CN210711721U - Coating machine for isolating target body through turnover target door - Google Patents
Coating machine for isolating target body through turnover target door Download PDFInfo
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- CN210711721U CN210711721U CN201920777374.2U CN201920777374U CN210711721U CN 210711721 U CN210711721 U CN 210711721U CN 201920777374 U CN201920777374 U CN 201920777374U CN 210711721 U CN210711721 U CN 210711721U
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Abstract
The utility model discloses a coating machine for isolating a target body through a turnover type target door, which comprises a vacuum coating chamber, a target body, a target cavity, a telescopic mechanism, a target door and a turnover opening and closing mechanism, wherein the target body is cooled through liquid circularly flowing through the target body, the target cavity is arranged at the bottom or the top or the side part of the vacuum coating chamber and is directly communicated with the vacuum coating chamber through a cavity opening; the telescopic mechanism is arranged on a wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the target body is driven by the telescopic mechanism to move towards the direction of the cavity opening or retract into the target cavity; the target door is installed at the cavity opening through the turnover opening and closing mechanism, the target door is driven to turn over through the turnover opening and closing mechanism, and the cavity opening is closed or opened through the turnover target door sealing cover. The utility model can ensure that the target material can not contact with the water vapor all the time in the use process.
Description
Technical Field
The utility model relates to a coating machine, in particular to a coating machine for isolating a target body through a turnover target door.
Background
The sputtering target body used in the existing magnetron sputtering film plating machine widely used for production is integrally arranged in a furnace or integrally arranged on a furnace wall (lower wall, side wall or upper wall), the surface of the target material on the target body faces to a workpiece to be plated in the furnace, a furnace chamber is vacuumized and heated before film plating, argon is filled in next step, higher voltage is applied to the workpiece and the furnace wall (grounded), argon plasma is generated by argon glow discharge in the furnace, argon ion bombardment cleaning is carried out on the surface of the workpiece, and then the film plating operation is carried out: starting a cathode magnetron sputtering target power supply to generate target sputtering, sputtering target materials, applying negative bias on a workpiece, and sucking sputtered target material particles to the surface of the workpiece to deposit a film layer. Because the target generates heat in the coating operation, a water cooling device is required on the back of the target to take away the heat.
The general target material can endure a certain temperature and humidity, and after the film coating operation is finished, the temperature in the furnace is cooled to about 100 ℃, the vacuum is broken, and the furnace door is opened to take the workpiece. Although the target is exposed to the atmosphere after opening the oven door, no inadmissible adverse effects and consequences generally occur. Some coating machine furnaces are also provided with cathode sputtering targets of various target materials, and during coating, in order to avoid mutual pollution among target bodies of different target materials, a movable shielding plate is additionally arranged in front of the target materials, and plays a role in shielding and shielding, but does not play a role in vacuum sealing.
With the continuous development of science and technology, many new materials of targets appear. In recent times, a lithium plating film layer is required to use metal lithium as a target material, and the metal lithium has the characteristics that the metal lithium cannot contact water and cannot contact water vapor at a slightly high temperature, or the metal lithium can cause explosion. The sputtering target structure of the existing magnetron sputtering coating machine can not meet the requirement of isolating the atmosphere (the air contains water vapor), and a brand new sputtering target structure and coating machine must be redesigned. The structure of the film plating machine using the lithium material target material must meet the following requirements: 1. water cannot be used as a medium for cooling so as to ensure that the lithium material cannot be contacted with water; 2. has the independent vacuum airtight function, and can isolate from the atmosphere and isolate water vapor. Therefore, aiming at the technical characteristics, the special coating machine with the functions is provided.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a coating machine for isolating a target body through a turnover target door is provided, which can ensure that the target can not contact with water vapor all the time in the use process.
Solve above-mentioned technical problem, the utility model discloses a technical scheme as follows:
the utility model provides a through coating machine of convertible target door isolation target body, includes vacuum coating room and target body, realizes the cooling to the target body through the liquid of circulation flow through the target body, its characterized in that: further comprising:
the target cavity is arranged at the bottom or the top or the side part of the vacuum coating chamber and is directly communicated with the vacuum coating chamber through a cavity opening;
the telescopic mechanism is arranged on a wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the target body is driven by the telescopic mechanism to move towards the direction of the cavity opening or retract into the target cavity;
the target door is installed at the cavity opening through the overturning opening and closing mechanism, the target door is driven to overturn through the overturning opening and closing mechanism, and the cavity opening is closed or opened through the overturning target door sealing cover.
The liquid circulated through the target body for cooling is silicone oil.
And an air exhaust port for vacuumizing the target cavity is arranged on the wall plate of the target cavity.
The turnover opening and closing mechanism comprises a rotating mechanism, a first dynamic seal assembly and a rotating shaft, the rotating shaft is rotatably supported beside the cavity opening, the side edge of the target door corresponding to the rotating shaft is fixedly connected with the rotating shaft, the rotating mechanism is installed outside the vacuum coating chamber, an output shaft of the rotating mechanism is connected with the rotating shaft through the first dynamic seal assembly, and sealing is achieved through the first dynamic seal assembly.
A target door sealing ring is arranged on the target door corresponding to the edge of the cavity opening, and a circle of surrounding edge is arranged on the periphery of the cavity opening; when the target door sealing cover is arranged at the cavity opening, the target door sealing ring is pressed between the target door and the edge of the cavity opening, and the surrounding edge surrounds the periphery of the target door.
The rotary mechanism is a rotary cylinder, the first dynamic sealing component is a magnetic fluid sealing transmission device, the magnetic fluid sealing transmission device is hermetically arranged on the outer surface of a wall plate of the vacuum coating chamber through a vacuum sealing ring, an output shaft of the rotary cylinder is connected with an input end of a main shaft of the magnetic fluid sealing transmission device, and an output end of the main shaft of the magnetic fluid sealing transmission device penetrates into the vacuum coating chamber and is connected with the rotary shaft.
The telescopic mechanism comprises a linear motion mechanism, a sliding sleeve, a connecting plate and a second dynamic seal assembly, the sliding sleeve movably penetrates through a wall plate of the target cavity and is sealed through the second dynamic seal assembly, the target body is fixedly installed at the inner end of the sliding sleeve, the linear motion mechanism is installed on the outer surface of the wall plate of the target cavity, and the connecting plate is connected with the movable end of the linear motion mechanism and the outer end of the sliding sleeve.
The target body is internally provided with a liquid flow channel, a liquid outlet pipe and a liquid inlet pipe are arranged in the sliding sleeve, the liquid outlet pipe and the liquid inlet pipe are insulated from the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with a liquid outlet and a liquid inlet of the liquid flow channel, and the outer ends of the liquid outlet pipe and the liquid inlet pipe penetrate out of the outer end of the sliding sleeve.
The target body comprises a target material, a copper plate, a pole shoe, a waterproof rubber sheet, a target holder and a plurality of magnets, wherein the surface of the target holder facing the vacuum coating chamber is provided with an installation groove; a liquid flow channel is formed between the copper plate and the pole shoe, a liquid outlet channel and a liquid inlet channel which are communicated with the liquid flow channel are also arranged on the target body, and the outer ends of the liquid outlet channel and the liquid inlet channel are a liquid outlet and a liquid inlet.
The coating machine also comprises a target body fixing plate, the target body fixing plate is fixed at the inner end of the sliding sleeve, the target holder is fixed on the target body fixing plate through an insulating fixing assembly, and a gap is reserved between the target holder and the target body fixing plate.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model discloses an unprecedented coating machine that has independent target body isolation space realizes the sealed isolation to the target body through setting up target chamber and target door in addition, is fit for being used for the sputtering of the special target (like metal lithium) that can not see water and moisture. The utility model discloses an automatic opening and the self-sealing lid of target door close the accent are realized to upset hoist mechanism. The utility model discloses a target body still can remove through telescopic machanism to can adjust the target body to reasonable sputtering distance, it is visible, the utility model discloses under the function that realizes carrying out sealed isolation to the target body, efficiency when can not influence the coating film yet.
2. The utility model discloses a silicon oil has avoided the unfavorable risk brought by the seepage of cooling water in the current coating machine as the liquid of target body cooling usefulness completely.
3. The utility model discloses set up the extraction opening alone on the target chamber, realize the independent evacuation of target chamber.
4. The utility model discloses a upset hoist mechanism passes through rotary mechanism, the upset of first dynamic seal subassembly and rotation axis realization target door, and realizes the dynamic seal, simple structure, and the operation is reliable stable.
Drawings
Fig. 1 is one of schematic cross-sectional views of a target door of the present invention in a closed state, the view direction being a front view direction;
fig. 2 is a schematic sectional view of the target door of the present invention in an opened state, the view direction being a front view direction;
fig. 3 is a second schematic sectional view of the target door of the present invention in a closed state, the view direction being a side view direction;
FIG. 4 is an enlarged schematic view taken at I in FIG. 1;
FIG. 5 is an enlarged schematic view at III in FIG. 3;
FIG. 6 is an enlarged schematic view of FIG. 3 at IV;
FIG. 7 is an enlarged schematic view taken at II in FIG. 2;
FIG. 8 is a schematic view of the target and the telescopic mechanism of the present invention;
FIG. 9 is an enlarged schematic view at V in FIG. 3;
FIG. 10 is a schematic view of the target of the present invention in a lowered position;
FIG. 11 is an enlarged schematic view of region VII of FIG. 9.
The reference numerals in the drawings mean:
1, vacuum coating chamber; 1-1, the bottom of a vacuum coating chamber; 2, a target cavity; 2-1, an air extraction opening; 2-2 bottom wall plate of target cavity; 2-3 cavities; 3 a target body; 3-1, a target material; 3-2 copper plates; 3-3 magnets; 3-4 pole shoes; 3-5 of waterproof rubber; 3-6 layering; 3-7 shielding coamings; 3-8 target seats; 3-9 target body fixing plates; 3-10 connecting bolts; 3-11 insulating pads; 3-12 insulating sleeves; 3-13 insulating covers; 4 target door; 4-1 target door sealing ring; 4-2 surrounding edges; 5, turning over the opening and closing mechanism; 5-1 rotating mechanism; 5-2 cylinder mounting seats; 5-3 output shaft of rotary cylinder; 5-4 rotation axis; 5-5, fixing the connecting seat; 5-7 of a block of padding; 5-8 support tubes; 5-9 of a supporting seat; 5-10 connecting sleeve holes; 6, a telescopic mechanism; 6-1 sliding sleeve; 6-3 of a protective cover; 6-4 insulating sheath; 6-5 connecting plates; 6-6 guide posts; 6-7 guide tubes; 6-8 guide post fixing seats; 6-9 linear motion mechanism; 6-10 floating joints; 7, a first dynamic seal assembly; 7-1 magnetic fluid sealing transmission device; 7-2, the magnetic fluid seals the input end of the main shaft of the drive unit; 7-3 output end of main shaft of magnetic fluid sealed driving device; 7-4, welding a seat; 7-5 vacuum sealing rings; 7-6 trepanning; 8, a second dynamic seal assembly; 8-1 second framework oil seal; 8-2, sealing and fixing the tube; 8-3 spacer bushes; 8-4 second sealing gland; 9-1 liquid flow channel; 9-2 liquid inlet pipe; 9-3 liquid outlet pipes; 9-4 liquid pipe insulating sleeves; 9-5 locking nuts; 9-6, sealing and pressing the sleeve; 9-7 pipe sealing rings; 9-8 pipe connectors; 9-9 elbow water nozzles; 9-10 liquid inlet channels; 9-11 liquid outlet channels; 10 silicone oil.
Detailed Description
The present invention will be further described with reference to the following examples.
As shown in fig. 1 to 11, the coater for isolating a target body by a turnover target door comprises a vacuum coating chamber 1, a target body 3, a target chamber 2, a telescopic mechanism 6, a target door 4 and a turnover opening and closing mechanism 5. The coating machine realizes the cooling of the target body 3 through the liquid which circularly flows through the target body.
As shown in FIG. 1, the target chamber 2 of the present embodiment is disposed at the bottom 1-1 of the vacuum coating chamber, but the target chamber 2 may be disposed at the top or side of the vacuum coating chamber, and the mounting positions of other components will also be changed. The target cavity 2 is directly communicated with the vacuum coating chamber 1 through a cavity port 2-3 at the upper end. The telescopic mechanism 6 is mounted on the bottom wall plate 2-2 of the target chamber 2. The target body 3 is arranged on the telescopic mechanism 6 and is positioned in the target cavity 2, the telescopic mechanism 6 drives the target body 3 to move towards the cavity opening 2-3 or to retract into the target cavity 2, and the telescopic mechanism 6 of the embodiment drives the target body 3 to move up and down. The target door 4 is arranged at the cavity opening 2-3 through the overturning opening and closing mechanism 5, the target door is driven to overturn through the overturning opening and closing mechanism, and the cavity opening is closed or opened through the overturning target door sealing cover.
In order to completely avoid the contact between the target material and water, in this embodiment, the silicone oil is used as the liquid for cooling that circulates through the target body, and the silicone oil is used as the coolant.
In order to independently evacuate the target chamber 2, as shown in fig. 1, an exhaust port 2-1 for evacuating the target chamber is provided on a left side wall plate of the target chamber 2. When the vacuum pumping is performed, the pumping hole 2-1 is externally connected with a vacuum pump.
As shown in fig. 4 to 6, the turnover opening and closing mechanism 5 of the present embodiment includes a rotating mechanism 5-1, a first movable sealing assembly 7 and a rotating shaft 5-4, the rotating shaft 5-4 is rotatably supported at a side of the cavity 2-3, a side of the target door 4 corresponding to the rotating shaft 5-4 is fixedly connected to the rotating shaft 5-4, so that the target door 4 can be driven to turn over by the rotating shaft 5-4, the rotating mechanism 5-1 is installed outside the vacuum coating chamber 1, an output shaft 5-3 of the rotating mechanism 5-1 is connected to the rotating shaft 5-4 by the first movable sealing assembly 7, and movable sealing is realized by the first movable sealing assembly 7.
The sealing structure of the target door 4 is: a target door sealing ring 4-1 is arranged on the target door 4 corresponding to the edge of the cavity opening 2-3, and a circle of surrounding edge 4-2 is arranged on the periphery of the cavity opening 2-3; when the target door 4 is sealed at the cavity opening 2-3, the target door sealing ring 4-1 is pressed between the target door 4 and the edge of the cavity opening 2-3 to form sealing, the surrounding edge 4-2 surrounds the periphery of the target door 4, and the surrounding edge 4-2 can prevent dust from entering the sealing position of the target door and the cavity opening.
The rotating mechanism 5-1 of the embodiment is a rotating cylinder, the first dynamic sealing component 7 is a magnetic fluid sealing transmission device, the magnetic fluid sealing transmission device 7-1 is hermetically installed on the outer surface of a rear wall plate of the vacuum coating chamber 1 through a vacuum sealing ring 7-5, an output shaft 5-3 of the rotating cylinder is connected with an input end 7-2 of a main shaft of the magnetic fluid sealing transmission device 7-1, an output end 7-3 of the main shaft of the magnetic fluid sealing transmission device penetrates into the vacuum coating chamber 1 and is connected with a rotating shaft 5-4, the rotating cylinder 5-1 drives the main shaft of the magnetic fluid sealing transmission device to rotate and then drives the rotating shaft 5-4 to rotate, and dynamic sealing is achieved through the magnetic fluid sealing transmission device 7-1.
As shown in fig. 5, the specific installation structure of the rotary cylinder 5-1 and the magnetic fluid seal transmission device 7-1 is as follows: the wall plate of the vacuum coating chamber 1 is provided with a communicating hole corresponding to the magnetic fluid seal transmission device, the position of the communicating hole is hermetically welded with a welding seat 7-4, the middle part of the welding seat 7-4 is provided with a through hole corresponding to the communicating hole, the magnetic fluid seal transmission device 7-1 is hermetically fixed on the welding seat 7-4 through a vacuum seal ring 7-5, the output end 7-3 of the main shaft of the magnetic fluid seal transmission device penetrates into the vacuum coating chamber 1 after penetrating through the through hole of the welding seat 7-4, a rotary cylinder 5-1 is fixedly arranged at the rear end part of the magnetic fluid seal transmission device 7-1 through a cylinder mounting seat 5-2, the output shaft 5-3 of the rotary cylinder and the input end 7-2 of the main shaft of the magnetic fluid seal transmission device both penetrate into the middle hole of the cylinder mounting seat 5, an output shaft 5-3 of the rotary cylinder is connected with an input end 7-2 of a main shaft of the magnetic fluid sealing transmission device through a flat key. The output end 7-3 of the main shaft of the magnetic fluid sealing transmission device is provided with a sleeve hole 7-6, the end part of the rotating shaft 5-4 penetrates into the sleeve hole 7-6 and is connected with the output end 7-3 of the main shaft of the magnetic fluid sealing transmission device and the end part of the rotating shaft 5-4 through a flat key.
As shown in fig. 4 and 6, the installation structure of the rotating shaft 5-4 is: supporting pipes 5-8 are respectively arranged at two ends, corresponding to the rotating shaft 5-4, above the bottom wall plate of the vacuum coating chamber, the supporting pipes 5-8 are respectively fixed on the bottom wall plate of the vacuum coating chamber 1 through supporting seats 5-9, two ends of the rotating shaft 5-4 are respectively movably penetrated in the supporting pipes 5-8, three fixed connecting seats 5-5 are arranged at the side edge, corresponding to the rotating shaft 5-4, of the target door 4, the three fixed connecting seats 5-5 are uniformly distributed along the side edge of the target door 4, the fixed connecting seats 5-5 are fixed on the target door 4 through bolts, a heightening block 5-7 is arranged between the fixed connecting seats 5-5 and the target door 4, connecting sleeve holes 5-10 are arranged on the fixed connecting seats 5-5, the fixed connecting seats 5-5 are sleeved on the rotating shaft 5-4 through the connecting sleeve holes 5-10, and the fixed connecting seat 5-5 and the rotating shaft 5-4 are fixedly connected through a flat key arranged in the connecting sleeve hole 5-10.
As shown in fig. 7 to 10, the telescopic mechanism 6 of the film plating machine of this embodiment includes a linear motion mechanism 6-9, a sliding sleeve 6-1, a connecting plate 6-5 and a second dynamic seal assembly 8, the sliding sleeve 6-1 movably penetrates through the bottom wall plate 2-2 of the target chamber 2, and is sealed by the second dynamic seal assembly 8, the target body 3 is fixedly mounted at the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve is the inner end thereof in this embodiment), the upper end of the linear motion mechanism 6-9 is mounted at the lower surface of the bottom wall plate 2-2 of the target chamber, and the connecting plate 6-5 connects the lower movable end of the linear motion mechanism 6-9 and the outer end of the sliding sleeve 6-1 (the lower end of the sliding sleeve is the outer end thereof in this embodiment). When the linear motion mechanism 6-9 does up-and-down linear motion, the sliding sleeve 6-1 is driven to synchronously move through the connecting plate 6-5.
Wherein, the linear motion mechanism 6-9 is a linear motion type cylinder, and a piston rod of the cylinder is connected with the middle part of the connecting plate 6-5 through a floating joint 6-10. The floating joints 6-10 are adopted to overcome the deviation of the connecting plate from the axis of the cylinder caused by slight swinging or deviation of the plate surface when the connecting plate moves up and down.
As shown in FIG. 8 and FIG. 9, in this embodiment, a liquid channel 9-1 is provided in the target body 3, a liquid outlet tube 9-3 and a liquid inlet tube 9-2 are provided in the inner cavity of the sliding sleeve 6-1, the liquid outlet tube 9-3 and the liquid inlet tube 9-2 are insulated from the sliding sleeve 6-1, the inner ends of the liquid outlet tube 9-3 and the liquid inlet tube 9-2 are respectively connected with the liquid outlet and the liquid inlet of the liquid channel 9-1, and the outer ends of the liquid outlet tube 9-3 and the liquid inlet tube 9-2 respectively penetrate out of the outer end of the sliding sleeve 6-1. The end parts of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 which penetrate out of the outer end of the sliding sleeve 6-1 are used for being connected with an external pipeline. When the device is used, silicon oil enters the liquid flow channel 9-1 from the liquid inlet pipe 9-2, carries away heat of the target body 3 when flowing through the liquid flow channel 9-1, then flows out of the liquid outlet pipe 9-3, and is cooled by continuous circulation of the silicon oil, and the arrow directions in the figures 9 and 10 show the inlet and outlet directions of the silicon oil.
As shown in fig. 8 and 9, the target body 3 has the following structure: the target body 3 comprises a target 3-1, a copper plate 3-2, pole shoes 3-4, waterproof rubber sheets 3-5, a target holder 3-8 and a plurality of magnets 3-3, wherein a mounting groove is formed in the surface, facing the vacuum coating chamber 1, of the target holder 3-8 (in the embodiment, the upper surface of the target holder is the surface facing the vacuum coating chamber), the waterproof rubber sheets 3-5 are flatly attached to the bottom surface of the mounting groove, the pole shoes 3-4 are arranged on the surface of the waterproof rubber sheets 3-5, the copper plate 3-2 is sealed at the groove openings of the mounting groove through sealing strips pressed on the periphery, the magnets 3-3 are uniformly distributed between the copper plate 3-2 and the pole shoes 3-4, and the target 3-1 is flatly attached to the outer surface of the copper plate 3-2. A liquid flow channel 9-1 is formed between the copper plate 3-2 and the pole shoe 3-4, a liquid outlet channel 9-11 and a liquid inlet channel 9-10 which are communicated with the liquid flow channel are also arranged on the target body 3, and the lower ends of the liquid outlet channel 9-11 and the liquid inlet channel 9-10 are a liquid outlet and a liquid inlet.
The specific fixing structure of the target 3-1 is as follows: the pressing strip 3-6 is fixed on the edge of the upper surface of the target seat 3-8 through bolts, the pressing strip and the copper plate 3-2 are fixed on the upper surface of the target seat 3-8 through bolts for fixing the pressing strip 3-6, the sealing strip is positioned between the copper plate 3-2 and the upper surface of the target seat 3-8, the periphery of the target 3-1 is pressed between the pressing strip 3-6 and the copper plate 3-2, and therefore the target 3-1 can be detachably fixed on the upper surface of the copper plate.
As shown in figure 9, the liquid outlet channels 9-11 and the liquid inlet channels 9-10 are symmetrically arranged by taking the central line of the target body 3 as the center, and the liquid outlet channels 9-11 and the liquid inlet channels 9-10 are respectively communicated with the liquid flow channel 9-1 after passing through the target seat 3-8, the waterproof rubber sheet 3-5 and the pole shoe 3-4.
Specifically, the telescopic mechanism 6 of the embodiment includes two sliding sleeves 6-1 and two sets of second dynamic seal assemblies 8, the two sliding sleeves 6-1 are symmetrically arranged with the center line of the target body 3 as the center, the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively arranged in the two sliding sleeves 6-1, the lower port of the liquid outlet channel 9-11 is connected with the upper end of the liquid outlet pipe 9-3, and the lower port of the liquid inlet channel 9-10 is connected with the upper end of the liquid inlet pipe 9-2.
As shown in fig. 8 and 9, the second dynamic seal assembly 8 includes a seal fixing tube 8-2 and a second framework oil seal 8-1, the seal fixing tube 8-2 is correspondingly fixed on the lower surface of the bottom wall plate 2-2 of the target cavity, the sliding sleeve 6-1 penetrates through the middle hole of the seal fixing tube 8-2, the second framework oil seal 8-1 is arranged in the middle hole of the seal fixing tube 8-2, and sealing is achieved through the second framework oil seal 8-1. The second dynamic seal assembly 8 of this embodiment is provided with two second framework oil seals 8-1, the second dynamic seal assembly is further provided with a spacer 8-3 and a second seal gland 8-4, the two second framework oil seals 8-1 are separated by the spacer 8-3, the second seal gland 8-4 is sealed at the lower port of the middle hole of the seal fixing pipe 8-2 by a seal cover 8-4, and the second framework oil seals 8-1 and the spacer 8-3 are fixed by the second seal gland 8-4.
The coating machine of this embodiment still is equipped with two sets of guide pillar subassemblies, makes linear motion mechanism more stable when driving the motion of slip sleeve through the guide pillar subassembly. The guide post assembly comprises a guide post fixing seat 6-8, a guide post 6-6 and a guide pipe 6-7, the guide post fixing seat 6-8 is fixed on the lower surface of a bottom wall plate 2-2 of the target cavity through bolts, the guide pipe 6-7 is fixedly installed on the upper surface of a connecting plate 6-5 through bolts, one end of the guide post 6-6 is fixed on the guide post fixing seat 6-8, the other end of the guide post 6-6 movably penetrates through the guide pipe 6-7, and the guide post 6-6 and the guide pipe 6-7 slide in a matched mode to enable movement to be stable.
In order to realize the insulation between the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 and the sliding sleeve, liquid pipe insulation sleeves 9-4 are sleeved at the contact parts of the end parts of the liquid outlet pipe and the liquid inlet pipe and the sliding sleeve. A protective cover 6-3 is fixed at the outer end of the sliding sleeve 6-1, an insulating sheath 6-4 is arranged in the protective cover 6-3 and close to the inner wall of the protective cover, a connecting plate 6-5 is connected with the lower end of the protective cover 6-3 through a bolt, the outer ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (the lower ends of the liquid outlet pipe and the liquid inlet pipe are the outer ends of the liquid outlet pipe and the liquid inlet pipe in the embodiment) are respectively connected with an elbow water nozzle 9-9 through a pipe connector 9-8, the elbow water nozzle 9-9 is positioned in the protective cover 6-3, and the connecting end of the elbow water nozzle 9-9 penetrates out of the side surface of the protective.
As shown in FIG. 8, the inner end of the sliding sleeve 6-1 is hermetically connected with the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 by the following structure: the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve is the inner end in the embodiment) is provided with a sealing step hole, the upper end of the sealing step hole is provided with a counter bore, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (the upper ends of the liquid outlet pipe and the liquid inlet pipe are the inner ends in the embodiment) respectively pass through the corresponding sealing step hole, the sealing step hole is internally provided with two sealing pressure sleeves 9-6 and two pipe sealing rings 9-7, the two sealing pressure sleeves 9-6 and the two pipe sealing rings 9-7 are arranged at intervals, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively connected with a locking nut 9-5 through threads, the locking nut 9-5 is positioned in the counter bore, and the liquid outlet pipe and the liquid inlet pipe are locked through the locking nut 9-5.
In order to better install the target 3, the coating machine of the embodiment further comprises a target fixing plate 3-9, the target fixing plate 3-9 is fixed at the upper end of the sliding sleeve 6-1, the target holder 3-8 is fixed above the target fixing plate 3-9 through an insulating fixing component, and a certain interval is reserved between the target holder 3-8 and the target fixing plate 3-9. The periphery of the target body fixing plate 3-9 is fixedly provided with a shielding coaming 3-7, the shielding coaming 3-7 surrounds the periphery of the target body 3, and a certain interval is left between the shielding coaming 3-7 and the target body 3, thereby preventing lateral discharge.
As shown in fig. 11, the structure of the insulation fixing assembly is: the insulating fixing assembly comprises connecting bolts 3-10, insulating pads 3-11, insulating sleeves 3-12 and insulating covers 3-13, the connecting bolts 3-10 penetrate through the target fixing plate and are in threaded connection with the target base, the insulating pads 3-11 are sleeved on the connecting bolts 3-10 and are padded between the target fixing plate 3-9 and the target base 3-8, the insulating sleeves 3-12 are sleeved on the heads of the connecting bolts 3-10 and the parts in contact with the target fixing plate, so that the connecting bolts are insulated from the target fixing plate, and the insulating covers 3-13 cover the port parts of the insulating sleeves 3-12, so that the heads of the connecting bolts are sealed in the insulating sleeves.
The specific use mode of the film coating machine of the utility model is as follows: because the sputtering target material can not contact water and moist air, when in non-coating operation, the target door 4 is always in a closed state, the telescopic mechanism 6 drives the target body 3 to descend to the lowest point, the air extraction opening 2-1 is externally connected with a special air extraction pump to extract air from the target cavity 2, and the vacuum in the target cavity 2 is maintained. When the film coating operation is needed, a furnace door of the vacuum film coating chamber 1 of the film coating machine is opened, a workpiece to be coated is placed, then the furnace door is closed, and the vacuum film coating chamber 1 is vacuumized. When the vacuum degree in the vacuum coating chamber 1 is close to the vacuum degree in the target cavity 2, the rotary cylinder of the turnover opening and closing mechanism 5 is started to drive the target door 4 to be turned upwards and opened, and the vacuum sealing of the target cavity 2 is removed. After the target door 4 is opened, the coating operation is carried out: and introducing circularly flowing silicon oil 10 into the target body 3 for cooling, and then starting the telescopic mechanism 6 to drive the target body 3 to rise towards the cavity opening 2-3, so as to adjust the coating distance between the target body 3 and the target base (workpiece). And then, heating the interior of the vacuum coating chamber 1 by a heater, vacuumizing to a background vacuum, introducing a proper amount of argon or reaction gas to a working vacuum degree, starting a sputtering target power supply and a bias power supply to perform ion bombardment cleaning and coating, cooling the workpiece in the vacuum coating chamber after the coating is finished, and continuously vacuumizing the vacuum coating chamber 1. At the moment, the target body 3 is driven to descend to the lowest position of the target cavity 2 through the telescopic mechanism 6, the overturning opening and closing mechanism 5 is started, and the target door 4 is driven to overturn towards the cavity opening until the target door 4 finishes sealing the cavity opening 2-3. And opening the furnace door to take the workpiece when the workpiece is cooled to a preset temperature, and finishing the film coating operation.
The coating machine of target body is kept apart through convertible target door of this embodiment is not unique implementation mode, can adopt the similar magnetron sputtering target that has upset target door as required, design into the coating machine of many targets side by side, also can design into the coating machine of the single target or many targets side by side of following the top of vacuum coating room and sputtering downwards, also can design into a set of opposite targets or the coating machine of multiunit opposite targets relative up and down, can also design into the magnetron sputtering target that has upset target door vertical dress single target or many targets coating machine on the lateral wall of vacuum coating room, the aforesaid all belongs to the utility model discloses the scope that the scheme was protected.
Claims (10)
1. The utility model provides a through coating machine of convertible target door isolation target body, includes vacuum coating room and target body, flows through the circulation the liquid realization of target body is right the cooling of target body, its characterized in that: further comprising:
the target cavity is arranged at the bottom or the top or the side part of the vacuum coating chamber and is directly communicated with the vacuum coating chamber through a cavity opening;
the telescopic mechanism is arranged on a wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the target body is driven by the telescopic mechanism to move towards the cavity opening or retract into the target cavity;
the target door is installed at the cavity opening through the overturning opening and closing mechanism, the target door is driven to overturn through the overturning opening and closing mechanism, and the cavity opening is closed or opened through the overturning target door sealing cover.
2. The coater for isolating target bodies through a convertible target door as claimed in claim 1 wherein: the liquid circulated through the target body for cooling is silicone oil.
3. The coater for isolating target bodies through a convertible target door as claimed in claim 1 wherein: and an air exhaust port for vacuumizing the target cavity is arranged on the wall plate of the target cavity.
4. The coater for isolating target bodies through a convertible target door as claimed in claim 1 wherein: the turnover opening and closing mechanism comprises a rotating mechanism, a first dynamic sealing assembly and a rotating shaft, the rotating shaft is rotatably supported beside the cavity opening, the side edge of the target door corresponding to the rotating shaft is fixedly connected with the rotating shaft, the rotating mechanism is installed outside the vacuum coating chamber, and an output shaft of the rotating mechanism is connected with the rotating shaft through the first dynamic sealing assembly and realizes sealing through the first dynamic sealing assembly.
5. The coater for isolating target bodies through a convertible target door as claimed in claim 4 wherein: a target door sealing ring is arranged on the target door corresponding to the edge of the cavity opening, and a circle of surrounding edge is arranged on the periphery of the cavity opening; when the target door sealing cover is arranged at the cavity opening, the target door sealing ring is pressed between the target door and the edge of the cavity opening, and the surrounding edge surrounds the periphery of the target door.
6. The coater for isolating target bodies through a convertible target door as claimed in claim 4 wherein: the rotary mechanism is a rotary air cylinder, the first dynamic sealing component is a magnetic fluid sealing transmission device, the magnetic fluid sealing transmission device is mounted on the outer surface of a wall plate of the vacuum coating chamber in a sealing mode through a vacuum sealing ring, an output shaft of the rotary air cylinder is connected with the input end of a main shaft of the magnetic fluid sealing transmission device, and the output end of the main shaft of the magnetic fluid sealing transmission device penetrates into the vacuum coating chamber and is connected with the rotary shaft.
7. The coater for isolating target bodies through a convertible target door as claimed in claim 1 wherein: telescopic machanism includes linear motion mechanism, sliding sleeve, connecting plate and second move seal assembly, the sliding sleeve activity is passed the wallboard in target chamber, through second moves seal assembly is sealed, the target body fixed mounting be in sliding sleeve's inner end, linear motion mechanism installs the surface of the wallboard in target chamber, the connecting plate is connected linear motion mechanism's expansion end with sliding sleeve's outer end.
8. The coater for isolating target bodies through a convertible target door as claimed in claim 7 wherein: the target body is internally provided with a liquid flow passage, a liquid outlet pipe and a liquid inlet pipe are arranged in the sliding sleeve, the liquid outlet pipe and the liquid inlet pipe are insulated with the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with the liquid outlet and the liquid inlet of the liquid flow passage, and the outer ends of the liquid outlet pipe and the liquid inlet pipe are respectively penetrated out from the outer end of the sliding sleeve.
9. The coater for isolating target bodies through a convertible target door as claimed in claim 8 wherein: the target body comprises a target material, a copper plate, a pole shoe, a waterproof rubber sheet, a target holder and a plurality of magnets, wherein an installation groove is formed in the surface of the target holder facing a vacuum coating chamber, the waterproof rubber sheet is flatly attached to the bottom surface of the installation groove, the pole shoe is arranged on the surface of the waterproof rubber sheet, a copper plate sealing cover is arranged at the notch of the installation groove, the magnets are distributed between the copper plate and the pole shoe, and the target material is flatly attached and fixed to the outer surface of the copper plate; the liquid flow channel is formed between the copper plate and the pole shoe, the target body is also provided with a liquid outlet channel and a liquid inlet channel which are communicated with the liquid flow channel, and the outer ends of the liquid outlet channel and the liquid inlet channel are the liquid outlet and the liquid inlet.
10. The coater for isolating target bodies through a convertible target door of claim 9 wherein: the coating machine further comprises a target body fixing plate, the target body fixing plate is fixed at the inner end of the sliding sleeve, the target holder is fixed on the target body fixing plate through an insulating fixing assembly, and a gap is reserved between the target holder and the target body fixing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920777374.2U CN210711721U (en) | 2019-05-27 | 2019-05-27 | Coating machine for isolating target body through turnover target door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920777374.2U CN210711721U (en) | 2019-05-27 | 2019-05-27 | Coating machine for isolating target body through turnover target door |
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| Publication Number | Publication Date |
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| CN210711721U true CN210711721U (en) | 2020-06-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920777374.2U Active CN210711721U (en) | 2019-05-27 | 2019-05-27 | Coating machine for isolating target body through turnover target door |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110295351A (en) * | 2019-05-27 | 2019-10-01 | 东莞市汇成真空科技有限公司 | A kind of coating machine that target body being isolated by convertible target door |
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2019
- 2019-05-27 CN CN201920777374.2U patent/CN210711721U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110295351A (en) * | 2019-05-27 | 2019-10-01 | 东莞市汇成真空科技有限公司 | A kind of coating machine that target body being isolated by convertible target door |
| CN110295351B (en) * | 2019-05-27 | 2024-02-27 | 东莞市汇成真空科技有限公司 | Coating machine for isolating target body through turnover target door |
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Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: 523820 Wangyuan Road/2, Yanwu Village, Dalingshan Town, Dongguan City, Guangdong Province Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd. |