CN206580913U - A kind of polycrystalline silicon ingot or purifying furnace heater - Google Patents
A kind of polycrystalline silicon ingot or purifying furnace heater Download PDFInfo
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- CN206580913U CN206580913U CN201720148334.2U CN201720148334U CN206580913U CN 206580913 U CN206580913 U CN 206580913U CN 201720148334 U CN201720148334 U CN 201720148334U CN 206580913 U CN206580913 U CN 206580913U
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Abstract
The utility model is related to polycrystalline silicon ingot casting furnace apparatus, it is desirable to provide a kind of Novel polycrystalline silicon ingot furnace heater.Its side heater is made up of the graphite heater of in the vertical direction undulate, is connected from beginning to end and is surrounded rectangle or circle；Side heater connecting plate is connected by electrode connecting plate with graphite electrode；Staggeredly diagonally arranged graphite electrode group is connected to the both positive and negative polarity of the first dc source；Its top heater is made up of the graphite heater of two pieces of top heater connecting plate connections serpentine-like in the horizontal direction, and its head and the tail two ends is respectively provided with graphite electrode, is respectively connected to the both positive and negative polarity of the second dc source.The utility model is heated using dc source, and thermal field uniformity can be effectively ensured, while avoiding influence of the magnetic field that alternating current is produced to directional long crystal technique.Long crystal boundary face level can be caused, silicon ingot quality is improved.Top, sidepiece power supply are independently opened, and are easy to individually control top, side heater power, are conducive to process adjustments.
Description
Technical field
The utility model is related to the polycrystalline silicon ingot casting furnace apparatus in photovoltaic equipment industry, and in particular to a kind of polycrystalline
Graphite heater in silicon ingot furnace thermal field.
Background technology
At present, polycrystalline silicon ingot or purifying furnace remains the main stream approach of silicon for solar cell ingot preparation.Polycrystalline silicon ingot or purifying furnace is
A kind of remelting device, it is desirable to be up to certain purity requirement silicon material be fitted into stove, by heating and melting, directional long crystal, annealing,
Cooling, finally gives the large scale square silicon ingot in large-scale production.
From the founding of polycrystal silicon ingot, during ingot casting, it is desirable to which thermal field is as uniform as possible, so as to ensure crystal
Growth interface shape level.In the prior art, ingot casting power supply generally uses three-phase alternating-current supply, and heater is then by crucible
The top heater of side and the side heater composition positioned at crucible surrounding, top heater is again by polylith in N shapes and the stone of U-shaped
Black resistance is spliced, and side heater is then formed by connecting by four pieces of corrugated graphite resistances by connector.In actual life
Found during production, AC Electric Heater device can not preferably ensure thermal field uniformity, cause the temperature at four angles of crucible inconsistent, lead
Cause crystal growth interface not measure up, have a strong impact on silicon ingot quality.
Utility model content
Main purpose of the present utility model is to provide a kind of polycrystalline silicon ingot or purifying furnace graphite heater.To solve above-mentioned ask
Inscribe, solution of the present utility model is：
A kind of polycrystalline silicon ingot or purifying furnace heater, including top heater and side heater, the side heater are provided
It is made up of the graphite heater of at least four pieces in the vertical direction undulates, each graphite heater is connected by side heater
Plate realizes that head and the tail connect and surround rectangle；On the side heater connecting plate positioned at the rectangle corner location, connected by electrode
Fishplate bar connects with graphite electrode；Wherein, it is connected to respectively by water cooling copper electrode as one group in two diagonal graphite electrodes
The positive pole of first dc source, another group is connected to the first direct current by water cooling copper electrode respectively in two diagonal graphite electrodes
The negative pole of power supply；
The top heater is made up of two pieces of graphite heaters serpentine-like in the horizontal direction, two graphite heaters pair
Claim arrangement and connected respectively with top heater connecting plate at head and the tail two ends；Stone is respectively provided with the head and the tail two ends of two graphite heaters
Electrode ink, one of graphite electrode is connected to the positive pole of the second dc source by water cooling copper electrode, and another graphite electrode leads to
Cross the negative pole that water cooling copper electrode is connected to the second dc source.
As an improvement, the top heater is located at the top for the coffin that side heater is surrounded, and top adds
Graphite heater in hot device has the bending shape being engaged with the rectangle.
As an improvement, equidistantly it is arranged at intervals with arm on the side heater.
As a kind of deformation of the present utility model, a kind of polycrystalline silicon ingot or purifying furnace heater, including top heating are additionally provided
Device and side heater, the side heater are made up of the graphite heater of at least two pieces in the vertical direction undulates,
Each graphite heater is realized by side heater connecting plate to be connected and surrounds circle from beginning to end；Surrounding the graphite heater of circle
Upper equidistant interval setting at least four electrode connecting plate, each electrode connecting plate is connected to a graphite electrode；Wherein, it is spaced not
Adjacent graphite electrode is connected to the positive pole of the first dc source by water cooling copper electrode respectively as one group；Residue is spaced not phase
Adjacent graphite electrode is connected to the negative pole of the first dc source by water cooling copper electrode respectively as another group；
The top heater is made up of two pieces of graphite heaters serpentine-like in the horizontal direction, two graphite heaters pair
Claim arrangement and connected respectively with top heater connecting plate at head and the tail two ends；Stone is respectively provided with the head and the tail two ends of two graphite heaters
Electrode ink, one of graphite electrode is connected to the positive pole of the second dc source by water cooling copper electrode, and another graphite electrode leads to
Cross the negative pole that water cooling copper electrode is connected to the second dc source.
As an improvement, the top heater is located at the top for the circular space that side heater is surrounded, top heater
In graphite heater there is the bending shape that is engaged with the circle.
As an improvement, being equidistantly arranged at intervals with arm on the side heater.
Compared with prior art, the beneficial effects of the utility model are：
1st, the utility model proposes polycrystalline silicon ingot or purifying furnace new type heater, heated using dc source, Ke Yiyou
Effect ensures thermal field uniformity, while avoiding influence of the magnetic field that alternating current is produced to directional long crystal technique.Long crystal boundary face can be caused
Level, improves silicon ingot quality.
2nd, new type heater is powered using dc source, and top, sidepiece power supply are independently opened, and is easy to individually control
System top, side heater power, are conducive to process adjustments.
Brief description of the drawings
Fig. 1 is overall structure diagram of the present utility model.
Fig. 2 is top view of the present utility model.
Reference is in figure：1 side heater；2 arms；3 side heater connecting plates；4 electrode connecting plates；5 graphite
Electrode；6 top heaters；7 top heater connecting plates.
A, b, c, d are the graphite electrode being connected with side heater, and e, f are the graphite electrode being connected with top heater.
Embodiment
Embodiment of the present utility model is described in further detail below in conjunction with the accompanying drawings：
As shown in figure 1, in the polycrystalline silicon ingot or purifying furnace heater in the utility model, the thermal field loaded on polycrystalline silicon ingot or purifying furnace,
Arranged around crucible for carrying out radiant heating to the silicon material in crucible of polycrystalline silicon ingot furnace.Heater mainly includes：Sidepiece adds
Hot device 1, arm 2, side heater connecting plate 3, electrode connecting plate 4, graphite electrode 5, top heater 6 and top heater connect
Fishplate bar 7.
The annexation of each part is：Side heater 1 by four pieces of in the vertical direction undulates graphite heater
Composition, each graphite heater is realized by side heater connecting plate 3 to be connected and surrounds rectangle from beginning to end；Positioned at the rectangle corner
On the side heater connecting plate 3 of position, connected by electrode connecting plate 4 with graphite electrode 5；Wherein, in diagonal two
Graphite electrode 5 is connected to the positive pole of the first dc source as one group by water cooling copper electrode respectively, and another group in diagonal two
Individual graphite electrode 5 is connected to the negative pole of the first dc source by water cooling copper electrode respectively；Every piece of graphite heating of side heater 1
Arm 2 is provided with the middle part of device.
Top heater 6 is made up of two pieces of graphite heaters serpentine-like in the horizontal direction, and two graphite heaters are symmetrical
Arrange and connected respectively with top heater connecting plate 7 at head and the tail two ends；Stone is respectively provided with the head and the tail two ends of two graphite heaters
Electrode ink 5, one of graphite electrode 5 is connected to the positive pole of the second dc source by water cooling copper electrode, another graphite electrode 5
The negative pole of the second dc source is connected to by water cooling copper electrode.Top heater 6 is located at the coffin that side heater 1 is surrounded
Top, the graphite heater in top heater 6 has the bending shape being engaged with the rectangle.
Assembling and operation instruction：
Two pieces of top heaters 6 are attached by top heater connecting plate 7, and (are not indicated in figure) with graphite suspension rod
Hung on the top plate (not indicated in figure) of crucible top；Four pieces of side heaters 1 are connected by side heater connecting plate 3
Connect, and be fixed to by arm 2 on the top plate (not indicated in figure) at top.Side heater 1 is led to graphite electrode 5
Cross electrode connecting plate 4 to be attached, then graphite electrode 5 is connected with water cooling copper electrode (not indicating in figure), so as to form loop.
As shown in Fig. 2 during ingot casting, the positive pole of the first dc source is added by water cooling copper electrode (not indicated in figure) with sidepiece
A, c (or b, d) in hot device graphite electrode are connected, the negative pole of the first dc source by water cooling copper electrode (not indicated in figure) with
B, d (or a, c) in side heater graphite electrode are connected, and constitute side heater loop.The design causes side heater
Four resistance in loop are equal, and the electric current passed through is equal, it is ensured that the thermal difference of generation is smaller, so as to ensure that thermal field is equal
It is even.Meanwhile, the positive pole of the second dc source passes through the e in water cooling copper electrode (not indicated in figure) and top heater graphite electrode
(or f) is connected, and the negative pole of the second dc source passes through in water cooling copper electrode (not indicated in figure) and top heater graphite electrode
F (or e) be connected, constitute top heater loop.
Design variations example：
Certainly, the utility model can also have the change of other forms.For example：
Side heater is made up of the graphite heater of at least two pieces in the vertical direction undulates, each graphite heater
Realized by side heater connecting plate and connect from beginning to end and surround circle；Equi-spaced apart is set on the graphite heater for surrounding circle
At least four electrode connecting plate is put, each electrode connecting plate is connected to a graphite electrode；Wherein, it is spaced non-conterminous graphite electricity
Pole is connected to the positive pole of the first dc source by water cooling copper electrode respectively as one group；The non-conterminous graphite electrode in residue interval
As another group, the negative pole of the first dc source is connected to by water cooling copper electrode respectively；
Top heater is made up of two pieces of graphite heaters serpentine-like in the horizontal direction, the symmetrical cloth of two graphite heaters
Put and connected respectively with top heater connecting plate at head and the tail two ends；Graphite electricity is respectively provided with the head and the tail two ends of two graphite heaters
Pole, one of graphite electrode is connected to the positive pole of the second dc source by water cooling copper electrode, and another graphite electrode passes through water
Cold copper electrode is connected to the negative pole of the second dc source.Top heater is located at the top for the circular space that side heater is surrounded,
Graphite heater in top heater has the bending shape being engaged with the circle.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited only to above example, also has many deformations.The person skilled of this area can be from disclosed in the utility model
All deformations for directly exporting or associating in content, are considered as protection domain of the present utility model.
Claims (6)
1. a kind of polycrystalline silicon ingot or purifying furnace heater, including top heater and side heater, it is characterised in that the sidepiece adds
Hot device is made up of the graphite heater of at least four pieces in the vertical direction undulates, and each graphite heater passes through side heater
Connecting plate realizes that head and the tail connect and surround rectangle；On the side heater connecting plate positioned at the rectangle corner location, pass through electricity
Pole connecting plate connects with graphite electrode；Wherein, water cooling copper electrode is passed through respectively as one group in two diagonal graphite electrodes
The positive pole of the first dc source is connected to, another group is connected to first by water cooling copper electrode respectively in two diagonal graphite electrodes
The negative pole of dc source；
The top heater is made up of two pieces of graphite heaters serpentine-like in the horizontal direction, the symmetrical cloth of two graphite heaters
Put and connected respectively with top heater connecting plate at head and the tail two ends；Graphite electricity is respectively provided with the head and the tail two ends of two graphite heaters
Pole, one of graphite electrode is connected to the positive pole of the second dc source by water cooling copper electrode, and another graphite electrode passes through water
Cold copper electrode is connected to the negative pole of the second dc source.
2. polycrystalline silicon ingot or purifying furnace heater according to claim 1, it is characterised in that the top heater is located at sidepiece
Graphite heater in the top for the coffin that heater is surrounded, top heater has the bent being engaged with the rectangle
Shape.
3. polycrystalline silicon ingot or purifying furnace heater according to claim 1, it is characterised in that between equidistant on the side heater
Every being provided with arm.
4. a kind of polycrystalline silicon ingot or purifying furnace heater, including top heater and side heater, it is characterised in that the sidepiece adds
Hot device is made up of the graphite heater of at least two pieces in the vertical direction undulates, and each graphite heater passes through side heater
Connecting plate realizes that head and the tail connect and surround circle；It is equidistant on the graphite heater for surrounding circle to be arranged at intervals at least four electrode
Connecting plate, each electrode connecting plate is connected to a graphite electrode；Wherein, non-conterminous graphite electrode is spaced as one group, point
The positive pole of the first dc source is not connected to by water cooling copper electrode；The non-conterminous graphite electrode in residue interval divides as another group
The negative pole of the first dc source is not connected to by water cooling copper electrode；
The top heater is made up of two pieces of graphite heaters serpentine-like in the horizontal direction, the symmetrical cloth of two graphite heaters
Put and connected respectively with top heater connecting plate at head and the tail two ends；Graphite electricity is respectively provided with the head and the tail two ends of two graphite heaters
Pole, one of graphite electrode is connected to the positive pole of the second dc source by water cooling copper electrode, and another graphite electrode passes through water
Cold copper electrode is connected to the negative pole of the second dc source.
5. polycrystalline silicon ingot or purifying furnace heater according to claim 4, it is characterised in that the top heater is located at sidepiece
Graphite heater in the top for the circular space that heater is surrounded, top heater has the bent being engaged with the circle
Shape.
6. polycrystalline silicon ingot or purifying furnace heater according to claim 4, it is characterised in that between equidistant on the side heater
Every being provided with arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720148334.2U CN206580913U (en) | 2017-02-20 | 2017-02-20 | A kind of polycrystalline silicon ingot or purifying furnace heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720148334.2U CN206580913U (en) | 2017-02-20 | 2017-02-20 | A kind of polycrystalline silicon ingot or purifying furnace heater |
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| CN206580913U true CN206580913U (en) | 2017-10-24 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108193266A (en) * | 2018-03-19 | 2018-06-22 | 镇江环太硅科技有限公司 | A kind of polycrystalline silicon ingot or purifying furnace top side heater |
| CN109402728A (en) * | 2019-01-02 | 2019-03-01 | 伯恩露笑蓝宝石有限公司 | Graphite heater and crystal growing furnace |
| CN109905930A (en) * | 2017-12-08 | 2019-06-18 | 北京机电工程研究所 | Graphite heater, design method and graphite heating component used |
-
2017
- 2017-02-20 CN CN201720148334.2U patent/CN206580913U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109905930A (en) * | 2017-12-08 | 2019-06-18 | 北京机电工程研究所 | Graphite heater, design method and graphite heating component used |
| CN109905930B (en) * | 2017-12-08 | 2021-05-11 | 北京机电工程研究所 | Graphite heater, design method and graphite heating element used by graphite heater |
| CN108193266A (en) * | 2018-03-19 | 2018-06-22 | 镇江环太硅科技有限公司 | A kind of polycrystalline silicon ingot or purifying furnace top side heater |
| CN109402728A (en) * | 2019-01-02 | 2019-03-01 | 伯恩露笑蓝宝石有限公司 | Graphite heater and crystal growing furnace |
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