CN210945859U - Multifunctional ingot furnace - Google Patents
Multifunctional ingot furnace Download PDFInfo
- Publication number
- CN210945859U CN210945859U CN201921125791.5U CN201921125791U CN210945859U CN 210945859 U CN210945859 U CN 210945859U CN 201921125791 U CN201921125791 U CN 201921125791U CN 210945859 U CN210945859 U CN 210945859U
- Authority
- CN
- China
- Prior art keywords
- ingot furnace
- multifunctional
- heater
- plate
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a multi-functional ingot furnace, include: a rectangular multifunctional ingot furnace; the quartz crucible is arranged in the ingot furnace; the thermal field structure is arranged on the quartz crucible and comprises heaters arranged above and on the side face of the quartz crucible, and a heat insulation plate is further arranged outside the thermal field structure. Compared with the prior art, the utility model, possess following beneficial effect: 1. the structure of the thermal field is as follows: the thermal fields of the polycrystalline furnaces in the prior art are square, and the thermal field of the silicon core ingot furnace of the multifunctional ingot furnace is rectangular; 2. the heating mode is as follows: the thermal field of the silicon core ingot furnace is used for heating 5 surfaces or 6 surfaces; 3. specification of the cast silicon ingot: the ingot casting furnace can cast 110 ingots, and has high yield and low cost.
Description
Technical Field
The utility model belongs to the technical field of thermal-insulated cage, a multi-functional ingot furnace is related to.
Background
The silicon core ingot furnace is necessary equipment in the process of converting polycrystalline silicon into polysilicon cores, and the polycrystalline silicon is a basic raw material in photovoltaic power generation and semiconductor industries. Polycrystalline silicon is one of the most important polycrystalline materials in the world as a key supporting material of the modern information society, and not only is the main functional material for developing computers and integrated circuits, but also the main functional material for photovoltaic power generation and solar energy utilization.
Today's society, demand for polycrystalline materials is also increasing. However, the silicon core ingot furnace in the prior art not only has a small number of prepared polysilicon ingots, but also has limited size of the prepared polysilicon ingots, and thus a long silicon core ingot furnace cannot be prepared.
To sum up, for solving current structural not enough, the utility model designs a rational in infrastructure, be fit for the silicon core or the polycrystalline silicon ingot of many specifications, excellent in use effect's multi-functional ingot furnace.
Disclosure of Invention
The utility model provides a multifunctional ingot furnace which has reasonable structure, is suitable for silicon cores or polysilicon ingots with various specifications and has good use effect.
The purpose of the utility model can be realized by the following technical proposal: a multifunctional ingot furnace comprises:
a rectangular multifunctional ingot furnace;
the quartz crucible is arranged in the ingot furnace;
the thermal field structure is arranged on the quartz crucible and comprises heaters arranged above and on the side face of the quartz crucible, and a heat insulation plate is further arranged outside the thermal field structure.
Preferably, multi-functional ingot furnace's outside is equipped with thermal-insulated cage structure, and thermal-insulated cage structure includes: an upper cage body and a lower cage body which have at least a double-layer structure,
the upper cage body is rectangular and comprises an inner angle plate I, an outer angle plate and pulling plates, the inner angle plate I is connected end to form an upper frame of the upper cage body, the outer angle plate I is connected end to form a lower frame of the lower cage, and the pulling plates are arranged between the inner angle plate I and the outer angle plate in parallel;
the lower cage body is rectangular, is arranged below the upper cage body and comprises pull plates and a second inner angle plate, the second inner angle plate is connected end to form a lower frame of the lower keel body, the lower frame is in contact with the ground, and the pull plates are arranged in parallel and are arranged between the outer angle plate and the second inner angle plate;
the pull plate comprises a supporting part and a connecting part, wherein the connecting part is symmetrically arranged at two ends of the supporting part, and an arc transition part is arranged between the supporting part and the connecting part.
Preferably, at least two parallel hanging plates are arranged in the width direction of the upper cage body, each hanging plate is U-shaped, and hanging blocks are arranged at two ends of each hanging plate.
Preferably, the heater comprises a top heater and a side heater, and the side heater is connected with the top heater through a plurality of connecting plates.
Preferably, the top heater comprises a first resistance heater and a second resistance heater, the first resistance heater and the second resistance heater are adjacently arranged, and the first resistance heater and the second resistance heater are both in a closed structure.
Compared with the prior art, the utility model discloses the structure sets up rationally, possesses following beneficial effect:
1. the structure of the thermal field is as follows: the thermal fields of the polycrystalline furnaces in the prior art are square, the thermal field of the silicon core ingot furnace of the multifunctional ingot furnace is rectangular, and the heat distribution is unique;
2. the heating mode is as follows: the heating surface of the polycrystalline furnace thermal field in the prior art is generally four-surface or five-surface heating (the top heating is increased), and the thermal field of the silicon core ingot furnace is 5-surface or 6-surface heating;
3. specification of the cast silicon ingot: the polycrystalline furnace in the prior art can only cast silicon ingots of one specification, the silicon core ingot furnace can cast silicon ingots of various specifications, if the silicon ingots are the same as those of the polycrystalline furnace, the silicon core ingot furnace can cast a plurality of ingots at one time, for example, the ingot can be cast into a thermal field ingot of G8 specification, the polycrystalline furnace can cast into a maximum ingot of 64 ingots, as shown in FIGS. 3 and 4, the silicon ingot furnace can cast 110 ingots, and has large yield and low cost;
4. the arrangement of the external heat insulation cage ensures that even a rectangular integral structure can bear certain deformation under the condition of high temperature, and the using effect is good;
5. the top heater and the side heater enable the silicon core ingot furnace to be heated uniformly, and the temperature gradient is easy to control.
Drawings
FIG. 1 is a schematic structural view of the multifunctional ingot furnace in the length direction;
FIG. 2 is a schematic structural view of the multifunctional ingot furnace in the width direction;
FIG. 3 is a distribution diagram of the ingot castable in the silicon ingot casting furnace of the multifunctional ingot casting furnace of the present invention;
FIG. 4 is a structural diagram of the multifunctional ingot furnace of the present invention;
FIG. 5 is a schematic perspective view of the heat insulation cage structure of the multi-functional ingot furnace of the present invention;
FIG. 6 is a main view of the heat insulation cage structure of the multi-functional ingot furnace of the present invention;
FIG. 7 is a top view of the multifunctional ingot furnace heat insulation cage structure of the present invention;
FIG. 8 is a partial enlarged view of portion A of the multifunctional ingot furnace heat insulation cage structure of the present invention;
FIG. 9 is a partial enlarged view of portion B of the multifunctional ingot furnace heat insulation cage structure of the present invention;
FIG. 10 is a schematic perspective view of a hanger plate in the heat insulation cage structure of the multi-functional ingot furnace of the present invention;
FIG. 11 is a schematic perspective view of a hanging block in the heat insulation cage structure of the multi-functional ingot furnace of the present invention;
fig. 12 is a schematic view of the three-dimensional structure of the pulling plate in the heat insulation cage structure of the multi-functional ingot furnace of the present invention.
FIG. 13 is a schematic perspective view of the heating structure of the multi-functional ingot furnace of the present invention;
FIG. 14 is a schematic structural view of the multifunctional ingot furnace heating structure of the present invention;
FIG. 15 is a left side view of the heating structure of the multi-functional ingot furnace of the present invention;
FIG. 16 is a bottom view of the multifunctional ingot furnace heating structure of the present invention;
Detailed Description
The technical solution of the present invention will be further explained with reference to the following embodiments and accompanying drawings.
Example 1
As shown in figure 1 of the drawings, in which,
this multi-functional ingot furnace 7 includes: the integral structure of the multifunctional ingot furnace is rectangular,
a quartz crucible 1, which is arranged in the ingot furnace,
the thermal field structure is arranged on the quartz crucible 1 and comprises heaters 2 arranged above and on the side face of the quartz crucible 1, and a heat insulation plate 9 is further arranged outside the thermal field structure.
The silicon core ingot furnace is necessary equipment in the process of converting polycrystalline silicon into polysilicon cores, and the polycrystalline silicon is a basic raw material in photovoltaic power generation and semiconductor industries. Polysilicon is one of the most important polycrystalline materials in the world as a key supporting material in the modern information society, and the demand for the polycrystalline materials is increasing. However, the silicon core ingot furnace in the prior art not only has a small number of prepared polysilicon ingots, but also has limited size of the prepared polysilicon ingots, and thus a long silicon core ingot furnace cannot be prepared.
Therefore the utility model designs a multi-functional ingot furnace, this multi-functional ingot furnace's overall structure is the rectangle, and concrete structure does, and quartz crucible 1 locates in the ingot furnace and quartz crucible 1 is surrounded by the thermal field structure, and the heating is even, and rectangular structure makes can install different quartz crucible according to the demand of reality moreover, prepares the silicon core or the polycrystalline silicon ingot 8 of many specifications for the ingot furnace is functional to be promoted. Graphite crucible 8 and quartz crucible 1
In the specific using process, before core ingot casting, a silicon material needs to be put into the quartz crucible 1, the silicon material in the quartz crucible 2 is melted by a heater in a thermal field, and then the melted silicon material in the quartz crucible 1 is directionally solidified through process control. Further, the size and number of the quartz crucibles 2 may be specifically set according to circumstances.
Specifically, the thermal field structure includes heaters provided above and at the side of the quartz crucible 1.
As shown in FIGS. 1-16, comparing the ingot furnace of the prior art, the utility model discloses a multi-functional ingot furnace is equipped with following beneficial effect:
1. the structure of the thermal field is as follows: the thermal fields of the polycrystalline furnaces in the prior art are square, the thermal field of the silicon core ingot furnace of the multifunctional ingot furnace is rectangular, and the heat distribution is unique;
2. the heating mode is as follows: the heating surface of the polycrystalline furnace thermal field in the prior art is generally four-surface or five-surface heating (the top heating is increased), and the thermal field of the silicon core ingot furnace is 5-surface or 6-surface heating;
3. specification of the cast silicon ingot: the polycrystalline furnace in the prior art can only cast silicon ingots with one specification, the silicon core ingot furnace can cast silicon ingots with various specifications, if the silicon ingots are the same as those of the polycrystalline furnace, the silicon core ingot furnace can cast a plurality of ingots at one time, for example, the silicon ingots are G8 specification thermal field ingot casting silicon ingots, the polycrystalline furnace can cast 64 ingots at most, as shown in fig. 3 and 4, the silicon ingot furnace can cast 110 ingots, the yield is high, and the cost is low.
Example 2
As shown in fig. 5 to 16, the embodiment 2 is different from the embodiment 1 only in that: the outside of multi-functional ingot furnace is equipped with thermal-insulated cage structure 4, and thermal-insulated cage structure includes: an upper cage 42 and a lower cage 43 having at least a double-layer structure,
the upper cage body 42 is rectangular and comprises a first inner angle plate 431, a second outer angle plate 433 and a pulling plate 44, wherein the inner angle plates are connected end to form an upper frame of the upper cage body 42, the outer angle plates 433 are connected end to form a lower frame of the lower cage, and the pulling plate 44 is arranged between the first inner angle plate 431 and the outer angle plates 433 in parallel;
the lower cage body 43 is rectangular, is arranged below the upper cage body, and comprises a pulling plate 44 and a second inner corner plate 432, the second inner corner plate 432 is connected end to form a lower frame of the lower keel 443, the lower frame is in contact with the ground, and the pulling plates 44 are arranged in parallel and are arranged between the outer corner plate 433 and the second inner corner plate 432;
the pulling plate 44 comprises a supporting portion 441 and a connecting portion 442, the connecting portion 442 is symmetrically disposed at two ends of the supporting portion 441, and an arc-shaped transition portion 4421 is disposed between the supporting portion 441 and the connecting portion 442.
Because the structure of modes such as welding of adopting prior art, at concrete working process, the phenomenon that thermal-insulated cage warp can take place among the evacuation high temperature and the repeated heating process, the utility model discloses an overall structure is the rectangle structure, and the ingot furnace of rectangle structure is big in the difference of length direction and width direction deflection and length direction deflection, and the structure of the thermal-insulated cage of prior art can't satisfy the demand, and further influence going on of production and the life of silicon core ingot furnace.
In the length direction, the number of the pulling plates 44 is nine; the number of the pulling plates 44 is two in the width direction, the upper cage body 42 and the lower cage body 43 are rectangular, and the arc transition portions 4421 are provided between the supporting portions 441 and the connecting portions 442 of the pulling plates 44, so that the deformation amounts in the length direction and the width direction are not the same when the temperature is high, and the arc transition portions 4421 of the pulling plates 44 are provided to enable the pulling plates to bear a certain deformation amount in the length direction, so that the upper cage body 42 and the lower cage body 43 are not deformed. The technology also has better bearing effect in the transportation process.
A first rib 443 is disposed in the vertical direction of the connecting portion 442. The first reinforcing rib 443 vertically arranged enables the overall strength of the pulling plate 44 to be improved, the structural stability of the upper cage body 42 and the lower cage body 43 is further improved, and the pulling plate is not prone to deformation and bears high temperature in the using process.
As a further improvement, at least two parallel hanging plates 45 are arranged in the width direction of the upper cage body 42, and the hanging plates are U-shaped and provided with hanging blocks 451 at two ends. The joint of the two inner corner plates 431 is provided with a fixing plate 46. The two ends of the hanging plate 45 are provided with a plurality of mounting holes, and the hanging plate 45 and the upper cage body 42 can be further fixed through screws.
As shown in fig. 5-13, the utility model discloses a multi-functional ingot furnace heat insulation cage makes the convenience to collude the adjustment that carries out adaptability to the hook position through hanging block 451 setting up structurally to conveniently make the center of heat insulation cage be located the perpendicular bisector of ingot furnace, guaranteed that the heat insulation cage can be under hoisting device's effect, fix a position fast and suspend in midair.
The fixing plates 46 are arranged on the upper cage body 42 and the lower cage body 43, as shown in fig. 1, the fixing plates are arranged at the joints of the inner corner plates 431 which are connected with each other and are respectively connected with the two inner corner plates 431, and the fixing plates 46, the inner corner plates 431 and the other inner corner plates 431 form an isosceles triangle structure at the corners of the rectangular cage body, so that the structure of the rectangular multifunctional ingot furnace heat insulation cage is stable.
As a further improvement, the lifting block 451 comprises a lifting part 4511 and connecting ends 4512, the lifting part 4511 is in an inverted U shape, and the connecting ends 4512 are symmetrically disposed at two ends of the lifting part 4511. A lifting hole 48 is formed in the center of the top surface of the lifting portion 4511, and an avoidance groove 4513 is formed at the end of the connecting end 4512. Wherein the lifting hole 48 is circular. Two reinforcing ribs 4514 are arranged at two ends of the top surface of the lifting part 4511 along the vertical frame direction.
The heat insulation cage of the utility model is rectangular and has a splicing structure, which is convenient to adjust, and moreover, the deformation of the rectangular heat insulation cage is controlled by the reinforcing ribs, so that the splicing type transportation is also convenient, and the transportation deformation is reduced; the welding device can be installed and adjusted on the use site, if a welding mode in the prior art is adopted, the processing difficulty is high, and once deformation cannot be corrected.
Two connecting ends 4512 of the hanging block 451 are provided with a plurality of through holes, and the avoidance groove 4513 is provided to avoid the mounting hole at the end of the hanging plate 45. The inverted U-shaped design of the circular lifting holes 448 and the lifting portions 4511 facilitates positioning and suspension during transportation and use.
Further, as shown in fig. 4 and 5, a right-angle vertically-arranged side frame strip 47 is arranged between the second internal angle plate 432 and the second internal angle plate 432, the side frame strip 47 is connected with the two intersected second internal angle plates 432, and the end of the side frame strip 47 is provided with a mounting hole 49, so that the three are fixedly connected through screws.
As shown in fig. 6, the connecting portion 442, which is an end portion of the pulling plate 44, is also provided with a mounting hole 49, and the pulling plate 44 and the inner gusset are fixed by a screw. Due to the arrangement of the arc-shaped transition portion 4421, the connecting portion 442 of the supporting portion 441 is fixed to the inner corner plate, the connecting portion 442 and the supporting portion 441 are not in the same plane, and the plane of the supporting portion 441 is closer to the inner portion of the cage body relative to the plane of the connecting portion 442, so that even if the integral structure is rectangular, the integral structure can bear certain deformation under the condition of high temperature, and the using effect is good.
In the embodiment, the multifunctional silicon core ingot furnace is arranged through an external heat insulation cage structure, and a novel heat insulation cage structure is adopted in the operation process of the silicon core ingot furnace, so that the operation can be simplified, the labor intensity and the cost are reduced, and the efficiency is improved; the deformation caused by different deformation in the length direction and the width direction can be effectively reduced, and the method is suitable for popularization and application.
Example 3
Example 3 differs from example 2 only in that:
as shown in fig. 14 to 16, the heater includes a top heater 52 and a side heater 53, and the side heater 53 is connected to the top heater 52 through a plurality of connecting plates 54, so that the quartz crucible can be uniformly temperature-controlled during high-temperature heating, the temperature gradient can be easily controlled, and the final silicon core yield is high.
As a further improvement, the top heater 52 includes a first resistance heater 521 and a second resistance heater 522, the first resistance heater 521 and the second resistance heater 522 are adjacently disposed, and the first resistance heater 521 and the second resistance heater 522 are both in a closed structure.
As a further improvement, the first resistance heater 521 includes a first portion 5211, a second portion 5212 and a third portion 5213, the first portion 5211 and the second portion are F-shaped, the first portion 5211 and the protruding portion of the second portion 212 are disposed opposite to each other, and the first portion 5211 and the second portion 5212 are communicated with each other. The second portion 5212 is formed by adjacently connecting a plurality of U-shaped structures, the third portion 5213 is rectangular, an inwardly concave arc-shaped section 52111 is arranged on one side far away from the first portion 211, and one side, close to the first portion 5211, of the third portion 5213 is communicated with the second portion 5212.
As a further improvement, the second resistance heater 522 includes a first resistance portion 5221, a second resistance portion 5222 and a third resistance portion 5223, and the third resistance portion 5223 is provided with a notch portion 5224.
As a further improvement, the first resistance heater 521 is further provided with a notch 5214.
More specifically, the first and second resistance heaters 521 and 522 are symmetrically disposed under the rectangular top plate 51.
Compared with the prior art, the structures and the distribution modes of the first resistance heater 521 and the second resistance heater 522 are uniformly distributed on the upper surface of the whole silicon core ingot furnace, so that the control of temperature gradient is facilitated, and the silicon core yield is effectively improved.
As a further improvement, the side heater 53 is formed by connecting a plurality of U-shaped structures.
Compared with the prior art, the multifunctional ingot furnace is provided with the resistance heaters respectively at the lower part and four side surfaces of the top plate 1, namely the top heater 52 and the side heater 53, so that the silicon core ingot furnace can be uniformly heated, and the temperature gradient is easy to control. Further more, the structure setting of side heater 53 and top heater 52 is even, and side heater 53 connects the constitution for a plurality of U type structure mutually, and top heater 53 structural symmetry just evenly arranges, and the structure of contrast prior art arranges, and in the heating process, the control by temperature change can be accurate and the heating is even for being heated of furnace body the inside is even.
To sum up, the utility model discloses a polycrystalline silicon bulk of multi-functional ingot furnace preparation is in large quantity, can prepare long size's silicon core ingot furnace, can install different quartz crucible according to the production requirement, prepares the silicon core or the polycrystalline silicon bulk of many specifications.
The preferred embodiments of the present invention are described herein, but the scope of the present invention is not limited thereto. Modifications or additions to or replacement by similar means to those skilled in the art to which the invention pertains to the specific embodiments described herein are intended to be covered by the scope of the invention.
Claims (5)
1. A multifunctional ingot furnace is characterized by comprising:
a rectangular multifunctional ingot furnace;
the quartz crucible (1) is arranged in the ingot furnace;
the thermal field structure is arranged on the quartz crucible (1), the thermal field structure comprises heaters (2) arranged above and on the side face of the quartz crucible (1), and a heat insulation plate (9) is further arranged outside the thermal field structure.
2. The multifunctional ingot furnace of claim 1, wherein a heat insulation cage structure (4) is arranged outside the multifunctional ingot furnace, and comprises: an upper cage (42) and a lower cage (43) of at least double-layer structure,
the upper cage body (42) is rectangular and comprises a first inner angle plate (431), an outer angle plate (433) and pull plates (44), the first inner angle plate is connected end to form an upper frame of the upper cage body (42), the second outer angle plate (433) is connected end to form a lower frame of the lower cage, and the pull plates (44) are arranged between the first inner angle plate (431) and the outer angle plate (433) in parallel;
the lower cage body (43) is rectangular, is arranged below the upper cage body and comprises a pull plate (44) and a second inner corner plate (432), the second inner corner plate (432) is connected end to form a lower frame of the lower keel body (443), the lower frame is in contact with the ground, and the pull plates (44) are arranged in parallel and are arranged between the outer corner plate (433) and the second inner corner plate (432);
the pulling plate (44) comprises a supporting part (441) and a connecting part (442), wherein the connecting part (442) is symmetrically arranged at two ends of the supporting part (441), and an arc-shaped transition part (4421) is arranged between the supporting part (441) and the connecting part (442).
3. The multifunctional ingot furnace as claimed in claim 2, wherein at least two parallel hanging plates (45) are arranged in the width direction of the upper cage body (42), the hanging plates are U-shaped, and hanging blocks (451) are arranged at two ends of the hanging plates.
4. The multifunctional ingot furnace of claim 1, wherein the heater comprises a top heater (52) and a side heater (53), and the side heater (53) is connected to the top heater (52) by a plurality of connecting plates (54).
5. The multifunctional ingot furnace of claim 4, wherein the top heater (52) comprises a first resistive heater (521) and a second resistive heater (522), the first resistive heater (521) and the second resistive heater (522) being disposed adjacent to each other, the first resistive heater (521) and the second resistive heater (522) both being in a closed configuration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921125791.5U CN210945859U (en) | 2019-07-17 | 2019-07-17 | Multifunctional ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921125791.5U CN210945859U (en) | 2019-07-17 | 2019-07-17 | Multifunctional ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210945859U true CN210945859U (en) | 2020-07-07 |
Family
ID=71375425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921125791.5U Active CN210945859U (en) | 2019-07-17 | 2019-07-17 | Multifunctional ingot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210945859U (en) |
-
2019
- 2019-07-17 CN CN201921125791.5U patent/CN210945859U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2022068700A1 (en) | Hot zone heater of single crystal furnace, and single crystal furnace | |
| CN210945859U (en) | Multifunctional ingot furnace | |
| CN206580913U (en) | A kind of polycrystalline silicon ingot or purifying furnace heater | |
| CN109402734A (en) | Crystal silicon ingot casting heater and its application method | |
| CN208201171U (en) | Polycrystalline silicon ingot or purifying furnace top side heater | |
| CN209584421U (en) | A kind of thermal field structure suitable for octagonal crystal silicon ingot casting | |
| CN208219008U (en) | Single crystal furnace heater | |
| WO2006088037A1 (en) | Silicon casting device and production method for silicon substrate | |
| CN208201172U (en) | Produce the polycrystalline ingot furnace and its side heater of cell piece | |
| CN210596320U (en) | Thermal field structure for silicon core ingot furnace | |
| CN202755096U (en) | Heat insulation device for ingot furnace | |
| CN205275784U (en) | Prepare G6 ingot furnace of high -efficient polycrystalline improved generation thermal field | |
| CN207811929U (en) | A kind of side heater assembly and its lifting panel assembly applied to polycrystalline cast ingot | |
| CN103696002A (en) | Electromagnetic and resistance mixed heating thermal field structure of ingot furnace and using method of electromagnetic and resistance mixed heating thermal field structure | |
| CN210048879U (en) | Silicon ingot casting thermal field structure | |
| CN211570834U (en) | Crystal silicon ingot casting heater | |
| CN207347694U (en) | A kind of side heater for polycrystalline silicon ingot or purifying furnace | |
| CN208151522U (en) | Close period polycrystalline silicon ingot casting furnace side heater | |
| CN208378176U (en) | A kind of suspender going out bucket for isostatic pressing formed graphite roasting base | |
| CN206529543U (en) | A kind of structure and polycrystalline silicon ingot or purifying furnace for installing polycrystalline silicon ingot or purifying furnace insulation shield felt | |
| CN208008948U (en) | A kind of solar energy quartz crucible positioning splint device | |
| CN110565163A (en) | Ingot casting heater and ingot casting furnace | |
| CN205774922U (en) | A kind of polycrystalline silicon ingot or purifying furnace heater | |
| CN207738891U (en) | One kind just dismantling base device for solar energy quartz crucible to be fixed | |
| CN205688057U (en) | For long brilliant formula of widening heater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 314000 Building 2, 72 Zhenbao Road, Dingqiao Town, Haining City, Jiaxing City, Zhejiang Province Patentee after: Zhejiang Jingyang electromechanical Co.,Ltd. Address before: 314000 Building 2, 72 Zhenbao Road, Dingqiao Town, Haining City, Jiaxing City, Zhejiang Province Patentee before: ZHEJIANG JINGYANG MECHANICAL & ELECTRICAL Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |