CN217034053U - Test probe card - Google Patents

Abstract

The utility model provides a test probe card, wherein a square probe module of the test probe card is detachably connected with a circuit board, so that the test probe card is convenient to replace, the whole probe card does not need to be repaired when a probe is damaged, the maintenance period is shortened, and probe modules of different types can be replaced and used on the same circuit board, so that the resource of the circuit board is saved. Simultaneously with the connection change contact type connection of current lead welding formula, when changing the cubic probe module, need not steps such as wire removal, welding, reduce the damage risk, convenient and fast. In addition, the square probe module can be accurately positioned by the structural design, and the position deviation or rotation is avoided.

Description

Test probe card

Technical Field

The utility model relates to the field of semiconductor device testing, in particular to a test probe card.

Background

The probe card (probe card) is a connection interface between a chip to be tested and a testing machine in wafer test (wafer test), is mainly applied to electrical test of the chip on the wafer, tests the chip by connecting the testing machine and the chip and transmitting signals, and feeds back information of the chip test to a chip tester so as to screen out unqualified products. The probe card has the main working principle that a probe on the probe card is directly contacted with a welding spot (Pad), a Bump (Bump) or a Pin (Pin) on a chip, a chip signal is led out, and the probe card is matched with a testing machine to carry out automatic measurement.

As shown in fig. 1, the conventional probe card includes a circuit board 11 and a ceramic ring 10, a probe 14 is fixed at a lower end of the ceramic ring 10 through an epoxy resin 13, and then is electrically connected to the circuit board 11 through wire bonding, so as to transmit an electrical signal to a chip to be tested, however, this structure has many disadvantages, in an actual test, the probe 14 is usually bent and damaged, and the like, and since the probe 14 and the ceramic ring 10 are relatively fixed, it is difficult to detach and replace them individually, and it is difficult to ensure uniformity of the positions before and after detachment, and furthermore, the welded wire causes inconvenience in detachment and installation, and generally, the whole probe card can only be sent for repair after the probe is damaged, the maintenance cycle is long, and even the whole probe card is scrapped when the damage is serious, which causes great inconvenience and waste of resources.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a test probe card including:

the circuit board is internally provided with a square through hole, the inner wall of the square through hole is provided with a plurality of first contacts, and the first contacts are electrically connected with electronic devices on the circuit board through internal buried lines;

the square probe module is arranged in the square through hole and can be detached, the square probe module comprises a square supporting plate and a plurality of probes fixed below the square supporting plate, a plurality of second contacts corresponding to the first contacts are arranged on the side wall of the square supporting plate, and the second contacts are electrically connected with the probes.

Optionally, an inner convex ring is arranged at the lower end of the square through hole in the circuit board to bear the square support plate.

Optionally, the square support plate is connected with the inner collar by a screw.

Optionally, the second contact is electrically connected to the probe by an internal buried line.

Optionally, the second contact is electrically connected to the probe by a wire.

Optionally, the support plate is a ceramic plate.

Optionally, a reinforcing plate is fixed above the circuit board and the square support plate.

Optionally, a plurality of the probes are fixed below the square support plate through epoxy resin.

Optionally, the circuit board is a PCB board.

Optionally, a handle is fixed on the upper surface of the square support plate.

As described above, the present invention provides a probe card for testing, in which the four-sided probe modules are detachably connected to a circuit board, so that the probe card is easy to replace, the entire probe card does not need to be repaired when the probes are damaged, the maintenance cycle is reduced, and the probe modules of different types can be replaced and used on the same circuit board, thereby saving the resources of the circuit board. Simultaneously with the connection change contact type connection of current lead welding formula, when changing the cubic probe module, need not steps such as wire removal, welding, reduce the damage risk, convenient and fast. In addition, the square probe module can be accurately positioned by the structural design, and the position deviation or rotation is avoided.

Drawings

Fig. 1 is a schematic structural diagram of a test probe card in the prior art.

Fig. 2 is a schematic cross-sectional view illustrating a test probe card according to the present invention.

Fig. 3 is a schematic top view of a test probe card according to the present invention.

FIG. 4 is a schematic view showing the structure of the reinforcing plate of the present invention.

Description of the element reference numerals

10 ceramic ring

11 Circuit board

12 first contact

13 epoxy resin

14 Probe

15 inner convex ring

21 square support plate

22 second contact

23 screw

24 handle

31 reinforcing plate

Detailed Description

The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The utility model is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.

As in the detailed description of the embodiments of the present invention, the cross-sectional views illustrating the device structure are not partially enlarged in general scale for convenience of illustration, and the schematic views are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.

For convenience in description, spatial relational terms such as "below," "beneath," "below," "under," "over," "upper," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that these terms of spatial relationship are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the figures. Further, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. As used herein, "between … …" is meant to include both endpoints.

In the context of this application, a structure described as having a first feature "on" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed in between the first and second features, such that the first and second features may not be in direct contact.

It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of each component in actual implementation may be changed freely, and the layout of the components may be more complicated.

As shown in fig. 1, the present invention provides a test probe card including:

the circuit board 11 is internally provided with a square through hole, the inner wall of the square through hole is provided with a plurality of first contacts 12, and the first contacts 12 are electrically connected with electronic devices on the circuit board 11 through internal buried wires;

the square probe module is arranged in the square through hole and can be detached, the square probe module comprises a square supporting plate 21 and a plurality of probes 14 fixed below the square supporting plate 21, a plurality of second contacts 22 corresponding to the first contacts 12 are arranged on the side wall of the square supporting plate 21, and the second contacts 22 are electrically connected with the probes 14;

specifically, the probe 14 is electrically connected with the circuit board 11 through the first contact 12 and the second contact 22, so that transmission of test current is realized, the four-direction probe module is detachably connected with the circuit board 11, so that detachment and replacement are facilitated, and meanwhile, the contact connection does not need to be performed by disconnecting, welding and other steps during replacement, and is more convenient and faster. Meanwhile, the square probe module is installed in the square through hole of the circuit board 11, so that the square probe module can be well limited, and the position deviation or rotation of the square probe module is avoided, and the probe 14 below is ensured to accurately correspond to a pin of a chip to be detected. The circuit board 11 is typically a PCB board.

Further, the lower end of the square through hole in the circuit board 11 is provided with an inner collar 15 to bear the square support plate 21.

Further, the square support plate 21 is connected with the inner collar 15 through a screw 23, so that the square probe module is mounted in the square through hole.

Further, the second contact 22 is electrically connected to the probe 14 by an internal buried line.

Further, the second contact 22 is electrically connected to the probe 14 by a wire.

Specifically, the second contact 22 and the probe 14 may be connected in various ways, such as an internal buried wire connection or a direct wire connection, because the second contact 22 and the probe 14 are integrally removed and replaced, and the connection manner does not affect the removal and repair.

Further, the support plate 21 is a ceramic plate.

Further, a reinforcing plate 31 is fixed above the circuit board 11 and the square support plate 21.

Specifically, the stiffener plate 31 is used to improve rigidity and stability of the probe card.

Further, a plurality of the probes 14 are fixed below the square support plate 21 by epoxy resin 13.

Further, a handle 24 is fixed to the upper surface of the square support plate 21.

In summary, the utility model provides a probe card for testing, in which the four-sided probe modules are detachably connected to a circuit board, so that the probe card is convenient to replace, the whole probe card does not need to be repaired when the probes are damaged, the maintenance period is shortened, and the probe modules of different types can be replaced and used on the same circuit board, thereby saving the resources of the circuit board. Simultaneously with the connection change contact type connection of current lead welding formula, when changing the cubic probe module, need not steps such as taking out stitches, welding, reduce the damage risk, convenient and fast. In addition, the square probe module can be accurately positioned by the structural design, and the position deviation or rotation is avoided.

The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the utility model. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (10)

1. A test probe card, comprising:

the circuit board is internally provided with a square through hole, the inner wall of the square through hole is provided with a plurality of first contacts, and the first contacts are electrically connected with an electronic device on the circuit board through internal buried wires;

the square probe module is arranged in the square through hole and can be detached, the square probe module comprises a square supporting plate and a plurality of probes fixed below the square supporting plate, a plurality of second contacts corresponding to the first contacts are arranged on the side wall of the square supporting plate, and the second contacts are electrically connected with the probes.

2. The test probe card of claim 1, wherein the lower end of the square through hole in the circuit board is provided with an inner collar to bear the square support plate.

3. The test probe card of claim 2, wherein the square support plate is coupled to the inner collar by screws.

4. The test probe card of claim 1 wherein the second contacts are electrically connected to the probes by buried wires.

5. The test probe card of claim 1 wherein the second contacts are electrically connected to the probes by wires.

6. The test probe card of claim 1 wherein the support plate is a ceramic plate.

7. The test probe card of claim 1, wherein a stiffener is fixed above the circuit board and the square support plate.

8. The test probe card of claim 1, wherein a plurality of the probes are fixed under the quad supporting plate by epoxy.

9. The test probe card of claim 1 wherein the circuit board is a PCB board.

10. The test probe card of claim 1, wherein a handle is fixed to an upper surface of the square support plate.

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