CN211111717U - Cutting and splitting system for laser precision processing glass - Google Patents

Cutting and splitting system for laser precision processing glass Download PDF

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Publication number
CN211111717U
CN211111717U CN201921852412.2U CN201921852412U CN211111717U CN 211111717 U CN211111717 U CN 211111717U CN 201921852412 U CN201921852412 U CN 201921852412U CN 211111717 U CN211111717 U CN 211111717U
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laser
cutting
gun
glass
oil injection
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魏剑维
高晓斌
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Nanjing Yingyang Photonics Technology Co ltd
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Nanjing Yingyang Photonics Technology Co ltd
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Abstract

The utility model relates to a cutting lobe of a leaf system of laser precision finishing glass, the system includes board and controller, set up laser instrument cutting component, little rifle of oiling and CCD positioner that link to each other with the controller on the board. The laser cutting assembly comprises an ultrafast laser and a cutting head, the oil injection micro-gun comprises an oil inlet pipe, a heating pipe, a heat preservation layer, a temperature measuring point and a micro-gun head, the CCD positioning devices are multiple and are arranged beside the cutting head and the oil injection micro-gun in a one-to-one correspondence mode, the controller controls the laser cutting assembly to cut the glass material and the oil injection micro-gun to inject oil with the temperature difference of 80-200 ℃ with the glass material along a laser cutting path, and therefore splitting of the glass material is achieved. The CCD positioning device monitors the positions of the cutting head and the oil injection micro-gun at any time. The utility model discloses the lobe of a leaf is with low costs, the time is short, easily control, and the lobe of a leaf is effectual, and good lubricity, powder settleability and the washing nature of oil can have fine guard action to the incision in the lobe of a leaf.

Description

Cutting and splitting system for laser precision processing glass
Technical Field
The utility model relates to a laser cutting processing field especially relates to a cutting lobe of a leaf system of laser precision finishing glass.
Background
The laser cutting glass has the obvious advantages of high processing speed, high precision, simple parameter setting and the like, and becomes a choice for large-batch processing. Since the laser is a non-contact tool, there are no wear problems, thus ensuring a continuous, uniform cut thickness and edge quality. Authoritative measurements showed that the average roughness (Ra) was less than 0.5 μm. Because of the excellent edge quality and natural tempering effect, the laser cut edge strength is very high, which is improved by about 30% compared to a sample that is ground after machining. Laser cutting avoids side cracks, not only is the impact strength of the edge enhanced, but the strength of the whole assembly can be generally improved by 80%, thereby obviously improving the damage resistance of the part. The increased strength of the material reduces the likelihood of damage and loss, as well as reducing the problem of premature field failure due to potential product defects. This is a great advantage for product design, where the designer can not only use lighter, thinner materials, but also does not affect the product lifetime.
In the microelectronics industry, the precision and efficiency of optical glass manufacturing and processing are also continuously improved. The problem that laser cutting processing exists at present is that because the kerf between a small-size glass plate and a large-size optical glass body after laser cutting is only about five microns, the acting force between sheets is large, the sheets cannot fall off freely, and the sheets can be separated by a certain external force. Therefore, the chinese patent application No. 201810992630.X provides a splitting process for laser optical glass cutting, but the splitting step is relatively complicated.
When the intensity of the laser pulse is higher than the damage threshold of the transparent glass material, the laser Filamentation generates a high aspect ratio damage channel with the order of tens of microns in the glass, and a specific fracture geometric track in the glass material can be realized by controlling the relative position of a light beam and a sample, finally the final sample cutting is realized by the way that a cutting part falls off from the substrate or cracks are assisted, the novelty of the laser Filamentation cutting attracts the great attention of the market, and the advantages of high cutting speed, little chip generation and high sample edge intensity are obvious, however, the sample which is difficult to cut by the laser Filamentation cutting often has the phenomenon of successfully separating from the substrate, and the external force needs to be applied to separate,
the stripping force after laser filamentation cutting is generally cracked by using a CO2 laser along a cutting path (cutting track) auxiliary heating mode, and a carbon dioxide laser has a complex structure and huge maintenance cost, so that not only is the front mirror and the tail mirror expensive, but also the service life of a turbine bearing is only 8000 hours, and the replacement cost reaches 8 ten thousand yuan per pair. In addition, the carbon dioxide laser cutting machine not only generates gas consumption during processing, but also has the photoelectric conversion rate of only 8-10%. Secondly, the carbon dioxide laser has a large beam divergence and is not suitable for large-scale processing.
The Chinese patent application CN201711393518 optimizes the path of carbon dioxide laser cutting splinters, and is hopeful to avoid the cracking of products to be cut caused by cutting and improve the yield of finished products.
The technology explores and optimizes the splitting process after the glass is cut by the laser, but the problems of complicated steps, high cost, difficult control and the like still exist.
SUMMERY OF THE UTILITY MODEL
In order to simplify the lobe of a leaf technology behind the laser cutting glass, reduce the cost of lobe of a leaf, further improve the finished product yield, the utility model provides a cutting lobe of a leaf method of laser precision finishing glass, the method includes:
cutting: cutting the glass material by laser according to a cutting path, and cutting to a depth more than 1/2 of the thickness of the glass;
splitting: injecting oil with the temperature difference of 80-200 ℃ with the glass material along the cutting path, and realizing the splitting of the glass material due to the temperature difference inside and outside the notch.
Further, the oil is one or a mixture of more of kerosene, engine oil, diesel oil, vegetable oil and silicone oil.
Further, a cold treatment step is also included between the cutting step and the splitting step: and integrally cooling the glass material subjected to laser cutting by using a cooling gas nozzle.
Further, a cooling and cleaning step is also included after the splitting step: and putting the whole glass material into cold water, and cleaning the cracked finished product to remove residual oil.
Further, the cutting step is to perform wire forming cutting on the glass material according to a cutting path by using an ultrafast laser based wire forming process.
The cutting step can also be cutting the glass material with an ultrafast laser through a multi-focus focusing system in a cutting path.
Or the cutting step is to cut by a Bessel beam formed by a cutting head by a Gaussian beam emitted by an ultrafast laser.
And further, the glass material is a glass substrate which is produced by an overflow melting method and naturally sags in the longitudinal direction, is cut by horizontal laser emitted by an ultrafast laser, and is subjected to low-temperature oil injection along a cutting path through a micro oil injection gun head which forms an included angle of 45 ℃ with the glass substrate in two directions and is tightly attached to the glass, so that the glass is cracked, and a cut finished product is obtained.
Or the glass material is a horizontally placed glass substrate, is subjected to laser cutting along a cutting path by an ultrafast laser, and is subjected to high-temperature oil injection from top to bottom along the cutting path by an oil injection micro-gun head to realize splitting, so that a cut finished product is obtained.
The utility model also provides a cutting lobe of a leaf system of realizing above-mentioned method, the system includes board and controller, sets up the laser instrument cutting subassembly and the little rifle of oiling that links to each other with the controller on the board, the little rifle of oiling is including advancing oil pipe, heating pipe, heat preservation, temperature measurement point and little rifle head.
Further, the system comprises a machine table and a controller, wherein the machine table is provided with a laser cutting assembly, an oil injection micro-gun and a CCD positioning device which are connected with the controller.
Furthermore, the laser cutting assembly comprises an ultrafast laser and a cutting head, the oil injection micro-gun comprises an oil inlet pipe, a heating pipe, a heat preservation layer, a temperature measuring point and a micro-gun head, the CCD positioning devices are multiple and are arranged beside the cutting head and the oil injection micro-gun in a one-to-one correspondence mode, the controller controls the laser cutting assembly to cut the glass material and the oil injection micro-gun to inject oil with the temperature difference of 80-200 ℃ with the glass material along a laser cut path, splitting of the glass material is achieved, and the CCD positioning device monitors the positions of the cutting head and the oil injection micro-gun at any time.
Or the laser cutting assembly comprises an ultrafast laser, a multi-focus light condensing system, an optical focusing focal depth adjusting system and a cutting head, the CCD positioning devices are multiple and are arranged beside the cutting head and the oil injection micro-gun in a one-to-one correspondence mode, and the controller controls the laser cutting assembly to cut the glass material and controls the oil injection micro-gun to inject oil along a laser cut path to achieve glass material splitting.
Furthermore, the laser cutting assembly also comprises a multi-focus light condensing system, an optical focusing focal depth adjusting system, an X/Y axis combined moving platform, a Z axis moving platform, and a glass adsorption platform fixed on the X/Y axis combined moving platform, wherein the glass adsorption platform can move along the X/Y axis on the X/Y axis combined moving platform; a Z-axis moving platform is arranged above the X/Y-axis combined moving platform, a fixed plate is arranged on the Z-axis moving platform, and the fixed plate can move on the Z-axis moving platform along the Z axis; the fixed plate is provided with an ultrafast laser and a multi-focus light condensing system, the multi-focus light condensing system focuses laser emitted by the ultrafast laser and then emits the focused laser to the glass adsorption platform through the cutting head, and the ultrafast laser is connected to the controller.
Further, the system also comprises a gas nozzle which cools the whole glass material after laser cutting and before oil injection cracking and is connected with the controller.
Furthermore, the oil injection micro-gun is arranged in a two-way mode by taking a longitudinal vertical plane as a symmetrical plane, one oil injection micro-gun is arranged on each side, and the included angle between each oil injection micro-gun and the symmetrical plane is 45 degrees.
Further, the system also comprises a cleaning water pool of the glass material.
Further, the ultrafast laser is a picosecond or femtosecond laser, and a Gaussian beam emitted by the ultrafast laser is shaped into a Bessel beam by a cutting head.
Further, the operating wavelength of the picosecond laser is 1030-, 1950nm, 532-, 545nm or 266-, 355 nm.
Furthermore, the working wavelength of the femtosecond laser is 780-1560nm, 513-535nm or 259-345 nm.
Further, the working pulse width of the picosecond laser is 1-500ps, and the working pulse width of the femtosecond laser is 100-900 fs.
The beneficial effects of the utility model reside in that:
1. the utility model discloses the lobe of a leaf method is through pouring into in the route after along laser cutting with the oil of the material difference in temperature 80-150 ℃ that cuts, forms very big difference in temperature with the periphery in the cutting route, and this kind of difference in temperature will cut glass and basement fracture like sharp steel sword, realizes the smooth lobe of a leaf after the laser cutting.
2. The utility model discloses carry out the on-the-spot cutting to the glass substrate of the vertical natural flagging motion of overflow melting method just production, utilize the high temperature of glass substrate itself in the production process, two-way injection low temperature oil in the cutting route has realized the cutting lobe of glass substrate and has washd on the route of production transportation, obtains required finished product smoothly. Compared with the traditional method of cutting the split pieces after cooling and transporting, the method saves time, labor and working procedures. And is beneficial to the integration of production and processing industries.
3. The utility model discloses cutting lobe of a leaf system, lobe of a leaf are with low costs, the time is short, easily control, with the edge of lobe of a leaf glass edge slight crack limit, collapse limit or collapse defect factors such as angle reduce to minimum, the lobe of a leaf is effectual, and good lubricity, powder settleability and the washing nature of oil can have fine guard action to the incision in the lobe of a leaf.
4. Kerosene becomes the first choice of the utility model with its excellent wettability and high temperature safety, and has excellent splinter effect.
5. The utility model discloses the cutting lobe of a leaf system is to the lobe of a leaf after the filamentation cutting of ultrafast laser, the cutting of multifocal condensing system and the cutting of bezier beam degree of depth, and the effect is excellent.
6. The utility model discloses the lobe of a leaf system can realize the lobe of a leaf after the cutting of any orbit of laser.
Description of the drawings:
FIG. 1 is a schematic view of a cutting and splitting system of the present invention cutting a horizontally disposed glass material into pieces;
FIG. 2 is a schematic diagram of the cutting and breaking system of the present invention cutting and breaking a glass substrate in vertical motion;
fig. 3 is a schematic view of the structure of the oil injection micro-gun of the present invention.
Wherein: 1-a glass adsorption platform; 2-a glass substrate; 3-a laser; 4-a mirror; 5-a cutting head; 6-oil injection micro gun; 7-molten glass; 8-overflow bricks; 9-a cold water tank; 10-a conveyor belt; 11-oiling the micro gun head; 12-temperature measuring point; 13-a flange; 14-a sewage draining outlet; 15-heating the tube; 16-a baffle; 17-an insulating layer; 18-oil inlet pipe.
Detailed Description
The principles of the present invention will be explained in more detail below with reference to the drawings and the detailed description, and any person skilled in the art to which the present invention pertains can make various changes and modifications to the present invention according to the technology taught by the present invention after understanding the preferred embodiments of the present invention, and these changes and modifications do not depart from the spirit and scope of the present invention.
The first embodiment is as follows:
referring to fig. 1 and 3, the cutting and splitting system for laser precision machining of glass of the present invention includes a machine table and a controller (not shown), the machine table is provided with a laser cutting assembly, an oil injection micro-gun 6, a CCD positioning device and a horizontal glass adsorption platform 1 for bearing a glass substrate 2, the glass substrate 2 to be precision machined is laid on the glass adsorption platform 1, and the glass adsorption platform 1 can move along the X/Y axis on the X/Y axis combined moving platform; a Z-axis moving platform is arranged above the X/Y-axis combined moving platform, a fixed plate is arranged on the Z-axis moving platform, and the fixed plate can move on the Z-axis moving platform along the Z axis; the fixed plate is provided with an ultrafast laser 3 and a multi-focus light condensing system, the multi-focus light condensing system focuses laser emitted by the ultrafast laser 3 and then emits the focused laser to the glass adsorption platform 1 through a cutting head 5, the ultrafast laser 3 is a picosecond laser with the wavelength of 1030nm, the working pulse width is 500ps, and the ultrafast laser 3 is connected to a controller.
The oil injection micro-gun comprises an oil inlet pipe 18, a heating pipe 15, a heat insulation layer 17, a temperature measuring point 12 and an oil injection micro-gun head 11, a plurality of CCD positioning devices are arranged beside a cutting head and the oil injection micro-gun in a one-to-one correspondence mode, a controller controls a laser cutting assembly to cut a glass substrate, then the oil injection micro-gun 6 is controlled to inject kerosene with the temperature of 150 ℃ to the glass substrate from top to bottom along a laser cutting path, the step of injecting the kerosene along the cut path can be repeated, smooth splitting after the glass substrate is cut by laser is achieved, and the CCD positioning devices monitor the positions of the cutting head and the oil injection micro-gun constantly.
And pushing the whole split glass substrate into a cold water tank 9 beside the platform for cleaning to obtain a finished product after cutting and splitting.
Example two:
the method is basically the same as the first embodiment, except that the ultrafast laser 3 is a femtosecond laser with a wavelength of 535nm and a working pulse width of 900fs, after the controller controls the laser cutting assembly to cut the glass substrate based on the ultrafast laser filamentation process, the gas nozzle connected with the controller performs integral cooling treatment on the glass substrate, then the oil injection micro-gun 6 is controlled to inject silicone oil with a temperature of 100 ℃ from top to bottom to the glass substrate along the laser cutting path, and the step of injecting the silicone oil along the cut path can be repeated to realize the splintering of the glass substrate after laser cutting.
Example three:
the difference from the second embodiment is that the ultrafast laser is a 1560nm femtosecond laser, the working pulse width is 100fs, and the cutting is performed after the gaussian beam emitted by the ultrafast laser is shaped into a Bessel beam by a cutting head. After the controller controls the laser cutting assembly to cut the glass substrate, the controller controls the oil injection micro-gun 6 to inject the engine oil with the temperature of 220 ℃ from top to bottom to the glass substrate along the laser cutting path, and the step of injecting the engine oil along the cut path can be repeated so as to realize the splitting of the glass substrate after laser cutting.
Example four:
the difference is that the ultrafast laser is a 345nm femtosecond laser with a working pulse width of 600fs, and the ultrafast laser cuts the glass material after being focused by a multi-focus focusing system. After the controller controls the laser cutting assembly to cut the glass substrate, the controller controls the oil injection micro-gun 6 to inject the vegetable oil with the temperature of 120 ℃ from top to bottom to the glass substrate along the laser cutting path, and the step of injecting the vegetable oil along the cut path can be repeated so as to realize the splitting of the glass substrate after laser cutting.
Example five:
the difference from the second embodiment is that the ultrafast laser is a 545nm picosecond laser, the operating pulse width is 300ps, and the cutting is performed after the gaussian beam emitted by the ultrafast laser is shaped into a Bessel beam by a cutting head. After the controller controls the laser cutting assembly to cut the glass substrate, the controller controls the oil injection micro-gun 6 to inject the diesel oil with the temperature of 136 ℃ from top to bottom to the glass substrate along the laser cutting path, and the step of injecting the diesel oil along the cut path can be repeated so as to realize the splitting of the glass substrate after laser cutting.
Example six:
referring to fig. 2 and 3, the cutting and splintering system for laser processing of glass substrate 2 of the present invention includes a machine table and a controller (not shown), a laser cutting assembly, two oil injection micro-guns 6, and a CCD positioning device are respectively connected to the controller, the glass substrate 2 is a glass substrate with vertical natural sagging motion produced by an overflow melting method (at this time, the temperature of the glass substrate is about 170 ℃), the two oil injection micro-guns 6 are arranged in two directions with the glass substrate 2 as a symmetry plane, and an included angle between the injection direction of each oil injection micro-gun and the glass substrate is 45 degrees. The laser cutting assembly is composed of an ultrafast laser and a cutting head, the ultrafast laser is a 266nm picosecond laser, the working pulse width is 50ps, and a Gaussian beam emitted by the ultrafast laser is shaped into a Bessel beam by the cutting head and then the glass substrate 2 is cut. Then, two oil injection micro-gun heads 6 which are symmetrically arranged on two sides of the glass substrate in a bidirectional mode are tightly attached to the glass along a cutting path at an included angle of 45 degrees and are used for injecting diesel oil at about 20 ℃ in a bidirectional mode, and then splitting is achieved.
And the glass substrate 2 after being cut and split falls into a cold water tank 9 on a lower conveying belt 10 for cleaning, and a cut finished product is obtained.
Example seven:
basically the same as the sixth embodiment, except that the ultrafast laser 3 is a picosecond laser with a wavelength of 1950nm, the working pulse width is 1ps, after the controller controls the laser cutting assembly to perform filamentation cutting on the glass substrate, the controller controls the two-way oiling micro-gun 6 to inject the mixed oil of 25 ℃ silicone oil, vegetable oil and engine oil into the glass substrate along the laser cutting path at an included angle of 45 degrees, so as to realize the splintering of the glass substrate after laser cutting.
Example eight:
the method is basically the same as the sixth embodiment, except that the ultrafast laser is a 780nm femtosecond laser, the working pulse width is 240fs, light beams emitted by the ultrafast laser are emitted from a cutting head to a glass substrate to be cut after passing through a multi-focus light condensing system to be cut, and then the controller controls the bidirectional oil injection micro-gun 6 to inject mixed oil of 10 ℃ kerosene and engine oil to the glass substrate in a bidirectional mode along a laser cutting path at an included angle of 45 degrees so as to achieve glass substrate splitting after laser cutting.

Claims (10)

1. The cutting and splitting system for precisely processing glass by laser is characterized by comprising a machine table and a controller, wherein the machine table is provided with a laser cutting assembly, an oil injection micro-gun and a CCD (charge coupled device) positioning device which are connected with the controller.
2. The system for cutting glass fragments according to claim 1, wherein the laser cutting assembly comprises an ultrafast laser and a cutting head, the oil injection micro-gun comprises an oil inlet pipe, a heating pipe, a heat insulation layer, a temperature measuring point and a micro-gun head, a plurality of CCD positioning devices are arranged beside the cutting head and the oil injection micro-gun in a one-to-one correspondence manner, the controller controls the laser cutting assembly to cut the glass materials and the oil injection micro-gun to inject oil with a temperature difference of 80-200 ℃ with the glass materials along a laser cut path, so that the glass material fragments are realized, and the CCD positioning device constantly monitors the positions of the cutting head and the oil injection micro-gun.
3. The cutting splinter system of claim 1 or 2 wherein the laser cutting assembly further comprises a multi-focus light focusing system, an optical focusing focal depth adjusting system, an X/Y axis combined moving platform, a Z axis moving platform, a glass adsorption platform fixed on the X/Y axis combined moving platform, the glass adsorption platform can move along the X/Y axis on the X/Y axis combined moving platform; a Z-axis moving platform is arranged above the X/Y-axis combined moving platform, a fixed plate is arranged on the Z-axis moving platform, and the fixed plate can move on the Z-axis moving platform along the Z axis; the fixed plate is provided with an ultrafast laser and a multi-focus light condensing system, the multi-focus light condensing system focuses laser emitted by the ultrafast laser and then emits the focused laser to the glass adsorption platform through the cutting head, and the ultrafast laser is connected to the controller.
4. The cutting and breaking system of claim 1, further comprising a gas jet connected to the controller for cooling the bulk of the glass material after laser cutting and before oil injection breaking.
5. The cutting splinter system of claim 1 wherein the oil injection micro-guns are positioned bi-directionally with the longitudinal vertical plane as the plane of symmetry, one on each side, and each oil injection micro-gun makes an angle of 45 degrees with the plane of symmetry.
6. The cutting and splinting system of claim 1 further comprising a cleaning reservoir of glass material.
7. The cutting and splitting system of claim 1, wherein the laser of the laser cutting assembly is an ultrafast laser, the ultrafast laser is a picosecond or femtosecond laser, and a gaussian beam emitted from the ultrafast laser is shaped into a Bessel beam by the cutting head.
8. The cutting and splitting system as set forth in claim 7, wherein the picosecond laser has an operating wavelength of 1030-, 1950-, 532-, 545-or 266-, 355 nm.
9. The cutting and splitting system as claimed in claim 7, wherein the operating wavelength of the femtosecond laser is 780-1560nm, 513-535nm or 259-345 nm.
10. The cutting and splitting system as claimed in claim 7, wherein the picosecond laser has an operating pulse width of 1-500ps and the femtosecond laser has an operating pulse width of 100-900 fs.
CN201921852412.2U 2019-10-31 2019-10-31 Cutting and splitting system for laser precision processing glass Active CN211111717U (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112372151A (en) * 2020-10-29 2021-02-19 大昶(重庆)电子科技有限公司 Laser cutting equipment for glass and production process thereof
CN114309987A (en) * 2022-01-13 2022-04-12 武汉华工激光工程有限责任公司 Laser cutting method and device for display panel
CN114643426A (en) * 2021-12-27 2022-06-21 无锡超通智能制造技术研究院有限公司 Device and method for improving quality and efficiency of high-boron silicon glass laser cutting splinters

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112372151A (en) * 2020-10-29 2021-02-19 大昶(重庆)电子科技有限公司 Laser cutting equipment for glass and production process thereof
CN114643426A (en) * 2021-12-27 2022-06-21 无锡超通智能制造技术研究院有限公司 Device and method for improving quality and efficiency of high-boron silicon glass laser cutting splinters
CN114643426B (en) * 2021-12-27 2023-11-03 无锡超通智能制造技术研究院有限公司 Device and method for improving quality and efficiency of laser cutting splitting of borosilicate glass
CN114309987A (en) * 2022-01-13 2022-04-12 武汉华工激光工程有限责任公司 Laser cutting method and device for display panel

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