 acts to drive the secondary positioning mechanism 53 to move upwards, after the optical sensor 538 detects the chip stored in the feeding module 4, the second linear module 52 stops acting, then the fourth linear module 532 acts to drive the clamping component 533 to move towards the chip, then the clamping cylinder 5332 acts to drive the clamping block 5333 to move downwards, so that the chip is clamped between the clamping block 5333 and the clamping plate 5331, the fourth linear module 532 acts in the reverse direction to take the chip out of the feeding module 4, the first sensor 536 detects the chip, which indicates that the chip is taken out, the fourth linear module 532 stops acting, and the transplanting mechanism 3 sends the taken-out chip to be cleaned;
after the chip is cleaned, the transplanting mechanism 3 places the cleaned chip above the second baffle 5351 and the first barrier 534, and the fourth linear module 532 acts to push the chip to move into the idle groove 431 along the second baffle 5351 and the first barrier 534, so that the chip can be automatically loaded and unloaded.
The secondary positioning mechanism 53 further comprises a code reader 537 and a light sensor 538, wherein the code reader 537 is arranged on the bottom plate 531 and is used for identifying chip information; the optical sensor 538 is disposed on the bottom plate 531 for detecting a chip of the feeding module 4.
Referring now to FIG. 2: pan feeding module 4 includes: the device comprises a material storage bottom plate 41, a limiting block 42 and a material storage frame 43, wherein the material storage frame 43 is arranged above the material storage bottom plate 41, and the limiting block 42 is arranged above the material storage bottom plate 41 and used for limiting the material storage frame 43; the inner wall of the storage rack 43 is provided with a groove 431 for clamping the chip.
Before chip cleaning, insert earlier and establish in the recess 431 of storage frame 43 waiting to abluent chip, fix the storage frame 43 who is covered with the chip in storage bottom plate 41 top again, stopper 42 is used for carrying on spacing fixedly to storage frame 43, improves the installation accuracy of storage frame 43 to the picking mechanism snatchs the chip.
Referring now to FIGS. 1 and 4:
a chip cleaning machine comprising:
a frame 1;
the cleaning device 2 is arranged on the rack 1, and the cleaning device 2 is used for bearing and cleaning the chip;
loading and unloading mechanism as claimed in any one of claims;
the drying device 6 is arranged on the rack 1, is connected with the cleaning device 2 through a pipeline, and is used for drying the cleaned chip; and
and the liquid medicine supply device 7 is arranged on the rack 1 and is used for providing liquid medicine for the cleaning device.
When the chip is cleaned, the chip is placed above the cleaning device, the liquid medicine supply device acts, liquid medicine is conveyed into the cleaning device to wash the chip, and after the cleaning device and the liquid medicine supply device act and stop, the drying device acts to dry the chip.
Further, the cleaning device 2 includes: the cleaning device comprises a rotating mechanism 21, a cleaning mechanism 22, a water storage tank 23 and a first pump body 24, wherein the rotating mechanism 21 is arranged on a rack, the output end of the rotating mechanism 21 is connected with the cleaning mechanism 22, the water storage tank 23 is arranged in the rack, the input end of the first pump body 24 is connected with the water storage tank 23, and the output end of the first pump body 24 is connected with the cleaning mechanism 22. The rotating mechanism 21 acts to drive the cleaning mechanism 22 to rotate, the cleaning mechanism 22 acts on the surface of the chip, and simultaneously the first pump body 24 acts to pump water in the water storage tank 23, pump the water out and wash the chip.
Further, the drying device 6 includes: the drying device comprises a drying pipe 61, a heater, an input joint 63 and an output joint 64, wherein the heater is sleeved in the hollow drying pipe 61, the input joint 63 is arranged above the drying pipe 61, and the output joint 64 is arranged below the drying pipe 61. Liquid nitrogen is input from the input joint 63, enters the drying tube 61, is output through the nitrogen output joint 64 heated by the heater, and flushes the chip.
Further, the liquid medicine supply device 7 includes: the liquid medicine storage tank 71 is arranged in the rack, the input end of the second pump body 72 is connected with the liquid medicine storage tank 71, and the output end of the second pump body 72 is connected with the cleaning device; second pump 72 draws the cleaning solution from the cleaning solution storage tank and delivers the cleaning solution to cleaning mechanism 22.
The machine frame 1 is provided with a four-way electromagnetic valve 9, the output end of the water storage tank 23 is connected with the cleaning mechanism 22 through a first connecting pipe, the output joint 64 is connected with the cleaning mechanism 22 through a second connecting pipe, and the output end of the second pump body 72 is connected with the cleaning device through a third connecting pipe; the first connecting pipe, the second connecting pipe and the third connecting pipe are respectively connected with the four-way electromagnetic valve 9, and the four-way electromagnetic valve 9 controls the corresponding pipelines to be opened and closed, so that the liquid medicine for the chip is firstly cleaned by the liquid medicine supply device 7, then the first pump body 24 acts to extract water in the water storage tank 23, the chip is washed, and finally the heated nitrogen is conveyed by the drying device 6 to dry the chip.
The utility model discloses an application principle: the chips to be cleaned are inserted into the grooves 431 of the storage rack 43, and then the storage rack 43 fully covered with the chips is fixed above the storage bottom plate 41; when a chip is taken, the second linear module 52 acts to drive the secondary positioning mechanism 53 to move upwards, after the optical sensor 538 detects a chip stored in the feeding module 4, the second linear module 52 stops acting, then the fourth linear module 532 acts to drive the clamping component 533 to move towards the chip, then the clamping cylinder 5332 acts to drive the clamping block 5333 to move downwards, so that the chip is clamped between the clamping block 5333 and the clamping plate 5331, the fourth linear module 532 acts in the reverse direction to take the chip out of the feeding module 4, after the first sensor 536 detects the chip, the fourth linear module 532 stops acting, the transplanting mechanism 3 acts, and the taken-out chip is sent to be cleaned; the liquid medicine supplying device 7 firstly washes the chip with liquid medicine, then the first pump body 24 acts to pump pure water in the water storage tank 23, the chip is washed for the second time, and finally the drying device 6 acts to output heated nitrogen, dry the chip and remove water stains; after the chip is cleaned, the transplanting mechanism 3 places the cleaned chip above the second baffle 5351 and the first barrier 534, and the fourth linear module 532 acts to push the chip to move into the idle groove 431 along the second baffle 5351 and the first barrier 534, so that the chip can be automatically loaded and unloaded.
It should be finally noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, it should be understood by those skilled in the art that after reading the present specification, the technical personnel can still modify or equivalently replace the specific embodiments of the present invention, but these modifications or changes do not depart from the scope of the claims of the present application.
Claims (10)
1. A feeding and discharging mechanism is applied to a chip cleaning machine, the chip cleaning machine is provided with a rack (1) and a cleaning device (2) arranged on the rack (1), and is characterized in that the chip cleaning machine is provided with a feeding and discharging mechanism; should go up unloading mechanism includes:
the transplanting mechanism (3) is arranged on the cleaning device (2) and is used for automatically feeding and discharging materials for the cleaning device (2);
the feeding module (4) is arranged on the rack (1) and used for storing chips; and
the material taking mechanism (5) is perpendicular to the transplanting mechanism (3) and is used for grabbing the chips on the feeding module (4), positioning and placing the cleaned chips; the material taking mechanism (5) comprises a first linear module (51), a second linear module (52) and a secondary positioning mechanism (53); the first linear module (51) and the second linear module (52) are arranged vertically, and the first linear module (51) can drive the second linear module (52) to reciprocate back and forth; the secondary positioning mechanism (53) is fixedly arranged on the second linear module (52), and the second linear module (52) can drive the secondary positioning mechanism (53) to reciprocate along the vertical direction;
during work, the secondary positioning mechanism (53) grabs the chips stored on the feeding module (4) and positions the chips, and the transplanting mechanism (3) grabs the positioned chips and then transports the chips to the cleaning device (2) for cleaning.
2. The loading and unloading mechanism according to claim 1, wherein the transplanting mechanism (3) comprises a bracket (31), a third linear module (32), a suction cup mechanism (33), a first power source (34) and a second power source (35); the third linear module (32) is arranged on a bracket (31); the number of the third linear modules (32) is two, wherein one of the third linear modules is fixedly connected with a first power source (34), and the other one of the third linear modules is fixedly connected with a second power source (35); the sucker mechanism (33) is arranged at the output ends of the first power source (34) and the second power source (35); the first power source (34) can drive the sucker mechanism (33) to move up and down, and the second power source (35) can drive the sucker mechanism (33) to move up and down.
3. The loading and unloading mechanism according to claim 2, characterized in that the first power source (34) and the second power source (35) are both cylinders, the cylinders are fixed on the third linear module (32) through mounting plates, and position sensors (36) are arranged corresponding to the initial positions and the extending positions of the telescopic rods of the cylinders.
4. The loading and unloading mechanism according to claim 1, wherein the secondary positioning mechanism (53) comprises a bottom plate (531);
the fourth linear module (532) is arranged on the bottom plate and used for providing power;
a clamping component (533) arranged on the fourth linear module, wherein the fourth linear module can drive the clamping component to reciprocate back and forth;
the first barrier strip (534) is fixedly arranged on the bottom plate and used for guiding the movement of the chip;
a second bar element (535) slidably disposed on the base for guiding movement of the chip; and
and a first sensor (536) disposed between the first bar and the second bar blocking member for positioning the chip.
5. The loading and unloading mechanism of claim 4, wherein the secondary positioning mechanism (53) further comprises a code reader (537) and an optical sensor (538), the code reader (537) is disposed on the base plate (531) for identifying chip information; the optical sensor (538) is arranged on the bottom plate (531) and used for detecting a chip of the feeding module (4).
6. The loading and unloading mechanism according to claim 1, wherein the feeding module (4) comprises: the device comprises a storage bottom plate (41), a limiting block (42) and a storage frame (43), wherein the storage frame (43) is arranged above the storage bottom plate (41), and the limiting block (42) is arranged above the storage bottom plate (41) and used for limiting the storage frame (43); the inner side wall of the storage rack (43) is provided with a groove (431) for clamping the chip.
7. A chip cleaning machine, comprising:
a frame (1);
the cleaning device (2) is arranged on the rack (1), and the cleaning device (2) is used for bearing and cleaning the chip;
the loading and unloading mechanism as claimed in any one of claims 1 to 5;
the drying device (6) is arranged on the rack (1), passes through a pipeline and the cleaning device (2), and is used for drying the cleaned chip; and
and the liquid medicine supply device (7) is arranged on the rack (1) and is used for supplying liquid medicine to the cleaning device.
8. The chip washing machine according to claim 7, characterized in that the washing device (2) comprises: the water pump comprises a rotating mechanism (21), a cleaning mechanism (22), a water storage tank (23) and a first pump body (24), wherein the rotating mechanism (21) is arranged on a rack, the output end of the rotating mechanism (21) is connected with the cleaning mechanism (22), the water storage tank (23) is arranged in the rack (1), the input end of the first pump body (24) is connected with the water storage tank, and the output end of the first pump body (24) is connected with the cleaning mechanism.
9. The chip washer according to claim 7, wherein the drying device (6) comprises: the drying device comprises a drying pipe (61), a heater, an input joint (63) and an output joint (64), wherein the heater is sleeved in the hollow drying pipe (61), the input joint (63) is arranged above the drying pipe (61), and the output joint (64) is arranged below the drying pipe (61).
10. The chip washing machine according to claim 7, wherein the liquid medicine supply device (7) comprises: the liquid medicine storage tank body (71) and the second pump body (72), the liquid medicine storage tank body (71) is arranged in the rack, the input end of the second pump body (72) is connected with the liquid medicine storage tank body (71), and the output end of the second pump body (72) is connected with the cleaning device (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020023853.8U CN211839290U (en) | 2020-01-07 | 2020-01-07 | Chip cleaning machine and feeding and discharging mechanism thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020023853.8U CN211839290U (en) | 2020-01-07 | 2020-01-07 | Chip cleaning machine and feeding and discharging mechanism thereof |
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| CN211839290U true CN211839290U (en) | 2020-11-03 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113013070A (en) * | 2021-03-16 | 2021-06-22 | 无锡锐思智能焊接装备有限公司 | Wafer cleaning and spin-drying method |
| CN113083784A (en) * | 2021-03-29 | 2021-07-09 | 姚志伟 | Biochip washing and drying instrument convenient to use |
-
2020
- 2020-01-07 CN CN202020023853.8U patent/CN211839290U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113013070A (en) * | 2021-03-16 | 2021-06-22 | 无锡锐思智能焊接装备有限公司 | Wafer cleaning and spin-drying method |
| CN113083784A (en) * | 2021-03-29 | 2021-07-09 | 姚志伟 | Biochip washing and drying instrument convenient to use |
| CN113083784B (en) * | 2021-03-29 | 2022-04-29 | 上海复可奥生物医疗科技有限公司 | Biochip washing and drying instrument convenient to use |
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