CN115440649A - Clamping jaw extracting mechanism suitable for crystal baskets of different specifications and wafer inserting machine thereof - Google Patents
Clamping jaw extracting mechanism suitable for crystal baskets of different specifications and wafer inserting machine thereof Download PDFInfo
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- CN115440649A CN115440649A CN202211050544.XA CN202211050544A CN115440649A CN 115440649 A CN115440649 A CN 115440649A CN 202211050544 A CN202211050544 A CN 202211050544A CN 115440649 A CN115440649 A CN 115440649A
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- 239000013078 crystal Substances 0.000 title claims abstract description 19
- 230000007246 mechanism Effects 0.000 title claims abstract description 18
- 230000033001 locomotion Effects 0.000 claims abstract description 8
- 238000003756 stirring Methods 0.000 claims description 42
- 238000007789 sealing Methods 0.000 claims description 15
- 230000001050 lubricating effect Effects 0.000 claims description 11
- 238000012546 transfer Methods 0.000 claims description 9
- 235000011194 food seasoning agent Nutrition 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 230000009286 beneficial effect Effects 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 239000010687 lubricating oil Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000314 lubricant Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000007605 air drying Methods 0.000 description 4
- 238000005461 lubrication Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
The invention provides a clamping jaw extracting mechanism suitable for crystal baskets with different specifications and a wafer inserting machine thereof, comprising: mounting panel, first connecting rod, actuating lever and supporting rod, the mounting panel level sets up, two first connecting rod symmetry sets up on the mounting panel bottom surface, the actuating lever level sets up two between the first connecting rod, and drives the actuating lever up-and-down motion through the master cylinder that sets up on the mounting panel, the slip of actuating lever both ends is provided with driving sleeve, horizontal slip is provided with the second connecting rod on the first connecting rod, the last articulated third connecting rod and the fourth connecting rod that is provided with of driving sleeve, third connecting rod and fourth connecting rod set up and articulate with first connecting rod and second connecting rod respectively along vertical direction symmetry, the supporting rod with second connecting rod fixed connection. The invention aims to provide a clamping jaw extracting mechanism suitable for crystal baskets with different specifications and a wafer inserting machine thereof, which can be suitable for clamping crystal baskets with various sizes and specifications.
Description
Technical Field
The invention relates to the technical field of wafer inserting machines, in particular to a clamping jaw extracting mechanism suitable for crystal baskets of different specifications and a wafer inserting machine thereof.
Background
In recent years, with the gradual popularization of the green development concept, the progress of replacing traditional energy sources such as petroleum and coal with various new clean energy sources is also gradually promoted, wherein the solar technology is developed earlier and the technology is gradually mature, and a plurality of solar products are also gradually put into the market. Wherein solar panel is the raw and other materials that mainly used in process of production for crystalline silicon, need be the silicon chip with crystalline silicon processing, make the panel again afterwards, and the silicon chip need wash before processing into the panel, need use the insert machine for promoting cleaning efficiency, clamping jaw on the insert machine can be picked up the brilliant basket and wash, however, clamping jaw width is comparatively fixed among the prior art, and in recent years in the mainstream technology various not silicon chips of size also increase gradually, consequently need design a clamping jaw that is applicable to different specification brilliant baskets and insert machine thereof, can be applicable to the centre gripping of various size specification brilliant baskets.
Disclosure of Invention
The invention provides a clamping jaw extracting mechanism suitable for crystal baskets with different specifications, which can be suitable for clamping crystal baskets with various sizes.
Therefore, the technical scheme is that the clamping jaw extracting mechanism suitable for crystal baskets with different specifications comprises the following steps: mounting panel, first connecting rod, actuating lever and supporting rod, the mounting panel level sets up, two first connecting rod symmetry sets up on the mounting panel bottom surface, the actuating lever level sets up two between the first connecting rod, and drives the actuating lever up-and-down motion through the master cylinder that sets up on the mounting panel, the slip of actuating lever both ends is provided with driving sleeve, horizontal slip is provided with the second connecting rod on the first connecting rod, the last articulated third connecting rod and the fourth connecting rod that is provided with of driving sleeve, third connecting rod and fourth connecting rod set up and articulate with first connecting rod and second connecting rod respectively along vertical direction symmetry, the supporting rod with second connecting rod fixed connection.
Preferably, the lower end of the clamping rod is fixedly provided with a clamping block, the clamping block is of a U-shaped structure, and the openings of the U-shaped structures of the two clamping blocks are oppositely arranged.
The invention also provides a piece inserting machine, which further comprises: workstation, conveying module, vertical slide bar and horizontal slide bar, the conveying module level sets up on the workstation, the horizontal slide bar level sets up just perpendicular to on the workstation conveying module direction of motion, the vertical setting of vertical slide bar is at the conveying module afterbody, and vertical slide bar with horizontal slide bar slip connecting rod, the clamping jaw draws the mechanism and slides along vertical direction and set up on the vertical slide bar.
Preferably, a lubricating assembly is further disposed on the horizontal sliding rod, and the lubricating assembly includes:
the fixing plate is vertically arranged and fixedly arranged on the side wall of the horizontal sliding rod, which is far away from the vertical sliding rod;
the side wall, close to the vertical slide bar, of the fixing plate is fixedly provided with a horizontal slide way, the horizontal slide way is parallel to the horizontal slide bar, a first sliding block is arranged in the horizontal slide way in a sliding mode along the length direction, a second sliding block is arranged below the horizontal slide way in a sliding mode along the length direction, the first sliding block is fixedly connected with the second sliding block and can abut against the second sliding block when the vertical slide bar slides, a first spring is arranged on one side, far away from the vertical slide bar, of the first sliding block, and the axis of the first spring is horizontally arranged;
a piston tube is arranged on one side of the horizontal slideway, the axis of the piston tube is parallel to the length direction of the horizontal slideway, a piston block is arranged in the piston tube in a sliding manner, and the piston block is fixedly connected with the first sliding block through a piston rod;
the side part of the piston tube is provided with a first crank, the first crank is vertically arranged and parallel to the fixed plate, the lower end of the first crank is rotatably connected with the fixed plate through a first convex column perpendicular to the fixed plate, the upper end of the first crank is hinged with a second crank, and the other end of the second crank is hinged with the first sliding block;
the upper end of the first crank is rotatably provided with a first connecting block, and the first connecting block is hinged with a third crank;
the fixed plate is fixedly provided with a supporting block, a second convex column is rotatably arranged on the supporting block and parallel to the axis of the piston tube, a fourth crank is fixedly arranged on the second convex column and is of a bending structure, a second connecting block is rotatably arranged at one end, away from the second convex column, of the fourth crank, and the second connecting block is hinged to the end of the third crank;
the third crank is fixedly sleeved with a swing sleeve, the lower end of the swing sleeve is hinged with a fifth crank, and the lower end of the fifth crank is provided with a first notch along the length direction;
the stirring rod is coaxially inserted into one end, away from the horizontal slideway, of the piston pipe, is rotatably connected with the piston pipe and can slide along the axis, a third convex column is rotatably arranged at one end, away from the piston pipe, of the stirring rod, is perpendicular to the stirring rod, penetrates through the first notch and is slidably connected with the fifth crank, and a stirring block is fixedly arranged at one end, away from the third convex column, of the stirring rod;
the connecting sleeve is sleeved on the stirring rod, the connecting sleeve is rotationally connected with the stirring rod, a sixth crank is fixedly connected to the connecting sleeve, the sixth crank is set to be of a U-shaped structure, an opening of the U-shaped structure is vertically and downwards arranged, a third slider is fixedly arranged at the other end of the sixth crank, the third slider is slidably connected with the outer wall of the piston tube along the length direction, a seventh crank is fixedly arranged on the sixth crank, the seventh crank is vertically arranged, a second notch is formed in the seventh crank along the length direction, a fourth convex column is fixedly arranged on the first crank, and the fourth convex column penetrates through the second notch and is slidably connected with the seventh crank;
the sealing plate is arranged between the piston block and the stirring block, the sealing plate is fixedly connected with the inner wall of the piston pipe, and a flow guide port is formed in the sealing plate;
the lubricating nozzle is arranged on the outer wall of the piston pipe and communicated with the interior of the piston pipe, the lubricating nozzle is vertically arranged downwards, and the interface of the lubricating nozzle is located between the closing plate and the piston block.
Preferably, a sealing ring is arranged at the joint of the end part of the piston pipe and the stirring rod.
Preferably, a cover plate is arranged on one side, close to the piston block, of the closing plate, and the cover plate is hinged to the inner wall of the piston pipe.
Preferably, the stirring block is arranged in a strip-shaped structure and is arranged along the radial direction of the piston pipe.
Preferably, the side of the conveying module is provided with a seasoning assembly, and the seasoning assembly comprises:
the observation plate is arranged on the side part of the conveying module, is vertically arranged and is fixedly connected with the workbench, and is made of transparent resin;
the air exhaust motor is fixedly arranged on one side, close to the conveying module, of the observation plate, an output shaft of the air exhaust motor is perpendicular to the observation plate, a fifth connecting rod is fixedly arranged on the output shaft of the air exhaust motor, the fifth connecting rod is of an L-shaped structure, and a first gear is rotatably arranged at the end, far away from the air exhaust motor, of the L-shaped structure;
a rotating main shaft is arranged on one side, away from the observation plate, of the exhaust motor, the axis of the rotating main shaft is superposed with the output shaft of the exhaust motor, a first sleeve is rotatably arranged on the rotating main shaft, and the first sleeve is fixedly connected with the observation plate through a rod piece;
the gear ring is coaxially and fixedly arranged on the rotating main shaft, the first gear is internally meshed with the gear ring, and an exhaust fan is fixedly arranged on the rotating main shaft;
the sixth connecting rod is fixedly arranged on the first gear, fixedly connected with the side wall of the first gear close to the exhaust fan, parallel to the observation plate, and provided with a third notch along the length direction at one end of the sixth connecting rod far away from the fifth connecting rod;
the observation plate is rotatably provided with a fifth convex column, the fifth convex column is perpendicular to the observation plate, a driving sliding block is fixedly arranged on the fifth convex column, and the driving sliding block is arranged in a rectangular structure and is arranged in the third groove in a sliding manner;
the scraper blade is fixedly arranged on the fifth convex column, and one end of the scraper blade is abutted to the observation plate.
Preferably, a plurality of flow guide holes are formed in the periphery of the exhaust motor on the observation plate.
Preferably, the periphery of the exhaust motor is covered with a protective cover.
This practical theory of operation and beneficial technological effect as follows: when the clamping jaw draws the mechanism and uses, master cylinder promotes the actuating lever downstream, because the setting of third connecting rod can promote two drive sleeves and be close to each other when the actuating lever downstream, and then promotes two second connecting rods and slide and be close to each other along the horizontal direction to make two supporting rods be close to each other along the horizontal direction and accomplish and press from both sides tightly, thereby make fixture can be applicable to the brilliant basket centre gripping of different specifications.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural view of a clamping jaw extracting mechanism suitable for crystal baskets with different specifications according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a wafer inserting machine according to an embodiment of the present invention;
FIG. 3 is a first schematic view of a lubrication assembly of a wafer inserting machine according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a lubrication assembly in an interposer according to an embodiment of the present invention;
FIG. 5 is a first schematic view of a dry wind assembly of a wafer inserting machine according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of an air drying assembly in a wafer inserting machine according to an embodiment of the present invention.
The reference numbers in the drawings are as follows: 1. a work table; 2. a transfer module; 3. a vertical sliding rod; 4. a horizontal sliding bar; 5. mounting a plate; 51. a first link; 52. a drive rod; 53. a clamping rod; 54. a master cylinder; 55. a drive sleeve; 56. a second link; 57. a third link; 58. a fourth link; 59. a clamping block; 6. a lubrication assembly; 601. a fixing plate; 602. a horizontal slideway; 603. a first slider; 604. a second slider; 605. a first spring; 606. a piston tube; 607. a piston block; 608. a piston rod; 609. a first crank; 610. a first convex column; 611. a second crank; 612. a first connection block; 613. a third crank; 614. a support block; 615. a second convex column; 616. a fourth crank; 617. a second connecting block; 618. a swing sleeve; 619. a fifth crank; 620. a first notch; 621. a stirring rod; 622. a third convex column; 623. a stirring block; 624. a connecting sleeve; 625. a sixth crank; 626. a third slider; 627. a seventh crank; 628. a second notch; 629. a fourth convex column; 630. a closing plate; 632. lubricating the spray head; 633. a seal ring; 634. a cover plate; 7. air-drying the assembly; 701. an observation plate; 702. an air exhaust motor; 703. a fifth link; 704. a first gear; 705. rotating the main shaft; 706. a first sleeve; 707. a gear ring; 708. an exhaust fan; 709. a sixth link; 710. a third notch; 711. a fifth convex column; 712. driving the slide block; 713. a squeegee; 714. a flow guide hole; 715. a protective cover.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it should be understood that they are presented herein only to illustrate and explain the present invention and not to limit the present invention.
The embodiment of the invention provides a clamping jaw extracting mechanism suitable for crystal baskets with different specifications, which comprises the following components as shown in figure 1: mounting panel 5, first connecting rod 51, actuating lever 52 and holding rod 53, the level of mounting panel 5 sets up, two first connecting rod 51 symmetry sets up on the mounting panel 5 bottom surface, actuating lever 52 level sets up two between the first connecting rod 51, and drives actuating lever 52 up-and-down motion through setting up master cylinder 54 on mounting panel 5, the slip of actuating lever 52 both ends is provided with driving sleeve 55, horizontal slip is provided with second connecting rod 56 on the first connecting rod 51, the articulated third connecting rod 57 and fourth connecting rod 58 that is provided with on the driving sleeve 55, third connecting rod 57 and fourth connecting rod 58 set up and articulate with first connecting rod 51 and second connecting rod 56 respectively along vertical direction symmetry, holding rod 53 with second connecting rod 56 fixed connection.
The working principle and the beneficial technical effects of the technical scheme are as follows: when the clamping jaw extracting mechanism is used, the main hydraulic cylinder 54 pushes the driving rod 52 to move downwards, and when the driving rod 52 moves downwards, the driving sleeve 55 is pushed to be close to each other due to the arrangement of the third connecting rod 57, and then the second connecting rod 56 is pushed to slide along the horizontal direction and be close to each other, so that the two clamping rods 53 are close to each other along the horizontal direction to complete clamping, and the clamping mechanism can be suitable for clamping crystal baskets with different specifications.
In one embodiment, the lower end of the clamping rod 53 is fixedly provided with a clamping block 59, the clamping block 59 is provided with a U-shaped structure, and the U-shaped structures of the two clamping blocks 59 are oppositely arranged.
The working principle and the beneficial technical effects of the technical scheme are as follows: through the clamp splice 59 that sets up the U type structure, two clamp splices 59 can carry out the centre gripping to the brilliant basket side when being close to each other along with supporting rod 53, and simultaneously, the setting of U type structure can avoid the centre gripping in-process brilliant basket to drop and cause the damage, can part automatically when two clamp splices 59 keep away from each other after the centre gripping is accomplished to the practicality and the stability of device have been promoted.
An embodiment of the present invention further provides a wafer inserting machine, as shown in fig. 2, further including: workstation 1, transfer module 2, vertical slide bar 3 and horizontal slide bar 4, 2 levels of transfer module set up on the workstation 1, 4 levels of horizontal slide bar set up 1 is gone up and the perpendicular to in the workstation 2 direction of motion of transfer module, 3 vertical settings of vertical slide bar are at 2 afterbody of transfer module, and vertical slide bar 3 with 4 slip connecting rods of horizontal slide bar, the clamping jaw draws the mechanism and slides the setting along vertical direction and is in on the vertical slide bar 3.
The working principle and the beneficial technical effects of the technical scheme are as follows: when the insert machine is used, the silicon wafer is cleaned and conveyed through the conveying module 2, at the moment, the clamping jaw extracts the crystal basket clamped by the module and is positioned at the tail part of the conveying module 2, the silicon wafer is directly inserted into the crystal basket after being conveyed through the conveying module 2, the clamping jaw extracts the module and drives the crystal basket to slowly ascend along the vertical sliding rod 3 in the process, so that automatic insert is completed, power parts such as a hydraulic cylinder and the like drive the vertical sliding rod 3 to slide along the horizontal sliding rod 4 after the crystal basket is filled with the silicon wafer, the crystal basket is placed, a new crystal basket is clamped, and the automation of the whole insert process is completed.
In one embodiment, a lubricating assembly 6 is further disposed on the horizontal sliding rod 4, as shown in fig. 3 and 4, the lubricating assembly 6 includes:
the fixing plate 601 is vertically arranged and is fixedly arranged on the side wall of the horizontal sliding rod 4 far away from the vertical sliding rod 3;
a horizontal slide 602 is fixedly arranged on the side wall of the fixing plate 601 close to the vertical slide bar 3, the horizontal slide 602 is parallel to the horizontal slide bar 4, a first slide block 603 is arranged in the horizontal slide 602 in a sliding manner along the length direction, a second slide block 604 is arranged below the horizontal slide 602 in a sliding manner along the length direction, the first slide block 603 is fixedly connected with the second slide block 604, the vertical slide bar 3 can be abutted against the second slide block 604 when sliding, a first spring 605 is arranged on one side of the first slide block 603 away from the vertical slide bar 3, and the axis of the first spring 605 is horizontally arranged;
a piston tube 606, one side of the horizontal slide 602 is provided with the piston tube 606, the axis of the piston tube 606 is parallel to the length direction of the horizontal slide 602, a piston block 607 is slidably arranged in the piston tube 606, and the piston block 607 is fixedly connected with the first slide block 603 through a piston rod 608;
a first crank 609, a first crank 609 is arranged on the side of the piston tube 606, the first crank 609 is vertically arranged and parallel to the fixing plate 601, the lower end of the first crank 609 is rotatably connected with the fixing plate 601 through a first convex column 610 perpendicular to the fixing plate 601, a second crank 611 is hinged to the upper end of the first crank 609, and the other end of the second crank 611 is hinged to the first sliding block 603;
a first connecting block 612 is rotatably arranged at the upper end of the first crank 609, and a third crank 613 is hinged on the first connecting block 612;
the supporting block 614 is fixedly arranged on the fixing plate 601, a second convex column 615 is arranged on the supporting block 614 in a rotating mode, the second convex column 615 is parallel to the axis of the piston tube 606, a fourth crank 616 is fixedly arranged on the second convex column 615, the fourth crank 616 is of a bending structure, a second connecting block 617 is arranged at one end, far away from the second convex column 615, of the fourth crank 616 in a rotating mode, and the second connecting block 617 is hinged to the end portion of the third crank 613;
the third crank 613 is fixedly sleeved with a swing sleeve 618, the lower end of the swing sleeve 618 is hinged with a fifth crank 619, and the lower end of the fifth crank 619 is provided with a first notch 620 along the length direction;
the stirring rod 621 is coaxially inserted into one end, away from the horizontal sliding way 602, of the piston pipe 606, the stirring rod 621 is rotatably connected with the piston pipe 606 and can slide along an axis at the same time, a third protruding column 622 is rotatably arranged at one end, away from the piston pipe 606, of the stirring rod 621, the third protruding column 622 is perpendicular to the stirring rod 621, the third protruding column 622 penetrates through the first notch 620 and is slidably connected with the fifth crank 619, and a stirring block 623 is fixedly arranged at one end, away from the third protruding column 622, of the stirring rod 621;
the connecting sleeve 624 is sleeved on the stirring rod 621, the connecting sleeve 624 is rotationally connected with the stirring rod 621, a sixth crank 625 is fixedly connected to the connecting sleeve 624, the sixth crank 625 is of a U-shaped structure, an opening of the U-shaped structure is vertically arranged downwards, a third sliding block 626 is fixedly arranged at the other end of the sixth crank 625, the third sliding block 626 is slidably connected with the outer wall of the piston tube 606 along the length direction, a seventh crank 627 is fixedly arranged on the sixth crank 625, the seventh crank 627 is vertically arranged, a second notch 628 is formed in the seventh crank 627 along the length direction, a fourth convex column 629 is fixedly arranged on the first crank 609, and the fourth convex column 629 penetrates through the second notch 628 and is slidably connected with the seventh crank 627;
a sealing plate 630 is arranged between the piston block 607 and the stirring block 623, the sealing plate 630 is fixedly connected with the inner wall of the piston pipe 606, and a diversion port is formed in the sealing plate 630;
the lubricating spray head 632 is arranged on the outer wall of the piston pipe 606, the lubricating spray head 632 is communicated with the interior of the piston pipe 606, the lubricating spray head 632 is vertically arranged downwards, and the interface of the lubricating spray head 632 is positioned between the closing plate 630 and the piston block 607.
The working principle and the beneficial technical effects of the technical scheme are as follows: when the lubricating assembly 6 is used, the vertical sliding rod 3 abuts against the second sliding block 604 when sliding along the horizontal sliding rod 4, so that the second sliding block 604 is driven to slide along the horizontal direction, the first sliding block 603 is driven to slide along the horizontal sliding channel 602 rightwards, the first sliding block 603 drives the piston block 607 to slide along the piston pipe 606 through the piston rod 608, lubricating oil in the piston pipe 606 is sucked between the closing plate 630 and the piston block 607 under the suction action of the piston, then the first sliding block 603 is reset leftwards under the action of the first spring 605, the piston block 607 sprays the lubricating oil out of the lubricating spray head 632 to complete the lubrication of the horizontal sliding rod 4, the vertical sliding rod 3 is prevented from being clamped when sliding, and the flow field and the stability of the whole clamping and inserting process are ensured;
when the first slider 603 slides, the first slider 603 drives the first crank 609 to rotate around the first convex column 610 through the second crank 611, the first crank 609 drives the third crank 613 to swing when rotating, through the arrangement of the fourth crank 616 and the second convex column 615, one end of the third crank 613 can also swing around the second convex column 615 along with the fourth crank 616 while the other end of the third crank 613 can also swing around the second convex column 615 along with the fourth crank 616, and then the swing sleeve 618 swings, the swing sleeve 618 drives the stirring rod 621 to reciprocate along the axial direction through the fifth crank 619, and when the stirring rod 621 rotates, the first crank 609 drives the seventh crank 627 to reciprocate along the horizontal direction through the matching of the fourth convex column 629 and the second notch 628, and then drives the stirring rod 621 to reciprocate along the horizontal direction through the sixth crank 625, and drives the stirring block 623 to stir the lubricating oil through the reciprocating sliding and the rotation of the stirring rod, thereby preventing the lubricating oil from being deposited and influencing the use when being placed for a long time.
In one embodiment, a sealing ring 633 is disposed at the connection between the end of the piston tube 606 and the stirring rod 621.
The working principle and the beneficial technical effects of the technical scheme are as follows: by providing the sealing ring 633, the lubricating oil is prevented from the joint due to the movement of the stirring rod 621, thereby improving the sealing degree of the device by providing the sealing ring 633.
In one embodiment, a cover plate 634 is disposed on a side of the closing plate 630 adjacent to the piston block 607, and the cover plate 634 is hinged to the inner wall of the piston tube 606.
The working principle and the beneficial technical effects of the technical scheme are as follows: by providing the cover plate 634 hinged to the inner wall of the piston tube 606, the cover plate 634 is opened by suction when the piston block 607 moves to the right, and the cover plate 634 is closed by pressure when the piston block 607 moves to the left, so as to increase the air pressure between the cover plate 634 and the piston block 607, thereby facilitating the ejection of the lubricating oil.
In one embodiment, the agitator blocks 623 are arranged in an elongated configuration and radially along the piston tube 606.
The working principle and the beneficial technical effects of the technical scheme are as follows: through the stirring piece 623 that sets up elongated structure, the homoenergetic drives when stirring rod 621 rotates or slides and stirs the piece 623 and effectively mix lubricating oil to the practicality of device has been promoted.
In one embodiment, the side of the conveying module 2 is provided with a seasoning assembly 7, as shown in fig. 5 and 6, the seasoning assembly 7 comprises:
an observation plate 701 is arranged on the side part of the transmission module 2, the observation plate 701 is vertically arranged and fixedly connected with the workbench 1, and the observation plate 701 is made of transparent resin;
an exhaust motor 702 is fixedly arranged on one side, close to the conveying module 2, of the observation plate 701, an output shaft of the exhaust motor 702 is perpendicular to the observation plate 701, a fifth connecting rod 703 is fixedly arranged on the output shaft of the exhaust motor 702, the fifth connecting rod 703 is arranged to be an L-shaped structure, and a first gear 704 is rotatably arranged at the end, far away from the exhaust motor 702, of the L-shaped structure;
a rotating main shaft 705, wherein the side of the exhaust motor 702, which is far away from the observation plate 701, is provided with the rotating main shaft 705, the axis of the rotating main shaft 705 coincides with the output shaft of the exhaust motor 702, the rotating main shaft 705 is rotatably provided with a first sleeve 706, and the first sleeve 706 is fixedly connected with the observation plate 701 through a rod;
a gear ring 707, wherein the rotating main shaft 705 is coaxially and fixedly provided with the gear ring 707, the first gear 704 is internally meshed with the gear ring 707, and the rotating main shaft 705 is also fixedly provided with an exhaust fan 708;
a sixth connecting rod 709, the first gear 704 is fixedly provided with a sixth connecting rod 709, the sixth connecting rod 709 is fixedly connected with the side wall of the first gear 704 close to the exhaust fan 708, the sixth connecting rod 709 is parallel to the observation plate 701, and a third notch 710 is formed in the length direction of one end of the sixth connecting rod 709 away from the fifth connecting rod 703;
a fifth convex column 711, wherein a fifth convex column 711 is rotatably disposed on the observation plate 701, the fifth convex column 711 is perpendicular to the observation plate 701, a driving slider 712 is fixedly disposed on the fifth convex column 711, and the driving slider 712 is configured in a rectangular structure and is slidably disposed in the third notch 710;
a scraper 713 is fixedly arranged on the fifth boss 711, and one end of the scraper 713 is abutted with the observation plate 701.
The working principle and the beneficial technical effects of the technical scheme are as follows: the silicon wafer is just cleaned in the process of inserting the silicon wafer, so that water drops are inevitably present on the surface of the silicon wafer, at this time, the air drying component 7 is air-dried, the air exhaust motor 702 is started to drive the fifth connecting rod 703 to rotate, the fifth connecting rod 703 drives the first gear 704 to revolve when rotating, and the first gear 704 is limited by the sixth connecting rod 709 to not rotate, so that the first gear 704 drives the gear ring 707 to rotate when revolving, and further drives the rotating main shaft 705 and the exhaust fan 708 to rotate, thereby air-drying the water drops on the surface of the silicon wafer in the wafer basket.
In one embodiment, a plurality of guiding holes 714 are disposed around the exhaust motor 702 on the observation plate 701.
The working principle and the beneficial technical effects of the technical scheme are as follows: through setting up water conservancy diversion hole 714 for the air current flows more unobstructed, thereby promotes exhaust fan 708 to the air-dry effect of silicon chip, has promoted the practicality of device.
In one embodiment, the outer periphery of the exhaust motor 702 is covered with a protective cover 715.
The working principle and the beneficial technical effects of the technical scheme are as follows: the air exhaust motor 702 is protected by the protective cover 715, so that the phenomenon that water drops splash to the air exhaust motor 702 to influence the operation of the air exhaust motor 702 is avoided, and the practicability and the safety of the device are improved.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. The utility model provides a clamping jaw draws mechanism suitable for brilliant basket of different specifications which characterized in that includes: mounting panel (5), first connecting rod (51), actuating lever (52) and holding rod (53), mounting panel (5) level sets up, two first connecting rod (51) symmetry sets up on mounting panel (5) bottom surface, actuating lever (52) level sets up two between first connecting rod (51), and drive actuating lever (52) up-and-down motion through master cylinder (54) that sets up on mounting panel (5), actuating lever (52) both ends slide and are provided with driving sleeve (55), horizontal slip is provided with second connecting rod (56) on first connecting rod (51), the articulated third connecting rod (57) and fourth connecting rod (58) that are provided with are gone up in driving sleeve (55), third connecting rod (57) and fourth connecting rod (58) set up and articulate with first connecting rod (51) and second connecting rod (56) respectively along vertical direction symmetry, holding rod (53) with second connecting rod (56) fixed connection.
2. The clamping jaw extracting mechanism suitable for crystal baskets with different specifications as recited in claim 1, wherein a clamping block (59) is fixedly arranged at the lower end of the clamping rod (53), the clamping block (59) is arranged in a U-shaped structure, and the openings of the U-shaped structures of the two clamping blocks (59) are oppositely arranged.
3. A wafer inserting machine comprising a clamping jaw extracting mechanism suitable for different specifications of wafer baskets as claimed in any one of claims 1 to 2, and further comprising: workstation (1), transfer module (2), vertical slide bar (3) and horizontal slide bar (4), transfer module (2) level sets up on workstation (1), horizontal slide bar (4) level sets up just perpendicular to on workstation (1) transfer module (2) direction of motion, vertical slide bar (3) vertical setting is at transfer module (2) afterbody, and vertical slide bar (3) with horizontal slide bar (4) slip connecting rod, the clamping jaw draws the mechanism and slides the setting along vertical direction on vertical slide bar (3).
4. A machine as claimed in claim 3, wherein a lubricating assembly (6) is further arranged on the horizontal sliding bar (4), and the lubricating assembly (6) comprises:
the fixing plate (601), the fixing plate (601) is vertically arranged and fixedly arranged on the side wall of the horizontal sliding rod (4) far away from the vertical sliding rod (3);
a horizontal slide way (602), a horizontal slide way (602) is fixedly arranged on the side wall, close to the vertical slide bar (3), of the fixing plate (601), the horizontal slide way (602) is parallel to the horizontal slide bar (4), a first slide block (603) is arranged in the horizontal slide way (602) in a sliding manner along the length direction, a second slide block (604) is arranged below the horizontal slide way (602) in a sliding manner along the length direction, the first slide block (603) is fixedly connected with the second slide block (604), the vertical slide bar (3) can be abutted against the second slide block (604) when sliding, a first spring (605) is arranged on one side, far away from the vertical slide bar (3), of the first slide block (603), and the axis of the first spring (605) is horizontally arranged;
a piston pipe (606) is arranged on one side of the horizontal slide way (602), the axis of the piston pipe (606) is parallel to the length direction of the horizontal slide way (602), a piston block (607) is arranged in the piston pipe (606) in a sliding manner, and the piston block (607) is fixedly connected with the first slide block (603) through a piston rod (608);
the piston tube (606) is provided with a first crank (609), the first crank (609) is vertically arranged and parallel to the fixing plate (601), the lower end of the first crank (609) is rotatably connected with the fixing plate (601) through a first convex column (610) perpendicular to the fixing plate (601), the upper end of the first crank (609) is provided with a second crank (611) in a hinged mode, and the other end of the second crank (611) is hinged to the first sliding block (603);
the upper end of the first crank (609) is rotatably provided with a first connecting block (612), and the first connecting block (612) is hinged with a third crank (613);
the fixing plate (601) is fixedly provided with a supporting block (614), the supporting block (614) is rotatably provided with a second convex column (615), the second convex column (615) is parallel to the axis of the piston tube (606), a fourth crank (616) is fixedly arranged on the second convex column (615), the fourth crank (616) is of a bending structure, one end, far away from the second convex column (615), of the fourth crank (616) is rotatably provided with a second connecting block (617), and the second connecting block (617) is hinged to the end of the third crank (613);
the swinging sleeve (618) is fixedly sleeved on the third crank (613), a fifth crank (619) is hinged to the lower end of the swinging sleeve (618), and a first notch (620) is formed in the lower end of the fifth crank (619) along the length direction;
the stirring rod (621) is coaxially inserted into one end, far away from the horizontal sliding way (602), of the piston pipe (606), the stirring rod (621) is connected with the piston pipe (606) in a rotating mode and can slide along an axis at the same time, a third convex column (622) is arranged at one end, far away from the piston pipe (606), of the stirring rod (621) in a rotating mode, the third convex column (622) is perpendicular to the stirring rod (621), the third convex column (622) penetrates through the first notch (620) and is connected with the fifth crank (619) in a sliding mode, and a stirring block (623) is fixedly arranged at one end, far away from the third convex column (622), of the stirring rod (621);
the connecting sleeve (624), a connecting sleeve (624) is sleeved on the stirring rod (621), the connecting sleeve (624) is connected with the stirring rod (621) in a rotating manner, a sixth crank (625) is fixedly connected to the connecting sleeve (624), the sixth crank (625) is set to be a U-shaped structure, an opening of the U-shaped structure is vertically and downwardly arranged, a third slider (626) is fixedly arranged at the other end of the sixth crank (625), the third slider (626) is connected with the outer wall of the piston tube (606) in a sliding manner along the length direction, a seventh crank (627) is fixedly arranged on the sixth crank (625), the seventh crank (627) is vertically arranged, a second notch (628) is formed in the seventh crank (627) along the length direction, a fourth convex column (629) is fixedly arranged on the first crank (609), and the fourth convex column (629) passes through the second notch (628) and is connected with the seventh crank (627) in a sliding manner;
a sealing plate (630) is arranged between the piston block (607) and the stirring block (623), the sealing plate (630) is fixedly connected with the inner wall of the piston pipe (606), and a diversion port is formed in the sealing plate (630);
lubricated shower nozzle (632), be provided with on piston pipe (606) outer wall with piston pipe (606) inside intercommunication lubricated shower nozzle (632), lubricated shower nozzle (632) vertical downward setting, and lubricated shower nozzle (632) interface is located between closing plate (630) and piston piece (607).
5. The machine of claim 4, wherein a sealing ring (633) is arranged at the joint of the end of the piston tube (606) and the stirring rod (621).
6. A wafer inserter according to claim 4, characterized in that the closing plate (630) is provided with a cover plate (634) on the side close to the piston block (607), and the cover plate (634) is hinged to the inner wall of the piston tube (606).
7. The wafer inserter according to claim 4, wherein the agitator blocks (623) are arranged in an elongated configuration and radially along the piston tube (606).
8. A film inserting machine as claimed in claim 3, characterized in that the conveying module (2) is laterally provided with a seasoning assembly (7), the seasoning assembly (7) comprising:
the observation plate (701) is arranged on the side part of the transmission module (2), the observation plate (701) is vertically arranged and fixedly connected with the workbench (1), and the observation plate (701) is made of transparent resin;
the air exhaust motor (702) is fixedly arranged on one side, close to the conveying module (2), of the observation plate (701), an output shaft of the air exhaust motor (702) is perpendicular to the observation plate (701), a fifth connecting rod (703) is fixedly arranged on the output shaft of the air exhaust motor (702), the fifth connecting rod (703) is arranged to be an L-shaped structure, and a first gear (704) is rotatably arranged at the end, far away from the air exhaust motor (702), of the L-shaped structure;
a rotating main shaft (705), wherein the rotating main shaft (705) is arranged on one side, away from the observation plate (701), of the exhaust motor (702), the axis of the rotating main shaft (705) is overlapped with the output shaft of the exhaust motor (702), a first sleeve (706) is rotatably arranged on the rotating main shaft (705), and the first sleeve (706) is fixedly connected with the observation plate (701) through a rod piece;
the gear ring (707) is fixedly arranged on the rotating main shaft (705) coaxially, the first gear (704) is meshed with the gear ring (707) internally, and an exhaust fan (708) is fixedly arranged on the rotating main shaft (705);
a sixth connecting rod (709), wherein the sixth connecting rod (709) is fixedly arranged on the first gear (704), the sixth connecting rod (709) is fixedly connected with the side wall, close to the exhaust fan (708), of the first gear (704), the sixth connecting rod (709) is parallel to the observation plate (701), and a third notch (710) is formed in one end, far away from the fifth connecting rod (703), of the sixth connecting rod (709) along the length direction;
the observation plate (701) is rotatably provided with a fifth convex column (711), the fifth convex column (711) is perpendicular to the observation plate (701), a driving sliding block (712) is fixedly arranged on the fifth convex column (711), and the driving sliding block (712) is of a rectangular structure and is arranged in the third notch (710) in a sliding manner;
a scraper (713) is fixedly arranged on the fifth convex column (711), and one end of the scraper (713) is abutted against the observation plate (701).
9. The wafer inserting machine according to claim 8, wherein a plurality of diversion holes (714) are arranged on the observation plate (701) around the exhaust motor (702).
10. A wafer inserting machine according to claim 8, characterized in that the peripheral cover of the air exhaust motor (702) is provided with a protective cover (715).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211050544.XA CN115440649B (en) | 2022-08-30 | 2022-08-30 | Clamping jaw extraction mechanism suitable for different specification crystal baskets and insert machine thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211050544.XA CN115440649B (en) | 2022-08-30 | 2022-08-30 | Clamping jaw extraction mechanism suitable for different specification crystal baskets and insert machine thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115440649A true CN115440649A (en) | 2022-12-06 |
| CN115440649B CN115440649B (en) | 2023-06-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211050544.XA Active CN115440649B (en) | 2022-08-30 | 2022-08-30 | Clamping jaw extraction mechanism suitable for different specification crystal baskets and insert machine thereof |
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| Country | Link |
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| CN (1) | CN115440649B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6299228B1 (en) * | 1999-02-02 | 2001-10-09 | Samsung Electronics Co., Ltd. | Gripper apparatus for robots |
| CN207398102U (en) * | 2017-08-15 | 2018-05-22 | 天津创昱达科技有限公司 | A kind of empty full basket switchgear of the silicon chip with double end manipulator |
| CN208147876U (en) * | 2018-05-18 | 2018-11-27 | 瑞智(青岛)精密机电有限公司 | Clip claw mechanism is used in a kind of clamping of compressor components |
| CN108987329A (en) * | 2018-07-14 | 2018-12-11 | 安徽工程大学 | A kind of flake semiconductor device clamp device |
| CN210150590U (en) * | 2019-06-25 | 2020-03-17 | 成都海成远创科技有限公司 | Clamp capable of clamping graphite with various specifications |
-
2022
- 2022-08-30 CN CN202211050544.XA patent/CN115440649B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6299228B1 (en) * | 1999-02-02 | 2001-10-09 | Samsung Electronics Co., Ltd. | Gripper apparatus for robots |
| CN207398102U (en) * | 2017-08-15 | 2018-05-22 | 天津创昱达科技有限公司 | A kind of empty full basket switchgear of the silicon chip with double end manipulator |
| CN208147876U (en) * | 2018-05-18 | 2018-11-27 | 瑞智(青岛)精密机电有限公司 | Clip claw mechanism is used in a kind of clamping of compressor components |
| CN108987329A (en) * | 2018-07-14 | 2018-12-11 | 安徽工程大学 | A kind of flake semiconductor device clamp device |
| CN210150590U (en) * | 2019-06-25 | 2020-03-17 | 成都海成远创科技有限公司 | Clamp capable of clamping graphite with various specifications |
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| Publication number | Publication date |
|---|---|
| CN115440649B (en) | 2023-06-13 |
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