CN207398102U - A kind of empty full basket switchgear of the silicon chip with double end manipulator - Google Patents
A kind of empty full basket switchgear of the silicon chip with double end manipulator Download PDFInfo
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- CN207398102U CN207398102U CN201721021092.7U CN201721021092U CN207398102U CN 207398102 U CN207398102 U CN 207398102U CN 201721021092 U CN201721021092 U CN 201721021092U CN 207398102 U CN207398102 U CN 207398102U
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- basket
- silicon chip
- fetching device
- empty
- switchgear
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 75
- 239000010703 silicon Substances 0.000 title claims abstract description 75
- 230000007246 mechanism Effects 0.000 claims abstract description 86
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 18
- 210000000078 claw Anatomy 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000008450 motivation Effects 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 19
- 238000000034 method Methods 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 16
- 238000005265 energy consumption Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 description 15
- 230000009471 action Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007306 turnover Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model provides a kind of silicon chip with double end manipulator empty full basket switchgear, including pedestal, column, crossbeam, X is to driving mechanism, X is to movable block, Z-direction moving mechanism, full basket fetching device, empty basket fetching device and Dao Lan mechanisms, column is vertically arranged on pedestal, the upper end of column is horizontally disposed with crossbeam, X is set on crossbeam to driving mechanism, X sets X to movable block in driving mechanism, X sets Z-direction moving mechanism on the front face of movable block, it is corresponding in Z-direction moving mechanism that full basket fetching device and empty basket fetching device are set, full basket fetching device is arranged to rotatable 90 degree, Dao Lan mechanisms are arranged on pedestal, Dao Lan mechanisms may be reversed 90 degree, Dao Lan mechanisms are disposed in proximity to the one side of full basket fetching device.The utility model uses the equipment, can realize that the integrated air after the completion of Wafer Cleaning expires basket interchange process, ensure production efficiency, and it is smaller so that overall space occupies, and reduces energy consumption, and can save production cost.
Description
Technical field
The utility model is related to silicon chip production technical field of auxiliary equipment more particularly to a kind of with double end manipulator
The empty full basket switchgear of silicon chip.
Background technology
In semiconductor devices production, because micropollution also results in component failure, therefore silicon chip must carry out stringent cleaning
Technique.The purpose of Wafer Cleaning is the pollution impurity for removing its surface, including organic contamination and inorganic pollution, organic contamination bag
Include photoresist, organic solvent residual object, synthetic wax and people contact grease or fiber that device, instrument, vessel are brought, and inorganic dirt
Dye includes heavy metal gold, copper, iron, chromium etc., these heavy metals can not only seriously affect minority carrier lifetime and surface conductance, and
And serious drain can be caused.The method for removing dirt on silicon chip generally includes two kinds of physical cleaning and chemical cleaning, clear in silicon chip
After washing, fast finishing need to be carried out to it and collects to be exposed in environment for a long time to cause secondary pollution, meanwhile, to protect
The batch production efficiency of card silicon chip, existing silicon chip inserting machine, which is set up, puts the empty full mechanical Hand supplementary progress Wafer Cleaning of basket exchange of silicon chip
Compiling afterwards, to reduce hand labor intensity, improves the cleaning efficiency of batch silicon wafer.It is but existing clear for silicon chip
Sky after washing expires basket auxiliary manipulator, although can ensure the exchange of empty full basket, shortens the speed that changes the outfit, however in the technique that changes the outfit
It is middle that multiple manipulators is needed to cooperate, and empty full basket transport mechanism is more so that required energy consumption is more, take up space compared with
Greatly, for medium-sized and small enterprises, production cost is higher.
The content of the invention
The main purpose of the utility model is that solving problems of the prior art, silicon chip can be realized by providing one kind
Integrated air after the completion of cleaning expires basket interchange process, ensures production efficiency, and it is smaller so that overall space occupies, and reduces energy
Consumption, and the empty full basket switchgear of the silicon chip with double end manipulator that production cost can be saved.
In order to solve the above technical problems, the technical solution adopted in the utility model is：A kind of silicon with double end manipulator
The empty full basket switchgear of piece, wherein the empty full basket switchgear of the silicon chip with double end manipulator includes pedestal, column, horizontal stroke
Beam, X are described to driving mechanism, X to movable block, Z-direction moving mechanism, full basket fetching device, empty basket fetching device and Dao Lan mechanisms
The column is vertically arranged on pedestal, the upper end of the column is horizontally disposed with the crossbeam, the X is set on the crossbeam to drive
Motivation structure, the X sets the X in driving mechanism, and to movable block, the X sets the Z-direction on the front face of movable block
Moving mechanism, it is corresponding in the Z-direction moving mechanism that the full basket fetching device and the empty basket fetching device be set, it is described full
Basket fetching device is arranged to rotatable 90 degree, and the Dao Lan mechanisms are arranged on the pedestal, and the Dao Lan mechanisms may be reversed 90
Degree, and the Dao Lan mechanisms are disposed in proximity to the one side of the full basket fetching device.
Further, the full basket fetching device is arranged to include the gentle claw portion one of mounting base one, rotary cylinder, described
Mounting base one is arranged in the Z-direction moving mechanism, and sets the rotary cylinder in the mounting base one, the rotary cylinder
The pneumatic clamper part one is set on lower surface.
Further, the Dao Lan mechanisms are arranged to include placement rack, auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, shaft and driving motor, described to put
The upper surface that seat is arranged at the pedestal is put, the cross section of the placement rack is arranged in U types, and the left end of the placement rack is set
Connecting portion is put, the connecting portion coaxial line is sheathed in the shaft, and the upper surface of the connecting portion is vertically arranged the auxiliary
A kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, the cross section of described auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices are arranged to L-shaped, and one end of the shaft connects the driving motor by shaft coupling
Motor shaft output terminal, and the other end of the shaft is arranged at by fixed seat on the pedestal.
Further, the empty basket fetching device is arranged to include two gentle claw portion two of mounting base, the mounting base two
It is arranged in the Z-direction moving mechanism, and the pneumatic clamper part two is set in the mounting base two.
Further, the pneumatic clamper part one is disposed as including installing plate, left clamping jaw, left gas with the pneumatic clamper part two
Cylinder, right clamping jaw and right cylinder, the installing plate of the pneumatic clamper part one are fixed on the lower surface of the rotary cylinder, the pneumatic clamper portion
Two installing plate is divided to be fixed in the mounting base two, it is corresponding on the lower surface of the installing plate to be vertically arranged the left clamping jaw
With the right clamping jaw, the left clamping jaw is connected on the cylinder piston rod of the left cylinder, on the cylinder piston rod of the right cylinder
Connect the right clamping jaw, and the left cylinder lower surface for being arranged at the installing plate corresponding with the right cylinder.
Further, the cross section of the left clamping jaw and the right clamping jaw is disposed as L-shaped.
Further, silicon chip flower basket lifting gear is set on the column, and the silicon chip flower basket lifting gear is arranged to wrap
Guide rail, slide and chain drive part are included, the guide rail coaxial line is arranged on the front face of the column, and is slided on the guide rail
The slide is set, and the slide is arranged to drive along the guide rail linear slide by the chain drive part.
The utility model has the advantages and positive effects of：
(1) it is laterally flat with full basket fetching device and empty basket fetching device to driving mechanism X to movable block by X
It moves, and Z-direction moving mechanism then aids in full basket fetching device to be picked and placeed with empty basket fetching device realization to silicon chip flower basket, to ensure silicon
Piece cleaning process is carried out continuously, and improves production efficiency, is put in addition, silicon chip can be expired basket by full basket fetching device after being rotated by 90 °
It is placed in Dao Lan mechanisms, silicon chip thereon can be expired basket by Ze Dao baskets mechanism to be turned over and turn 90 degrees, and makes it in the band of follow-up transmission device
It is transported under dynamic, so as to complete efficiently compiling for the silicon chip after cleaning.
(2) silicon chip carried out by pneumatic clamper part on slide expires the gripping of basket, and basket fetching device to be expired is in X to movable block
When placement rack region is moved under the auxiliary of driving mechanism with X, rotary cylinder driving pneumatic clamper part is rotated by 90 °, so that
Its silicon chip gripped is expired basket and is rotated by 90 °, and is then placed into Dao Lan mechanisms, finally after Dao Lan mechanisms are turned over and turn 90 degrees, facilitates silicon
Piece is expired basket and automatically into follow-up transmission device and is transported, and ensures the continuity of entire technological process, to improve production efficiency.
(3) by the cooperation of placement rack and auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices structure, it can ensure that silicon chip expires the lower end of basket and is placed in placement rack
In, side wall is then placed on auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, then in shaft and driving motor placement rack is driven to turn over what is turn 90 degrees with auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices
In the process so that silicon chip expires that basket is reliable and stable to be put upside down.
It (4), can by the transmission device of full basket fetching device, empty basket fetching device and the switchgear main body both sides
Under the mutual cooperation of two pneumatic clampers, the exchange of the hollow full basket of Wafer Cleaning process is carried out, so that the switchgear is ensureing
While production efficiency, energy consumption is reduced, and manufacturing cost is low, the space hold of entire interchange process ancillary equipment is smaller.
(5) by the structure design of left clamping jaw and right clamping jaw, the vertical wall surface in its L-type and horizontal wall surface phase are enabled to
Cooperation ensures the good clamping to silicon chip flower basket, and when further avoiding only clamping silicon chip flower basket by vertical wall surface, silicon chip flower basket is easy
In transport process because the effects that vibrations and self gravitation come off pneumatic clamper part the problem of, with reduce loss.
Description of the drawings
Fig. 1 is the structure diagram of the utility model.
Fig. 2 is the partial enlargement structural representation of full basket fetching device part in Fig. 1.
Fig. 3 is the overlooking the structure diagram of the mechanism section of falling basket in Fig. 1.
Fig. 4 is working state structure schematic diagrames of the Fig. 1 during Wafer Cleaning.
In figure：10- pedestals, 20- columns, 201- guide rails, 202- slides, 203- chain drives part, 30- crossbeams, 40-X to
Driving mechanism, 50-X expire basket fetching device, 701- mounting bases one, 702- rotary pneumatics to movable block, 60-Z to moving mechanism, 70-
Cylinder, 703- pneumatic clampers part one, the left clamping jaws of 7031-, 7032- left cylinders, the right clamping jaws of 7033-, 7034- right cylinders, 80- sky baskets take
Laying mechanism, 801- mounting bases two, 802- pneumatic clampers part two, 90- Dao Lan mechanisms, 901- placement racks, 902- aid in a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, 903-
Shaft, 904- driving motors, 905- connecting portions.
Specific embodiment
In order to be better understood from the utility model, with reference to specific embodiments and the drawings to the utility model into advance one
The description of step.
As Figure 1-Figure 4, the empty full basket switchgear of a kind of silicon chip with double end manipulator, including pedestal 10, column
20th, crossbeam 30, X are to driving mechanism 40, X to movable block 50, Z-direction moving mechanism 60, full basket fetching device 70, empty basket pick-and-place machine
Structure 80 and Dao Lan mechanisms 90 are vertically arranged column 20 on pedestal 10, and the upper end of column 20 is horizontally disposed with crossbeam 30, is set on crossbeam 30
X is put to driving mechanism 40, X sets X in driving mechanism 40, and X sets Z-direction on the front face of movable block 50 to movable block 50
Moving mechanism 60, it is corresponding in Z-direction moving mechanism 60 that full basket fetching device 70 and empty basket fetching device 80, full basket pick-and-place machine are set
Structure 70 is arranged to rotatable 90 degree, and Dao Lan mechanisms 90 are arranged on pedestal 10, and Dao Lan mechanisms 90 may be reversed 90 degree, and should the machine of falling basket
Structure 90 is disposed in proximity to the one side of full basket fetching device 70, is taken by X to 40 X of driving mechanism to movable block 50 with full basket
Laying mechanism 70 and empty 80 transverse translation of basket fetching device, and Z-direction moving mechanism 60 then aids in full basket fetching device 70 to be taken with empty basket
Laying mechanism 80, which is realized, picks and places silicon chip flower basket, to ensure being carried out continuously for Wafer Cleaning process, and improves production efficiency, separately
Outside, silicon chip can be expired in basket after basket fetching device 70 is rotated by 90 ° by, which expiring, is positioned in Dao Lan mechanisms 90, and Ze Dao baskets mechanism 90 can incite somebody to action
Silicon chip thereon, which is expired basket and turned over, to be turn 90 degrees, it is made to be transported under the drive of follow-up transmission device, so as to complete the silicon chip after cleaning
Efficiently compile.
Full basket fetching device 70 is arranged to include mounting base 1,702 gentle claw portion 1 of rotary cylinder, installs
Seat 1 is arranged in Z-direction moving mechanism 60, and rotary cylinder 702 is set in the mounting base 1, under rotary cylinder 702
Pneumatic clamper part 1 is set on surface, and the silicon chip carried out by pneumatic clamper part 1 on slide 202 expires the gripping of basket, basket to be expired
Fetching device 70 (should to realize when X moves to 901 region of placement rack to movable block 50 and X under the auxiliary of driving mechanism 40
Process is smoothed out, and sensing detection device is set on rotary cylinder 702, which selects existing position inspection
Survey sensor, the course of work and with the connection relation of entire switchgear control section, how to realize information transmission etc., belong to
In electric connection of the prior art, information transmission mode, therefore do not repeated in specification and Figure of description), rotary cylinder
702 driving pneumatic clamper part, one 703 rotation is turn 90 degrees, so that the silicon chip of its gripping is expired basket and is rotated by 90 °, is then placed into down basket
In mechanism 90, finally after Dao Lan mechanisms 90 are turned over and turn 90 degrees, silicon chip is facilitated to expire basket automatically into follow-up transmission device and is transported,
Ensure the continuity of entire technological process, to improve production efficiency.
Dao Lan mechanisms 90 are arranged to include placement rack 901, auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 902, shaft 903 and driving motor 904, placement rack
901 are arranged at the upper surface of pedestal 10, and the cross section of placement rack 901 is arranged to U-shaped, and the left end of the placement rack 901 is set
Connecting portion 905,905 coaxial line of connecting portion are sheathed in shaft 903, and the upper surface of the connecting portion 905 is vertically arranged auxiliary and falls
Plate 902, the cross section of auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 902 are arranged to L-shaped, and one end of shaft 903 connects driving motor 904 by shaft coupling
Motor shaft output terminal, and the other end of the shaft 903 is arranged at by fixed seat on pedestal 10, passes through 901 He of placement rack
The cooperation of 902 structure of a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices is aided in, can ensure that silicon chip is expired the lower end of basket and is placed in placement rack 901, side wall is then placed in
It aids on a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 902, then drives placement rack 901 with a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices 902 is aided in turn over the mistake turning 90 degrees in shaft 903 and driving motor 904
Cheng Zhong so that silicon chip expires that basket is reliable and stable to be put upside down.
Empty basket fetching device 80 is arranged to include 2 801 gentle claw portion 2 802 of mounting base, and mounting base 2 801 is arranged at
In Z-direction moving mechanism 60, and pneumatic clamper part 2 802 in the mounting base 2 801 is set, is taken by full basket fetching device 70, empty basket
Laying mechanism 80 and the transmission device of the switchgear main body both sides (transmission device at this is band of the prior art transmission,
The transmission modes such as chain transmission and disk roller have carried out simple signal in Figure of description 4, therefore no longer specific superfluous in the description
State), the exchange of the hollow full basket of Wafer Cleaning process under the mutual cooperation of two pneumatic clampers, can be carried out, so that the exchange is set
It is standby to reduce energy consumption while production efficiency is ensured, and manufacturing cost is low, the space of entire interchange process ancillary equipment accounts for
With smaller.
Pneumatic clamper part 1 and pneumatic clamper part 2 802 be disposed as including installing plate, left clamping jaw 7031, left cylinder 7032,
Right clamping jaw 7033 and right cylinder 7034, the installing plate of pneumatic clamper part 1 are fixed on the lower surface of rotary cylinder 702, pneumatic clamper portion
Points 2 802 installing plate is fixed in mounting base 2 801, on the lower surface of installing plate it is corresponding be vertically arranged left clamping jaw 7031 with
Right clamping jaw 7033 connects left clamping jaw 7031 on the cylinder piston rod of left cylinder 7032, connects on the cylinder piston rod of right cylinder 7034
Right clamping jaw 7033, and the lower surface for being arranged at installing plate corresponding with right cylinder 7034 of left cylinder 7032 are connect, passes through left cylinder
7032 with the action of the cylinder piston rod of right cylinder 7034, realize left clamping jaw 7031 and the close to each other of right clamping jaw 7033 or
It is separate, so as to complete the clamping or release to silicon chip flower basket, to ensure full basket fetching device 70 and empty basket fetching device 80
Works fine.
The cross section of left clamping jaw 7031 and right clamping jaw 7033 is disposed as L-shaped, passes through left clamping jaw 7031 and right clamping jaw
7033 structure design enables to the vertical wall surface in its L-type to be engaged guarantee to the good of silicon chip flower basket with horizontal wall surface
Clamp, further avoid only by vertical wall surface clamp silicon chip flower basket when, silicon chip flower basket easily in transport process because vibrations and itself
The effects that gravity come off pneumatic clamper part the problem of, with reduce loss.
Silicon chip flower basket lifting gear is set on column 20, and silicon chip flower basket lifting gear is arranged to include guide rail 201, slide
202 and chain drive part 203,201 coaxial line of guide rail be arranged on the front face of column 20, and on the guide rail 201 slide set
Slide 202, slide 202 are arranged to drive along 201 linear slide of guide rail by chain drive part 203, pass through the silicon on column 20
The setting of piece gaily decorated basket lifting gear, can be after the completion of Wafer Cleaning so that chain drive part 203 drives slide 202 to be spaced root
The duration slided to according to single silicon chip in silicon chip flower basket rises a silicon wafer thickness distance, so as to ensure the continuous receipts to cleaning silicon chip
Collection.
X may be configured as chain-drive mechanism to driving mechanism 40, and Z-direction moving mechanism 60 is arranged to include Z to movable block and Z
To driving mechanism, Z-direction movable block is slideably positioned in X on movable block 50, and mounting base one is set on the front face of Z-direction movable block
701 with mounting base 2 801, and on the Z-direction movable block connect Z-direction driving mechanism, Z-direction driving mechanism may be configured as hydraulic cylinder or
Person's oil cylinder, by Z-direction movable block transverse shifting of the chain-drive mechanism with X on movable block 50, and Z-direction movable block is with thereon
Mounting base 1 translated in X direction with mounting base 2 801, and under the auxiliary of Z-direction driving mechanism so that Z-direction movable block band
Mounting base 1 thereon and 2 801 vertical lifting of mounting base, so as to fulfill the fetching process to silicon chip flower basket.
Using the empty full basket switchgear of the silicon chip provided by the utility model with double end manipulator, it can realize that silicon chip is clear
Integrated air after the completion of washing expires basket interchange process, ensures production efficiency, and it is smaller so that overall space occupies, and reduces energy consumption,
And production cost can be saved.When this mutually turns equipment for working during Wafer Cleaning, set and transmit in the both sides of the equipment
Device, to realize the real-time conveying of silicon chip sky basket and full basket, the course of work of the switchgear is as follows：
1st, start X causes X to movable block 50 with full basket fetching device 70 and empty basket fetching device 80 to driving mechanism 40
Transverse translation, full basket fetching device 70 move to 202 top of slide, and empty basket fetching device 80 is moved to above transmission device；
2nd, starting Z-direction moving mechanism 60 drives Z-direction movable block to decline, and pneumatic clamper part 1 is distinguished with pneumatic clamper part 2 802
Under the action of its left cylinder 7032 and the cylinder piston rod of right cylinder 7034, basket is expired to silicon chip and is gripped with silicon chip sky basket；
3rd, after starting 60 driving Z-direction movable block rising certain altitude of Z-direction moving mechanism, restart X makes to driving mechanism 40
X is obtained to movable block 50 with full basket fetching device 70 and empty 80 transverse translation of basket fetching device, full basket fetching device 70 moves to
90 top of Dao Lan mechanisms, empty basket fetching device 80 move to 202 top of slide；
4th, starting Z-direction moving mechanism 60 drives Z-direction movable block to decline, and pneumatic clamper part 1 is distinguished with pneumatic clamper part 2 802
Under the action of its left cylinder 7032 and the cylinder piston rod of right cylinder 7034, basket is expired to silicon chip and is placed with silicon chip sky basket；
5th, start Dao Lan mechanisms 90 and silicon chip thereon expired into basket turn over and turn 90 degrees, silicon chip is made to expire basket under the drive of transmission device
It is transported, restarts 90 degree of 90 reverse flip of Dao Lan mechanisms；
6th, when the silicon chip sky basket on slide 202 will place full, restart X and cause X to movable block to driving mechanism 40
50 move to 202 top of slide with full basket fetching device 70 and empty 80 transverse translation of basket fetching device, full basket fetching device 70,
Empty basket fetching device 80 is moved to above transmission device, and then repeat the above steps 2-5, so as to fulfill the company to silicon chip after cleaning
It is continuous to collect transhipment, to improve production efficiency.
The embodiment of the utility model is described in detail above, but the content is only the preferable of the utility model
Embodiment, it is impossible to be construed as limiting the scope of the utility model.All impartial changes made according to the scope of the utility model
Change and improvement etc., should all still belong within this patent covering scope.
Claims (7)
1. a kind of empty full basket switchgear of the silicon chip with double end manipulator, it is characterised in that：It is described with double end manipulator
The empty full basket switchgear of silicon chip includes pedestal, column, crossbeam, X and is taken to driving mechanism, X to movable block, Z-direction moving mechanism, full basket
Laying mechanism, empty basket fetching device and Dao Lan mechanisms are vertically arranged the column on the pedestal, and the upper end level of the column is set
The crossbeam is put, the X is set on the crossbeam to driving mechanism, the X sets the X to movable block in driving mechanism,
The X sets the Z-direction moving mechanism on the front face of movable block, in the Z-direction moving mechanism it is corresponding set it is described full
Basket fetching device and the empty basket fetching device, the full basket fetching device are arranged to rotatable 90 degree, and the Dao Lan mechanisms are set
It is placed on the pedestal, the Dao Lan mechanisms may be reversed 90 degree, and the Dao Lan mechanisms are disposed in proximity to the full basket fetching device
One side.
2. the empty full basket switchgear of the silicon chip with double end manipulator according to claim 1, it is characterised in that：It is described full
Basket fetching device is arranged to include the gentle claw portion one of mounting base one, rotary cylinder, and the mounting base one is arranged at the Z-direction and moves
On motivation structure, and the rotary cylinder is set in the mounting base one, the pneumatic clamper portion is set on the lower surface of the rotary cylinder
Divide one.
3. the empty full basket switchgear of the silicon chip with double end manipulator according to claim 1, it is characterised in that：It is described fall
Basket mechanism is arranged to include placement rack, a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, shaft and driving motor, the placement rack is aided in be arranged at the upper table of the pedestal
Face, the cross section of the placement rack are arranged to U-shaped, and the left end of the placement rack sets connecting portion, the connecting portion coaxial line
It is sheathed in the shaft, and the upper surface of the connecting portion is vertically arranged described auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices, the cross section of described auxiliary a kind of rhyme scheme in Chinese operas serving as the prelude to a complete score for voices
It is arranged to L-shaped, one end of the shaft connects the output terminal of the motor shaft of the driving motor, and the shaft by shaft coupling
The other end be arranged at by fixed seat on the pedestal.
4. the empty full basket switchgear of the silicon chip with double end manipulator according to claim 2, it is characterised in that：The sky
Basket fetching device is arranged to include two gentle claw portion two of mounting base, and the mounting base two is arranged in the Z-direction moving mechanism,
And the pneumatic clamper part two is set in the mounting base two.
5. the empty full basket switchgear of the silicon chip with double end manipulator according to claim 4, it is characterised in that：The gas
Claw portion one is disposed as including installing plate, left clamping jaw, left cylinder, right clamping jaw and right cylinder with the pneumatic clamper part two, described
The installing plate of pneumatic clamper part one is fixed on the lower surface of the rotary cylinder, and the installing plate of the pneumatic clamper part two is fixed on described
It is corresponding on the lower surface of the installing plate to be vertically arranged the left clamping jaw and the right clamping jaw, the left gas in mounting base two
The left clamping jaw is connected on the cylinder piston rod of cylinder, the right clamping jaw is connected on the cylinder piston rod of the right cylinder, and it is described
The left cylinder lower surface for being arranged at the installing plate corresponding with the right cylinder.
6. the empty full basket switchgear of the silicon chip with double end manipulator according to claim 5, it is characterised in that：The left side
The cross section of clamping jaw and the right clamping jaw is disposed as L-shaped.
7. the empty full basket switchgear of the silicon chip with double end manipulator according to claim 1, it is characterised in that：It is described vertical
Silicon chip flower basket lifting gear is set on column, the silicon chip flower basket lifting gear is arranged to include guide rail, slide and chain drive part,
The guide rail coaxial line is arranged on the front face of the column, and is slided on the guide rail and set the slide, and the slide is set
It is set to and is driven by the chain drive part along the guide rail linear slide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721021092.7U CN207398102U (en) | 2017-08-15 | 2017-08-15 | A kind of empty full basket switchgear of the silicon chip with double end manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721021092.7U CN207398102U (en) | 2017-08-15 | 2017-08-15 | A kind of empty full basket switchgear of the silicon chip with double end manipulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207398102U true CN207398102U (en) | 2018-05-22 |
Family
ID=62418419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721021092.7U Expired - Fee Related CN207398102U (en) | 2017-08-15 | 2017-08-15 | A kind of empty full basket switchgear of the silicon chip with double end manipulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207398102U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115440649A (en) * | 2022-08-30 | 2022-12-06 | 曲靖阳光新能源股份有限公司 | Clamping jaw extracting mechanism suitable for crystal baskets of different specifications and wafer inserting machine thereof |
-
2017
- 2017-08-15 CN CN201721021092.7U patent/CN207398102U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115440649A (en) * | 2022-08-30 | 2022-12-06 | 曲靖阳光新能源股份有限公司 | Clamping jaw extracting mechanism suitable for crystal baskets of different specifications and wafer inserting machine thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190507 Address after: 300 000 East 4, No. 1 Road, Huangzhuang Town Industrial Function Zone, Baodi District, Tianjin Patentee after: Tianjin Chuangyuda Photovoltaic Technology Co.,Ltd. Address before: 300 000 East 4, No. 1 Road, Huangzhuang Town Industrial Function Zone, Baodi District, Tianjin Patentee before: TIANJIN CHUANGYUDA TECHNOLOGY CO.,LTD. |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180522 |
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| CF01 | Termination of patent right due to non-payment of annual fee |