CN210093691U - Etching system - Google Patents
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- CN210093691U CN210093691U CN201920724124.2U CN201920724124U CN210093691U CN 210093691 U CN210093691 U CN 210093691U CN 201920724124 U CN201920724124 U CN 201920724124U CN 210093691 U CN210093691 U CN 210093691U
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Abstract
The utility model relates to an etching system. The etching system comprises a power device, a first delivery pipe, a second delivery pipe and a spraying device; the power device is used for conveying liquid medicine; the first conveying pipe and the second conveying pipe are connected with the power device and are symmetrically distributed; the power device respectively conveys the liquid medicine to the first conveying pipe and the second conveying pipe; the spraying devices comprise a plurality of first spraying devices and a plurality of second spraying devices, the first spraying devices are respectively connected with the first conveying pipe, and the second spraying devices are respectively connected with the second conveying pipe; the first spraying devices and the second spraying devices are arranged in rows and columns, and the first spraying devices correspond to the second spraying devices one to one; the first spraying devices are obliquely arranged relative to the substrate, and the first spraying devices in adjacent rows are respectively inclined towards two opposite directions. The etching system can reduce the pool effect, effectively control the etching factor and improve the etching efficiency.
Description
Technical Field
The utility model relates to a machining technology field especially relates to an etching system.
Background
With the development of industry, printed circuit boards are developed towards multilayering, densification and flexibility, and the lines are thinner and thinner, and the copper thickness is increased continuously. Therefore, the etching process is more and more required. In addition, the waste etching solution has a serious influence on the ecological environment, and people are forced to continuously develop new etching technologies so as to improve the etching process, improve the utilization rate of the liquid medicine, reduce the pool effect, and meet the requirements of the development of the printed circuit board and reduce the environmental influence.
SUMMERY OF THE UTILITY MODEL
In view of the above, there is a need for an etching system that addresses the problems of reducing the pool effect and increasing the utilization of the chemical solution.
An etching system, comprising:
the power device is used for conveying the liquid medicine;
the conveying pipe group comprises a first conveying pipe and a second conveying pipe, the first conveying pipe and the second conveying pipe are both connected with the power device, and the first conveying pipe and the second conveying pipe are symmetrically distributed; the power device is used for respectively delivering the liquid medicine to the first delivery pipe and the second delivery pipe;
the spraying device comprises a plurality of first spraying devices and a plurality of second spraying devices, the first spraying devices are respectively connected with the first conveying pipe, and the second spraying devices are respectively connected with the second conveying pipe; the first spraying devices are arranged in rows and columns, the second spraying devices are arranged in rows and columns, and the first spraying devices correspond to the second spraying devices one to one; the first spraying devices are obliquely arranged relative to the substrate, and the first spraying devices in adjacent rows are respectively inclined towards two opposite directions.
In the etching system, the power device is used for conveying liquid medicine, the first conveying pipe and the second conveying pipe are connected with the power device, the first conveying pipe and the second conveying pipe are symmetrically distributed, the power device is used for conveying the liquid medicine to the first conveying pipe and the second conveying pipe respectively, the first spraying devices are connected with the first conveying pipe respectively, the second spraying devices are connected with the second conveying pipe respectively, the first spraying devices are arranged in a row and a column, the second spraying devices are arranged in a row and a column, and the first spraying devices correspond to the second spraying devices one by one, so that the liquid medicine is conveyed to the first spraying devices and the second spraying devices through the first conveying pipe and the second conveying pipe respectively, the liquid medicine is sprayed out from the first spraying devices and the second spraying devices to the substrate to etch the substrate, in addition, the first spraying devices are obliquely arranged relative to the substrate, and the first spraying devices in adjacent rows are obliquely inclined towards two opposite directions respectively, because first spray set is the slope setting with the base plate for there is the side direction impact force when first spray set sprays the base plate, thereby ensures that the regional reaction of central authorities of base plate liquid medicine flows away fast, thereby reduces pond effect, improves the liquid medicine utilization ratio, and in addition, adjacent row's first spray set inclines towards two relative directions respectively, is the symmetry setting, ensures effectively to control the etching factor when reducing pond effect, improves etching efficiency.
In one embodiment, the inclination angle between the first spraying device and the substrate is 10-30 degrees.
In one embodiment, the first spraying devices and the corresponding second spraying devices are distributed in a staggered manner.
In one embodiment, the second spraying device is arranged perpendicular to the substrate.
In one embodiment, the second spraying device is obliquely arranged with the substrate.
In one embodiment, the inclination angle between the second spraying device and the substrate is 10-30 degrees.
In one embodiment, the distance between the corresponding first spray devices of the adjacent rows is 4-8 cm.
In one embodiment, the medical liquid filtering device further comprises a filtering device, the filtering device is connected with the power device, the filtering device is located between the power device and the conveying pipe group, and the filtering device is used for filtering the medical liquid conveyed by the power device.
In one embodiment, the first spraying device comprises a first spray pipe and a first nozzle arranged on the first spray pipe, and the first spray pipe is connected with the first conveying pipe; the second spraying device comprises a second spraying pipe and a second nozzle arranged on the second spraying pipe, and the second spraying pipe is connected with the second conveying pipe.
In one embodiment, the nozzle further comprises a plurality of wheel sheets, and one wheel sheet is arranged on each of two sides of each first nozzle and each second nozzle.
Drawings
FIG. 1 is a schematic diagram of an etching system according to an embodiment;
FIG. 2 is a schematic diagram of the arrangement of the transfer pipe set and the spray device shown in FIG. 1;
fig. 3 is a schematic structural view of the first spray devices in adjacent rows shown in fig. 2.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1 and 2, an etching system 100 of an embodiment includes a power plant 110, a set of delivery tubes, and a spray device. The etching system 100 is mounted on a support 200. The etching system 100 is used for etching a substrate, wherein the substrate may be a glass substrate, a copper substrate, a polyimide plate, or the like. In one embodiment, the power plant 110 may be a pump, such as a hydraulic pump or the like. The power unit 110 is used to draw the medical fluid and deliver the medical fluid. The chemical liquid is stored in the main tank, that is, the power unit 110 draws the chemical liquid in the main tank.
The conveying pipe group comprises a first conveying pipe 121 and a second conveying pipe 122, the first conveying pipe 121 and the second conveying pipe 122 are both connected with the power device 110, and the first conveying pipe 121 and the second conveying pipe 122 are symmetrically distributed. The power unit 110 delivers the liquid medicine to the first delivery pipe 121 and the second delivery pipe 122, respectively. Specifically, in the present embodiment, the first delivery pipe 121 and the second delivery pipe 122 are distributed up and down symmetrically, as shown in fig. 2. Further, after the power device 110 draws the liquid medicine, the liquid medicine is divided into two paths and flows into the first delivery pipe 121 and the second delivery pipe 122, and the liquid medicine is delivered through the first delivery pipe 121 and the second delivery pipe 122.
The spraying device comprises a plurality of first spraying devices 131 and a plurality of second spraying devices 132, the first spraying devices 131 are respectively connected with the first conveying pipe 121, and the second spraying devices 132 are respectively connected with the second conveying pipe 122. The first shower device 131 may be connected to the first delivery pipe 121 by a pipe adapter or the like, and similarly, the second shower device 132 may be connected to the second delivery pipe 122 by a pipe adapter or the like. The first and second showering devices 131 and 132 not only function as branches, but also spray the chemical solution onto the substrate. In the present embodiment, as can be seen from the above description, the first delivery pipe 121 and the second delivery pipe 122 are distributed up and down symmetrically, and similarly, the first spraying device 131 and the second spraying device 132 are also distributed up and down, that is, the first spraying device 131 is located above the second spraying device 132 and corresponds to each other.
Further, the first spraying devices 131 are arranged in rows and columns, the second spraying devices 132 are arranged in rows and columns, and the first spraying devices 131 correspond to the second spraying devices 132 one to one. In other words, the plurality of first spraying devices 131 are arranged according to the process requirements, the plurality of second spraying devices 132 are also arranged according to the process requirements, and the plurality of first spraying devices 131 and the plurality of second spraying devices 132 are arranged in an array. In addition, the first spraying devices 131 are disposed obliquely with respect to the substrate. That is, the first spray device 131 is angled with respect to the substrate such that the chemical solution sprayed from the first spray device 131 is sprayed obliquely onto the substrate instead of being sprayed vertically onto the substrate surface. Further, the first spray devices 131 of the adjacent rows are respectively inclined in two opposite directions, that is, the inclination directions of the first spray devices 131 of the adjacent rows are opposite. Specifically, as shown in fig. 3, the first spray devices 131 of one of the adjacent rows of first spray devices 131 are inclined toward the left, and the first spray devices 131 of the other row are inclined toward the right. It should be noted that "left" and "right" are only explained with reference to fig. 3.
The first spraying device 131 and the substrate form a certain angle, the liquid medicine sprayed from the first spraying device 131 is obliquely sprayed onto the substrate, and at the moment, lateral impact force exists in spraying, so that the liquid medicine can be ensured to flow away quickly after the central region reflects, and the influence of the water tank effect on the process is reduced. In addition, the use of the bilaterally symmetric inclined showers for the first showers 131 of the adjacent rows ensures effective control of the etching factor while reducing the pool effect. The etching liquid can be prevented from flowing out of the plate quickly after the reaction in the central area of the plate surface caused by the liquid medicine vertically sprayed on the substrate and the spraying of the plate edge, so that a plurality of liquid medicines which are not fresh after the reaction are remained in the central area of the plate, and the reacted liquid medicines can generate adverse effects on etching.
In addition, in one embodiment, the distance between the corresponding first spraying devices of the adjacent rows is 4-8 cm, so that the uniformity of spraying is further ensured. It should be noted that the distance between the corresponding second spraying devices of the adjacent rows may be the same as or different from the distance between the corresponding first spraying devices of the adjacent rows.
In the etching system 100, the power device 110 is used for delivering liquid medicine, the first delivery pipe 121 and the second delivery pipe 122 are both connected to the power device 110, the first delivery pipe 121 and the second delivery pipe 122 are symmetrically distributed, the power device 110 delivers the liquid medicine to the first delivery pipe 121 and the second delivery pipe 122 respectively, the plurality of first spraying devices 131 are connected to the first delivery pipe 121 respectively, the plurality of second spraying devices 132 are connected to the second delivery pipe 122 respectively, the plurality of first spraying devices 131 are arranged in rows and columns, the plurality of second spraying devices 132 are arranged in rows and columns, the first spraying devices 131 correspond to the second spraying devices 132 one by one, so that the liquid medicine is delivered to the first spraying devices 131 and the second spraying devices 132 through the first delivery pipe 121 and the second delivery pipe 122 respectively, so that the liquid medicine is sprayed from the first spraying devices 131 and the second spraying devices 132 onto the substrate to etch the substrate, in addition, first spray set 131 all becomes the slope setting relative to the base plate, adjacent row's first spray set 131 slopes towards two relative directions respectively, because first spray set 131 is the slope setting with the base plate, there is the side direction impact force when making first spray set 131 spray the base plate on, thereby ensure that the regional reaction of central authorities of base plate liquid medicine flows away fast, thereby reduce pond effect, improve the liquid medicine utilization ratio, in addition, adjacent row's first spray set 131 slopes towards two relative directions respectively, be the symmetry setting, ensure effectively controlling the etching factor when reducing pond effect, improve etching efficiency, and then have etching fast, the etching lines is even, the etching factor is little, liquid medicine utilization ratio advantage such as high. Wherein, the etching uniformity can reach and be more than 93 percent, and the etching uniformity is better; the etching factor can reach and be more than 3.0, and the line edge verticality is better.
In one embodiment, the inclination angle between the first spraying device 131 and the substrate is 10-30 degrees, that is, the included angle between the first spraying device 131 and the substrate is 10-30 degrees. Further, in one embodiment, the inclination angle between the first spraying device 131 and the substrate is 15-20 degrees. It should be noted that the inclination angle is determined according to the processing technology of the substrate, and in addition, if the inclination angle between the first spray device 131 and the substrate is too small, the pool effect is affected, and the utilization rate of the chemical solution is reduced, and if the inclination angle between the first spray device 131 and the substrate is too large, the etching efficiency is affected.
Further, in an embodiment, the first spraying device 131 includes a first spray pipe and a first nozzle disposed on the first spray pipe, and the first spray pipe is connected to the first delivery pipe 121. Specifically, the first spray pipes correspond to the first nozzles one to one, all the first spray pipes are connected to the first delivery pipe 121, the first spray pipes function as branches, and the liquid medicine flows through the first delivery pipe 121, flows into the first spray pipes respectively, is sprayed out from the corresponding first nozzles, and is sprayed onto the substrate. Thus, the first delivery pipe 121 ensures the entire pressure and the chemical flow rate of the first spray device 131, and the first spray device 131 ensures the chemical spray range and pressure.
Likewise, the second spraying device 132 includes a second spray pipe and a second spray nozzle provided on the second spray pipe, and the second spray pipe is connected to the second delivery pipe 122. Specifically, the second spray pipes correspond to the second nozzles one to one, all the second spray pipes are connected to the second delivery pipe 122, the second spray pipes function as branches, and the liquid medicine flows through the second delivery pipe 122, flows into the second spray pipes respectively, is sprayed out from the corresponding second nozzles, and is sprayed onto the substrate. Thus, the second delivery pipe 122 ensures the entire pressure and the flow rate of the chemical solution of the second shower device 132, and the second shower device 132 ensures the chemical solution shower range and pressure.
Referring to fig. 2 again, in one embodiment, the etching system 100 further includes a plurality of wheel plates 140, and one wheel plate 140 is disposed on both sides of each first nozzle and each second nozzle. Through the arrangement of the wheel sheets 140, the uniform transportation of the liquid medicine is ensured, and the phenomena of splashing and the like of the liquid medicine are avoided.
In one embodiment, the first spray devices 131 are staggered with their corresponding second spray devices 132. In other words, on a plane perpendicular to a plane formed by the row-column arrangement of the first spraying devices 131, the first spraying devices 131 correspond to the second spraying devices 132 one to one, and the first spraying devices 131 and the corresponding second spraying devices 132 are distributed in a staggered manner on the plane. In this embodiment, the first spraying devices are symmetrically inclined and uniformly distributed in a front-back manner, and in addition, the first spraying devices and the corresponding second spraying devices are distributed in a staggered manner, the first nozzle device does not have an upper conveying branch for the lower second spraying device, and the second spraying device does not have a lower conveying branch for the upper first spraying device, so that not only are the pipelines of the whole system reduced, the whole system is simpler, but also the blocking of the liquid medicine by the wheel sheets 140 is reduced.
Further, in an embodiment, the second spraying device 132 is disposed perpendicular to the substrate, so that the chemical solution sprayed from the second spraying device 132 is sprayed onto the substrate perpendicularly to etch the substrate, and the second spraying device 132 and the first spraying device 131 cooperate to perform etching, thereby improving etching efficiency.
In another embodiment, the second spraying device 132 is disposed obliquely to the substrate. The inclination angle between the second spraying device 132 and the substrate may be 10-30 degrees, that is, the included angle between the second spraying device 132 and the substrate is 10-30 degrees. In one embodiment, the angle of inclination between the second spraying device 132 and the substrate is 15-20 degrees. It should be noted that the inclination angle is determined according to the processing technology of the substrate, and in addition, if the inclination angle between the first spraying device 131 and the substrate is too small, the pool effect is affected, and the utilization rate of the chemical solution is reduced. Further, in this embodiment, the inclination directions of the second spraying devices 132 and the corresponding first spraying devices 131 may be the same, and the inclination directions of the second spraying devices 132 and the corresponding first spraying devices 131 may be opposite. In addition, the inclination directions of the second spraying devices 132 in adjacent rows may be the same, and the inclination directions of the second spraying devices 132 in adjacent rows may also be two opposite directions.
In one embodiment, as shown in fig. 1, the etching system 100 further includes a filtering device 150, the filtering device 150 is connected to the power device 110, the filtering device 140 is located between the conveying pipe sets of the power device 110, and the filtering device 150 is used for filtering the liquid medicine conveyed by the power device 110. Specifically, the power device 110 extracts the chemical liquid, the chemical liquid is filtered by the filtering device 150, and the filtered chemical liquid flows to the first delivery pipe 121 and the second delivery pipe 122, and is then sprayed onto the substrate from the first spraying device 131 and the second spraying device 132 respectively for etching. Through the arrangement of the filtering device 150, impurities in the liquid medicine are filtered, so that the cleanliness of the liquid medicine is ensured, and the influence of the impurities on the etching of the substrate is reduced.
In this embodiment, the operation of the etching system 100 is as follows: the liquid medicine in the main tank is sucked by a pump, and after being filtered by the filtering device 150, the liquid medicine is respectively conveyed to each first spray pipe and each second spray pipe through the first conveying pipe 121 and the second conveying pipe 122, and then is respectively sprayed onto the substrate through the first nozzle and the second nozzle. By adopting the etching system 100 to etch the substrate, the etching uniformity can reach and be more than 93%, the etching uniformity is good, the etching factor can reach and be more than 3.0, and the line edge verticality is good. In addition, the process capability of the etching system 100 can achieve a minimum line width of 50um, and the precision is high, so that the etching system is suitable for producing high-precision lines. In addition, the water pool effect of the etching system 100 is small, further promoting its suitability for producing high-definition lines.
The etching method of the etching system 100 according to an embodiment includes the steps of supplying the chemical solution to the first delivery pipe and the second delivery pipe, respectively; the first conveying pipe and the second conveying pipe respectively convey the liquid medicine into the first spraying device and the second spraying device, and the liquid medicine is sprayed onto the substrate from the first spraying device and the second spraying device respectively to etch the substrate. The etching method of the etching system has the advantages of simple process and high etching efficiency.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. An etching system, comprising:
the power device is used for conveying the liquid medicine;
the conveying pipe group comprises a first conveying pipe and a second conveying pipe, the first conveying pipe and the second conveying pipe are both connected with the power device, and the first conveying pipe and the second conveying pipe are symmetrically distributed; the power device is used for respectively delivering the liquid medicine to the first delivery pipe and the second delivery pipe;
the spraying device comprises a plurality of first spraying devices and a plurality of second spraying devices, the first spraying devices are respectively connected with the first conveying pipe, and the second spraying devices are respectively connected with the second conveying pipe; the first spraying devices are arranged in rows and columns, the second spraying devices are arranged in rows and columns, and the first spraying devices correspond to the second spraying devices one to one; the first spraying devices are obliquely arranged relative to the substrate, and the first spraying devices in adjacent rows are respectively inclined towards two opposite directions.
2. The etching system of claim 1, wherein the first spray device is inclined at an angle of 10-30 degrees with respect to the substrate.
3. The etching system of claim 1, wherein the first spray devices are staggered with respect to their corresponding second spray devices.
4. The etching system of claim 3, wherein the second spray device is disposed perpendicular to the substrate.
5. The etching system of claim 3, wherein the second spray device is disposed at an angle to the substrate.
6. The etching system of claim 5, wherein the angle of inclination between the second spray device and the substrate is 10-30 degrees.
7. The etching system of claim 1, wherein a distance between corresponding first showers of adjacent rows is 5-8 centimeters.
8. The etching system of claim 1, further comprising a filtering device connected to the power device, the filtering device being located between the power device and the delivery tube set, the filtering device being configured to filter the liquid delivered by the power device.
9. The etching system of any one of claims 1 to 8, wherein the first spray device comprises a first spray pipe and a first nozzle disposed on the first spray pipe, the first spray pipe being connected to the first delivery pipe; the second spraying device comprises a second spraying pipe and a second nozzle arranged on the second spraying pipe, and the second spraying pipe is connected with the second conveying pipe.
10. The etching system of claim 9, further comprising a plurality of wheel plates, one on each side of each of the first and second nozzles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920724124.2U CN210093691U (en) | 2019-05-20 | 2019-05-20 | Etching system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920724124.2U CN210093691U (en) | 2019-05-20 | 2019-05-20 | Etching system |
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| Publication Number | Publication Date |
|---|---|
| CN210093691U true CN210093691U (en) | 2020-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920724124.2U Active CN210093691U (en) | 2019-05-20 | 2019-05-20 | Etching system |
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| CN (1) | CN210093691U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111447751A (en) * | 2020-04-25 | 2020-07-24 | 深圳市科路迪机械设备有限公司 | Precision etching device and etching spray frame thereof |
-
2019
- 2019-05-20 CN CN201920724124.2U patent/CN210093691U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111447751A (en) * | 2020-04-25 | 2020-07-24 | 深圳市科路迪机械设备有限公司 | Precision etching device and etching spray frame thereof |
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| CP01 | Change in the name or title of a patent holder |
Address after: 516200 Ganbi Village, Qingcaowwo, Zhenlong Town, Huiyang District, Huizhou City, Guangdong Province Patentee after: Jebsen Microsystems (Huizhou) Co., Ltd Address before: 516200 Ganbi Village, Qingcaowwo, Zhenlong Town, Huiyang District, Huizhou City, Guangdong Province Patentee before: Huizhou Jiecheng Mechanical and Electrical Equipment Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |