CN103456702A - Corrosion preventing method with water and electricity separated and liquid cooling radiator - Google Patents
Corrosion preventing method with water and electricity separated and liquid cooling radiator Download PDFInfo
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- CN103456702A CN103456702A CN2013104155350A CN201310415535A CN103456702A CN 103456702 A CN103456702 A CN 103456702A CN 2013104155350 A CN2013104155350 A CN 2013104155350A CN 201310415535 A CN201310415535 A CN 201310415535A CN 103456702 A CN103456702 A CN 103456702A
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Abstract
The invention discloses a corrosion preventing method with water and electricity separated and a liquid cooling radiator. The corrosion preventing method with the water and the electricity separated is used for the liquid cooling radiator adopting separated water and electricity to prevent corrosion in an internal flow channel, an ion plating technology is used for covering the surface of the internal flow channel of the base plate and/or the cover plate of the liquid cooling radiator with a diamond-like carbon film, a sealing ring is arranged between the base plate and the cover plate, and then the base plate and the cover plate are fastened and sealed. The liquid cooling radiator comprises the base plate, the cover plate, the diamond-like carbon film and the sealing ring. The internal flow channel is arranged on the base plate and/or the cover plate, and the diamond-like carbon film covers the surface of the internal flow channel of the base plate and/or the cover plate of the liquid cooling radiator. The sealing ring is arranged between the base plate and the cover plate, and the base plate and the cover plate are fastened and sealed. According to the method and the liquid cooling radiator, the water and the electricity can be separated, the corrosion resisting and washing resisting performance of the internal flow channel of the radiator is improved, the heat radiating performance of the radiator can be improved, flow resistance can be reduced, and the liquid cooling radiator has good application prospects.
Description
Technical field
The present invention relates to liquid cooling heat radiator and manufacture field, especially a kind of anti-corrosion method and liquid cooling heat radiator thereof that adopts water power isolation corrosion-resistant liquid cooling heat radiator for inner flow passage.
Background technology
Electric power semiconductor element generally is comprised of substrate and cover plate with liquid cooling heat radiator, and its inside is processed with runner.In use, cooling fluid can wash away the runner wall while flowing in inner flow passage, and if impurity is arranged in cooling liquid, impurity may react with the radiator base material, thus electrochemical corrosion.Therefore, for guaranteeing the reliability of radiator, general inner flow passage need to carry out preservative treatment.Anti-corrosion method commonly used mainly contains anodic oxidation at present, the chromate chemistry transforms two kinds.
But the thermal conductivity of anodic oxidation and chromate chemistry conversion film layer is low, although rete is very thin, still can reduce to a certain extent the heat dispersion of cooled plate.And chromate chemistry conversion film layer can be in cold situation, the chemicals hybrid reaction that the chromate of take is the master is at aluminium surface production one deck dense oxidation film, but chromate chemistry conversion film layer hardness is not high, resistance to erosion not, and rete is conducting film, if while on radiator, being applied with large electric current, may make the cooling fluid generation electrolysis in inner flow passage, thus corrosion.
And in commercial Application, a kind of novel hard lubricating function film---DLC film (diamond-like carbon films, diamond-like carbon film), performance with a series of excellences, as high rigidity, high-wearing feature, high heat conductance, high resistivity, good optical transparence, chemical inertness etc., the fields such as machinery, electronics, optics, calorifics, acoustics, medical science have been widely used at present.Anti-corrosion characteristic in view of its good characteristic and liquid cooling heat radiator inner flow passage, be applied on liquid cooling heat radiator, for solving water power isolation and the inner flow passage Anticorrosion of radiator.
Through retrieval, in prior art, the disclosure of the invention that application number is 200910311960.9 a kind of processing method of liquid-cooling anti-corrosion radiator, mainly solved liquid cooling heat radiator cooling duct in the prior art and be difficult to carry out complete anti-corrosion treatment and the poor problem of anticorrosion ability.The present invention is by processing in the cover plate inboard for docking the vent rib top of the inboard vent rib of radiator body bottom, adopt hard anodize technique to carry out anti-corrosion treatment, then unified preliminary treatment solder side, finally get up to realize the cold complete anticorrosion of removing passage of liquid cooling heat radiator by radiator body and cover plate vacuum welding.Liquid cooling heat radiator corrosion resistance of the present invention is strong, and manufacturing process is simple, and operation is easily gone, and the production technology cost is low.The invention that application number is 200710156606.4 relates to a kind of novel liquid cooling heat radiator for semiconductor device, its composition comprises the radiator box body, inner chamber on described box body is equipped with a groups of fins be comprised of several fin, described fin is " U " template, described " U " template upper punch is pressed with several equally distributed slotted holes, and the both sides of plate and slotted hole adjacent punching press respectively have opening.This radiator is for alternately stacking several fin a positive and a negative together and form, make at liquid in process step by step, liquid constantly carries out shunting the most up and down, liquid flow is even and sufficient large tracts of land contacts and the fixed volume uninterrupted has determined radiating effect, has greatly promoted heat radiation power density.The present invention is for the semiconductor device heat radiation.The inventive embodiments that application number is 201310005082.4 discloses a kind of radiating block and manufacture method thereof of liquid-cooling type cpu heat, the radiating block of this liquid-cooling type cpu heat comprises the substrate with end face and bottom surface and is located at the fins group of described substrate for heat radiation, described substrate top surface middle part is provided with to the groove sunk into, described fins group is arranged in parallel and forms from the outwardly directed fin in the vertical diapire of the diapire ground of described groove by multi-disc, the apical margin middle part of some fins of described fins group or whole fins also is provided with breach, each breach is common to be formed one and connects continuously several or whole guiding gutters on the top of fins.The method of manufacturing the radiating block of described liquid-cooling type cpu heat comprises makes semi-finished product radiating block, making guiding gutter, making groove, making fin and radiating block forming step.The radiating block of this liquid-cooling type cpu heat has promoted heat conduction and the heat dispersion of radiating block.Above liquid cooling heat radiator of the prior art is not all to adopt the diamond-like-carbon membrane technology, can't isolate by water power, and its heat dispersion and antiseptic property are subject to certain limitation, remain further to be improved.
Summary of the invention
Technical problem to be solved by this invention is, a kind of anti-corrosion method and liquid cooling heat radiator thereof of water power isolation is provided, and it can solve water power isolation and the inner flow passage Anticorrosion of liquid cooling heat radiator, heat dispersion and the antiseptic property of raising liquid cooling heat radiator.
Technical scheme of the present invention is: the anti-corrosion method of described water power isolation, adopt water power isolation corrosion-resistant liquid cooling heat radiator for inner flow passage, utilize the inner flow passage surface coverage one deck diamond-like carbon film of ion plating technology at liquid cooling heat radiator substrate and/or cover plate, between substrate and cover plate, sealing ring is installed, then fit sealing.
In the anti-corrosion method of above-mentioned water power isolation, described electroplating technology comprises hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, activated reactive evaporation, radio-frequency (RF) ion plating, direct-current discharge ion plating.
The invention provides a kind of manufacture method of liquid cooling heat radiator, comprise the steps:
A, manufacture substrate and cover plate are slotted on substrate and/or cover plate, process inner flow passage;
B, utilize the inner flow passage surface coverage one deck diamond-like carbon film of ion plating technology at liquid cooling heat radiator substrate and/or cover plate;
C, between substrate and cover plate, install sealing ring;
D, by substrate, sealing ring and cover plate fit sealing, complete the manufacture of liquid cooling heat radiator.
In the manufacture method of above-mentioned liquid cooling heat radiator, described electroplating technology also comprises hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, activated reactive evaporation, radio-frequency (RF) ion plating, direct-current discharge ion plating.
Described liquid cooling heat radiator, comprise substrate, cover plate, diamond-like carbon film and sealing ring; Described substrate and/or cover plate are provided with inner flow passage, and described diamond-like carbon film covers the inner flow passage surface of liquid cooling heat radiator substrate and/or cover plate; Described sealing ring is arranged between substrate and cover plate, and substrate and cover plate fit sealing can pass through screw or bolt by substrate, sealing ring and cover plate fit sealing.The thickness of described diamond-like carbon film is 0.2 to 1.2 μ m.Described inner flow passage is the groove of offering on substrate and/or cover plate.
The present invention utilizes the inner flow passage surface coverage one deck diamond-like carbon film of ion plating technology at radiator base plate and/or cover plate, between substrate and cover plate, sealing ring is installed, then with the bolted sealing, thereby produce water power, isolate and the good liquid cooling heat radiator of antiseptic property.
With traditional radiator, compare, advantage of the present invention is:
1), due to the high resistivity of diamond-like carbon film, be applied in the electric semiconductor liquid cooling heat radiator and can accomplish the water power isolation, and antiseptic effect is outstanding;
2) thermal conductivity due to diamond-like carbon film high (be about copper 6 times), thermal coefficient of expansion is little, and the anticorrosion rete of liquid cooling heat radiator inside can improve the heat dispersion of radiator;
3) because diamond-like carbon film has high hardness (have and approach adamantine high rigidity, its hardness is about HVl000～8000) and excellent wear resistance, improved the corrosion-resistant and flushing resistance of radiator inner flow passage;
4) coefficient of friction due to diamond-like carbon film low (0.005 ~ 0.02), surface is very level and smooth, and roughness can reach Ra0.01um, can reduce the flow resistance of radiator runner.
The accompanying drawing explanation
Fig. 1 is the liquid cooling heat radiator outline drawing in the present invention;
Fig. 2 is the decomposition texture schematic diagram of the liquid cooling heat radiator in the present invention.
In figure: 1, substrate; 2, sealing ring; 3, cover plate; 4, screw; 5, inner flow passage.
Embodiment
For the anticorrosion of power industry liquid cooling heat radiator and hot property requirement, pass effect and radiator integral heat dispersion in the situation that do not change the actual heat of heat pipe, a kind of water power isolation and corrosion-resistant process are proposed, utilize the ion plating technology to adhere to diamond-like carbon film on the substrate of liquid cooling heat radiator and/or cover plate, then by screw and sealing ring, seal assembling.The anti-corrosion method of described water power isolation, be mainly used in inner flow passage and adopt water power isolation corrosion-resistant liquid cooling heat radiator, and also can be used for it similarly needs on the corrosion-resistant product.The anti-corrosion method of described water power isolation, utilize the inner flow passage surface coverage one deck diamond-like carbon film of ion plating technology at liquid cooling heat radiator substrate and/or cover plate, and sealing ring 2 is installed between substrate 1 and cover plate 3, then uses screw 4 fit sealings.
In the anti-corrosion method of above-mentioned water power isolation, the ion plating technology of diamond-like carbon film comprises hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, activated reactive evaporation, radio-frequency (RF) ion plating, direct-current discharge ion plating etc.During ion plating, various gas discharges are introduced to vapour deposition, a branch of Ar ion beam sputtering solid graphite target that ion source produces forms carbon ion and is deposited on matrix (substrate of radiator and/or cover plate), the film that another beam ion bundle bombardment is being grown simultaneously, make between deposited carbon-containing particle and bombarding ion to occur the series of physical chemical action, thereby form diamond-like carbon film on the collective surface.
The anti-corrosion method of above-mentioned water power isolation can be accomplished the water power isolation, improves the corrosion-resistant and flushing resistance of radiator inner flow passage, and can improve the heat dispersion of radiator and reduce flow resistance, on liquid cooling heat radiator, has a good application prospect.
The present invention also provides a kind of manufacture method of liquid cooling heat radiator, comprises the steps:
A, manufacture substrate and cover plate are slotted on substrate and/or cover plate, process inner flow passage;
B, utilize the inner flow passage surface coverage one deck diamond-like carbon film of ion plating technology at liquid cooling heat radiator substrate and/or cover plate;
C, between substrate and cover plate, install sealing ring;
D, by substrate, sealing ring and cover plate fit sealing, complete the manufacture of liquid cooling heat radiator.
As depicted in figs. 1 and 2, described liquid cooling heat radiator, comprise substrate 1, cover plate 3, diamond-like carbon film and sealing ring 2; Described substrate 1 and/or cover plate 3 are provided with inner flow passage 5, and described diamond-like carbon film covers inner flow passage 5 surfaces of liquid cooling heat radiator substrate 1 and/or cover plate 3; Described sealing ring 2 is arranged between substrate 1 and cover plate 3, by screw 4 or bolt by substrate 1, sealing ring 2 and cover plate 3 fit sealings.The thickness of described diamond-like carbon film is 0.8 μ m.
It is cooling that above-mentioned liquid cooling heat radiator can be used for the liquid cooling of the cooling thyristor of power industry or IGCT device.In view of there is temperature instability in diamond-like carbon film, should not adopt welding procedure (as vacuum brazing, friction stir welding, argon arc welding etc.).Therefore adopt and slot on substrate and/or cover plate, utilize ion plating at the substrate of radiator and/or the inner flow passage surface attachment diamond-like carbon film of cover plate, then place suitable sealing ring, then seal with screw fastening.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all being included in protection scope of the present invention.
Claims (8)
1. the anti-corrosion method of water power isolation, adopt water power isolation corrosion-resistant liquid cooling heat radiator for inner flow passage, it is characterized in that: utilize the inner flow passage surface coverage one deck diamond-like carbon film of ion plating technology at liquid cooling heat radiator substrate and/or cover plate, between substrate and cover plate, sealing ring is installed, then fit sealing.
2. the anti-corrosion method that water power according to claim 1 is isolated, it is characterized in that: described electroplating technology comprises hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, activated reactive evaporation, radio-frequency (RF) ion plating, direct-current discharge ion plating.
3. the manufacture method of a liquid cooling heat radiator, comprise the steps:
A, manufacture substrate and cover plate are slotted on substrate and/or cover plate, process inner flow passage;
B, utilize the inner flow passage surface coverage one deck diamond-like carbon film of ion plating technology at liquid cooling heat radiator substrate and/or cover plate;
C, between substrate and cover plate, install sealing ring;
D, by substrate, sealing ring and cover plate fit sealing, complete the manufacture of liquid cooling heat radiator.
4. the manufacture method of liquid cooling heat radiator according to claim 3, it is characterized in that: described electroplating technology comprises hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, activated reactive evaporation, radio-frequency (RF) ion plating, direct-current discharge ion plating.
5. a liquid cooling heat radiator, comprise substrate (1) and cover plate (3), and described substrate (1) and/or cover plate (3) are provided with inner flow passage (5), it is characterized in that: described liquid cooling heat radiator also comprises diamond-like carbon film and sealing ring (2); Described diamond-like carbon film covers inner flow passage (5) surface of liquid cooling heat radiator substrate (1) and/or cover plate (3); Described sealing ring (2) is arranged between substrate (1) and cover plate (3), substrate (1) and cover plate (3) fit sealing.
6. liquid cooling heat radiator according to claim 5 is characterized in that: by screw (4) or bolt by substrate (1), sealing ring (2) and cover plate (3) fit sealing.
7. liquid cooling heat radiator according to claim 5, it is characterized in that: the thickness of described diamond-like carbon film is 0.2 to 1.2 μ m.
8. liquid cooling heat radiator according to claim 5, it is characterized in that: described inner flow passage is the groove of offering on substrate and/or cover plate.
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| CN2013104155350A CN103456702A (en) | 2013-09-13 | 2013-09-13 | Corrosion preventing method with water and electricity separated and liquid cooling radiator |
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| CN2013104155350A CN103456702A (en) | 2013-09-13 | 2013-09-13 | Corrosion preventing method with water and electricity separated and liquid cooling radiator |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106777715A (en) * | 2016-12-22 | 2017-05-31 | 西安交通大学 | A kind of self-adaptive growth method for designing of phased-array radar T/R assembly radiating networks |
| CN108054150A (en) * | 2018-01-10 | 2018-05-18 | 深圳市智通电子有限公司 | A kind of high-power IGBT liquid-cooling heat radiator |
| CN111111797A (en) * | 2019-12-31 | 2020-05-08 | 中国科学院力学研究所 | Constant temperature water cooling plant of embedded annular water-cooled tube |
| CN111118588A (en) * | 2020-01-13 | 2020-05-08 | 深圳市晟达真空钎焊技术有限公司 | System capable of circularly plating nickel inside liquid cooling plate |
| CN114204239A (en) * | 2021-11-08 | 2022-03-18 | 北京无线电测量研究所 | Liquid cooling waveguide |
| TWI832729B (en) * | 2023-03-21 | 2024-02-11 | 英業達股份有限公司 | Separator type liquid cooling radiator |
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| CN101764110A (en) * | 2009-12-29 | 2010-06-30 | 中国科学院电工研究所 | Radiator of IGBT (Insulated Gate Bipolar Translator) module for electric vehicle or hybrid electric vehicle |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106777715A (en) * | 2016-12-22 | 2017-05-31 | 西安交通大学 | A kind of self-adaptive growth method for designing of phased-array radar T/R assembly radiating networks |
| CN106777715B (en) * | 2016-12-22 | 2020-04-10 | 西安交通大学 | Adaptive growth design method for T/R component heat dissipation network of phased array radar |
| CN108054150A (en) * | 2018-01-10 | 2018-05-18 | 深圳市智通电子有限公司 | A kind of high-power IGBT liquid-cooling heat radiator |
| CN111111797A (en) * | 2019-12-31 | 2020-05-08 | 中国科学院力学研究所 | Constant temperature water cooling plant of embedded annular water-cooled tube |
| CN111118588A (en) * | 2020-01-13 | 2020-05-08 | 深圳市晟达真空钎焊技术有限公司 | System capable of circularly plating nickel inside liquid cooling plate |
| CN111118588B (en) * | 2020-01-13 | 2020-10-16 | 深圳市晟达真空钎焊技术有限公司 | System capable of circularly plating nickel inside liquid cooling plate |
| CN114204239A (en) * | 2021-11-08 | 2022-03-18 | 北京无线电测量研究所 | Liquid cooling waveguide |
| CN114204239B (en) * | 2021-11-08 | 2023-04-14 | 北京无线电测量研究所 | Liquid cooling waveguide |
| TWI832729B (en) * | 2023-03-21 | 2024-02-11 | 英業達股份有限公司 | Separator type liquid cooling radiator |
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