CN110230033B - Coating machine for isolating target body through translational target door - Google Patents
Coating machine for isolating target body through translational target door Download PDFInfo
- Publication number
- CN110230033B CN110230033B CN201910449106.2A CN201910449106A CN110230033B CN 110230033 B CN110230033 B CN 110230033B CN 201910449106 A CN201910449106 A CN 201910449106A CN 110230033 B CN110230033 B CN 110230033B
- Authority
- CN
- China
- Prior art keywords
- target
- cavity
- opening
- door
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011248 coating agent Substances 0.000 title claims description 35
- 238000000576 coating method Methods 0.000 title claims description 35
- 239000007788 liquid Substances 0.000 claims abstract description 108
- 239000013077 target material Substances 0.000 claims abstract description 15
- 238000007789 sealing Methods 0.000 claims description 45
- 238000001771 vacuum deposition Methods 0.000 claims description 34
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 20
- 229910052802 copper Inorganic materials 0.000 claims description 20
- 239000010949 copper Substances 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 11
- 229920002545 silicone oil Polymers 0.000 claims description 10
- 238000000605 extraction Methods 0.000 claims description 8
- 238000002955 isolation Methods 0.000 claims description 4
- 238000007747 plating Methods 0.000 abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 238000003825 pressing Methods 0.000 description 8
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 7
- 229910052744 lithium Inorganic materials 0.000 description 7
- 238000005477 sputtering target Methods 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 210000004907 gland Anatomy 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 238000003466 welding Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 238000007667 floating Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a film plating machine for isolating a target body through a translation type target door, which comprises a vacuum film plating chamber, a target body, a target cavity, a telescopic mechanism, a target door and a translation opening and closing mechanism, wherein the target body is cooled through liquid which circularly flows through the target body, and the target cavity is arranged at the bottom or the top or the side part of the vacuum film plating chamber and is directly communicated with the vacuum film plating chamber through a cavity opening; the telescopic mechanism is arranged on a wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the telescopic mechanism drives the target body to move towards the cavity opening direction or shrink back into the target cavity; the target door is arranged at the cavity opening through a translation opening and closing mechanism; the target door can automatically seal the cover at the cavity opening by driving the translation opening and closing mechanism to do translation movement towards the cavity opening; by driving the translation opening and closing mechanism to do translation movement in the direction away from the cavity opening, the target door can be automatically separated from the cavity opening and is driven by the translation opening and closing mechanism to be horizontally moved towards the side edge of the cavity opening. The invention can ensure that the target material is not contacted with water vapor all the time in the using process.
Description
Technical Field
The invention relates to a coating machine, in particular to a coating machine for isolating a target body through a translation type target door.
Background
The sputtering target body used in the existing magnetron sputtering coating machine widely used for production is either integrally arranged in a furnace or integrally arranged on a furnace wall (lower wall, side wall or upper wall), the surface of a target material on the target body faces to a workpiece to be coated in the furnace, a furnace chamber is vacuumized and started to be heated before coating, argon is filled in next step, higher voltage is applied between the workpiece and the furnace wall (grounded), argon plasma is generated by argon glow discharge in the furnace, argon ion bombardment cleaning is carried out on the surface of the workpiece, and then coating operation is carried out: starting a cathode magnetron sputtering target power supply to generate target sputtering, sputtering target materials, applying negative bias on a workpiece, and sucking sputtered target particles to the surface of the workpiece to deposit a film forming layer. Because the target material can generate heat in the coating operation, a water cooling device is required to take away heat at the back of the target material.
The common target material can endure a certain temperature and humidity, and after the coating operation is finished, the furnace is waited to cool to about 100 ℃, the vacuum is broken, and the furnace door is opened to take the workpiece. After opening the oven door, the target is exposed to the atmosphere, but without adverse effects and consequences. In some cathode sputtering targets with various targets are also provided in the coating machine furnace, in order to avoid mutual pollution between the targets of different targets, a movable shielding plate is arranged in front of the targets, which plays a role in shielding but does not play a role in vacuum sealing.
With the continuous development of science and technology, a plurality of new material targets are appeared. There is a recent requirement for a lithium plating film layer, which requires metallic lithium as a target material, and the metallic lithium has characteristics of being unable to contact water, being unable to contact water vapor at a slightly high temperature, or causing explosion. The sputtering target structure of the existing magnetron sputtering coating machine can not meet the requirement of isolating water vapor, and a brand new sputtering target structure and coating machine must be redesigned. The structure of the coating machine using the lithium material target material must satisfy the following conditions: 1. the lithium material cannot be cooled by taking water as a medium so as to ensure that the lithium material cannot be contacted with water; 2. has independent vacuum airtight function, and can be isolated from the atmosphere and water vapor. Therefore, the special film plating machine with the functions is invented aiming at the technical characteristics.
Disclosure of Invention
The invention aims to solve the technical problem of providing a film plating machine for isolating a target body through a translational target door, which can ensure that the target material is not contacted with water vapor all the time in the use process.
The technical scheme adopted by the invention is as follows:
the utility model provides a through coating machine of translation formula target door isolation target body, includes vacuum coating room and target body, realizes the cooling to the target body through the liquid of circulation flow through the target body, its characterized in that: further comprises:
the target cavity is arranged at the bottom or the top or the side part of the vacuum coating chamber and is directly communicated with the vacuum coating chamber through an cavity opening;
the telescopic mechanism is arranged on the wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the telescopic mechanism drives the target body to move towards the cavity opening direction or shrink back into the target cavity;
the target door and the translation opening and closing mechanism are arranged at the cavity opening through the translation opening and closing mechanism; the target door can automatically seal the cover at the cavity opening by driving the translation opening and closing mechanism to do translation movement towards the cavity opening; by driving the translation opening and closing mechanism to do translation movement in the direction away from the cavity opening, the target door can be automatically separated from the cavity opening and is driven by the translation opening and closing mechanism to be horizontally moved towards the side edge of the cavity opening.
The liquid which circularly flows through the target body and is used for cooling is silicone oil.
And an extraction opening for vacuumizing the target cavity is arranged on the wall plate of the target cavity.
The translational opening and closing mechanism comprises a first linear motion mechanism, a translational plate, a connecting rod, a spring and a limiting wheel, wherein the first linear motion mechanism is arranged on a wall plate of the vacuum coating chamber, the translational plate is arranged at the movable end of the first linear motion mechanism, the target door is arranged opposite to the translational plate, the connecting rod and the spring are positioned between the target door and the translational plate, two ends of the connecting rod are respectively hinged with the target door and the translational plate, two ends of the spring are respectively fixedly connected with the target door and the translational plate, and the limiting wheel is arranged at the side edge of the cavity opening; when the first linear movement mechanism moves in the direction away from the cavity opening, the connecting rod inclines to the side, the spring contracts, and the target door is pulled up; when the first linear movement mechanism moves towards the cavity opening until the target door faces the cavity opening, the limiting wheels are blocked on the side face of the target door, the target door is limited to continue to translate, the translation plate continues to move forwards, the connecting rod is led to incline and turn from the side to the side, the target door is vertically pressed down, and meanwhile the spring is lengthened.
A convex sealing ring is arranged along the edge of the cavity opening, a target door sealing ring is arranged on the position, corresponding to the sealing ring, of the target door, and a flange is arranged along the edge of the target door; when the target door seals the lid at the mouth of the cavity, the flange surrounds the seal ring periphery.
The first linear movement mechanism is an air cylinder, the air cylinder is correspondingly arranged on the outer surface of the wall plate of the vacuum coating chamber through a first dynamic seal assembly, and a piston rod of the air cylinder penetrates into the vacuum coating chamber.
The telescopic mechanism comprises a second linear motion mechanism, a sliding sleeve, a connecting plate and a second dynamic sealing assembly, the sliding sleeve movably penetrates through the wall plate of the target cavity and is sealed through the second dynamic sealing assembly, the target body is fixedly arranged at the inner end of the sliding sleeve, the second linear motion mechanism is arranged on the outer surface of the wall plate of the target cavity, and the connecting plate is connected with the movable end of the second linear motion mechanism and the outer end of the sliding sleeve.
The liquid outlet pipe and the liquid inlet pipe are insulated from the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with the liquid outlet and the liquid inlet of the liquid flow channel, and the outer ends of the liquid outlet pipe and the liquid inlet pipe respectively penetrate out from the outer ends of the sliding sleeve.
The target body comprises a target material, a copper plate, a pole shoe, a waterproof rubber, a target seat and a plurality of magnets, wherein the surface of the target seat facing the vacuum coating chamber is provided with a mounting groove, the waterproof rubber is flatly attached to the bottom surface of the mounting groove, the pole shoe is arranged on the surface of the waterproof rubber, a copper plate sealing cover is arranged at the notch of the mounting groove, the magnets are distributed between the copper plate and the pole shoe, and the target material is flatly attached and fixed on the outer surface of the copper plate; a liquid flow channel is formed between the copper plate and the pole shoe, a liquid outlet channel and a liquid inlet channel which are communicated with the liquid flow channel are also arranged on the target body, and the outer ends of the liquid outlet channel and the liquid inlet channel are a liquid outlet and a liquid inlet.
The coating machine further comprises a target body fixing plate, wherein the target body fixing plate is fixed at the inner end of the sliding sleeve, the target seat is fixed on the target body fixing plate through the insulating fixing assembly, and a gap is reserved between the target seat and the target body fixing plate.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention discloses an unprecedented film plating machine with an independent target body vacuum isolation space, which realizes the sealing isolation of a target body by additionally arranging a target cavity and a target door and is suitable for sputtering special targets (such as metallic lithium) which cannot see water and moisture. The automatic opening and closing mechanism realizes automatic opening and automatic sealing of the target door through the translation opening and closing mechanism. The target body can also move through the telescopic mechanism, so that the target body can be adjusted to a reasonable sputtering distance, and the efficiency of film coating can not be influenced under the function of sealing and isolating the target body.
2. The invention adopts the silicone oil as the liquid for cooling the target body, thereby completely avoiding the adverse risk caused by leakage of cooling water in the existing coating machine.
3. The invention independently arranges the air extraction opening on the target cavity to realize the independent vacuum pumping of the target cavity.
4. The translational opening and closing mechanism drives the translational movement through the first linear movement mechanism, and can realize automatic opening and automatic sealing of the target door through the cooperation of the connecting rod, the spring and the limiting wheel, and the translational opening and closing mechanism has a simple structure and reliable and stable operation.
Drawings
FIG. 1 is one of the schematic cross-sectional views of the target door of the present invention in a closed state, the view being in a front view;
FIG. 2 is a second schematic cross-sectional view of the target door of the present invention in a closed state, the view being in a side view;
FIG. 3 is one of the schematic cross-sectional views of the target door of the present invention in an open state, the view being in the front view;
FIG. 4 is a second schematic cross-sectional view of the target door of the present invention in an open state, the view being in a side view;
FIG. 5 is an enlarged schematic view of the portion I of FIG. 1;
FIG. 6 is an enlarged schematic view of the portion II of FIG. 1;
FIG. 7 is an enlarged schematic view at III in FIG. 2;
FIG. 8 is an enlarged schematic view at IV in FIG. 3;
fig. 9 is an enlarged schematic view at v in fig. 3;
FIG. 10 is a schematic view of the assembly of a target body and a telescopic mechanism of the present invention;
FIG. 11 is an enlarged schematic view of the VI of FIG. 4;
FIG. 12 is an enlarged schematic view at VIII in FIG. 2;
fig. 13 is an enlarged schematic view at vii in fig. 11.
The meaning of the reference numerals in the figures:
1, a vacuum coating chamber; 1-1, the bottom of a vacuum coating chamber; 2 a target cavity; 2-1 extraction openings; 2-2 bottom wall of the target chamber; 2-3 cavity ports; 2-4 sealing rings; 3, target body; 3-1 target material; 3-2 copper plate; 3-3 magnets; 3-4 pole shoes; 3-5 of waterproof rubber; 3-6 layering; 3-7 shielding coaming plates; 3-8 target seats; 3-9 target body fixing plates; 3-10 connecting bolts; 3-11 insulating pads; 3-12 insulating sleeves; 3-13 insulating covers; 4 target door; 4-1 target door sealing rings; 4-2 flanges; 5, translating an opening and closing mechanism; 5-1 a first linear motion mechanism; 5-2 piston rods; 5-3 connecting sleeves; 5-4 springs; 5-5 spring fixing seats; 5-6 translation plates; 5-7 limit posts; 5-8 connecting rod seats; 5-9 connecting rods; 5-10 limit wheels; 5-11 limit wheel seats; 5-12 height limiting blocks; 5-13 sliding blocks; 5-14 guide rails; 6, a telescopic mechanism; 6-1 sliding sleeve; 6-3 protecting covers; 6-4 insulating sheath; 6-5 connecting plates; 6-6 guide posts; 6-7 guiding pipes; 6-8 guide post fixing seats; 6-9 second linear motion mechanism; 6-10 floating joints; 7, a first dynamic seal assembly; 7-1 a sealing seat; 7-2 oil storage rings; 7-3 a first framework oil seal; 7-4 pressing rings; 7-5 of a first sealing gland; 7-6 welding seats; 7-8 oil filling holes; 7-9 of a lubricating sleeve; 8, a second dynamic seal assembly; 8-1 a second framework oil seal; 8-2 sealing and fixing the pipe; 8-3 spacer sleeves; 8-4 second sealing gland; 9-1 liquid flow path; 9-2 liquid inlet pipe; 9-3 liquid outlet pipes; 9-4 liquid pipe insulating sleeves; 9-5 locking nuts; 9-6 sealing and pressing the sleeve; 9-7 pipe sealing rings; 9-8 pipe connectors; 9-9 elbow water nozzles; 9-10 liquid inlet channels; 9-11 liquid outlet channels; 10 silicone oil.
Detailed Description
The invention is further described below with reference to examples.
The coating machine for isolating a target body through a translational target door as shown in fig. 1 to 13 comprises a vacuum coating chamber 1, a target body 3, a target cavity 2, a telescopic mechanism 6, a target door 4 and a translational opening and closing mechanism 5. The coating machine achieves cooling of the target body 3 by circulating liquid flowing through the target body.
As shown in fig. 1, the target chamber 2 of the present embodiment is disposed at the bottom 1-1 of the vacuum coating chamber, and of course, the target chamber 2 may be disposed at the top or side of the vacuum coating chamber, and the mounting positions of other components will also be changed. The target cavity 2 is directly communicated with the vacuum coating chamber 1 through an cavity opening 2-3 at the upper end. The telescopic mechanism 6 is mounted on the bottom wall plate 2-2 of the target chamber 2. The target body 3 is arranged on the telescopic mechanism 6 and is positioned in the target cavity 2, the telescopic mechanism 6 drives the target body 3 to move towards the cavity mouth 2-3 or retract into the target cavity 2, and the telescopic mechanism 6 in the embodiment drives the target body 3 to move up and down. The target door 4 is arranged at the cavity mouth 2-3 through a translation opening and closing mechanism 5. The target door 4 can automatically seal the cover at the cavity opening 2-3 by driving the translation opening and closing mechanism 5 to do translation movement towards the cavity opening 2-3; by driving the translation opening and closing mechanism 5 to do translation movement in the direction away from the cavity opening 2-3, the target door 4 can be automatically separated from the cavity opening 2-3 and is driven by the translation opening and closing mechanism 5 to be horizontally moved towards the side edge of the cavity opening 2-3, so that the cavity opening is opened.
In order to completely avoid contact between the target and water, in this embodiment, silicone oil is used as a liquid for cooling that circulates through the target body, and silicone oil is used as a coolant.
In order to independently vacuumize the target cavity 2, an extraction opening 2-1 for vacuuming the target cavity is arranged on the left side wall plate of the target cavity 2. When vacuumizing, the air extraction port 2-1 is externally connected with a vacuum pump.
As shown in fig. 5 to 8, the translational opening and closing mechanism 5 of this embodiment includes a first linear motion mechanism 5-1, a translational plate 5-6, a connecting rod 5-9, a spring 5-4 and a limiting wheel 5-10, the first linear motion mechanism 5-1 is mounted on a left side wall plate of the vacuum coating chamber 1, the translational plate 5-6 is horizontally mounted on a movable end of the first linear motion mechanism 5-1, the target door 4 and the translational plate 5-6 are arranged face to face, the target door 4 is located below the translational plate 5-6, the connecting rod 5-9 and the spring 5-4 are located between the target door 4 and the translational plate 5-6, two ends of the connecting rod 5-9 are hinged with the target door 4 and the translational plate 5-6 respectively, two ends of the spring 5-4 are fixedly connected with the target door 4 and the translational plate 5-6 respectively, and the limiting wheel 5-10 is arranged on a right side edge of the cavity opening 2-3. In the use process, when the cavity opening 2-3 needs to be opened, the first linear movement mechanism 5-1 moves towards the direction away from the cavity opening, namely moves leftwards, the connecting rod 5-9 inclines sideways, the spring 5-4 contracts, the target door 4 is pulled up, the first linear movement mechanism 5-1 continues to move leftwards, and the target door 4 is driven to translate to the left side edge of the cavity opening 2-3, so that the cavity opening 2-3 is opened; when the cavity opening 2-3 needs to be closed, the first linear movement mechanism 5-1 moves towards the cavity opening 2-3, namely moves rightwards until the target door 4 is right opposite to the cavity opening 2-3, namely the target door 4 is positioned right above the cavity opening 2-3, the limiting wheel 5-10 is blocked on the right side surface of the target door 4, the target door 4 is limited to continue to translate rightwards, at the moment, the first linear movement mechanism 5-1 continues to move rightwards, the connecting rod 5-9 is forced to continuously swing straight, the distance between the target door 4 and the translation plate 5-6 is gradually increased, the spring 5-4 is stretched, and finally the target door 4 is tightly covered on the cavity opening 2-3.
As shown in fig. 8, a limit post 5-7 is arranged on the upper surface of the target door 4 facing the translation plate 5-6, and when the spring 5-4 contracts and pulls up the target door 4, the upper end surface of the limit post 5-7 will lean against the translation plate 5-6, so that the situation that the target door 4 cannot contact with the limit wheel 5-10 due to the too high pulled-up height of the target door 4 is avoided.
The mounting structure of the limit wheels 5-10 is as follows: the right side edge of the cavity opening 2-3 is fixedly provided with a limiting wheel seat 5-11 through a bolt, and the limiting wheel 5-10 is rotatably arranged on the limiting wheel seat 5-11 through a wheel shaft.
The translational opening and closing mechanism 5 of the embodiment is provided with four connecting rods 5-9 and four springs 5-4, connecting rod seats 5-8 are arranged on the target door 4 and the translational plate 5-6 corresponding to the connecting rods 5-9 respectively, two ends of the connecting rods 5-9 are hinged to the connecting rod seats 5-8 respectively through pin shafts, spring fixing seats 5-5 are arranged on the target door 4 and the translational plate 5-6 corresponding to the springs 5-4 respectively, and two ends of the springs 5-4 are fixed to the spring fixing seats 5-5 respectively.
The sealing cover of the target door 4 has the following structure: the edge of the cavity mouth 2-3 is provided with an upward protruding sealing ring 2-4, the position of the target door 4 corresponding to the sealing ring 2-4 is provided with a target door sealing ring 4-1, and the edge of the target door 4 is provided with a flange 4-2. When the target door 4 seals the lid at the cavity mouth 2-3, the flange 4-2 surrounds the periphery of the seal ring 2-4.
As shown in FIG. 7, in this embodiment, two guide rails 5-14 are disposed at the front and rear sides of the cavity opening 2-3, the guide rails 5-14 are parallel to the translation direction of the target door 4, the width of the translation plate 5-6 is greater than that of the target door 4, a sliding block 5-13 is fixed on the translation plate 5-6 through bolts, a height limiting block 5-12 is disposed between the translation plate 5-6 and the sliding block 5-13, the translation plate 5-6 is stably maintained at a certain height through the height limiting block 5-12, a sliding groove is disposed on the sliding block 5-13, and the sliding groove is clamped on the guide rails 5-14 in a matched manner, so that the translation plate 5-6 moves along the guide rails, and the translation is more stable.
The first linear motion mechanism 5-1 in this embodiment is a cylinder, which is correspondingly installed on the outer surface of the left wall plate of the vacuum coating chamber 1 through the first dynamic seal assembly 7, and the piston rod 5-2 of the cylinder penetrates into the vacuum coating chamber 1 rightward. The left side edge of the translation plate 5-6 connected with the air cylinder is fixedly provided with a connecting sleeve 5-3 through a bolt, and the end part of the piston rod 5-2 positioned in the vacuum coating chamber 1 is in threaded connection with the connecting sleeve 5-3, so that the translation plate 5-6 and the piston rod 5-2 can be quickly disassembled and assembled.
As shown in fig. 5, the first dynamic seal assembly 7 comprises a welding seat 7-6, a seal seat 7-1, a first framework oil seal 7-3, an oil storage ring 7-2 and a lubrication sleeve 7-9, a communication hole is correspondingly formed in the left side wall plate of the vacuum coating chamber 1, the welding seat 7-6 is correspondingly welded on the outer surface of the left side wall plate of the vacuum coating chamber 1, a middle hole is formed in the middle of the welding seat 7-6 and corresponds to the communication hole, the seal seat 7-1 is fixed on the welding seat 7-6 through a bolt, sealing is realized through a sealing ring, a convex ring at the right end of the seal seat 7-1 is inserted into the middle hole of the welding seat 7-6, a step hole is formed in the middle of the seal seat 7-1, a cylinder is fixedly mounted at the left end of the seal seat 7-1 through the bolt, a piston rod 5-2 of the cylinder transversely penetrates through the step hole and is respectively arranged in the step hole, the first framework oil 7-3, the oil storage ring 7-2 and the lubrication sleeve 7-9 are respectively sealed through the step hole, and the oil injection hole 7-8 can be realized through the first framework oil 7-3, and the oil storage ring 7-2 can be correspondingly arranged at the position of the piston rod 7-2 through the oil storage ring 7-8. The first dynamic seal assembly 7 of this embodiment is provided with three first skeleton oil seals 7-3, the oil storage ring 7-2 is arranged between two first skeleton oil seals, and the first skeleton oil seals 7-3 and the oil storage ring 7-2 are installed in the stepped hole through the pressing ring 7-4 and the first seal gland 7-5, so that the three first skeleton oil seals 7-3 are tightly pressed to achieve better sealing.
As shown in fig. 9 to 12, the telescopic mechanism 6 of the present embodiment includes a second linear motion mechanism 6-9, a sliding sleeve 6-1, a connecting plate 6-5, and a second dynamic seal assembly 8, the sliding sleeve 6-1 movably passes through the bottom wall plate 2-2 of the target cavity 2, the target body 3 is fixedly mounted at the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve is the inner end thereof in the present embodiment) by sealing with the second dynamic seal assembly 8, the second linear motion mechanism 6-9 is mounted at the lower surface of the bottom wall plate 2-2 of the target cavity, and the connecting plate 6-5 connects the movable end of the second linear motion mechanism 6-9 and the outer end of the sliding sleeve 6-1 (the lower end of the sliding sleeve is the outer end thereof in the present embodiment). When the second linear motion mechanism 6-9 moves up and down in a linear manner, the sliding sleeve 6-1 is driven to move synchronously through the connecting plate 6-5.
The second linear motion mechanism 6-9 is also an air cylinder, and a piston rod of the air cylinder is connected with the middle part of the connecting plate 6-5 through a floating joint 6-10. The floating joint 6-10 is used for overcoming the deviation of the plate surface from the axis of the cylinder caused by slight swinging or deflection of the plate surface when the connecting plate moves up and down.
As shown in fig. 10 and 11, in this embodiment, a liquid flow channel 9-1 is provided in a target body 3, a liquid outlet pipe 9-3 and a liquid inlet pipe 9-2 are provided in a sliding sleeve 6-1, insulation is provided between the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 and the sliding sleeve 6-1, inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively connected with a liquid outlet and a liquid inlet of the liquid flow channel, and outer ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 respectively penetrate out from outer ends of the sliding sleeve 6-1. The ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 which are penetrated out from the outer end of the sliding sleeve 6-1 are used for connecting with an external pipeline. When in use, the silicone oil enters the liquid flow channel 9-1 from the liquid inlet pipe 9-2, takes away the heat of the target body 3 when flowing through the liquid flow channel 9-1, flows out from the liquid outlet pipe 9-3, and realizes the cooling of the target body 3 by continuous circulation of the silicone oil, and the directions of arrows in fig. 11 and 12 show the directions of the silicone oil.
As shown in fig. 10 and 11, the target body 3 has the following structure: the target body 3 comprises a target 3-1, a copper plate 3-2, a pole shoe 3-4, a waterproof rubber sheet 3-5, a target seat 3-8 and a plurality of magnets 3-3, wherein a mounting groove is formed in the surface of the target seat 3-8 facing the vacuum coating chamber 1 (the upper surface of the target seat in the embodiment is the surface facing the vacuum coating chamber), the waterproof rubber sheet 3-5 is flatly attached to the bottom surface of the mounting groove, the pole shoe 3-4 is arranged on the surface of the waterproof rubber sheet 3-5, a copper plate 3-2 is sealed at the notch of the mounting groove, sealing is realized through a sealing strip pressed on the periphery, the magnets 3-3 are uniformly distributed between the copper plate 3-2 and the pole shoe 3-4, and the target 3-1 is flatly attached and fixed on the outer surface of the copper plate 3-2. A liquid flow channel 9-1 is formed between the copper plate 3-2 and the pole shoe 3-4, a liquid outlet channel 9-11 and a liquid inlet channel 9-10 which are communicated with the liquid flow channel are also arranged on the target body 3, and the lower ends of the liquid outlet channel 9-11 and the liquid inlet channel 9-10 are a liquid outlet and a liquid inlet.
The specific fixing structure of the target 3-1 is as follows: the upper surface edge of the target seat 3-8 is fixedly provided with a pressing strip 3-6 through bolts, the copper plate 3-2 is fixedly arranged on the upper surface of the target seat 3-8 through bolts for fixing the pressing strip 3-6, the sealing strip is positioned between the copper plate 3-2 and the upper surface of the target seat 3-8, and the periphery of the target 3-1 is pressed between the pressing strip 3-6 and the copper plate 3-2, so that the target 3-1 is detachably fixed on the upper surface of the copper plate.
As shown in FIG. 11, the liquid outlet channel 9-11 and the liquid inlet channel 9-10 are symmetrically arranged with the center line of the target body 3 as the center, and the liquid outlet channel 9-11 and the liquid inlet channel 9-10 respectively pass through the target seat 3-8, the waterproof rubber 3-5 and the pole shoe 3-4 and then are communicated with the liquid flow channel 9-1.
Specifically, the telescopic mechanism 6 of this embodiment includes two sliding sleeves 6-1 and two sets of second dynamic seal assemblies 8, the two sliding sleeves 6-1 are symmetrically arranged with the center line of the target body 3 as the center, the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 are respectively arranged in the two sliding sleeves 6-1, the lower port of the liquid outlet channel 9-11 is connected with the upper end of the liquid outlet pipe 9-3, and the lower port of the liquid inlet channel 9-10 is connected with the upper end of the liquid inlet pipe 9-2.
As shown in fig. 9 and 10, the second dynamic seal assembly 8 includes a seal fixing tube 8-2 and a second frame oil seal 8-1, the seal fixing tube 8-2 is correspondingly fixed on the lower surface of the bottom wall plate 2-2 of the target cavity, the sliding sleeve 6-1 passes through the middle hole of the seal fixing tube 8-2, the second frame oil seal 8-1 is disposed in the middle hole of the seal fixing tube 8-2, and sealing is achieved through the second frame oil seal 8-1. The second dynamic seal assembly 8 of this embodiment is provided with two second skeleton oil seals 8-1, the second dynamic seal assembly is also provided with a spacer bush 8-3 and a second seal gland 8-4, the two second skeleton oil seals 8-3 are separated by the spacer bush 8-3, the second seal gland 8-4 seals the lower port of the middle hole of the seal fixing tube 8-2, and the second skeleton oil seal 8-1 and the spacer bush 8-3 are fixed by the second seal gland 8-4.
The coating machine of the embodiment is further provided with two groups of guide pillar components, and the second linear motion mechanism is more stable when driving the sliding sleeve to move through the guide pillar components. The guide pillar component comprises a guide pillar fixing seat 6-8, a guide pillar 6-6 and a guide pipe 6-7, wherein the guide pillar fixing seat 6-8 is fixed on the lower surface of the bottom wall plate 2-2 of the target cavity through bolts, the guide pipe 6-7 is fixedly arranged on the upper surface of the connecting plate 6-5 through bolts, one end of the guide pillar 6-6 is fixed on the guide pillar fixing seat 6-8, the other end of the guide pillar 6-6 movably penetrates through the guide pipe 6-7, and the guide pillar 6-6 and the guide pipe 6-7 are matched to slide so that movement is stable.
In order to realize insulation between the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 and the sliding sleeve, liquid pipe insulation sleeves 9-4 are sleeved at the contact parts of the ends of the liquid outlet pipe and the liquid inlet pipe and the sliding sleeve. The outer end of the sliding sleeve 6-1 is also fixedly provided with a protective cover 6-3, an insulating sheath 6-4 is arranged in the protective cover 6-3 and clung to the inner wall of the protective cover, the connecting plate 6-5 is connected with the lower end of the protective cover 6-3 through bolts, the outer ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (in the embodiment, the lower ends of the liquid outlet pipe and the liquid inlet pipe are the outer ends) are respectively connected with an elbow water nozzle 9-9 through pipe connectors 9-8, the elbow water nozzle 9-9 is positioned in the protective cover 6-3, and the connecting end of the elbow water nozzle 9-9 penetrates out from the side face of the protective cover to the outside for being connected with an external pipeline.
As shown in fig. 10, the structure of the sealed connection between the inner end of the sliding sleeve 6-1 and the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 is as follows: the inner end of the sliding sleeve 6-1 (the upper end of the sliding sleeve in the embodiment is the inner end of the sliding sleeve) is provided with a sealing step hole, the upper end of the sealing step hole is provided with a counter bore, the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2 (the upper ends of the liquid outlet pipe and the liquid inlet pipe in the embodiment are the inner ends of the liquid outlet pipe and the liquid inlet pipe) respectively penetrate through the corresponding sealing step holes, two sealing pressing sleeves 9-6 and two pipe part sealing rings 9-7 are arranged in the sealing step hole, the two sealing pressing sleeves 9-6 and the two pipe part sealing rings 9-7 are arranged at intervals, locking nuts 9-5 are respectively in threaded connection with the inner ends of the liquid outlet pipe 9-3 and the liquid inlet pipe 9-2, and the locking nuts 9-5 are positioned in the counter bore and lock the liquid outlet pipe and the liquid inlet pipe through the locking nuts 9-5.
In order to better mount the target body 3, the film plating machine of this embodiment further includes a target body fixing plate 3-9, the target body fixing plate 3-9 is fixed at the upper end of the sliding sleeve 6-1, the target seat 3-8 is fixed above the target body fixing plate 3-9 through an insulating fixing component, and a certain interval is left between the target seat 3-8 and the target body fixing plate 3-9. The periphery of the target body fixing plate 3-9 is fixedly provided with a shielding coaming plate 3-7, the shielding coaming plate 3-7 surrounds the periphery of the target body 3, and a certain interval is reserved between the shielding coaming plate and the target body 3, so that lateral discharge can be prevented.
As shown in fig. 13, the insulating fixing unit has the structure that: the insulating fixing component comprises a connecting bolt 3-10, an insulating pad 3-11, an insulating sleeve 3-12 and an insulating cover 3-13, wherein the connecting bolt 3-10 penetrates through the target body fixing plate and is connected to the target seat in a threaded mode, the insulating pad 3-11 is sleeved on the connecting bolt 3-10 and is arranged between the target body fixing plate 3-9 and the target seat 3-8, the head of the connecting bolt 3-10 and the part contacted with the target body fixing plate are sleeved by the insulating sleeve 3-12, accordingly insulation is achieved between the connecting bolt and the target body fixing plate, the insulating cover 3-13 covers the port of the insulating sleeve 3-12, and accordingly the head of the connecting bolt is sealed in the insulating sleeve.
The specific use mode of the coating machine is as follows: because the sputtering target material can not contact water and humid air, the target door 4 is always in a closed state during non-coating operation, the telescopic mechanism 6 drives the target body 3 to descend to the lowest point, the air extraction opening 2-1 is externally connected with a special air extraction pump to extract air from the target cavity 2, and the vacuum in the target cavity 2 is maintained. When coating operation is needed, the furnace door of the vacuum coating chamber 1 of the coating machine is opened, after the workpiece to be coated is put in, the furnace door is closed, and the vacuum coating chamber 1 is vacuumized. When the vacuum degree in the vacuum coating chamber 1 is similar to the vacuum degree in the target cavity 2, a cylinder of the translation opening and closing mechanism 5 is started, a piston rod of the cylinder pulls the translation plate to translate leftwards, the target door 4 is lifted up, the vacuum sealing of the target cavity 2 is relieved, at the moment, the translation plate 5-6 continues to move leftwards along the guide rail, and the target door 4 is pulled upwards by the pulling force of the spring 5-4 until a limit post 5-7 on the target door 4 abuts against the translation plate 5-6. And the translation plate 5-6 is pulled to move leftwards until the target door 4 is completely staggered from the cavity opening 2-3 of the target cavity, so that the opening of the target door 4 is completed. After the target door 4 is opened, the coating operation is carried out: and (3) introducing circularly flowing silicone oil 10 into the target body 3 for cooling, and then starting the telescopic mechanism 6 to drive the target body 3 to lift towards the cavity opening 2-3, so as to adjust the coating distance between the target body 3 and the target base (workpiece). And then, heating the inside of the vacuum coating chamber 1 by a heater, vacuumizing to background vacuum, introducing a proper amount of argon or reaction gas to the working vacuum degree, starting a sputtering target power supply and a bias power supply to perform ion bombardment cleaning and coating, cooling a workpiece in the vacuum coating chamber after coating is finished, and continuously vacuumizing the vacuum coating chamber 1. At this time, the target body 3 is driven to descend to the lowest position of the target cavity 2 through the telescopic mechanism 6, the translation opening and closing mechanism 5 is started, the target door 4 is driven to move rightwards, the target door is stopped until the target door 4 touches the limiting wheel 5-10, the target door 4 is opposite to the target cavity opening 2-3, the translation plate 5-6 continues to move rightwards, the connecting rod 5-9 is forced to turn to the vertical direction from the inclined direction, the target door 4 is pressed downwards, the cavity opening 2-3 is sealed, and meanwhile the spring 5-4 is lengthened. When the workpiece is cooled to a preset temperature, the furnace door pick-up can be opened to finish the coating operation.
The film plating machine of the embodiment, which is isolated from the target body by the translational target door, is not the only implementation mode, and a similar magnetron sputtering target with the translational target door can be adopted according to the requirement, and the film plating machine can be designed into a parallel multi-target film plating machine, a single-target film plating machine or a parallel multi-target film plating machine which can be sputtered downwards from the top of the vacuum film plating chamber, a group of opposite targets or a plurality of groups of opposite targets which are opposite up and down, and the magnetron sputtering target with the translational target door can be designed into a vertical single-target film plating machine or a multi-target film plating machine which is arranged on the side wall of the vacuum film plating chamber, which belongs to the scope of the protection of the scheme of the invention.
Claims (6)
1. The utility model provides a through coating machine of translation formula target door isolation target body, includes vacuum coating room and target body, through circulation flow through the liquid of target body realizes to the cooling of target body, its characterized in that: further comprises:
the target cavity is arranged at the bottom or the top or the side part of the vacuum coating chamber and is directly communicated with the vacuum coating chamber through an cavity opening;
the telescopic mechanism is arranged on the wall plate of the target cavity; the target body is arranged on the telescopic mechanism and is positioned in the target cavity; the telescopic mechanism drives the target body to move towards the cavity opening or retract into the target cavity;
the target door and the translation opening and closing mechanism are arranged at the cavity opening through the translation opening and closing mechanism; the target door can automatically seal the cover at the cavity opening by driving the translation opening and closing mechanism to do translation movement towards the cavity opening; the target door can be automatically separated from the cavity opening by driving the translation opening and closing mechanism to do translation movement in the direction away from the cavity opening, and is driven by the translation opening and closing mechanism to be horizontally moved towards the side edge of the cavity opening;
the liquid which circularly flows through the target body and is used for cooling is silicone oil;
an extraction opening for vacuumizing the target cavity is arranged on the wall plate of the target cavity;
the translational opening and closing mechanism comprises a first linear motion mechanism, a translational plate, a connecting rod, a spring and a limiting wheel, wherein the first linear motion mechanism is installed on a wall plate of the vacuum coating chamber, the translational plate is installed at the movable end of the first linear motion mechanism, the target door and the translational plate are arranged opposite to each other, the connecting rod and the spring are positioned between the target door and the translational plate, two ends of the connecting rod are respectively hinged with the target door and the translational plate, two ends of the spring are respectively fixedly connected with the target door and the translational plate, and the limiting wheel is arranged at the side edge of the cavity opening; when the first linear movement mechanism moves away from the cavity opening, the connecting rod inclines to the side, the spring contracts, and the target door is pulled up; when the first linear movement mechanism moves towards the cavity opening to the direction that the target door is opposite to the cavity opening, the limiting wheel is blocked on the side surface of the target door to limit the target door to continuously translate;
a convex sealing ring is arranged along the edge of the cavity opening, a target door sealing ring is arranged on the position, corresponding to the sealing ring, on the target door, and a flange is arranged along the edge of the target door; the flange surrounds the seal ring when the target seal cap is at the cavity opening.
2. The coating machine for isolating targets by translating target doors according to claim 1, characterized in that: the first linear movement mechanism is an air cylinder, the air cylinder is correspondingly arranged on the outer surface of the wall plate of the vacuum coating chamber through a first dynamic seal assembly, and a piston rod of the air cylinder penetrates into the vacuum coating chamber.
3. The coating machine for isolating targets by translating target doors according to claim 2, characterized in that: the telescopic mechanism comprises a second linear motion mechanism, a sliding sleeve, a connecting plate and a second dynamic sealing assembly, wherein the sliding sleeve movably penetrates through the wall plate of the target cavity, the target body is sealed through the second dynamic sealing assembly and fixedly installed at the inner end of the sliding sleeve, the second linear motion mechanism is installed on the outer surface of the wall plate of the target cavity, and the connecting plate is connected with the movable end of the second linear motion mechanism and the outer end of the sliding sleeve.
4. A coating machine for isolating targets by a translating target door according to claim 3, characterized in that: the liquid outlet pipe and the liquid inlet pipe are arranged in the sliding sleeve, the liquid outlet pipe and the liquid inlet pipe are insulated between the sliding sleeve, the inner ends of the liquid outlet pipe and the liquid inlet pipe are respectively connected with the liquid outlet and the liquid inlet of the liquid flow channel, and the outer ends of the liquid outlet pipe and the liquid inlet pipe respectively penetrate out of the outer ends of the sliding sleeve.
5. The coating machine for isolating targets by translating target doors according to claim 4, wherein: the target body comprises a target material, a copper plate, a pole shoe, a waterproof rubber, a target seat and a plurality of magnets, wherein a mounting groove is formed in the surface of the target seat facing the vacuum coating chamber, the waterproof rubber is flatly attached to the bottom surface of the mounting groove, the pole shoe is arranged on the surface of the waterproof rubber, the copper plate is sealed at the notch of the mounting groove, the magnets are distributed between the copper plate and the pole shoe, and the target material is flatly attached to and fixed on the outer surface of the copper plate; the liquid flow channel is formed between the copper plate and the pole shoe, a liquid outlet channel and a liquid inlet channel which are communicated with the liquid flow channel are further arranged on the target body, and the outer ends of the liquid outlet channel and the liquid inlet channel are the liquid outlet and the liquid inlet.
6. The coating machine for isolating targets by translating target doors according to claim 5, characterized in that: the coating machine further comprises a target body fixing plate, wherein the target body fixing plate is fixed at the inner end of the sliding sleeve, the target seat is fixed on the target body fixing plate through an insulating fixing assembly, and a gap is reserved between the target seat and the target body fixing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910449106.2A CN110230033B (en) | 2019-05-27 | 2019-05-27 | Coating machine for isolating target body through translational target door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910449106.2A CN110230033B (en) | 2019-05-27 | 2019-05-27 | Coating machine for isolating target body through translational target door |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110230033A CN110230033A (en) | 2019-09-13 |
| CN110230033B true CN110230033B (en) | 2023-09-08 |
Family
ID=67858530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910449106.2A Active CN110230033B (en) | 2019-05-27 | 2019-05-27 | Coating machine for isolating target body through translational target door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110230033B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111188018A (en) * | 2020-03-06 | 2020-05-22 | 西南交通大学 | High-temperature superconducting strip metal sputtering target material protection device and substrate film manufacturing method |
| CN112593193B (en) * | 2020-11-16 | 2022-12-09 | 中建材玻璃新材料研究院集团有限公司 | Vacuum magnetron sputtering coating equipment and coating method thereof |
| CN113061867A (en) * | 2021-03-11 | 2021-07-02 | 深圳市三束镀膜技术有限公司 | Closed target cabin equipment for realizing washing-free target function |
| CN113667947B (en) * | 2021-07-23 | 2023-04-21 | 镇江市德利克真空设备科技有限公司 | Be applied to intelligent temperature control device of negative pole platform |
| CN114293168B (en) * | 2021-12-28 | 2022-11-04 | 广东省新兴激光等离子体技术研究院 | Coating material storage device, vacuum coating equipment and vacuum coating method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4294678A (en) * | 1979-11-28 | 1981-10-13 | Coulter Systems Corporation | Apparatus and method for preventing contamination of sputtering targets |
| CN87214297U (en) * | 1987-10-12 | 1988-09-21 | 浙江大学 | Multiple source plane magnetic control sputtering source |
| JPH0687778U (en) * | 1993-05-31 | 1994-12-22 | 日新電機株式会社 | Vacuum device |
| EP1947211A1 (en) * | 2006-12-05 | 2008-07-23 | Galileo Vacuum Systems S.p.A. | Vacuum metallization device |
| CN201695079U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Target door rotating mechanism of horizontal vacuum coating machine |
| WO2014089948A1 (en) * | 2012-12-14 | 2014-06-19 | 广东志成冠军集团有限公司 | Multi-functional continuous magneto-controlled sputter coating device |
| CN210341044U (en) * | 2019-05-27 | 2020-04-17 | 东莞市汇成真空科技有限公司 | Coating machine for isolating target body through translation type target door |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7588669B2 (en) * | 2005-07-20 | 2009-09-15 | Ascentool, Inc. | Single-process-chamber deposition system |
-
2019
- 2019-05-27 CN CN201910449106.2A patent/CN110230033B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4294678A (en) * | 1979-11-28 | 1981-10-13 | Coulter Systems Corporation | Apparatus and method for preventing contamination of sputtering targets |
| CN87214297U (en) * | 1987-10-12 | 1988-09-21 | 浙江大学 | Multiple source plane magnetic control sputtering source |
| JPH0687778U (en) * | 1993-05-31 | 1994-12-22 | 日新電機株式会社 | Vacuum device |
| EP1947211A1 (en) * | 2006-12-05 | 2008-07-23 | Galileo Vacuum Systems S.p.A. | Vacuum metallization device |
| CN201695079U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Target door rotating mechanism of horizontal vacuum coating machine |
| WO2014089948A1 (en) * | 2012-12-14 | 2014-06-19 | 广东志成冠军集团有限公司 | Multi-functional continuous magneto-controlled sputter coating device |
| CN210341044U (en) * | 2019-05-27 | 2020-04-17 | 东莞市汇成真空科技有限公司 | Coating machine for isolating target body through translation type target door |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110230033A (en) | 2019-09-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110230033B (en) | Coating machine for isolating target body through translational target door | |
| CN210341044U (en) | Coating machine for isolating target body through translation type target door | |
| CN110295351B (en) | Coating machine for isolating target body through turnover target door | |
| CN210394504U (en) | Target body telescopic mechanism in magnetron sputtering coating machine | |
| CN210711721U (en) | Coating machine for isolating target body through turnover target door | |
| CN110433875B (en) | High-low temperature vacuum optical test box | |
| CN113621920B (en) | Vacuum coating method of vacuum coating machine | |
| CN202412866U (en) | Photovoltaic glass copper-clad circuit board vacuum laminating machine | |
| CN113522607B (en) | Anti-corrosion building material and preparation device thereof | |
| CN203270024U (en) | Multifunctional magnetron sputtering coating device | |
| CN112458264A (en) | Gas quenching furnace with uniform low-temperature | |
| CN217324293U (en) | Multi-cavity microwave plasma chemical vapor deposition device | |
| CN208232179U (en) | Vacuum hotpressing machine, intelligent fire-proofing plate vacuum hotpressing complete set of equipments | |
| CN108453984A (en) | Large-tonnage large format intelligent fire-proofing plank vacuum hotpressing complete set of equipments and preparation method | |
| CN108588682A (en) | A kind of thermal decomposition film preparation reaction unit | |
| CN114963703A (en) | Vacuum type oven with pressure protection function | |
| CN210139558U (en) | Secondary foaming make-up machine | |
| CN210346182U (en) | Drying device is used in film forming auxiliary agent production with cooling body | |
| CN212121610U (en) | Die casting machine spraying mechanism | |
| CN212382194U (en) | Vamp hot pressing equipment of pressfitting in vacuum environment | |
| CN208791741U (en) | A kind of vertical silicon wafer magnetron sputtering coater | |
| CN203754792U (en) | Rotary positive ion nitriding furnace | |
| CN221166729U (en) | Vacuum coating device | |
| CN214792233U (en) | Low-energy-consumption electric heating air-blast drying oven | |
| CN217149295U (en) | Multifunctional magnetron sputtering vacuum coating machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.2, Yanwu Longyuan Road, Dalingshan Town, Dongguan City, Guangdong Province, 523838 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: No. 2, Wangyuan Road, Yanwu Village, Dalingshan, Dongguan, Guangdong 523820 Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY CO.,LTD. |