CN210394504U - Target body telescopic mechanism in magnetron sputtering coating machine - Google Patents
Target body telescopic mechanism in magnetron sputtering coating machine Download PDFInfo
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- CN210394504U CN210394504U CN201920777295.1U CN201920777295U CN210394504U CN 210394504 U CN210394504 U CN 210394504U CN 201920777295 U CN201920777295 U CN 201920777295U CN 210394504 U CN210394504 U CN 210394504U
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Abstract
The utility model discloses a target body telescoping mechanism in a magnetron sputtering film plating machine, which comprises a sliding sleeve, a dynamic seal assembly, a linear motion mechanism and a connecting plate, wherein the sliding sleeve can slide and pass through a through hole on a wall plate of the film plating machine; the target body is fixedly arranged at the inner end of the sliding sleeve; the dynamic seal assembly is arranged at the perforation to realize dynamic seal; the linear motion mechanism is arranged on the outer side of a wall plate of the film coating machine and corresponds to the sliding sleeve, and the linear motion direction is parallel to the sliding direction of the sliding sleeve; the connecting plate is connected with the outer end of the sliding sleeve and the movable end of the linear motion mechanism; the linear motion mechanism drives the sliding sleeve to do telescopic motion through the connecting plate. The utility model discloses flexible stable, sealed stable.
Description
Technical Field
The utility model relates to a target body telescopic mechanism in a magnetron sputtering coating machine.
Background
The magnetron sputtering deposition coating is one of the mainstream coating technologies of the current ion plating coating of decorative hard films, tool and die superhard films, mechanical wear part wear-resistant and antifriction films, precise optical films, photoelectric functional films and the like, various types of magnetron sputtering coating equipment are widely applied by the film industry, and the technical core is the design and manufacture of a magnetron sputtering target body. In the coating operation process of the magnetron sputtering coating machine, the distance between the surface of a sputtering target and a coated workpiece (called target base distance) is one of key process parameters. If the distance is too large, the deposition rate is reduced, and the deposited particles have low energy and low concentration and poor film-forming quality; if the distance is too close, the diffraction ability of the deposited particles is poor, and the stability of the glow discharge is even disturbed. Conventional magnetron sputtering target constructions preferably have a target base distance of about 60 to 100 mm.
The general film plating machine is characterized in that the target body is fixedly arranged on a wall plate of a film plating chamber, the distance between the target body and a plated workpiece is not adjustable, and the structure is simple and the manufacturing cost is low. However, for a planar sputtering target, the target material is continuously consumed and thinned in the process of coating operation, the target base distance is increased after the operation time is long, and the coating operation cannot be maintained at the optimal sputtering parameters due to the unadjustable target base distance.
Some coating machines use a plurality of targets with targets of different materials for coating, and in order to avoid mutual contamination between targets of different targets, a simple baffle shield is used, but the shield is not tight, and if a tight baffle shield is used, the structure becomes complicated, and the design of the baffle becomes difficult due to insufficient space in front of the targets. Considering that a target cavity special for isolating a target body is arranged on a wall plate of a coating chamber towards the outdoor direction, a target door is arranged to seal a cavity opening of the target cavity, when the coating is not carried out, the target body retracts into the target cavity, the target door acts and seals the cavity opening, the target body is isolated, and the target body is protected from being polluted; when needing the coating, open the target door, stretch the target body to the coating chamber, adjust to the best target base distance and carry out the coating, even if the gold target still can stretch forward as far as possible and be close to the work piece to the nearest distance that allows in, like this gold target utilization ratio is the highest. In addition, some targets can not contact water and moist air, so that the target body must retreat into the target cavity, the target cavity needs to be independently vacuumized, and a vacuum sealing target door is adopted at the cavity opening of the target cavity to be isolated from the coating chamber (which can be filled with air). When coating, the target door is opened, and the target body is stretched into the coating chamber for coating. All of the above considerations require that the target body be telescopically adjustable.
The existing telescopic mechanism mostly adopts a hand-operated screw and nut combined telescopic structure, the structure is simple, but for a large-scale plane target, the design of a single screw and nut hand-operated mechanism is adopted, so that firstly, the force is more wasted; secondly, the target body does not move stably enough; and thirdly, the vacuum seal is easy to damage, so that the air leakage of the coating chamber is caused.
A more reasonable target body telescopic mechanism needs to be designed, the transmission of power, the stability of movement and the vacuum tightness of a vacuum coating chamber of a coating machine are all difficult points of design, and the unstable movement easily influences the vacuum tightness.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of providing a target body telescopic mechanism in a magnetron sputtering coating machine with stable telescoping and sealing.
Solve above-mentioned technical problem, the utility model discloses a technical scheme as follows:
a target body telescopic mechanism in a magnetron sputtering film plating machine is characterized by comprising:
the sliding sleeve can slide through a through hole on a wall plate of the film coating machine; the target body is fixedly arranged at the inner end of the sliding sleeve;
the dynamic seal assembly is arranged at the perforation to realize dynamic seal;
the linear motion mechanism is arranged on the outer side of a wall plate of the film coating machine and corresponds to the sliding sleeve, and the linear motion direction is parallel to the sliding direction of the sliding sleeve;
the connecting plate is connected with the outer end of the sliding sleeve and the movable end of the linear motion mechanism; the linear motion mechanism drives the sliding sleeve to do telescopic motion through the connecting plate.
The movable sealing assembly comprises a sealing fixed pipe, a spacer bush, a sealing gland and two framework oil seals, the sealing fixed pipe corresponds to a through hole and is fixed on the outer surface of a wall plate of the film coating machine, a sliding sleeve penetrates through a middle hole of the sealing fixed pipe, the two framework oil seals and the spacer bush are sleeved on the sliding sleeve and are located in the middle hole of the sealing fixed pipe, the spacer bush is arranged between the two framework oil seals, the sealing gland is annular and is sleeved on the sliding sleeve, and the sealing gland compresses the two framework oil seals and the spacer bush at the outer port of the middle hole of the sealing fixed pipe.
The target body telescopic mechanism further comprises a guide pillar assembly, the guide pillar assembly comprises a guide pillar fixing seat, a guide pillar and a guide pipe, the guide pillar fixing seat is fixed on the outer surface of a wall plate of the film coating machine, the guide pipe is correspondingly and fixedly installed on the connecting plate, one end of the guide pillar is fixed on the guide pillar fixing seat, and the other end of the guide pillar penetrates through the guide pipe in a sliding mode.
The target body telescopic mechanism comprises two sliding sleeves, two sets of dynamic sealing assemblies and two sets of guide pillar assemblies, the two sliding sleeves are correspondingly arranged on the left and the right, the two sets of guide pillar assemblies are correspondingly arranged on the left and the right, and the two sets of dynamic sealing assemblies are respectively arranged on the two sliding sleeves.
The linear motion mechanism is an air cylinder, and a piston rod of the air cylinder is connected with the connecting plate through a floating joint.
And a liquid outlet pipe and a liquid inlet pipe are arranged in the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with a liquid outlet and a liquid inlet of a cooling channel of the target body, and the outer ends of the liquid outlet pipe and the liquid inlet pipe respectively penetrate out of the outer end of the sliding sleeve.
Liquid pipe insulating sleeves are sleeved at the contact parts of the end parts of the liquid outlet pipe and the liquid inlet pipe and the sliding sleeve.
The outer port of the sliding sleeve is fixedly covered with a protective cover, an insulating protective sleeve is arranged in the protective cover and clings to the inner wall of the protective cover, the outer ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with an elbow water nozzle through pipe connectors, the elbow water nozzle is positioned in the protective cover, and the connecting end of the elbow water nozzle penetrates out of the side face of the protective cover.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model discloses set up linear motion mechanism in the wallboard outside of coating machine, through sliding sleeve and target body coupling, the dynamic seal subassembly carries out dynamic seal to sliding sleeve, and concertina movement is more stable like this, and sliding sleeve can not rock, can realize better vacuum seal.
2. The utility model discloses set up sliding sleeve and simplified the structure of coating machine, the feed liquor pipe and the drain pipe of the coolant liquid in the target body can directly set up in sliding sleeve, and the electrical connection line of the target body also can directly set up in sliding sleeve, through sliding sleeve and external connection.
3. The utility model discloses a dynamic seal subassembly realizes dynamic seal, simple structure, sealed reliable through sealed fixed pipe, spacer, gland and two skeleton oil seals.
4. The utility model discloses still set up the guide pillar subassembly for concertina movement is more stable.
5. The utility model discloses set up drain pipe and feed liquor pipe in sliding sleeve for the coolant liquid of the cooling target body can directly be connected with the external world through drain pipe and feed liquor pipe, makes the target body structure simpler.
Drawings
Fig. 1 is one of schematic cross-sectional views of a target door of the present invention in a closed state, the view direction being a front view direction;
fig. 2 is a schematic sectional view of the target door of the present invention in an opened state, the view direction being a front view direction;
fig. 3 is a second schematic sectional view of the target door of the present invention in a closed state, the view direction being a side view direction;
FIG. 4 is an enlarged schematic view taken at I in FIG. 2;
FIG. 5 is a schematic view of the assembly of the target body and the target body retracting mechanism of the present invention;
FIG. 6 is an enlarged schematic view taken at II in FIG. 3;
fig. 7 is an enlarged schematic view at iii in fig. 6.
The reference numerals in the drawings mean:
1, vacuum coating chamber; 1-1, the bottom of a vacuum coating chamber; 2, a target cavity; 2-1, an air extraction opening; 2-2 bottom wall plate of target cavity; 2-3 cavities; 3 a target body; 3-1, a target material; 3-2 copper plates; 3-3 magnets; 3-4 pole shoes; 3-5 of waterproof rubber; 3-6 layering; 3-7 shielding coamings; 3-8 target seats; 3-9 target body fixing plates; 3-10 connecting bolts; 3-11 insulating pads; 3-12 insulating sleeves; 3-13 insulating covers; 4 target door; 5 a rotary cylinder; 6 target body telescopic mechanism; 6-1 sliding sleeve; 6-3 of a protective cover; 6-4 insulating sheath; 6-5 connecting plates; 6-6 guide posts; 6-7 guide tubes; 6-8 guide post fixing seats; 6-9 linear motion mechanism; 6-10 floating joints; 8, a dynamic seal assembly; 8-1 framework oil seal; 8-2, sealing and fixing the tube; 8-3 spacer bushes; 8-4 of sealing gland; 9-1 liquid flow channel; 9-2 liquid inlet pipe; 9-3 liquid outlet pipes; 9-4 liquid pipe insulating sleeves; 9-5 locking nuts; 9-6, sealing and pressing the sleeve; 9-7 pipe sealing rings; 9-8 pipe connectors; 9-9 elbow water nozzles; 9-10 liquid inlet channels; 9-11 liquid outlet channels; 10 cooling the liquid.
Detailed Description
The present invention will be further described with reference to the following examples.
The target body telescoping mechanism 6 in the magnetron sputtering coating machine shown in fig. 1 to 7 comprises a sliding sleeve 6-1, a dynamic seal assembly 8, a linear motion mechanism 6-9 and a connecting plate 6-5.
As shown in FIGS. 1 to 3, the coater of the embodiment is provided with the target chamber 2 at the bottom 1-1 of the vacuum coating chamber, but of course, the target chamber 2 can also be arranged at the top or the side of the vacuum coating chamber, and the installation positions of other components will also change. The target cavity 2 is directly communicated with the vacuum coating chamber 1 through a cavity port 2-3 at the upper end. The telescopic mechanism 6 is mounted on the bottom wall plate 2-2 of the target chamber 2. The target body 3 is arranged on the target body telescopic mechanism 6 and is positioned in the target cavity 2, and the target body telescopic mechanism 6 drives the target body 3 to move towards the cavity opening 2-3 direction or retract into the target cavity 2. The position of the cavity opening 2-3 is provided with a target door 4, and the target door 4 can seal the position of the cavity opening 2-3 or open the cavity opening 2-3. The target door 4 can be turned over by the rotary air cylinder 5 to be closed and opened, and can also be closed and opened in a translation mode. In order to independently vacuumize the target cavity 2, an air suction port 2-1 for vacuuming the target cavity is arranged on the left side wall plate of the target cavity 2. In the operation process, the vacuum degree of the target cavity is maintained through the air exhaust port 2-1, when film coating is needed, the cavity port 2-3 is opened, the target body 3 is driven to rise to a set height through the target body telescopic mechanism 6, the target body 3 is lowered after the film coating is finished, and the cavity port 2-3 is sealed and closed through the target door 4.
The sliding sleeve 6-1 movably penetrates through a through hole on the bottom wall plate 2-2 of the target cavity 2, and the dynamic seal assembly 8 is arranged at the through hole and realizes dynamic seal through the dynamic seal assembly 8. The target body 3 is fixedly arranged at the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve is the inner end in the embodiment), the upper end of the linear motion mechanism 6-9 is arranged at the lower surface of the bottom wall plate 2-2 of the target cavity, namely the outer side of the wall plate of the film coating machine, the connecting plate 6-5 is connected with the lower movable end of the linear motion mechanism 6-9 and the outer end of the sliding sleeve 6-1 (the lower end of the sliding sleeve is the outer end in the embodiment), and when the linear motion mechanism 6-9 does vertical linear motion, the connecting plate 6-5 drives the sliding sleeve 6-1 to synchronously move.
Wherein, the linear motion mechanism 6-9 is a linear motion type cylinder, and a piston rod of the cylinder is connected with the middle part of the connecting plate 6-5 through a floating joint 6-10. The floating joints 6-10 are adopted to overcome the deviation of the connecting plate from the axis of the cylinder caused by slight swinging or deviation of the plate surface when the connecting plate moves up and down.
As shown in figure 5, the dynamic seal assembly 8 comprises a seal fixing pipe 8-2, a spacer 8-3, a seal gland 8-4 and two framework oil seals 8-1, the seal fixing pipe 8-2 is fixed on the lower surface of the bottom wall plate of the target cavity of the coating machine corresponding to a perforation, a sliding sleeve 6-1 passes through a middle hole of the seal fixing pipe 8-2, the two framework oil seals 8-1 and the spacer 8-3 are sleeved on the sliding sleeve 6-1, and is positioned in the middle hole of the sealing fixed pipe 8-2, the spacer bush 8-3 is arranged between the two framework oil seals 8-1, the sealing gland 8-4 is annular and is sleeved on the sliding sleeve 6-1, and the sealing cover is arranged at the outer port of the middle hole of the sealing fixed pipe and tightly presses the two framework oil seals and the spacer bush, and the framework oil seal 8-1 is contacted with the side surface of the sliding sleeve 6-1.
As shown in fig. 6, the target body telescopic mechanism of this embodiment further includes a guide post assembly, the guide post assembly includes a guide post fixing seat 6-8, a guide post 6-6 and a guide tube 6-7, the guide post fixing seat 6-8 is fixed on the lower surface of the bottom wall plate 2-2 of the target cavity by a bolt, the guide tube 6-7 is fixedly mounted on the upper surface of the connecting plate 6-5 by a bolt, the upper end of the guide post 6-6 is fixed on the guide post fixing seat 6-8, the lower end of the guide post 6-7 movably passes through the guide tube 6-7, and the movement is more stable by the fit sliding of the guide post 6-6 and the.
In order to make the telescopic motion more stable and the structure more reasonable, the present embodiment is provided with two sliding sleeves 6-1, two sets of dynamic seal assemblies 8 and two sets of guide pillar assemblies, the two sliding sleeves 6-1 are correspondingly arranged left and right, the two sets of guide pillar assemblies are correspondingly arranged left and right, and the two sets of dynamic seal assemblies 8 are respectively arranged on the two sliding sleeves.
The coating machine is when the coating operation, and the target body can generate heat, consequently all need cool down to the target body, generally cool down to the target body through endless coolant liquid, can set up the liquid runner 9-1 that is used for the circulation of coolant liquid 10 in the target body, and the inflow and the outflow of coolant liquid all are a technological difficulty because need be connected with external equipment, but also need vacuum seal, still need insulating isolation. In the embodiment, a liquid outlet pipe 9-3 and a liquid inlet pipe 9-2 can be directly arranged in the inner cavity of the sliding sleeve 6-1, the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are insulated from the sliding sleeve 6-1, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively connected with a liquid outlet and a liquid inlet of the liquid flow channel 9-1, and the outer ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 respectively penetrate out of the outer end of the sliding sleeve 6-1. The end parts of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 which penetrate out of the outer end of the sliding sleeve 6-1 are used for being connected with an external pipeline. When the cooling liquid cooling device is used, the cooling liquid 10 enters the liquid flow channel 9-1 from the liquid inlet pipe 9-2, carries away heat of the target body 3 when flowing through the liquid flow channel 9-1, then flows out of the liquid outlet pipe 9-3, and is cooled by continuous circulation of the cooling liquid 10, the cooling liquid used in the embodiment is silicon oil, and the direction of an arrow in fig. 6 indicates the inlet and outlet direction of the silicon oil.
In order to realize the insulation between the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 and the sliding sleeve, liquid pipe insulation sleeves 9-4 are sleeved at the contact parts of the end parts of the liquid outlet pipe and the liquid inlet pipe and the sliding sleeve. A protective cover 6-3 is fixed at the outer end of the sliding sleeve 6-1, an insulating sheath 6-4 is arranged in the protective cover 6-3 and close to the inner wall of the protective cover, a connecting plate 6-5 is connected with the lower end of the protective cover 6-3 through a bolt, the outer ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (the lower ends of the liquid outlet pipe and the liquid inlet pipe are the outer ends of the liquid outlet pipe and the liquid inlet pipe in the embodiment) are respectively connected with an elbow water nozzle 9-9 through a pipe connector 9-8, the elbow water nozzle 9-9 is positioned in the protective cover 6-3, and the connecting end of the elbow water nozzle 9-9 penetrates out of the side surface of the protective.
As shown in FIG. 5, the inner end of the sliding sleeve 6-1 is hermetically connected with the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 by the following structure: the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve is the inner end in the embodiment) is provided with a sealing step hole, the upper end of the sealing step hole is provided with a counter bore, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (the upper ends of the liquid outlet pipe and the liquid inlet pipe are the inner ends in the embodiment) respectively pass through the corresponding sealing step hole, the sealing step hole is internally provided with two sealing pressure sleeves 9-6 and two pipe sealing rings 9-7, the two sealing pressure sleeves 9-6 and the two pipe sealing rings 9-7 are arranged at intervals, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively connected with a locking nut 9-5 through threads, the locking nut 9-5 is positioned in the counter bore, and the liquid outlet pipe and the liquid inlet pipe are locked through the locking nut 9-5.
As shown in fig. 5 and 6, the target body 3 of the present embodiment has the following structure: the target body 3 comprises a target 3-1, a copper plate 3-2, pole shoes 3-4, waterproof rubber sheets 3-5, a target holder 3-8 and a plurality of magnets 3-3, wherein a mounting groove is formed in the surface, facing the vacuum coating chamber 1, of the target holder 3-8 (in the embodiment, the upper surface of the target holder is the surface facing the vacuum coating chamber), the waterproof rubber sheets 3-5 are flatly attached to the bottom surface of the mounting groove, the pole shoes 3-4 are arranged on the surface of the waterproof rubber sheets 3-5, the copper plate 3-2 is sealed at the groove openings of the mounting groove through sealing strips pressed on the periphery, the magnets 3-3 are uniformly distributed between the copper plate 3-2 and the pole shoes 3-4, and the target 3-1 is flatly attached to the outer surface of the copper plate 3-2. A liquid flow channel 9-1 is formed between the copper plate 3-2 and the pole shoe 3-4, a liquid outlet channel 9-11 and a liquid inlet channel 9-10 which are communicated with the liquid flow channel are also arranged on the target body 3, and the lower ends of the liquid outlet channel 9-11 and the liquid inlet channel 9-10 are a liquid outlet and a liquid inlet.
The specific fixing structure of the target 3-1 is as follows: the pressing strip 3-6 is fixed on the edge of the upper surface of the target seat 3-8 through bolts, the pressing strip and the copper plate 3-2 are fixed on the upper surface of the target seat 3-8 through bolts for fixing the pressing strip 3-6, the sealing strip is positioned between the copper plate 3-2 and the upper surface of the target seat 3-8, the periphery of the target 3-1 is pressed between the pressing strip 3-6 and the copper plate 3-2, and therefore the target 3-1 can be detachably fixed on the upper surface of the copper plate.
As shown in figure 6, the liquid outlet channels 9-11 and the liquid inlet channels 9-10 are symmetrically arranged by taking the central line of the target body 3 as the center, and the liquid outlet channels 9-11 and the liquid inlet channels 9-10 are respectively communicated with the liquid flow channel 9-1 after passing through the target seat 3-8, the waterproof rubber sheet 3-5 and the pole shoe 3-4.
In order to better install the target 3, the coating machine of the embodiment further comprises a target fixing plate 3-9, the target fixing plate 3-9 is fixed at the upper end of the sliding sleeve 6-1, the target holder 3-8 is fixed above the target fixing plate 3-9 through an insulating fixing component, and a certain interval is reserved between the target holder 3-8 and the target fixing plate 3-9. The periphery of the target body fixing plate 3-9 is fixedly provided with a shielding coaming 3-7, the shielding coaming 3-7 surrounds the periphery of the target body 3, and a certain interval is left between the shielding coaming 3-7 and the target body 3, thereby preventing lateral discharge.
As shown in fig. 7, the structure of the insulation fixing assembly is: the insulating fixing assembly comprises connecting bolts 3-10, insulating pads 3-11, insulating sleeves 3-12 and insulating covers 3-13, the connecting bolts 3-10 penetrate through the target fixing plate and are in threaded connection with the target base, the insulating pads 3-11 are sleeved on the connecting bolts 3-10 and are padded between the target fixing plate 3-9 and the target base 3-8, the insulating sleeves 3-12 are sleeved on the heads of the connecting bolts 3-10 and the parts in contact with the target fixing plate, so that the connecting bolts are insulated from the target fixing plate, and the insulating covers 3-13 cover the port parts of the insulating sleeves 3-12, so that the heads of the connecting bolts are sealed in the insulating sleeves.
Of course, the target body telescopic mechanism of the present invention is not limited to the coating machine used in this embodiment, and can also be used in coating machines of other structures, such as: the coating machine without the target cavity 2 is specially used for adjusting the target base distance of the target body, so that the coating operation is always at the optimal distance.
The above embodiments of the present invention are not right the utility model discloses the limited protection scope, the utility model discloses an embodiment is not limited to this, all kinds of basis according to the above-mentioned of the utility model discloses an under the above-mentioned basic technical thought prerequisite of the utility model, right according to ordinary technical knowledge and the conventional means in this field the modification, replacement or the change of other multiple forms that above-mentioned structure made all should fall within the protection scope of the utility model.
Claims (8)
1. A target body telescopic mechanism in a magnetron sputtering film plating machine is characterized by comprising:
the sliding sleeve can slide through a through hole on a wall plate of the film coating machine; the target body is fixedly arranged at the inner end of the sliding sleeve;
the dynamic seal assembly is arranged at the perforation to realize dynamic seal;
the linear motion mechanism is arranged on the outer side of a wall plate of the film coating machine and corresponds to the sliding sleeve, and the linear motion direction is parallel to the sliding direction of the sliding sleeve;
the connecting plate is connected with the outer end of the sliding sleeve and the movable end of the linear motion mechanism; the linear motion mechanism drives the sliding sleeve to do telescopic motion through the connecting plate.
2. The target body telescoping mechanism in the magnetron sputtering coating machine of claim 1, characterized in that: the movable sealing assembly comprises a sealing fixed pipe, a spacer bush, a sealing gland and two framework oil seals, wherein the sealing fixed pipe corresponds to the perforation fixed on the outer surface of a wall plate of the film coating machine, the sliding sleeve penetrates through a middle hole of the sealing fixed pipe, and the two framework oil seals and the spacer bush are sleeved on the sliding sleeve and are located in the middle hole of the sealing fixed pipe, the spacer bush is arranged between the framework oil seals, the sealing gland is annular and sleeved on the sliding sleeve, and the sealing cover is in the outer port of the middle hole of the sealing fixed pipe and compresses the two framework oil seals and the spacer bush.
3. The target body telescoping mechanism in the magnetron sputtering coating machine of claim 1, characterized in that: the target body telescopic mechanism further comprises a guide pillar assembly, the guide pillar assembly comprises a guide pillar fixing seat, a guide pillar and a guide pipe, the guide pillar fixing seat is fixed on the outer surface of a wall plate of the film coating machine, the guide pipe is correspondingly and fixedly installed on the connecting plate, one end of the guide pillar is fixed on the guide pillar fixing seat, and the other end of the guide pillar penetrates through the guide pipe in a sliding mode.
4. The target body telescoping mechanism in the magnetron sputtering coating machine of claim 3, characterized in that: the target body telescopic mechanism comprises two sliding sleeves, two groups of dynamic sealing assemblies and two groups of guide pillar assemblies, the two sliding sleeves are correspondingly arranged on the left and right sides, the two groups of guide pillar assemblies are correspondingly arranged on the left and right sides, and the two groups of dynamic sealing assemblies are respectively arranged on the two sliding sleeves.
5. The target body telescoping mechanism in the magnetron sputtering coating machine of claim 1, characterized in that: the linear motion mechanism is an air cylinder, and a piston rod of the air cylinder is connected with the connecting plate through a floating joint.
6. The target body telescoping mechanism in the magnetron sputtering coating machine of claim 1, characterized in that: and a liquid outlet pipe and a liquid inlet pipe are arranged in the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with a liquid outlet and a liquid inlet of a cooling channel of the target body, and the outer ends of the liquid outlet pipe and the liquid inlet pipe respectively penetrate out of the outer end of the sliding sleeve.
7. The target body telescoping mechanism in the magnetron sputtering coating machine of claim 6, characterized in that: liquid pipe insulating sleeves are sleeved at the contact parts of the end parts of the liquid outlet pipe and the liquid inlet pipe and the sliding sleeve.
8. The target body telescoping mechanism in the magnetron sputtering coating machine of claim 7, characterized in that: the outer port of the sliding sleeve is fixedly covered with a protective cover, an insulating sheath is arranged in the protective cover and clings to the inner wall of the protective cover, the outer ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with an elbow water nozzle through pipe connectors, the elbow water nozzle is positioned in the protective cover, and the connecting end of the elbow water nozzle is arranged outside after being penetrated out from the side face of the protective cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920777295.1U CN210394504U (en) | 2019-05-27 | 2019-05-27 | Target body telescopic mechanism in magnetron sputtering coating machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920777295.1U CN210394504U (en) | 2019-05-27 | 2019-05-27 | Target body telescopic mechanism in magnetron sputtering coating machine |
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| CN210394504U true CN210394504U (en) | 2020-04-24 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112159967A (en) * | 2020-09-30 | 2021-01-01 | 中国电子科技集团公司第四十八研究所 | Ion beam deposition equipment for infrared metal film and film deposition method |
| CN112593193A (en) * | 2020-11-16 | 2021-04-02 | 中建材蚌埠玻璃工业设计研究院有限公司 | Vacuum magnetron sputtering coating equipment and coating method thereof |
| CN116837332A (en) * | 2023-05-09 | 2023-10-03 | 宁波招宝磁业有限公司 | Magnetron sputtering method for surface of neodymium-iron-boron magnet |
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2019
- 2019-05-27 CN CN201920777295.1U patent/CN210394504U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112159967A (en) * | 2020-09-30 | 2021-01-01 | 中国电子科技集团公司第四十八研究所 | Ion beam deposition equipment for infrared metal film and film deposition method |
| CN112159967B (en) * | 2020-09-30 | 2023-01-31 | 中国电子科技集团公司第四十八研究所 | Ion beam deposition equipment for infrared metal film and film deposition method |
| CN112593193A (en) * | 2020-11-16 | 2021-04-02 | 中建材蚌埠玻璃工业设计研究院有限公司 | Vacuum magnetron sputtering coating equipment and coating method thereof |
| CN112593193B (en) * | 2020-11-16 | 2022-12-09 | 中建材玻璃新材料研究院集团有限公司 | Vacuum magnetron sputtering coating equipment and coating method thereof |
| CN116837332A (en) * | 2023-05-09 | 2023-10-03 | 宁波招宝磁业有限公司 | Magnetron sputtering method for surface of neodymium-iron-boron magnet |
| CN116837332B (en) * | 2023-05-09 | 2023-11-17 | 宁波招宝磁业有限公司 | Magnetron sputtering method for surface of neodymium-iron-boron magnet |
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Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: 523820 Wangyuan Road/2, Yanwu Village, Dalingshan Town, Dongguan City, Guangdong Province Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd. |
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