CN216514075U - Waterway structure of vacuum coating cavity - Google Patents
Waterway structure of vacuum coating cavity Download PDFInfo
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- CN216514075U CN216514075U CN202121282817.4U CN202121282817U CN216514075U CN 216514075 U CN216514075 U CN 216514075U CN 202121282817 U CN202121282817 U CN 202121282817U CN 216514075 U CN216514075 U CN 216514075U
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Abstract
The utility model provides a waterway structure of a vacuum coating cavity, which comprises a polygonal columnar vacuum cavity, wherein a sinking groove formed by turning and milling is distributed on the surface of the outer wall of the vacuum cavity, and a cover plate is hermetically covered on the top surface of the sinking groove, so that a waterway is formed between the cover plate and the sinking groove. The vacuum cavity is polygonal and columnar, so that the outer wall of the vacuum cavity consists of a plurality of planes, the outer wall of the vacuum cavity is machined into the sinking groove through turning and milling, the processing is convenient, the water paths can be distributed in any shape, the cooling is more uniform, the water paths are arranged on the outer wall of the vacuum cavity in a sinking mode, the heat conduction effect is very good, and the water paths can take away heat more quickly; in addition, because the water route is sunken in the inside of vacuum cavity outer wall in the semicircular shape, can not increase the wall thickness of vacuum cavity, can not reduce the intensity of outer wall, can not interfere the installation overall arrangement of other parts yet, it is more convenient to look for the water spot during later maintenance.
Description
Technical Field
The utility model relates to the technical field of vacuum coating machines, in particular to a waterway structure of a vacuum coating cavity.
Background
Vacuum coating mainly refers to a coating film which needs to be carried out under higher vacuum degree, and the principle is that metal, alloy or compound is evaporated or sputtered in vacuum, so that the metal, alloy or compound is solidified on a coated object and deposited to form a thin film. In the vacuum coating process, the vacuum cavity of the coating equipment needs to be cooled, and the traditional cooling mode comprises a mode of laying a pipeline outside the outer wall of the vacuum cavity and a mode of arranging cooling plates outside the outer wall of the vacuum cavity at intervals so that a water channel is formed by a gap between the cooling plates and the outer wall of the vacuum cavity; for example, chinese patent publication No. CN 102618838A discloses a cooling housing for a circulating cooling system of a vacuum coater, the cooling structure of which is that a metal cover is sleeved outside the outer wall of a vacuum chamber, an inward concave reinforced circular groove is provided on the metal cover, and a cooling water path is formed in a gap between the outer wall of the vacuum chamber and the metal cover through the reinforced circular groove. In the scheme, due to the fact that the pipeline is laid on the outer wall of the vacuum cavity, the heat dissipation effect of the vacuum cavity is not ideal due to poor heat conductivity, and the pipeline is difficult to bend at a small angle, so that the local cooling effect is poor; and the mode of installing the cooling plate additionally is adopted, so that the wall thickness of the vacuum cavity is increased, the structure is complex, and the cooling plate structure is easy to fall off to influence the service life.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a waterway structure which is easy in waterway processing layout, uniform in heat dissipation and free from increasing the wall thickness of a vacuum cavity.
In order to achieve the purpose, the technical scheme adopted by the utility model is as follows:
the utility model provides a waterway structure in vacuum coating chamber, includes polygonal columnar vacuum cavity, the outer wall surface of vacuum cavity has laid the heavy groove of turn-milling machine tooling shaping, the top surface of heavy groove covers sealedly has the apron, makes the apron with form the water route between the heavy groove.
The beneficial effect of above-mentioned scheme lies in: the vacuum cavity is polygonal and columnar, so that the outer wall of the vacuum cavity consists of a plurality of planes, the outer wall of the vacuum cavity is machined into the sinking groove through turning and milling, the processing is convenient, the water paths can be distributed in any shape, the cooling is more uniform, the water paths are arranged on the outer wall of the vacuum cavity in a sinking mode, the heat conduction effect is very good, and the water paths can take away heat more quickly; in addition, because the water route is sunken in the inside of vacuum cavity outer wall in the semicircular shape, can not increase the wall thickness of vacuum cavity, can not reduce the intensity of outer wall, can not interfere the installation overall arrangement of other parts yet, it is more convenient to look for the water spot during later maintenance.
In a preferable scheme, the distribution shape of the cover plate is matched with that of the sinking grooves. Further, the cover plate is embedded on the top surface of the sinking groove, and the outer surface of the cover plate is flush with the outer wall surface of the vacuum cavity. Further, the lower part of the section of the sinking groove is an arc groove, the top of the sinking groove is provided with a step groove with the width larger than that of the arc groove, and the cover plate is embedded and fixed in the step groove. Further, the cover plate is welded or sealed and locked in the step groove.
In the scheme, the cover plate is matched with the sinking groove in shape, so that not only is the material saved, but also a better sealing effect between the cover plate and the sinking groove is achieved more easily; the cover plate is embedded in the sinking groove and does not protrude out of the surface of the outer wall of the vacuum cavity, so that the surface of the outer wall of the vacuum cavity is smoother and does not protrude to interfere other structures, and the edge of the cover plate is embedded and fixed in the sinking groove, so that the bonding strength is higher; the cover plate can be supported by the step groove at the top of the sinking groove, so that the cover plate is prevented from loosening downwards, and the reliability and the sealing performance of the cover plate are further enhanced.
Drawings
The present invention will be described in further detail with reference to the following drawings and specific examples.
FIG. 1 is a schematic view showing the arrangement of the deposition chambers in the vacuum chamber of the embodiment;
fig. 2 is a schematic cross-sectional view of the waterway in the embodiment.
Detailed Description
The utility model is further described below with reference to the accompanying drawings:
referring to fig. 1 and 2, the waterway structure of the vacuum coating cavity comprises a polygonal columnar vacuum cavity 1, wherein the surfaces of all outer walls 100 of the vacuum cavity 1 are uniformly provided with sunk grooves 21 formed by turning and milling, the sunk grooves 21 are distributed in a labyrinth shape, and the top surfaces of the sunk grooves 21 are hermetically covered with a cover plate 22, so that a waterway 2 is formed between the cover plate 22 and the sunk grooves 21. The vacuum cavity 1 is provided with a cavity 11 and a cavity door 12 which are longitudinally cut, and the water ways 2 of the cavity 11 and the cavity door 12 are mutually independent.
The vacuum cavity 1 is in a polygonal column shape, so the outer wall 100 of the vacuum cavity is composed of a plurality of planes, the outer wall 100 of the vacuum cavity 1 is machined into the sink groove 21 through turning and milling, the machining is convenient, the water ways 2 can be distributed in any shape, the cooling is more uniform, compared with the traditional water way structure, the pipe distribution mode is difficult to bend into small angles, and the irregular bending machining is difficult, and the circular water way holes are directly drilled on the outer wall 100, so the machining is more difficult, only linear holes can be drilled, the strength of the outer wall 100 can be reduced, the labyrinth-shaped sink groove 21 can ensure that the water ways 2 are uniformly distributed on the outer wall 100 of the vacuum cavity 1, the heat at each part of the vacuum cavity 1 is timely dissipated, the uniformity of the internal temperature of the vacuum cavity 1 is ensured, and the quality of film coating is improved. The water channel 2 is arranged on the outer wall 100 of the vacuum cavity 1 in a downward and inward sinking manner, the heat conduction effect is very good, and the water channel 2 can take away heat more quickly; in addition, because the water path 2 is sunk in the outer wall 100 of the vacuum cavity 1 in a semicircular shape, the wall thickness of the vacuum cavity 1 cannot be increased, the strength of the outer wall 100 cannot be reduced, the installation layout of other parts cannot be interfered, and the water leakage point is more conveniently found during later maintenance.
In a preferred embodiment, the cover plate 22 is matched with the distribution shape of the sinking groove 21, and the cover plate 22 can be cut according to the shape of the sinking groove 21 during processing. Further, the cover plate 22 is embedded on the top surface of the sinking groove 21, and the outer surface of the cover plate 22 is flush with the surface of the outer wall 100 of the vacuum chamber 1. Further, the lower part of the cross section of the sinking groove 21 is an arc groove 212, the top part of the sinking groove is provided with a step groove 211 with a width larger than that of the arc groove 212, and the cover plate 22 is embedded and fixed in the step groove 211. Further, the cover plate 22 is welded or sealed and locked in the step groove 211.
In the above-mentioned implementation structure, the cover plate 22 is matched with the sinking groove 21 in shape, which not only saves materials, but also makes it easier to achieve better sealing effect between the cover plate 22 and the sinking groove 21; the cover plate 22 is embedded in the sinking groove 21 and does not protrude out of the surface of the outer wall 100 of the vacuum chamber 1, so that the surface of the outer wall 100 of the vacuum chamber 1 is smoother and does not protrude to interfere with other structures, and the edge of the cover plate 22 is embedded and fixed in the sinking groove 21, so that the bonding strength is higher; the step groove 211 at the top of the sinking groove 21 can support the cover plate 22, so as to prevent the cover plate 22 from loosening downwards, and further enhance the reliability and the sealing performance of the cover plate 22.
The above description is not intended to limit the technical scope of the present invention, and any modification, equivalent change and modification of the above embodiments according to the technical spirit of the present invention are still within the technical scope of the present invention.
Claims (5)
1. The utility model provides a waterway structure in vacuum coating chamber which characterized in that: the water-cooled generator comprises a polygonal columnar vacuum cavity, wherein a sinking groove formed by turning and milling is distributed on the surface of the outer wall of the vacuum cavity, and a cover plate is hermetically covered on the top surface of the sinking groove, so that a water path is formed between the cover plate and the sinking groove.
2. The waterway structure of a vacuum coating chamber according to claim 1, wherein: the cover plate is matched with the distribution shape of the sinking grooves.
3. The waterway structure of the vacuum coating cavity of claim 2, wherein: the cover plate is embedded in the top surface of the sinking groove, and the outer surface of the cover plate is flush with the surface of the outer wall of the vacuum cavity.
4. The waterway structure of the vacuum coating cavity of claim 3, wherein: the lower part of the section of the sinking groove is an arc groove, the top of the sinking groove is provided with a step groove with the width larger than that of the arc groove, and the cover plate is embedded and fixed in the step groove.
5. The waterway structure of the vacuum coating cavity of claim 4, wherein: the cover plate is welded or sealed and locked in the step groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121282817.4U CN216514075U (en) | 2021-06-08 | 2021-06-08 | Waterway structure of vacuum coating cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121282817.4U CN216514075U (en) | 2021-06-08 | 2021-06-08 | Waterway structure of vacuum coating cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216514075U true CN216514075U (en) | 2022-05-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121282817.4U Active CN216514075U (en) | 2021-06-08 | 2021-06-08 | Waterway structure of vacuum coating cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216514075U (en) |
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2021
- 2021-06-08 CN CN202121282817.4U patent/CN216514075U/en active Active
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