CN207347694U - A kind of side heater for polycrystalline silicon ingot or purifying furnace - Google Patents
A kind of side heater for polycrystalline silicon ingot or purifying furnace Download PDFInfo
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- CN207347694U CN207347694U CN201721210481.4U CN201721210481U CN207347694U CN 207347694 U CN207347694 U CN 207347694U CN 201721210481 U CN201721210481 U CN 201721210481U CN 207347694 U CN207347694 U CN 207347694U
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Abstract
The utility model provides a kind of side heater for polycrystalline silicon ingot or purifying furnace, and included Edge Heating plate, corner heating plate and connecting plate are carbon carbon composite material；Since carbon carbon composite density ratio graphite itself is small, so the side heater weight saving of the existing graphite material of the weight ratio of the side heater in the application 60%；And the mechanical property such as intensity, toughness is more preferable than graphite so that the side heater in the application is more more robust than the side heater of existing graphite material, and service life is longer；And in the case where realizing equal electrical heating power, the wall thickness of the side heater in the application only needs 5 6mm, than wall thickness reduction more than the 10mm of the side heater of graphite material, so as to expand the radial dimension of thermal field in polycrystalline silicon ingot or purifying furnace.
Description
Technical field
Polysilicon technical field of processing equipment is the utility model is related to, more particularly, to a kind of for polycrystalline silicon ingot or purifying furnace
Side heater.
Background technology
Need to use heater in polycrystalline silicon ingot or purifying furnace, heater is broadly divided into top surface heater in ingot furnace and side adds
Hot device, currently on the market top surface heater and side heater use graphite as heater material, due to graphite material
The conditions such as resistivity, heater structure, cause the minimum thickness of the side heater of graphite material also to have 16~18mm.With light
Yield is constantly improved in volt market in recent years reduces cost, it is desirable to and polycrystalline cast ingot increases the inventory of every heat as far as possible, into
And require thermal field size constantly to amplify, so as to be put into larger sized silica crucible to place more silicon raw materials.
At present, the size of the side heater of existing graphite material seriously constrains the dilatation of thermal field, while graphite material
There is also the defects of weight is heavy, service life is short for the side heater of matter.
Therefore, the thickness of side heater how is thinned, and mitigates the weight of side heater at the same time, improves side heat
The service life of device is the technical problem of current those skilled in the art's urgent need to resolve.
Utility model content
The purpose of this utility model is to provide a kind of side heater for polycrystalline silicon ingot or purifying furnace, side can be thinned
The thickness of heater, and mitigate the weight of side heater at the same time, the service life of side heater is improved, is polycrystalline silicon ingot casting
The further dilatation of thermal field provides achievable condition in stove.
To solve above-mentioned technical problem, technical solution provided by the utility model is：
A kind of side heater for polycrystalline silicon ingot or purifying furnace, including at least two heating rings, three electrode arms, bolts
And nut；
Each heating ring includes four blocks of Edge Heating plates, four pieces of corner heating plates, eight pieces of connecting plates, bolt and spiral shell
It is female；
Four blocks of Edge Heating plates, four pieces of corner heating plates and eight pieces of connecting plates in each heating ring are that carbon-to-carbon is answered
Condensation material material；
The heating ring is that cross section is the short tubular structure of octagonal thin-walled, each four pieces of Edge Heatings heated in ring
Plate corresponds four sides of the silica crucible of the rectangular-shape in the polycrystalline silicon ingot or purifying furnace for respectively to quartzy earthenware
Four sides of crucible are heated, and each four pieces of corner heating plates heated in ring are corresponded in the polycrystalline silicon ingot or purifying furnace
Each heated for being heated respectively to four angles of silica crucible in ring at four angles of the silica crucible of rectangular-shape
The length extension of adjacent two block Edge Heating plate be mutually perpendicular to, each adjacent corner heating plate heated in ring and side
Angle between portion's heating plate is 135 degree, each four blocks of Edge Heating plates heated in ring, four pieces of corner heating plates and eight pieces
The through hole for being inserted into the bolt is offered on connecting plate, each one end for heating each piece of connecting plate in ring leads to
Cross that bolt attaching nut is connected in the corner heating plate and the other end is connected to the edge by bolt attaching nut and adds
Adjacent corner heating plate is linked together with Edge Heating plate with realizing on hot plate；
The through hole for being inserted into the bolt is offered on three electrode arms；
The through hole for being inserted into the bolt is offered on three pieces in four blocks of Edge Heating plates in each heating ring；
Three electrode arms pass through spiral shell correspondingly with three blocks of Edge Heating plates for being provided with through hole in each heating ring
Bolt attaching nut connects；
At least two heating rings are fixed on three electrode arms by bolt attaching nut to form at least two heating
Ring is superimposed and is spaced in intervals between each other from top to bottom.
Preferably, the heating ring is three.
Preferably, the thickness of the Edge Heating plate is 5mm~6mm, and the thickness of the corner heating plate is 5mm~6mm.
Preferably, several auxiliary booms are further included, are offered on the auxiliary boom for being inserted into the logical of the bolt
Hole, each heats the through hole offered on four blocks of Edge Heating plates in ring for being inserted into the bolt, any one auxiliary
Arm is connected by bolt attaching nut with the Edge Heating plate, and at least two heating rings are fixed on by bolt attaching nut
It is superimposed with the heating rings of composition at least two on several auxiliary booms and is spaced in intervals between each other from top to bottom.
Preferably, the auxiliary boom is three.
The utility model provides a kind of side heater for polycrystalline silicon ingot or purifying furnace, including at least two heating rings,
Three electrode arms, bolt and nut；The heating ring includes four blocks of Edge Heating plates, four pieces of corner heating plates, eight pieces of companies
Fishplate bar, bolt and nut；Above-mentioned Edge Heating plate, corner heating plate and connecting plate are carbon-carbon composite material；By
It is small in carbon-carbon composite density ratio graphite itself, so the existing graphite material of the weight ratio of the side heater in the application
Side heater weight saving 60%；Since the mechanical properties such as the intensity of carbon-carbon composite, toughness are more preferable than graphite,
So that the side heater in the application is more more robust than the side heater of existing graphite material, service life is longer；And
In the case of realizing equal electrical heating power, three blocks of Edge Heating plates are in parallel up and down for the application design, the heating of upper and lower three pieces of corners
Plate is in parallel so that the wall thickness of the side heater in the application only needs 5-6mm, than the wall thickness of the side heater of graphite material
More than 10mm is thinned, so as to expand the radial dimension of thermal field in polycrystalline silicon ingot or purifying furnace；The side heat that the application provides
Device is provided with the corner heating plate for being used for being heated to four angles of silica crucible, is ensureing the premise of three-phase electricity three-phase equilibrium
Under improve corner temperature of thermal field, grown beneficial to polysilicon corner brilliant；And the connection size of the electrode arm in the application with it is existing
The size of the side heater of graphite material is consistent so that in actual use, the side heater of former graphite material is dismantled
Side heater in direct replacement cost application can；So as to be thinned the thickness of side heater, and alleviate at the same time
The weight of side heater, improves the service life of side heater, is the further dilatation of thermal field in polycrystalline silicon ingot or purifying furnace
Achievable condition is provided.
Brief description of the drawings
Fig. 1 is the stereochemical structure signal for the side heater for polycrystalline silicon ingot or purifying furnace that the utility model embodiment provides
Scheme (bolts and nuts not shown in figure)；
Fig. 2 is the top view (bolts and nuts not shown in figure) of Fig. 1；
Fig. 3 is the front view (bolts and nuts not shown in figure) of Fig. 1；
Fig. 4 is the dimensional structure diagram (bolts and nuts not shown in figure) of the heating ring in Fig. 1.
In figure：1 heating ring, 101 Edge Heating plates, 102 corner heating plates, 103 connecting plates, 2 electrode arms, 3 auxiliary hangings
Arm.
Embodiment
It is new below in conjunction with this practicality to make the purpose, technical scheme and advantage of the utility model embodiment clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the part of the embodiment of the utility model, instead of all the embodiments.Based on the reality in the utility model
Apply example, those of ordinary skill in the art's all other embodiments obtained on the premise of creative work is not made, all
Belong to the scope of the utility model protection.
In the description of the utility model, it is to be understood that term " " center ", " axial direction ", " radial direction ", " longitudinal direction ", " horizontal stroke
To ", " length ", " width ", " on ", " under ", "front", "rear", "left", "right", " top ", " bottom ", " interior ", " outer ", " clockwise ",
The orientation or position relationship of instructions such as " counterclockwise " are based on orientation shown in the drawings or position relationship, are for only for ease of description
The utility model and simplified description, rather than indicate or imply that signified device or element must be with specific orientation, Yi Te
Fixed azimuth configuration and operation, therefore it is not intended that limitation to the utility model.
With reference to Fig. 1~Fig. 4, Fig. 1 is the side heater for polycrystalline silicon ingot or purifying furnace that the utility model embodiment provides
Dimensional structure diagram (bolts and nuts not shown in figure)；Top view (bolt and the spiral shell not shown in figure that Fig. 2 is Fig. 1
It is female)；Fig. 3 is the front view (bolts and nuts not shown in figure) of Fig. 1；Fig. 4 is the dimensional structure diagram of the heating ring in Fig. 1
(bolts and nuts not shown in figure).
A kind of side heater for polycrystalline silicon ingot or purifying furnace, including at least two heating ring 1, three electrode arm 2, spiral shells
Bolt and nut；
Each heating ring 1 include four pieces of 101, four pieces of Edge Heating plate, 102, eight pieces of corner heating plate connecting plates 103,
Bolt and nut；
Four blocks of Edge Heating plates, 101, four pieces of corner heating plates 102 and eight pieces of connecting plates 103 in each heating ring are equal
For carbon-carbon composite material；
The heating ring 1 is that cross section is the short tubular structure of octagonal thin-walled, and each four pieces of edge heated in ring add
Hot plate 101 corresponds four sides of the silica crucible of the rectangular-shape in the polycrystalline silicon ingot or purifying furnace for respectively to stone
Four sides of English crucible are heated, and each four pieces of corner heating plates 102 heated in ring correspond the polysilicon casting
Four angles of the silica crucible of the rectangular-shape in ingot stove are for respectively heating four angles of silica crucible, and each
The length extension of adjacent two piece Edge Heating plate 101 in heating ring is mutually perpendicular to, each adjacent angle heated in ring
Angle between portion's heating plate 102 and Edge Heating plate 101 is 135 degree, each four blocks of Edge Heating plates 101 heated in ring,
The through hole for being inserted into the bolt is offered in four pieces of corner heating plates 102 and eight pieces of connecting plates 103, each heats ring
In each piece of connecting plate 103 one end be connected to by bolt attaching nut it is in the corner heating plate 102 and another
End is connected on the Edge Heating plate 101 by bolt attaching nut to realize adjacent corner heating plate 102 and edge
Heating plate 101 links together；
The through hole for being inserted into the bolt is offered on three electrode arms 2；
The through hole for being inserted into the bolt is offered on three pieces in four blocks of Edge Heating plates in each heating ring；
Three electrode arms pass through spiral shell correspondingly with three blocks of Edge Heating plates for being provided with through hole in each heating ring
Bolt attaching nut connects；
At least two heating rings 1 are fixed on three electrode arms 2 by bolt attaching nut to be added with forming at least two
Hot ring 1 is superimposed and is spaced in intervals between each other from top to bottom.
The utility model provides a kind of side heater for polycrystalline silicon ingot or purifying furnace, including at least two heating rings 1,
Three electrode arms 2, bolt and nut；The heating ring 1 includes four blocks of Edge Heating plates, 101, four pieces of corner heating plates
102nd, eight pieces of connecting plates 103, bolt and nut；Above-mentioned Edge Heating plate 101, corner heating plate 102 and connecting plate 103 are equal
For carbon-carbon composite material；Since carbon-carbon composite density ratio graphite itself is small, so the side heat in the application
The side heater weight saving of the existing graphite material of weight ratio of device 60%；Due to the intensity of carbon-carbon composite, toughness
It is more preferable than graphite etc. mechanical property so that side heater in the application than existing graphite material side heater more resistant to
With service life is longer；And in the case where realizing equal electrical heating power, three blocks of Edge Heating plates above and below the application design
101 in parallel, upper and lower three pieces of corner heating plates 102 are in parallel so that and the wall thickness of the side heater in the application only needs 5-6mm,
Than wall thickness reduction more than the 10mm of the side heater of graphite material, so as to expanding the footpath of thermal field in polycrystalline silicon ingot or purifying furnace
To size；The side heater that the application provides is provided with the corner heating plate for being used for being heated to four angles of silica crucible
102, corner temperature of thermal field is improved on the premise of three-phase electricity three-phase equilibrium is ensured, is grown beneficial to polysilicon corner brilliant；And this Shen
Please in electrode arm 2 connection size it is consistent with the size of the side heater of existing graphite material so that actually using
In, the side heater in direct replacement cost application that the side heater of former graphite material is dismantled can；So as to be thinned
The thickness of side heater, and the weight of side heater is alleviated at the same time, the service life of side heater is improved, it is
The further dilatation of thermal field provides achievable condition in polycrystalline silicon ingot or purifying furnace.
In one embodiment of the application, the heating ring 1 is three.
In one embodiment of the application, the thickness of the Edge Heating plate 101 is 5mm~6mm, the corner heating
The thickness of plate 102 is 5mm~6mm.
In one embodiment of the application, above-mentioned side heater, further includes several auxiliary booms 3, described auxiliary
The through hole offered for being inserted into the bolt is helped on arm 3, is offered on each four blocks of Edge Heating plates heated in ring
For being inserted into the through hole of the bolt, any one auxiliary boom is connected by bolt attaching nut with the Edge Heating plate,
At least two heating rings 1 be fixed on by bolt attaching nut on several auxiliary booms 3 with forms at least two heat rings 1 from
Top to bottm is superimposed and is spaced in intervals between each other.
In one embodiment of the application, the auxiliary boom 3 is three.
In the application, electrode arm 2 is used to suspend the multiple heating rings 1 of support in midair and is connected with power electrode with conduction；It is auxiliary
Help arm 3 be used for suspend in midair the multiple heating rings 1 of support, to prevent 101, four pieces of corners of the less four blocks of Edge Heating plates of thickness from heating
102, eight pieces of connecting plates 103 of plate deform during the use of high-temperature heating.
The method and apparatus of the not detailed description of the utility model are the prior art, are repeated no more.
Specific embodiment used herein is set forth the principle and embodiment of the utility model, and the above is implemented
The explanation of example is only intended to help the method and its core concept for understanding the utility model.It should be pointed out that for the art
Those of ordinary skill for, on the premise of the utility model principle is not departed from, can also to the utility model carry out it is some
Improve and modification, these improvement and modification are also fallen into the protection domain of the utility model claims.
Claims (5)
1. a kind of side heater for polycrystalline silicon ingot or purifying furnace, it is characterised in that including at least two heating rings, three electrodes
Arm, bolt and nut；
Each heating ring includes four blocks of Edge Heating plates, four pieces of corner heating plates, eight pieces of connecting plates, bolt and nut；
Four blocks of Edge Heating plates, four pieces of corner heating plates and eight pieces of connecting plates in each heating ring are carbon-to-carbon composite wood
Expect material；
The heating ring is that cross section is the short tubular structure of octagonal thin-walled, each four blocks of Edge Heating plates one heated in ring
One corresponds to four sides of the silica crucible of the rectangular-shape in the polycrystalline silicon ingot or purifying furnace for respectively to silica crucible
Four sides are heated, and each four pieces of corner heating plates heated in ring correspond rectangular in the polycrystalline silicon ingot or purifying furnace
Four angles of the silica crucible of body shape are for respectively heating four angles of silica crucible, and the phase in each heating ring
The length extension of two blocks of adjacent Edge Heating plates is mutually perpendicular to, and each adjacent corner heating plate heated in ring adds with edge
Angle between hot plate is 135 degree, each four blocks of Edge Heating plates heated in ring, four pieces of corner heating plates and eight pieces of connections
The through hole for being inserted into the bolt is offered on plate, each one end for heating each piece of connecting plate in ring passes through spiral shell
Bolt attaching nut is connected in the corner heating plate and the other end is connected to the Edge Heating plate by bolt attaching nut
On with realize adjacent corner heating plate is linked together with Edge Heating plate；
The through hole for being inserted into the bolt is offered on three electrode arms；
The through hole for being inserted into the bolt is offered on three pieces in four blocks of Edge Heating plates in each heating ring；
Three electrode arms are matched somebody with somebody by bolt correspondingly with three blocks of Edge Heating plates for being provided with through hole in each heating ring
Close nut connection；
At least two heating rings be fixed on by bolt attaching nut on three electrode arms with forms at least two heat rings from
Top to bottm is superimposed and is spaced in intervals between each other.
2. side heater according to claim 1, it is characterised in that the heating ring is three.
3. side heater according to claim 1, it is characterised in that the thickness of the Edge Heating plate for 5mm~
6mm, the thickness of the corner heating plate is 5mm~6mm.
4. side heater according to claim 1, it is characterised in that further include several auxiliary booms, the auxiliary
The through hole for being inserted into the bolt is offered on arm, offers and is used on each four blocks of Edge Heating plates heated in ring
The through hole of the bolt is inserted into, any one auxiliary boom is connected by bolt attaching nut with the Edge Heating plate, at least
Two heating rings are fixed on several auxiliary booms by bolt attaching nut to form at least two heating rings from top to bottom
It is superimposed and is spaced in intervals between each other.
5. side heater according to claim 4, it is characterised in that the auxiliary boom is three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721210481.4U CN207347694U (en) | 2017-09-20 | 2017-09-20 | A kind of side heater for polycrystalline silicon ingot or purifying furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721210481.4U CN207347694U (en) | 2017-09-20 | 2017-09-20 | A kind of side heater for polycrystalline silicon ingot or purifying furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207347694U true CN207347694U (en) | 2018-05-11 |
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ID=62410332
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721210481.4U Active CN207347694U (en) | 2017-09-20 | 2017-09-20 | A kind of side heater for polycrystalline silicon ingot or purifying furnace |
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| CN (1) | CN207347694U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110565163A (en) * | 2019-10-17 | 2019-12-13 | 晶科能源有限公司 | Ingot casting heater and ingot casting furnace |
-
2017
- 2017-09-20 CN CN201721210481.4U patent/CN207347694U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110565163A (en) * | 2019-10-17 | 2019-12-13 | 晶科能源有限公司 | Ingot casting heater and ingot casting furnace |
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