CN211014400U - Probe card for combined material sensor chip - Google Patents

Probe card for combined material sensor chip Download PDF

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Publication number
CN211014400U
CN211014400U CN201921722417.3U CN201921722417U CN211014400U CN 211014400 U CN211014400 U CN 211014400U CN 201921722417 U CN201921722417 U CN 201921722417U CN 211014400 U CN211014400 U CN 211014400U
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CN
China
Prior art keywords
base
apron
cover plate
sensor chip
mounting hole
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Active
Application number
CN201921722417.3U
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Chinese (zh)
Inventor
张海涛
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Tianjin Qiushan Instrument Technology Co ltd
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Tianjin Qiushan Instrument Technology Co ltd
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Priority to CN201921722417.3U priority Critical patent/CN211014400U/en
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Publication of CN211014400U publication Critical patent/CN211014400U/en
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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

The utility model provides a probe card for combined material sensor chip, includes base, apron, cooperation mounting hole, electrical connector mounting hole, bolt, electrical connector, probe, the base intermediate position is equipped with the recess, be equipped with the base through-hole on four angles of recess respectively, the base upside is equipped with the apron, the apron is equipped with the logical groove of equidimension with the position that the recess corresponds, it is equipped with the apron through-hole to lead to the position that corresponds with the recess all around, the quantity of apron through-hole is 100, install the probe in the apron through-hole, it is equipped with the cooperation mounting hole to correspond respectively on four angles of base and apron, realizes the fixed of base and apron through passing the bolt cooperation mounting hole, still be equipped with the electrical connector mounting hole on the apron between two cooperation mounting holes, the electrical connector passes through the bolt fastening on the apron. The utility model has the advantages that: the structure is simple, the sensor chip is convenient to take and place, and the sensor chip is firmly matched with the probe card.

Description

Probe card for combined material sensor chip
Technical Field
The present invention relates to a probe card, and more particularly to a probe card for a composite material sensor chip.
Background
The probe card is a kind of test interface, mainly test the bare Chip, through connecting tester and Chip, test the Chip parameter through the transmission signal, the semiconductor process technology has leaps forward in recent years, the products are taught to be light and thin and small at present, the IC volume is smaller and smaller, the function is stronger and stronger, the foot count is more and more, in order to reduce the area occupied by the Chip package and improve the IC efficiency, the Flip Chip type package at present is generally applied to drawing Chip, Chip group, memorizer and CPU, etc., the probe on the probe card is directly contacted with the welding pad or lug on the Chip, draw out the Chip signal, and then cooperate with peripheral test instrument and software control to achieve the goal of automatic measurement, the probe card is applied before the IC is packaged, can test with the probe to the bare Chip, screen out the defective products, then carry on the subsequent packaging engineering, therefore, probe cards are one of the important processes in IC manufacturing that significantly impact manufacturing costs.
The existing probe card finds that the sensor chip is inconvenient to take and place and the sensor chip is not firmly matched with the probe card in use.
Disclosure of Invention
In light of the above technical problems, the present invention provides a probe card for a composite material sensor chip, which comprises a base, a cover plate, a fitting mounting hole, an electrical connector mounting hole, a bolt, an electrical connector, and a probe, a groove is arranged at the middle position of the base, base through holes are respectively arranged at four corners of the groove, a cover plate is arranged on the upper side of the base, through grooves with the same size are arranged at the positions of the cover plate corresponding to the grooves, cover plate through holes are arranged at the positions, corresponding to the grooves, on the periphery of the through grooves, the number of the cover plate through holes is 100, probes are arranged in the through holes of the cover plate, matching mounting holes are respectively and correspondingly arranged on four corners of the base and the cover plate, the fixing of base and apron is realized through passing the bolt cooperation mounting hole, still be equipped with the electrical connector mounting hole on the apron between two cooperation mounting holes, the electrical connector passes through the bolt fastening on the apron.
Further, the depth of the groove is less than one fourth of the thickness of the base.
Further, the groove is a regular quadrangle.
Furthermore, four corners of the base and the cover plate are also provided with 45-degree chamfers.
The utility model has the advantages that: the utility model relates to a probe card for combined material sensor chip, recess in the middle of the base is used for placing and fix the sensor chip, and the recess has the through-hole all around for the sensor chip gets to put the convenience, corresponds with chip pin position in the middle of the apron has 100 through-holes to be used for installing the probe, and there are the through-hole at four angles of base and apron for the two is fixed and the cooperation. The utility model discloses simple structure, sensor chip get put the convenience, and sensor chip is firm with the cooperation of probe card.
Drawings
FIG. 1 is a view of the main structure of the present invention;
FIG. 2 is a schematic view of a base structure;
FIG. 3 is a schematic diagram of a base structure for mounting a sensor chip;
FIG. 4 is a schematic structural view of a cover plate;
FIG. 5 is a schematic view of a cover plate for mounting electrical connectors;
fig. 6 is an exploded view of the assembly of the present invention.
As shown in the figure, the sensor comprises a base-1, a groove-11, a base through hole-12, a cover plate-2, a cover plate through hole-21, a matching mounting hole-3, an electrical connector mounting hole-4, a bolt-5, an electrical connector-6, a sensor chip-7 and a probe-8.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings: the utility model relates to a probe card for combined material sensor chip, which comprises a base 1, a cover plate 2, a matching mounting hole 3, an electrical connector mounting hole 4, a bolt 5, an electrical connector 6 and a probe 8, wherein a groove 11 is arranged at the middle position of the base 1, base through holes 12 are respectively arranged at four corners of the groove 11, the cover plate 2 is arranged at the upper side of the base 1, through grooves with the same size are arranged at the positions of the cover plate 2 corresponding to the groove 11, cover plate through holes 21 are arranged at the positions around the through grooves corresponding to the groove 11, the number of the cover plate through holes 21 is 100, the probe 8 is arranged in the cover plate through holes 21, the matching mounting holes 3 are respectively arranged at the four corners of the base 1 and the cover plate 2, the fixing of the base 1 and the cover plate 2 is realized by passing the bolt 5 through the matching mounting hole 3, the electrical connector mounting hole 4 is also arranged between the two matching, the electrical connector 6 is fixed on the cover plate 2 by a bolt 5.
Furthermore, the depth of the groove 11 is less than one fourth of the thickness of the base 1, so that the inconvenient taking due to the over-deep depth is prevented.
Further, the groove 11 is a regular quadrangle to adapt to the size of the sensor chip 7 and facilitate installation.
Furthermore, four corners of the base 1 and the cover plate 2 are also provided with 45-degree chamfers, so that scratches on people and other parts are prevented.
The working principle is as follows: place sensor chip 7 in base 1's recess 11, there are cooperation mounting hole 3 at four angles of base 1 and apron 2, a fixing and cooperation for the two, it is fixed with base 1 with apron 2 through bolt 5, apron through-hole 21 is used for installing probe 8, probe 8 forms the electricity with sensor chip 7's pin contact and is connected, probe 8 passes through the wire and is connected with electrical connector 6, the probe card is whole to be connected through cable and external instrument formation electricity, recess 11 has base through-hole 12 all around, it is convenient to be used for sensor chip 7 to get and put, it is to notice: the sensor chip 7 is only for convenience of describing the structure of the probe card.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications can be made without departing from the principle of the present invention, and these modifications should also be regarded as the protection scope of the present invention.

Claims (4)

1. A probe card for a combined material sensor chip is characterized by comprising a base, a cover plate, a matching mounting hole, an electrical connector mounting hole, a bolt, an electrical connector and a probe, a groove is arranged at the middle position of the base, base through holes are respectively arranged at four corners of the groove, a cover plate is arranged on the upper side of the base, through grooves with the same size are arranged at the positions of the cover plate corresponding to the grooves, cover plate through holes are arranged at the positions, corresponding to the grooves, on the periphery of the through grooves, the number of the cover plate through holes is 100, probes are arranged in the through holes of the cover plate, matching mounting holes are respectively and correspondingly arranged on four corners of the base and the cover plate, the fixing of base and apron is realized through passing the bolt cooperation mounting hole, still be equipped with the electrical connector mounting hole on the apron between two cooperation mounting holes, the electrical connector passes through the bolt fastening on the apron.
2. The probe card for a unitized material sensor chip of claim 1, wherein said recess has a depth less than one quarter of the thickness of the base.
3. The probe card for a unitized material sensor chip according to claim 1, wherein said recess is a regular quadrilateral.
4. The probe card for a unitized material sensor chip according to claim 1, wherein said base and cover plate are further provided with 45 ° chamfers at four corners.
CN201921722417.3U 2019-10-15 2019-10-15 Probe card for combined material sensor chip Active CN211014400U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921722417.3U CN211014400U (en) 2019-10-15 2019-10-15 Probe card for combined material sensor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921722417.3U CN211014400U (en) 2019-10-15 2019-10-15 Probe card for combined material sensor chip

Publications (1)

Publication Number Publication Date
CN211014400U true CN211014400U (en) 2020-07-14

Family

ID=71476864

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921722417.3U Active CN211014400U (en) 2019-10-15 2019-10-15 Probe card for combined material sensor chip

Country Status (1)

Country Link
CN (1) CN211014400U (en)

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