CN210085576U

CN210085576U - Horizontal slide boat and bracket structure thereof

Info

Publication number: CN210085576U
Application number: CN201822256311.0U
Authority: CN
Inventors: 李丙科
Original assignee: Wuxi Songyu Technology Co Ltd
Current assignee: Wuxi Songyu Technology Co Ltd
Priority date: 2018-12-29
Filing date: 2018-12-29
Publication date: 2020-02-18
Anticipated expiration: 2028-12-29

Abstract

The utility model discloses a horizontal slide boat and a bracket structure thereof, wherein the horizontal slide boat comprises a slide boat body, the upper end surface of the slide boat body is provided with a plurality of concave grooves, and the size of each groove is slightly larger than that of a silicon wafer; the horizontal slide boat bracket structure comprises a bracket body, wherein the bracket body comprises side plates arranged on the left and right sides, and clamping grooves are formed in the inner sides, opposite to the side plates, of the side plates. The utility model discloses a with slide glass boat and its bracket structural design for horizontal structure, can make and place atThe back of the silicon chip in the inner groove of the slide boat body can not be plated with Al₂O₃The film process can achieve better effect only by using common slurry in the subsequent screen printing process, thereby greatly reducing the production cost.

Description

Horizontal slide boat and bracket structure thereof

Technical Field

The utility model relates to an atom deposition equipment spare part technical field in the solar wafer production, in particular to horizontal slide glass boat and bracket structure thereof.

Background

In a tubular atomic layer deposition Apparatus (ALD) for producing solar cells, a slide boat is required to load silicon wafers into a heating chamber for atomic depositionAnd (6) depositing. At present, the commonly used method is to vertically place silicon wafers on a slide boat in batches to enable the silicon wafers to be parallel to the gas flow direction in a heating chamber, and the front and back surfaces of the evaporated silicon wafers are uniformly plated with Al₂O₃In order to further improve the conversion efficiency of the cell, a back passivation process needs to be performed on the silicon wafer after the film is coated, namely slurry is used for carrying out Al on the back of the silicon wafer₂O₃And (3) removing the film, wherein the silicon wafer treated by the method needs specific slurry for treatment in the subsequent screen printing step, otherwise, the efficiency is difficult to improve, and the production cost is greatly increased. Therefore, it is required to provide a method capable of directly evaporating single-sided Al on the surface of a silicon wafer₂O₃A slide boat for the film.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide a can be directly at silicon chip surface coating by vaporization single face Al₂O₃Horizontal slide boat for film and its bracket structure.

In order to solve the technical problem, the utility model discloses a technical scheme does:

a horizontal carrier comprises a carrier body, wherein a plurality of concave grooves are formed in the upper end face of the carrier body, and the size of each groove is slightly larger than that of a silicon wafer.

Preferably, the slide boat body is made of aviation aluminum, carbon fiber or graphite.

Preferably, the thickness of the slide boat body is 1-8 mm.

Preferably, the depth of the groove is 0.2-1 mm.

Preferably, four parallel concave grooves are arranged on the upper end surface of the slide boat body.

The bracket structure of the horizontal slide boat comprises a bracket body, wherein the bracket body comprises side plates arranged on the left and right sides, and clamping grooves are formed in the inner sides, opposite to the side plates, of the side plates.

Preferably, the bracket body is made of aviation aluminum materials, carbon fiber materials or graphite materials.

Preferably, the distance between the upper part and the lower part of the clamping groove is 1-8 mm.

Preferably, the bracket body is provided with three rows which are vertically arranged, and a side plate is shared between the rows.

By adopting the technical scheme, the slide boat and the bracket structure thereof are designed to be horizontal structures, so that the back of the silicon wafer placed in the inner groove of the slide boat body can not be plated with Al₂O₃And a subsequent back passivation process is not needed, and a better effect can be achieved only by using common slurry in the subsequent screen printing process, so that the production cost is greatly reduced.

Drawings

FIG. 1 is a front view of a horizontal slide boat according to the present invention;

FIG. 2 is a left side view of the horizontal slide boat of the present invention;

FIG. 3 is an enlarged view of part A of FIG. 2;

fig. 4 is a front view of the bracket structure of the horizontal slide boat of the present invention.

In the figure, 1-carrying boat body, 2-groove, 4-side plate, 5-silicon chip.

Detailed Description

The following describes the present invention with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features related to the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

As shown in fig. 1-3, a horizontal slide boat comprises a slide boat body 1, preferably, the slide boat body 1 is made of aviation aluminum, carbon fiber or graphite, so that effective supporting force, light weight and no deformation at high temperature can be guaranteed, preferably, the slide boat body 1 has a thickness of 1-8mm, the space in a heating chamber can be saved by designing the slide boat body 1 to be a thin structure, the upper end surface of the slide boat body 1 is provided with a plurality of concave grooves 2, the size of the grooves 2 is slightly larger than that of silicon wafers 5, when in use, the silicon wafers 5 are horizontally placed in the grooves 2, preferably, the depth of the grooves 2 is 0.2-1mm, preferably, the upper end surface of the slide boat body 1 is provided with four parallel concave grooves 2, that is, the slide boat body 1 can accommodate four silicon wafers 5, through the structure that can hold four silicon chips 5 with slide glass boat body 1 design, can guarantee every silicon chip 5's evaporation coating quality under the prerequisite of maximize utilization heating cavity inner space, the inhomogeneous condition of adjacent silicon chip 5 evaporation coating can not appear.

As shown in fig. 4, a bracket structure of a horizontal slide boat comprises a bracket body, preferably, the bracket body is made of aviation aluminum, carbon fiber or graphite, so that effective supporting force, light weight and no deformation at high temperature can be guaranteed, the bracket body comprises side plates 4 arranged on the left and right sides, clamping grooves are arranged on the inner sides of the side plates 4, the slide boat body 1 is horizontally placed in the bracket body through the clamping grooves on the left and right sides, preferably, the distance between the upper side and the lower side of each clamping groove is 1-8mm, the bracket body is three rows vertically arranged, and the side plates 4 are shared between the rows.

The utility model discloses a with slide glass boat and bracket structural design for horizontal structure, can make the back of placing silicon chip 5 in slide glass boat body 1 inner groovy 2 can not plated Al₂O₃And a subsequent back passivation process is not needed, and a better effect can be achieved only by using common slurry in the subsequent screen printing process, so that the production cost is greatly reduced.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, and the scope of the invention is to be accorded the full scope of the claims.

Claims

1. A horizontal slide boat, comprising: the silicon wafer carrier comprises a carrier boat body (1), wherein a plurality of concave grooves (2) are formed in the upper end face of the carrier boat body (1), the size of each groove (2) is slightly larger than that of a silicon wafer (5), and four parallel concave grooves (2) are formed in the upper end face of the carrier boat body (1).

2. The horizontal slide boat of claim 1, wherein: the slide boat body (1) is made of aviation aluminum, carbon fiber or graphite.

3. The horizontal slide boat of claim 1, wherein: the thickness of the slide boat body (1) is 1-8 mm.

4. The horizontal slide boat of claim 1, wherein: the depth of the groove (2) is 0.2-1 mm.

5. The utility model provides a carrier structure of horizontal slide glass boat which characterized in that: the bracket comprises a bracket body, wherein the bracket body comprises side plates (4) arranged on the left and right sides, clamping grooves are formed in the inner sides, which are opposite to the side plates (4), the bracket body is three rows which are vertically arranged, and the rows and the columns share one side plate (4).

6. The carrier structure of claim 5, wherein: the bracket body is made of aviation aluminum materials, carbon fiber materials or graphite materials.

7. The carrier structure of claim 5, wherein: the distance between the upper part and the lower part of the clamping groove is 1-8 mm.