CN209854242U - Mechanism capable of realizing coating of inner wall of cylindrical coated substrate - Google Patents
Mechanism capable of realizing coating of inner wall of cylindrical coated substrate Download PDFInfo
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- CN209854242U CN209854242U CN201920603328.0U CN201920603328U CN209854242U CN 209854242 U CN209854242 U CN 209854242U CN 201920603328 U CN201920603328 U CN 201920603328U CN 209854242 U CN209854242 U CN 209854242U
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Abstract
The utility model relates to a vacuum coating technical field especially relates to a can realize mechanism of cylinder coating film base plate inner wall coating film, the mechanism includes that drive gear, at least one transmission shaft and at least one membrane are thick to assist positive board, the external power of drive gear, the transmission shaft with constitute the transmission cooperation between the drive gear, the transmission shaft is in can drive cylinder coating film base plate under drive gear's the drive and rotate, membrane is thick to assist positive board and is arranged the opposite side of transmission shaft and its arrange the position satisfy in its protractile in the requirement of the hole of cylinder basement, the radian face type of thick positive board of assisting with the radian of cylinder basement is unanimous mutually. The utility model has the advantages that: the structure is simple, and the integration is high; the problem of inconsistent inner wall film thickness distribution caused by different placement positions of the cylindrical film-coated substrate in a film-coated area is solved; the mass production feasibility is realized; is especially suitable for the physical vapor deposition field, such as evaporation plating or sputtering plating.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating technique and specifically relates to physical vapor deposition field, concretely relates to mechanism that can realize cylinder coating film substrate inner wall coating film.
Background
With the rapid development of communication technology, in more and more fields such as robots, identification technologies, vehicles and the like, the application of cylindrical and annular substrates appears, and the outer wall and the inner wall are required to be coated with films to enhance signal transmission or filter signals of certain interference bands. High-low refractive index materials are generally used for alternately plating interference film layers with high requirements, and when the interference film layers are plated, the uniformity of the film thickness in the cylinder wall must be controlled very well. For the outer wall of the barrel-shaped substrate, a good solution is provided in the conventional physical vapor deposition mode through planetary rotation and other modes, but a good mass production coating scheme for the inner wall is not provided, and the main problem is that the film thickness uniformity of the inner wall cannot be controlled to be high precision, so that the film thickness uniformity requirement of about +/-1% is met, and no scheme can be realized at present.
Disclosure of Invention
The utility model aims at providing a can realize mechanism of cylinder coating film base plate inner wall coating film according to above-mentioned prior art not enough, along with the rotation of cylinder coating film base plate to the combination stretches into the unanimous supplementary board of thick membrane of the radian looks of cylinder coating film base plate inner wall and radian face type and cylinder basement, to the even coating film of inner wall of cylinder coating film base plate, solves the problem that the membrane thick distribution of inner wall produced because of the difference of the position of placing of cylinder coating film base plate is inconsistent in the coating film region.
The utility model discloses the purpose is realized accomplishing by following technical scheme:
a mechanism capable of realizing coating of inner wall of cylindrical coated substrate is characterized in that: the mechanism includes that drive gear, at least one transmission shaft and at least one membrane are thick to assist positive board, the external power of drive gear, the transmission shaft with constitute the transmission cooperation between the drive gear, the transmission shaft is in can drive cylinder coating film base plate and rotate under drive gear's drive, membrane is thick to be assisted positive board and is arranged the opposite side of transmission shaft and its arrangement position satisfy in its protractile in the requirement of the hole of cylinder basement, the radian face type of the positive board is assisted to membrane thickness with the radian of cylinder basement is unanimous.
The mechanism comprises at least two transmission shafts, the transmission shafts are respectively connected with transmission gears, adjacent transmission gears form transmission fit through a transition gear, and adjacent transmission shafts form transmission fit through the engagement of the transmission gears and the transition gear.
The transmission shaft runs through a fixing base and is arranged, two ends of the transmission shaft extend out of the fixing base, and the transmission gear and the transition gear are located on the top surface of the fixing base.
The fixed base is connected with a fixed support, the fixed support is connected with the thick positive board of assisting of membrane through a positive board support of assisting, assist positive board support with detachable the connection between the fixed support.
And the two ends of the auxiliary positive plate support are movably arranged on the fixed support through the positioning blocks.
The bottom end of the transmission shaft is provided with a clamping transition block, and the cylindrical coated substrate can be in transmission fit with the transmission shaft by connecting the clamping transition block.
The transmission shaft corresponds to the film thickness correction plate in number.
The utility model has the advantages that: the purpose of uniformly coating the inner side of the cylindrical substrate is realized on coating equipment for physical vapor deposition such as evaporation, sputtering and the like; each cylindrical substrate is provided with a film thickness correction plate, so that the aim of finely adjusting the film thickness distribution of the cylindrical substrate at each position is fulfilled, and the problem of inconsistent film thickness distribution of the inner wall caused by different positions for placing the cylindrical substrates in a film coating area is solved; the thick dismantlement mode of assisting the positive version of membrane is whole dismantlement, and the fixed block of mounted position has the adjustability, can adjust according to the cylinder base plate size, and the lock dies after the design location, and the mounted position that can guarantee the thick positive version of assisting of membrane has the repeatability, and the installation of the thick positive version of assisting of membrane is simple, has the volume production feasibility.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a connection structure diagram of the middle auxiliary positive plate support and the fixed support of the present invention.
Detailed Description
The features of the present invention and other related features are described in further detail below by way of example in conjunction with the accompanying drawings to facilitate understanding by those skilled in the art:
as shown in fig. 1-2, reference numerals 1-12 are respectively shown as: the device comprises a driving gear 1, a transmission shaft 2, a transmission gear 3, a transition gear 4, a fixed base 5, a clamping transition block 6, a cylindrical coated substrate 7, a film thickness auxiliary positive plate 8, a fixed support 9, an auxiliary positive plate support 10, a positioning block 11 and a butterfly-shaped fixing screw 12.
Example (b): the embodiment is a mechanism capable of realizing coating of the inner wall of a cylindrical coating substrate, which rotates along with the cylindrical coating substrate 7, and is combined with a film thickness correction plate 8 which extends into the inner wall of the cylindrical coating substrate 7 and has the radian profile consistent with the radian of a cylindrical base 7 to uniformly coat the inner wall of the cylindrical coating substrate 7, so that the problem of inconsistent inner wall film thickness distribution caused by different placing positions of the cylindrical coating substrate 7 in a coating area is solved, and the mechanism is particularly suitable for the field of physical vapor deposition, such as evaporation coating or sputtering coating.
As shown in fig. 1, the mechanism in this embodiment is applied to the working condition of simultaneously coating four cylindrical coated substrates 7, and specifically includes four transmission shafts 2 arranged at intervals from left to right, four auxiliary thick plates 8, and a driving gear 1.
Wherein, every transmission shaft 2 all runs through unable adjustment base 5 and sets up and the both ends of transmission shaft 2 stretch out unable adjustment base 5 outside, and the bottom of transmission shaft 2 is used for connecting cylindrical coating film base plate 7. The top of the leftmost transmission shaft 2 is provided with a driving gear 1, and the later-stage driving gear 1 is externally connected with power to drive the leftmost transmission shaft 2 to rotate, so that the cylindrical coated substrate 7 is driven to rotate. The transmission shaft 2 is provided with a transmission gear 3, and the transmission gear 3 rotates along with the rotation of the transmission shaft 2. The transmission gear 3 is positioned above the fixed base 5. Be equipped with transition gear 4 between the adjacent drive gear 3, transition gear 4 all constitutes the meshing with the drive gear 3 of both sides, when the left transmission shaft 2 of drive is rotatory, the drive gear 3 of fixing on this transmission shaft 2 will rotate thereupon to it is rotatory to drive transition gear 4, transition gear 4 then will drive the drive gear 3 rotation on right side, and then drive the transmission shaft 2 rotation that links to each other with this drive gear 3, with this repeated right side synchronous drive that turns to, make all transmission shafts 2 all rotatory, thereby it is rotatory to drive all cylindrical coating film base plates 7.
As shown in fig. 1, a thick auxiliary plate 8 is disposed at one side of the bottom of the transmission shaft 2, and the thick auxiliary plate 8 can extend into the inner wall of the cylindrical substrate 7, so that the sputtered material can be shielded during the later coating process, thereby controlling the thickness of the film on the inner wall of the cylindrical substrate 7. The radian surface type of the film thickness auxiliary positive plate 8 is consistent with the radian of the cylindrical substrate 7, the film thickness of the inner wall of the cylindrical coated substrate 7 is uniform along with the rotation of the cylindrical coated substrate 7 during coating, and the problem of inconsistent inner wall film thickness distribution caused by different placement positions of the cylindrical coated substrate 7 in a coating area is solved.
Referring to fig. 1 and 2, four film-thickness correction plates 8 are mounted on a correction plate support 10, and the correction plate support 10 is used to support the film-thickness correction plates 8. Assist positive board support 10 to connect on fixed bolster 9, fixed bolster 9 connects on unable adjustment base 5, and fixed bolster 9 is used for supporting and assists positive board support 10, and fixed bolster 5 is used for supporting fixed bolster 9, improves the integrated nature of mechanism.
As shown in fig. 2, two ends of the auxiliary positive plate support 10 are mounted on the fixing support 9 through the positioning blocks 11, and the position of the auxiliary positive plate support 10 is changed by adjusting the positioning blocks 11, so that the position of the thick auxiliary positive plate 8 is changed, the thick auxiliary positive plate 8 extends into the cylindrical coated substrate 7 and keeps a proper distance from the inner wall of the cylindrical coated substrate, and the later-stage thick uniformity is improved.
As shown in fig. 1, the clamping transition block 6 is arranged at the bottom end of the transmission shaft 2, and the transmission shaft 2 drives the clamping transition block 6 to rotate. And in the later stage, the cylindrical base 7 is fixed at the bottom end of the clamping transition block 6, and the clamping transition block 6 drives the cylindrical coated substrate 7 to rotate. Because the section area of the clamping transition block 6 is smaller than that of the cylindrical coated substrate 7, the contact area with the fixed base 5 can be reduced, and the resistance applied in the rotating process is reduced.
In the embodiment, in specific implementation:
the specific shape of the film thickness auxiliary positive plate 8 is determined by the coating process personnel after adjusting according to the distribution condition of the coating uniformity.
The cylindrical film-coated substrate 7 is arranged on the clamping transition block 6 through a fixing screw; the film thickness auxiliary positive plate 8 is arranged on the auxiliary positive plate bracket 10 through a fixing screw; the auxiliary positive plate support 10 is arranged on the fixing support 9 through a butterfly-shaped fixing screw 12, so that the connecting strength of the auxiliary positive plate support and the fixing support is improved, and the connecting structure is simple.
The coating process personnel can automatically adjust the number of the transmission shaft 2 and the film thickness auxiliary positive plate 8 according to the mass production requirement, but always ensure that the number of the transmission shaft and the film thickness auxiliary positive plate are consistent. If the number of the transmission shafts 2 is one without mass production requirements, the number of the transmission shafts 2 is increased along with the continuous increase of the mass production requirements.
Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims.
Claims (7)
1. A mechanism capable of realizing coating of inner wall of cylindrical coated substrate is characterized in that: the mechanism includes that drive gear, at least one transmission shaft and at least one membrane are thick to assist positive board, the external power of drive gear, the transmission shaft with constitute the transmission cooperation between the drive gear, the transmission shaft is in can drive cylinder coating film base plate and rotate under drive gear's drive, membrane is thick to be assisted positive board and is arranged the opposite side of transmission shaft and its arrangement position satisfy in its protractile in the requirement of the hole of cylinder basement, the radian face type of the positive board is assisted to membrane thickness with the radian of cylinder basement is unanimous.
2. The mechanism of claim 1, wherein the mechanism is characterized in that: the mechanism comprises at least two transmission shafts, the transmission shafts are respectively connected with transmission gears, adjacent transmission gears form transmission fit through a transition gear, and adjacent transmission shafts form transmission fit through the engagement of the transmission gears and the transition gear.
3. The mechanism of claim 2, wherein the mechanism is characterized in that: the transmission shaft runs through a fixing base and is arranged, two ends of the transmission shaft extend out of the fixing base, and the transmission gear and the transition gear are located on the top surface of the fixing base.
4. The mechanism of claim 3, wherein the mechanism comprises: the fixed base is connected with a fixed support, the fixed support is connected with the thick positive board of assisting of membrane through a positive board support of assisting, assist positive board support with detachable the connection between the fixed support.
5. The mechanism of claim 4, wherein the mechanism comprises: and the two ends of the auxiliary positive plate support are movably arranged on the fixed support through the positioning blocks.
6. The mechanism of claim 1, wherein the mechanism is characterized in that: the bottom end of the transmission shaft is provided with a clamping transition block, and the cylindrical coated substrate can be in transmission fit with the transmission shaft by connecting the clamping transition block.
7. The mechanism of claim 1, wherein the mechanism is characterized in that: the transmission shaft corresponds to the film thickness correction plate in number.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920603328.0U CN209854242U (en) | 2019-04-29 | 2019-04-29 | Mechanism capable of realizing coating of inner wall of cylindrical coated substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920603328.0U CN209854242U (en) | 2019-04-29 | 2019-04-29 | Mechanism capable of realizing coating of inner wall of cylindrical coated substrate |
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| CN209854242U true CN209854242U (en) | 2019-12-27 |
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| CN201920603328.0U Active CN209854242U (en) | 2019-04-29 | 2019-04-29 | Mechanism capable of realizing coating of inner wall of cylindrical coated substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110643946A (en) * | 2019-11-12 | 2020-01-03 | 安徽安合鑫光电科技有限公司 | PVD (physical vapor deposition) gradient-color coating process for mobile phone rear cover |
-
2019
- 2019-04-29 CN CN201920603328.0U patent/CN209854242U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110643946A (en) * | 2019-11-12 | 2020-01-03 | 安徽安合鑫光电科技有限公司 | PVD (physical vapor deposition) gradient-color coating process for mobile phone rear cover |
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