CN210341044U

CN210341044U - Coating machine for isolating target body through translation type target door

Info

Publication number: CN210341044U
Application number: CN201920777312.1U
Authority: CN
Inventors: 李志荣; 李志方; 潘锐华; 陈思
Original assignee: DONGGUAN HUICHENG VACUUM TECHNOLOGY CO LTD
Current assignee: Guangdong Huicheng Vacuum Technology Co.,Ltd.
Priority date: 2019-05-27
Filing date: 2019-05-27
Publication date: 2020-04-17
Anticipated expiration: 2029-05-27

Abstract

The utility model discloses a coating machine for isolating a target body through a translation type target door, which comprises a vacuum coating chamber, a target body, a target cavity, a telescopic mechanism, a target door and a translation opening and closing mechanism, wherein the target body is cooled through the liquid which circularly flows through the target body, the target cavity is arranged at the bottom or the top or the side part of the vacuum coating chamber and is directly communicated with the vacuum coating chamber through a cavity opening; the telescopic mechanism is arranged on a wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the target body is driven by the telescopic mechanism to move towards the direction of the cavity opening or retract into the target cavity; the target door is arranged at the cavity opening through the translation opening and closing mechanism; the target door automatic sealing cover can be positioned at the cavity opening by driving the translation opening and closing mechanism to do translation movement towards the cavity opening; the translation opening and closing mechanism is driven to do translation movement towards the direction far away from the cavity opening, so that the target door can be automatically separated from the cavity opening and is driven by the translation opening and closing mechanism to move away from the side edge of the cavity opening in a translation manner. The utility model can ensure that the target material can not contact with the water vapor all the time in the use process.

Description

Coating machine for isolating target body through translation type target door

Technical Field

The utility model relates to a coating machine especially relates to a coating machine through target body is kept apart to translation formula target door.

Background

The sputtering target body used in the existing magnetron sputtering film plating machine widely used for production is integrally arranged in a furnace or integrally arranged on a furnace wall (lower wall, side wall or upper wall), the surface of the target material on the target body faces to a workpiece to be plated in the furnace, a furnace chamber is vacuumized and heated before film plating, argon is filled in next step, higher voltage is applied to the workpiece and the furnace wall (grounded), argon plasma is generated by argon glow discharge in the furnace, argon ion bombardment cleaning is carried out on the surface of the workpiece, and then the film plating operation is carried out: starting a cathode magnetron sputtering target power supply to generate target sputtering, sputtering target materials, applying negative bias on a workpiece, and sucking sputtered target material particles to the surface of the workpiece to deposit a film layer. Because the target generates heat in the coating operation, a water cooling device is required on the back of the target to take away the heat.

The general target material can endure a certain temperature and humidity, and after the film coating operation is finished, the temperature in the furnace is cooled to about 100 ℃, the vacuum is broken, and the furnace door is opened to take the workpiece. After opening the oven door, the target is exposed to the atmosphere, but no adverse effects and consequences occur. Some coating machine furnaces are also provided with cathode sputtering targets of various target materials, and during coating, in order to avoid mutual pollution among target bodies of different target materials, a movable shielding plate is additionally arranged in front of the target materials, and plays a role in shielding and shielding, but does not play a role in vacuum sealing.

With the continuous development of science and technology, many new materials of targets appear. In recent times, a lithium plating film layer is required to use metal lithium as a target material, and the metal lithium has the characteristics that the metal lithium cannot contact water and cannot contact water vapor at a slightly high temperature, or the metal lithium can cause explosion. The sputtering target structure of the existing magnetron sputtering coating machine can not meet the requirement of water vapor isolation, and a brand new sputtering target structure and coating machine must be redesigned. The structure of the film plating machine using the lithium material target material must meet the following requirements: 1. water cannot be used as a medium for cooling so as to ensure that the lithium material cannot be contacted with water; 2. has the independent vacuum airtight function, and can isolate from the atmosphere and isolate water vapor. Therefore, aiming at the technical characteristics, the special coating machine with the functions is provided.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that a coating machine for isolating a target body through a translation type target door is provided, which can ensure that the target can not contact with water vapor all the time in the use process.

Solve above-mentioned technical problem, the utility model discloses a technical scheme as follows:

the utility model provides a through coating machine of translation formula target door isolation target body, includes vacuum coating room and target body, realizes the cooling to the target body through the liquid of circulation flow through the target body, its characterized in that: further comprising:

the target cavity is arranged at the bottom or the top or the side part of the vacuum coating chamber and is directly communicated with the vacuum coating chamber through a cavity opening;

the telescopic mechanism is arranged on a wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the target body is driven by the telescopic mechanism to move towards the direction of the cavity opening or retract into the target cavity;

the target door is arranged at the cavity opening through the translation opening and closing mechanism; the target door automatic sealing cover can be positioned at the cavity opening by driving the translation opening and closing mechanism to do translation movement towards the cavity opening; the translation opening and closing mechanism is driven to do translation movement towards the direction far away from the cavity opening, so that the target door can be automatically separated from the cavity opening and is driven by the translation opening and closing mechanism to move away from the side edge of the cavity opening in a translation manner.

The liquid circulated through the target body for cooling is silicone oil.

And an air exhaust port for vacuumizing the target cavity is arranged on the wall plate of the target cavity.

The translation opening and closing mechanism comprises a first linear motion mechanism, a translation plate, a connecting rod, a spring and a limiting wheel, the first linear motion mechanism is installed on a wall plate of the vacuum coating chamber, the translation plate is installed at the movable end of the first linear motion mechanism, the target door is arranged opposite to the translation plate, the connecting rod and the spring are located between the target door and the translation plate, two ends of the connecting rod are respectively hinged with the target door and the translation plate, two ends of the spring are respectively fixedly connected with the target door and the translation plate, and the limiting wheel is arranged on the side edge of the cavity opening; when the first linear motion mechanism moves away from the cavity opening, the connecting rod inclines to the side, the spring contracts, and the target door is pulled up; when the first linear motion mechanism moves towards the cavity opening until the target door is opposite to the cavity opening, the limiting wheel abuts against the side face of the target door to limit the target door to continuously translate, the translation plate continuously moves forwards, the connecting rod is caused to rotate obliquely from side to vertically press down the target door, and meanwhile, the spring is lengthened.

A convex sealing ring is arranged along the edge of the cavity opening, a target door sealing ring is arranged on the target door corresponding to the sealing ring, and a flange is arranged along the edge of the target door; the flange surrounds the seal ring when the target door seals the lid at the port.

The first linear motion mechanism is an air cylinder, the air cylinder is correspondingly installed on the outer surface of a wall plate of the vacuum coating chamber through a first movable sealing assembly, and a piston rod of the air cylinder penetrates into the vacuum coating chamber.

The telescopic mechanism comprises a second linear motion mechanism, a sliding sleeve, a connecting plate and a second dynamic seal assembly, the sliding sleeve movably penetrates through a wall plate of the target cavity and is sealed through the second dynamic seal assembly, the target body is fixedly installed at the inner end of the sliding sleeve, the second linear motion mechanism is installed on the outer surface of the wall plate of the target cavity, and the connecting plate is connected with the movable end of the second linear motion mechanism and the outer end of the sliding sleeve.

The target body is internally provided with a liquid flow channel, a liquid outlet pipe and a liquid inlet pipe are arranged in the sliding sleeve, the liquid outlet pipe and the liquid inlet pipe are insulated from the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with a liquid outlet and a liquid inlet of the liquid flow channel, and the outer ends of the liquid outlet pipe and the liquid inlet pipe penetrate out of the outer end of the sliding sleeve.

The target body comprises a target material, a copper plate, a pole shoe, a waterproof rubber sheet, a target holder and a plurality of magnets, wherein the surface of the target holder facing the vacuum coating chamber is provided with an installation groove; a liquid flow channel is formed between the copper plate and the pole shoe, a liquid outlet channel and a liquid inlet channel which are communicated with the liquid flow channel are also arranged on the target body, and the outer ends of the liquid outlet channel and the liquid inlet channel are a liquid outlet and a liquid inlet.

The coating machine also comprises a target body fixing plate, the target body fixing plate is fixed at the inner end of the sliding sleeve, the target holder is fixed on the target body fixing plate through an insulating fixing assembly, and a gap is reserved between the target holder and the target body fixing plate.

Compared with the prior art, the utility model discloses following beneficial effect has:

1. the utility model discloses an unprecedented coating machine that has independent target body vacuum isolation space realizes the sealed isolation to the target body through setting up target chamber and target door in addition, is fit for being used for the sputtering of the special target (like metal lithium) that can not see water and moisture. The utility model discloses a translation headstock gear realizes that the automation of target door is opened and the self-sealing lid closes. The utility model discloses a target body still can remove through telescopic machanism to can adjust the target body to reasonable sputtering distance, it is visible, under the function that the realization was sealed the isolation to the target body, efficiency when also can not influence the coating film.

2. The utility model discloses a silicon oil has avoided the unfavorable risk brought by the seepage of cooling water in the current coating machine as the liquid of target body cooling usefulness completely.

3. The utility model discloses set up the extraction opening alone on the target chamber, realize the independent evacuation of target chamber.

4. The utility model discloses a translation hoist mechanism drives the translation through first linear motion mechanism, and the cooperation through connecting rod, spring and spacing wheel can realize that the automation of target door is opened and the self-sealing lid closes, simple structure, and the operation is reliable stable.

Drawings

Fig. 1 is one of schematic cross-sectional views of a target door of the present invention in a closed state, the view direction being a front view direction;

fig. 2 is a second schematic sectional view of the target door of the present invention in a closed state, the view direction being a side view direction;

fig. 3 is one of schematic cross-sectional views of the target door of the present invention in an opened state, the view direction being a front view direction;

fig. 4 is a second schematic sectional view of the target door of the present invention in an opened state, the view direction being a side view direction;

FIG. 5 is an enlarged schematic view taken at I in FIG. 1;

FIG. 6 is an enlarged schematic view taken at II in FIG. 1;

FIG. 7 is an enlarged schematic view at III in FIG. 2;

FIG. 8 is an enlarged schematic view taken at IV in FIG. 3;

FIG. 9 is an enlarged schematic view at V in FIG. 3;

FIG. 10 is a schematic view of the target and the telescopic mechanism of the present invention;

FIG. 11 is an enlarged schematic view taken at VI in FIG. 4;

FIG. 12 is an enlarged schematic view at VIII in FIG. 2;

FIG. 13 is an enlarged schematic view of region VII of FIG. 11.

The reference numerals in the drawings mean:

1, vacuum coating chamber; 1-1, the bottom of a vacuum coating chamber; 2, a target cavity; 2-1, an air extraction opening; 2-2 bottom wall plate of target cavity; 2-3 cavities; 2-4 sealing rings; 3 a target body; 3-1, a target material; 3-2 copper plates; 3-3 magnets; 3-4 pole shoes; 3-5 of waterproof rubber; 3-6 layering; 3-7 shielding coamings; 3-8 target seats; 3-9 target body fixing plates; 3-10 connecting bolts; 3-11 insulating pads; 3-12 insulating sleeves; 3-13 insulating covers; 4 target door; 4-1 target door sealing ring; 4-2 flange; 5, translating the opening and closing mechanism; 5-1 a first linear motion mechanism; 5-2 piston rods; 5-3 connecting sleeves; 5-4 springs; 5-5 spring fixing seats; 5-6 translation plates; 5-7 limiting columns; 5-8 connecting rod seats; 5-9 connecting rods; 5-10 limiting wheels; 5-11 limiting wheel seats; 5-12 height limiting blocks; 5-13 sliding blocks; 5-14 guide rails; 6, a telescopic mechanism; 6-1 sliding sleeve; 6-3 of a protective cover; 6-4 insulating sheath; 6-5 connecting plates; 6-6 guide posts; 6-7 guide tubes; 6-8 guide post fixing seats; 6-9 second linear motion mechanism; 6-10 floating joints; 7, a first dynamic seal assembly; 7-1 sealing seat; 7-2 oil storage rings; 7-3, a first framework oil seal; 7-4, pressing a ring; 7-5 a first gland; 7-6 welding seats; 7-8 oil holes; 7-9 lubricating sleeve; 8, a second dynamic seal assembly; 8-1 second framework oil seal; 8-2, sealing and fixing the tube; 8-3 spacer bushes; 8-4 second sealing gland; 9-1 liquid flow channel; 9-2 liquid inlet pipe; 9-3 liquid outlet pipes; 9-4 liquid pipe insulating sleeves; 9-5 locking nuts; 9-6, sealing and pressing the sleeve; 9-7 pipe sealing rings; 9-8 pipe connectors; 9-9 elbow water nozzles; 9-10 liquid inlet channels; 9-11 liquid outlet channels; 10 silicone oil.

Detailed Description

The present invention will be further described with reference to the following examples.

As shown in fig. 1 to 13, a coating machine for isolating a target body through a translation type target door comprises a vacuum coating chamber 1, a target body 3, a target chamber 2, a telescopic mechanism 6, a target door 4 and a translation opening and closing mechanism 5. The coating machine realizes the cooling of the target body 3 through the liquid which circularly flows through the target body.

As shown in FIG. 1, the target chamber 2 of the present embodiment is disposed at the bottom 1-1 of the vacuum coating chamber, but the target chamber 2 may be disposed at the top or side of the vacuum coating chamber, and the mounting positions of other components will also be changed. The target cavity 2 is directly communicated with the vacuum coating chamber 1 through a cavity port 2-3 at the upper end. The telescopic mechanism 6 is mounted on the bottom wall plate 2-2 of the target chamber 2. The target body 3 is arranged on the telescopic mechanism 6 and is positioned in the target cavity 2, the telescopic mechanism 6 drives the target body 3 to move towards the cavity opening 2-3 or to retract into the target cavity 2, and the telescopic mechanism 6 of the embodiment drives the target body 3 to move up and down. The target door 4 is arranged at the cavity opening 2-3 through a translation opening and closing mechanism 5. The target door 4 can be automatically sealed at the cavity opening 2-3 by driving the translation opening and closing mechanism 5 to do translation movement towards the cavity opening 2-3; the translation opening and closing mechanism 5 is driven to do translation movement towards the direction far away from the cavity opening 2-3, so that the target door 4 can be automatically separated from the cavity opening 2-3 and driven by the translation opening and closing mechanism 5 to be translated towards the side edge of the cavity opening 2-3, and the cavity opening is opened.

In order to completely avoid the contact between the target material and water, in this embodiment, the silicone oil is used as the liquid for cooling that circulates through the target body, and the silicone oil is used as the coolant.

In order to independently vacuumize the target cavity 2, an air suction port 2-1 for vacuuming the target cavity is arranged on the left side wall plate of the target cavity 2. When the vacuum pumping is performed, the pumping hole 2-1 is externally connected with a vacuum pump.

As shown in fig. 5 to 8, the translational opening and closing mechanism 5 of the present embodiment includes a first linear motion mechanism 5-1 and a translational plate 5-6, the vacuum coating device comprises a connecting rod 5-9, a spring 5-4 and a limiting wheel 5-10, wherein a first linear motion mechanism 5-1 is installed on a left side wall plate of a vacuum coating chamber 1, a translation plate 5-6 is horizontally installed at a movable end of the first linear motion mechanism 5-1, a target door 4 and the translation plate 5-6 are arranged in a face-to-face mode, the target door 4 is located below the translation plate 5-6, the connecting rod 5-9 and the spring 5-4 are located between the target door 4 and the translation plate 5-6, two ends of the connecting rod 5-9 are respectively hinged with the target door 4 and the translation plate 5-6, two ends of the spring 5-4 are respectively fixedly connected with the target door 4 and the translation plate 5-6, and the limiting wheel 5-10 is arranged on the right side edge of a cavity opening 2. In the use process, when the cavity opening 2-3 needs to be opened, the first linear motion mechanism 5-1 moves in the direction away from the cavity opening, namely moves leftwards, the connecting rod 5-9 inclines sideward, the spring 5-4 contracts, the target door 4 is pulled up, the first linear motion mechanism 5-1 continues to move leftwards, and the target door 4 is driven to translate to the left side of the cavity opening 2-3, so that the cavity opening 2-3 is opened; when the cavity opening 2-3 needs to be closed, the first linear motion mechanism 5-1 moves towards the cavity opening 2-3, namely moves rightwards, until the target door 4 is opposite to the cavity opening 2-3, namely the target door 4 is positioned right above the cavity opening 2-3, the limiting wheel 5-10 is abutted against the right side surface of the target door 4 to limit the target door 4 to continue to translate rightwards, at the moment, the first linear motion mechanism 5-1 continues to move rightwards, the connecting rod 5-9 is forced to continuously swing straight, the distance between the target door 4 and the translation plate 5-6 is gradually increased, the spring 5-4 is stretched, and finally the target door 4 tightly covers the cavity opening 2-3.

As shown in figure 8, the upper surface of the target door 4 facing the translation plate 5-6 is provided with a limiting column 5-7, when the spring 5-4 contracts and the target door 4 is pulled up, the upper end surface of the limiting column 5-7 is abutted against the translation plate 5-6, so that the situation that the height of the target door 4 pulled up is too high, and the target door 4 cannot be contacted with the limiting wheel 5-10 is avoided.

The mounting structure of the limiting wheel 5-10 is as follows: a limiting wheel seat 5-11 is fixed on the right side of the cavity opening 2-3 through a bolt, and a limiting wheel 5-10 is rotatably arranged on the limiting wheel seat 5-11 through a wheel shaft.

The translation opening and closing mechanism 5 of the embodiment is provided with four connecting rods 5-9 and four springs 5-4, connecting rod seats 5-8 are respectively arranged on the target door 4 and the translation plate 5-6 corresponding to the connecting rods 5-9, two ends of the connecting rods 5-9 are respectively hinged on the connecting rod seats 5-8 through pin shafts, spring fixing seats 5-5 are respectively arranged on the target door 4 and the translation plate 5-6 corresponding to the springs 5-4, and two ends of the springs 5-4 are respectively fixed on the spring fixing seats 5-5.

The sealing and covering structure of the target door 4 is as follows: a sealing ring 2-4 protruding upwards is arranged along the edge of the cavity opening 2-3, a target door sealing ring 4-1 is arranged on the target door 4 corresponding to the sealing ring 2-4, and a flange 4-2 is arranged along the edge of the target door 4. The flange 4-2 surrounds the sealing ring 2-4 when the target door 4 seals the lid at the cavity opening 2-3.

As shown in FIG. 7, two guide rails 5-14 are arranged on the front side and the rear side of the cavity opening 2-3, the guide rails 5-14 are parallel to the translation direction of the target door 4, the width of the translation plate 5-6 is larger than that of the target door 4, a sliding block 5-13 is fixed on the translation plate 5-6 through a bolt, a height limiting block 5-12 is arranged between the translation plate 5-6 and the sliding block 5-13, the translation plate 5-6 is stably kept at a certain height through the height limiting block 5-12, a sliding groove is arranged on the sliding block 5-13 and is clamped on the guide rails 5-14 in a matching manner, so that the translation plate 5-6 moves along the guide rails, and the translation is more stable.

The first linear motion mechanism 5-1 of this embodiment is a cylinder, the cylinder is correspondingly installed on the outer surface of the left side wall plate of the vacuum coating chamber 1 through the first movable sealing assembly 7, and the piston rod 5-2 of the cylinder penetrates into the vacuum coating chamber 1 rightwards. A connecting sleeve 5-3 is fixed on the left side edge of the translation plate 5-6 connected with the air cylinder through a bolt, and the end part of the piston rod 5-2 positioned in the vacuum coating chamber 1 is in threaded connection with the connecting sleeve 5-3, so that the translation plate 5-6 and the piston rod 5-2 are quickly assembled and disassembled.

As shown in figure 5, the first dynamic seal assembly 7 comprises a welding seat 7-6, a seal seat 7-1, a first framework oil seal 7-3, an oil storage ring 7-2 and a lubricating sleeve 7-9, wherein a communicating hole is correspondingly formed in the left side wall plate of the vacuum coating chamber 1, the welding seat 7-6 is welded on the outer surface of the left side wall plate of the vacuum coating chamber 1 corresponding to the communicating hole, a middle hole is formed in the middle of the welding seat 7-6 corresponding to the communicating hole, the seal seat 7-1 is fixed on the welding seat 7-6 through a bolt and sealed through a sealing ring, a convex ring at the right end of the seal seat 7-1 is inserted into the middle hole of the welding seat 7-6, a step hole is formed in the middle of the seal seat 7-1, an air cylinder is fixedly installed at the left end of the seal seat 7-1 through a bolt, and a piston rod 5-2, and the first skeleton oil 7-3, the oil storage ring 7-2 and the lubricating sleeve 7-9 are respectively arranged in the step holes, the piston rod is sealed through the first skeleton oil 7-3, the oil injection hole 7-8 is arranged on the sealing seat 7-1 corresponding to the oil storage ring 7-2, and the oil can be injected into the oil storage ring 7-2 through the oil injection hole 7-8. The first dynamic seal assembly 7 of the embodiment is provided with three first framework oil seals 7-3, the oil storage ring 7-2 is arranged between the two first framework oil seals, and the first framework oil seals 7-3 and the oil storage ring 7-2 are arranged in the stepped hole through the compression ring 7-4 and the first seal gland 7-5, so that the three first framework oil seals 7-3 are compressed to realize better sealing.

As shown in fig. 9 to 12, the telescopic mechanism 6 of this embodiment includes a second linear motion mechanism 6-9, a sliding sleeve 6-1, a connecting plate 6-5 and a second dynamic seal assembly 8, the sliding sleeve 6-1 movably penetrates through the bottom wall plate 2-2 of the target cavity 2 and is sealed by the second dynamic seal assembly 8, the target body 3 is fixedly mounted at the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve is the inner end in this embodiment), the second linear motion mechanism 6-9 is mounted at the lower surface of the bottom wall plate 2-2 of the target cavity, and the connecting plate 6-5 connects the movable end of the second linear motion mechanism 6-9 and the outer end of the sliding sleeve 6-1 (the lower end of the sliding sleeve is the outer end in this embodiment). When the second linear motion mechanism 6-9 does up-and-down linear motion, the sliding sleeve 6-1 is driven to synchronously move through the connecting plate 6-5.

The second linear motion mechanism 6-9 is also an air cylinder, and a piston rod of the air cylinder is connected with the middle part of the connecting plate 6-5 through a floating joint 6-10. The floating joints 6-10 are adopted to overcome the deviation of the connecting plate from the axis of the cylinder caused by slight swinging or deviation of the plate surface when the connecting plate moves up and down.

As shown in FIG. 10 and FIG. 11, in this embodiment, a liquid channel 9-1 is provided in the target 3, a liquid outlet tube 9-3 and a liquid inlet tube 9-2 are provided in the sliding sleeve 6-1, the liquid outlet tube 9-3 and the liquid inlet tube 9-2 are insulated from the sliding sleeve 6-1, the inner ends of the liquid outlet tube 9-3 and the liquid inlet tube 9-2 are respectively connected with the liquid outlet and the liquid inlet of the liquid channel, and the outer ends of the liquid outlet tube 9-3 and the liquid inlet tube 9-2 respectively penetrate out of the outer end of the sliding sleeve 6-1. The end parts of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 which penetrate out of the outer end of the sliding sleeve 6-1 are used for being connected with an external pipeline. When the device is used, silicon oil enters the liquid flow channel 9-1 from the liquid inlet pipe 9-2, carries away heat of the target body 3 when flowing through the liquid flow channel 9-1, then flows out of the liquid outlet pipe 9-3, and is cooled by continuous circulation of the silicon oil, and the arrow directions in the figures 11 and 12 show the inlet and outlet directions of the silicon oil.

As shown in fig. 10 and 11, the target body 3 has the following structure: the target body 3 comprises a target 3-1, a copper plate 3-2, pole shoes 3-4, waterproof rubber sheets 3-5, a target holder 3-8 and a plurality of magnets 3-3, wherein a mounting groove is formed in the surface, facing the vacuum coating chamber 1, of the target holder 3-8 (in the embodiment, the upper surface of the target holder is the surface facing the vacuum coating chamber), the waterproof rubber sheets 3-5 are flatly attached to the bottom surface of the mounting groove, the pole shoes 3-4 are arranged on the surface of the waterproof rubber sheets 3-5, the copper plate 3-2 is sealed at the groove openings of the mounting groove through sealing strips pressed on the periphery, the magnets 3-3 are uniformly distributed between the copper plate 3-2 and the pole shoes 3-4, and the target 3-1 is flatly attached to the outer surface of the copper plate 3-2. A liquid flow channel 9-1 is formed between the copper plate 3-2 and the pole shoe 3-4, a liquid outlet channel 9-11 and a liquid inlet channel 9-10 which are communicated with the liquid flow channel are also arranged on the target body 3, and the lower ends of the liquid outlet channel 9-11 and the liquid inlet channel 9-10 are a liquid outlet and a liquid inlet.

The specific fixing structure of the target 3-1 is as follows: the pressing strips 3-6 are fixed on the edges of the upper surfaces of the target seats 3-8 through bolts, the copper plates 3-2 are fixed on the upper surfaces of the target seats 3-8 through bolts for fixing the pressing strips 3-6, the sealing strips are located between the copper plates 3-2 and the upper surfaces of the target seats 3-8, the periphery of the target 3-1 is pressed between the pressing strips 3-6 and the copper plates 3-2, and therefore the target 3-1 can be detachably fixed on the upper surfaces of the copper plates.

As shown in figure 11, the liquid outlet channels 9-11 and the liquid inlet channels 9-10 are symmetrically arranged by taking the central line of the target body 3 as the center, and the liquid outlet channels 9-11 and the liquid inlet channels 9-10 are respectively communicated with the liquid flow channel 9-1 after passing through the target seat 3-8, the waterproof rubber sheet 3-5 and the pole shoe 3-4.

Specifically, the telescopic mechanism 6 of the embodiment includes two sliding sleeves 6-1 and two sets of second dynamic seal assemblies 8, the two sliding sleeves 6-1 are symmetrically arranged with the center line of the target body 3 as the center, the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively arranged in the two sliding sleeves 6-1, the lower port of the liquid outlet channel 9-11 is connected with the upper end of the liquid outlet pipe 9-3, and the lower port of the liquid inlet channel 9-10 is connected with the upper end of the liquid inlet pipe 9-2.

As shown in fig. 9 and 10, the second dynamic seal assembly 8 includes a seal fixing tube 8-2 and a second framework oil seal 8-1, the seal fixing tube 8-2 is correspondingly fixed on the lower surface of the bottom wall plate 2-2 of the target cavity, the sliding sleeve 6-1 penetrates through the middle hole of the seal fixing tube 8-2, the second framework oil seal 8-1 is arranged in the middle hole of the seal fixing tube 8-2, and sealing is achieved through the second framework oil seal 8-1. The second dynamic seal assembly 8 of this embodiment is provided with two second framework oil seals 8-1, the second dynamic seal assembly is further provided with a spacer 8-3 and a second seal gland 8-4, the two second framework oil seals 8-3 are separated by the spacer 8-3, the second seal gland 8-4 is sealed at the lower port of the middle hole of the seal fixing pipe 8-2 by a seal cover 8-4, and the second framework oil seals 8-1 and the spacer 8-3 are fixed by the second seal gland 8-4.

The coating machine of this embodiment still is equipped with two sets of guide pillar subassemblies, makes second linear motion mechanism more stable when driving the motion of slip sleeve through the guide pillar subassembly. The guide post assembly comprises a guide post fixing seat 6-8, a guide post 6-6 and a guide pipe 6-7, the guide post fixing seat 6-8 is fixed on the lower surface of a bottom wall plate 2-2 of the target cavity through bolts, the guide pipe 6-7 is fixedly installed on the upper surface of a connecting plate 6-5 through bolts, one end of the guide post 6-6 is fixed on the guide post fixing seat 6-8, the other end of the guide post 6-6 movably penetrates through the guide pipe 6-7, and the guide post 6-6 and the guide pipe 6-7 slide in a matched mode to enable movement to be stable.

In order to realize the insulation between the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 and the sliding sleeve, liquid pipe insulation sleeves 9-4 are sleeved at the contact parts of the end parts of the liquid outlet pipe and the liquid inlet pipe and the sliding sleeve. A protective cover 6-3 is fixed at the outer end of the sliding sleeve 6-1, an insulating sheath 6-4 is arranged in the protective cover 6-3 and close to the inner wall of the protective cover, a connecting plate 6-5 is connected with the lower end of the protective cover 6-3 through a bolt, the outer ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (the lower ends of the liquid outlet pipe and the liquid inlet pipe are the outer ends of the liquid outlet pipe and the liquid inlet pipe in the embodiment) are respectively connected with an elbow water nozzle 9-9 through a pipe connector 9-8, the elbow water nozzle 9-9 is positioned in the protective cover 6-3, and the connecting end of the elbow water nozzle 9-9 penetrates out of the side surface of the protective.

As shown in FIG. 10, the inner end of the sliding sleeve 6-1 is hermetically connected with the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 by the following structure: the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve is the inner end of the sliding sleeve in this embodiment) is provided with a sealing step hole, the upper end of the sealing step hole is provided with a counter bore, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (the upper ends of the liquid outlet pipe and the liquid inlet pipe are the inner ends of the liquid outlet pipe and the liquid inlet pipe in this embodiment) respectively pass through the corresponding sealing step hole, the sealing step hole is internally provided with two sealing pressure sleeves 9-6 and two pipe sealing rings 9-7, the two sealing pressure sleeves 9-6 and the two pipe sealing rings 9-7 are arranged at intervals, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively in threaded connection with a locking nut 9-5, the locking nut 9-5 is positioned in the counter bore, and the liquid outlet pipe and the.

In order to better install the target 3, the coating machine of the embodiment further comprises a target fixing plate 3-9, the target fixing plate 3-9 is fixed at the upper end of the sliding sleeve 6-1, the target holder 3-8 is fixed above the target fixing plate 3-9 through an insulating fixing component, and a certain interval is reserved between the target holder 3-8 and the target fixing plate 3-9. The periphery of the target body fixing plate 3-9 is fixedly provided with a shielding coaming 3-7, the shielding coaming 3-7 surrounds the periphery of the target body 3, and a certain interval is left between the shielding coaming 3-7 and the target body 3, thereby preventing lateral discharge.

As shown in fig. 13, the structure of the insulation fixing assembly is: the insulating fixing assembly comprises connecting bolts 3-10, insulating pads 3-11, insulating sleeves 3-12 and insulating covers 3-13, the connecting bolts 3-10 penetrate through the target fixing plate and are in threaded connection with the target base, the insulating pads 3-11 are sleeved on the connecting bolts 3-10 and are padded between the target fixing plate 3-9 and the target base 3-8, the insulating sleeves 3-12 are sleeved on the heads of the connecting bolts 3-10 and the parts in contact with the target fixing plate, so that the connecting bolts are insulated from the target fixing plate, and the insulating covers 3-13 cover the port parts of the insulating sleeves 3-12, so that the heads of the connecting bolts are sealed in the insulating sleeves.

The specific use mode of the film coating machine of the utility model is as follows: because the sputtering target material can not contact water and moist air, when in non-coating operation, the target door 4 is always in a closed state, the telescopic mechanism 6 drives the target body 3 to descend to the lowest point, the air extraction opening 2-1 is externally connected with a special air extraction pump to extract air from the target cavity 2, and the vacuum in the target cavity 2 is maintained. When the film coating operation is needed, a furnace door of the vacuum film coating chamber 1 of the film coating machine is opened, a workpiece to be coated is placed in the furnace door, and the vacuum film coating chamber 1 is vacuumized. When the vacuum degree in the vacuum coating chamber 1 is close to the vacuum degree in the target cavity 2, the air cylinder of the translation opening and closing mechanism 5 is started, the piston rod of the air cylinder pulls the translation plate to translate leftwards, the target door 4 is pulled up, the vacuum sealing of the target cavity 2 is released, at the moment, the translation plate 5-6 continues to move leftwards along the guide rail, the target door 4 continues to be pulled upwards by the pulling force of the spring 5-4 until the limiting column 5-7 on the target door 4 abuts against the translation plate 5-6. And continuously pulling the translation plates 5-6 to move leftwards until the target door 4 is completely staggered with the cavity opening 2-3 of the target cavity, and completing the opening of the target door 4. After the target door 4 is opened, the coating operation is carried out: and introducing circularly flowing silicon oil 10 into the target body 3 for cooling, and then starting the telescopic mechanism 6 to drive the target body 3 to rise towards the cavity opening 2-3, so as to adjust the coating distance between the target body 3 and the target base (workpiece). And then, heating the interior of the vacuum coating chamber 1 by a heater, vacuumizing to a background vacuum, introducing a proper amount of argon or reaction gas to a working vacuum degree, starting a sputtering target power supply and a bias power supply to perform ion bombardment cleaning and coating, cooling the workpiece in the vacuum coating chamber after the coating is finished, and continuously vacuumizing the vacuum coating chamber 1. At the moment, the target body 3 is driven to descend to the lowest position of the target cavity 2 through the telescopic mechanism 6, the translation opening and closing mechanism 5 is started, the target door 4 is driven to move rightwards, the target door 4 stops when touching the limiting wheels 5-10, the target door 4 is over against the target cavity opening 2-3 at the moment, the translation plate 5-6 continues moving rightwards, the connecting rod 5-9 is forced to turn to the vertical direction from the inclined direction, the target door 4 is pressed downwards, the cavity opening 2-3 is sealed, and meanwhile the spring 5-4 is lengthened. And opening the furnace door to take the workpiece when the workpiece is cooled to a preset temperature, and finishing the film coating operation.

The coating machine of this embodiment through target body is kept apart to translation formula target door is not the only implementation mode, can adopt similar magnetron sputtering target that has translation target door as required, design into the coating machine of many targets side by side, also can design into the coating machine of the single target or many targets side by side of following the top of vacuum coating room and sputtering downwards, also can design into the coating machine of a set of opposite targets or multiunit opposite targets relative up and down, can also design into the magnetron sputtering target that has translation target door vertical dress single target or many targets coating machine on the lateral wall of vacuum coating room, the aforesaid all belongs to the scope protected by the utility model discloses the scheme.

Claims

1. The utility model provides a through coating machine of translation formula target door isolation target body, includes vacuum coating room and target body, through circulation flow through the liquid realization of target body is right the cooling of target body, its characterized in that: further comprising:

the telescopic mechanism is arranged on a wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the target body is driven by the telescopic mechanism to move towards the cavity opening or retract into the target cavity;

the target door is arranged at the cavity opening through the translation opening and closing mechanism; the translation opening and closing mechanism is driven to do translation movement towards the cavity opening, so that the target door is automatically sealed at the cavity opening; the translation opening and closing mechanism is driven to do translation movement towards the direction far away from the cavity opening, so that the target door can be automatically separated from the cavity opening and is driven by the translation opening and closing mechanism to move towards the side edge of the cavity opening in a translation way.

2. The coater for isolating a target body through a translating target door as recited in claim 1 wherein: the liquid circulated through the target body for cooling is silicone oil.

3. The coater for isolating a target body through a translating target door as recited in claim 1 wherein: and an air exhaust port for vacuumizing the target cavity is arranged on the wall plate of the target cavity.

4. The coater for isolating a target body through a translating target door as recited in claim 1 wherein: the translation opening and closing mechanism comprises a first linear motion mechanism, a translation plate, a connecting rod, a spring and a limiting wheel, the first linear motion mechanism is installed on a wall plate of the vacuum coating chamber, the translation plate is installed at the movable end of the first linear motion mechanism, the target door is arranged opposite to the translation plate, the connecting rod and the spring are located between the target door and the translation plate, two ends of the connecting rod are respectively hinged with the target door and the translation plate, two ends of the spring are respectively fixedly connected with the target door and the translation plate, and the limiting wheel is arranged on the side edge of the cavity opening; when the first linear motion mechanism moves away from the cavity opening, the connecting rod inclines to the side, the spring contracts, and the target door is pulled up; when the first linear motion mechanism moves towards the cavity opening until the target door is opposite to the cavity opening, the limiting wheel abuts against the side face of the target door to limit the target door to move continuously.

5. The coater of claim 4 wherein the target body is isolated by a translating target door, wherein: a convex sealing ring is arranged along the edge of the cavity opening, a target door sealing ring is arranged on the target door corresponding to the sealing ring, and a flange is arranged along the edge of the target door; the flange surrounds the seal ring when the target door seal cover is at the port.

6. The coater of claim 5 wherein the target body is isolated by a translating target door, wherein: the first linear motion mechanism is an air cylinder, the air cylinder is correspondingly installed on the outer surface of a wall plate of the vacuum coating chamber through a first movable sealing assembly, and a piston rod of the air cylinder penetrates into the vacuum coating chamber.

7. The coater for isolating a target body through a translating target door as recited in claim 1 wherein: telescopic machanism includes second linear motion mechanism, sliding sleeve, connecting plate and second dynamic seal subassembly, the sliding sleeve activity is passed the wallboard in target chamber, through the second dynamic seal subassembly is sealed, the target body fixed mounting be in sliding sleeve's inner end, second linear motion mechanism installs the surface of the wallboard in target chamber, the connecting plate is connected second linear motion mechanism's expansion end with sliding sleeve's outer end.

8. The coater of claim 7 wherein the target body is isolated by a translating target door, wherein: the target body is internally provided with a liquid flow passage, a liquid outlet pipe and a liquid inlet pipe are arranged in the sliding sleeve, the liquid outlet pipe and the liquid inlet pipe are insulated with the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with the liquid outlet and the liquid inlet of the liquid flow passage, and the outer ends of the liquid outlet pipe and the liquid inlet pipe are respectively penetrated out from the outer end of the sliding sleeve.

9. The coater for isolating a target body through a translating target door according to claim 8 wherein: the target body comprises a target material, a copper plate, a pole shoe, a waterproof rubber sheet, a target holder and a plurality of magnets, wherein an installation groove is formed in the surface of the target holder facing a vacuum coating chamber, the waterproof rubber sheet is flatly attached to the bottom surface of the installation groove, the pole shoe is arranged on the surface of the waterproof rubber sheet, a copper plate sealing cover is arranged at the notch of the installation groove, the magnets are distributed between the copper plate and the pole shoe, and the target material is flatly attached and fixed to the outer surface of the copper plate; the liquid flow channel is formed between the copper plate and the pole shoe, the target body is also provided with a liquid outlet channel and a liquid inlet channel which are communicated with the liquid flow channel, and the outer ends of the liquid outlet channel and the liquid inlet channel are the liquid outlet and the liquid inlet.

10. A coater for isolating a target body through a translating target door as recited in claim 9 wherein: the coating machine further comprises a target body fixing plate, the target body fixing plate is fixed at the inner end of the sliding sleeve, the target holder is fixed on the target body fixing plate through an insulating fixing assembly, and a gap is reserved between the target holder and the target body fixing plate.