CN206538470U - A kind of coating machine of substrate frame flexible overturning - Google Patents
A kind of coating machine of substrate frame flexible overturning Download PDFInfo
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- CN206538470U CN206538470U CN201720290604.3U CN201720290604U CN206538470U CN 206538470 U CN206538470 U CN 206538470U CN 201720290604 U CN201720290604 U CN 201720290604U CN 206538470 U CN206538470 U CN 206538470U
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Abstract
The utility model describes a kind of coating machine of substrate frame flexible overturning, including frame, vacuum chamber is provided with frame, bell jar is covered with vacuum chamber, the top of vacuum chamber rotates and is provided with turntable, and the edge of table of turntable is evenly arranged with multiple support plates, and the back side of support plate is provided with star-wheel, spider gear shaft is connected with star-wheel, one end of spider gear shaft through support plate is connected with clamping frame；Cylinder and the driving lever being connected with cylinder piston rod are provided with the frame, driving lever acts on two adjacent wheel between cog of star-wheel.Substrate to be coated is fastened on clamping frame, substrate surface is deposited in after heated target evaporation in vacuum chamber, now driving lever is in retracted state, clamping frame will not be caused to overturn.After the completion of the first face plated film for treating substrate, cylinder is allowed to extend the two neighboring wheel between cog for acting on star-wheel by driving lever is started, and star-wheel will be moved along under the drive of turntable, because the position of driving lever is fixed, star-wheel will realize and overturn that upset system architecture of the present utility model is simple, flexible overturning.
Description
Technical field
The utility model is related to a kind of coating machine, more particularly to a kind of coating machine of substrate frame flexible overturning.
Background technology
Evaporation coating is usually that heating target makes surface component be evaporated and be settled with atomic group or ionic species
In substrate surface, pass through film forming procedure (scatterplot-island structure-fan walks structure-layer growth) formation film.At present, thermal evaporation
The work rest system that coating machine is generally used is divided into several major classes for contour structures, umbrella shape (multiple-piece, monoblock type), planetary
(plane is planetary, umbrella shape planet), flat (level, inclined-plane) etc..Many coated products are required for overturning drive device to base
Piece is overturn to realize automatic flaps under double-sided coating, a kind of achievable vacuum state of such as Application No. 201420570936.3
Overturning drive device it is described as, be made up of upset driving driver plate and turnover driving mechanism, the upset driving driver plate
It is connected and fixed on the upset film coating jig outer, upset driving driver plate and offers at least one neck, neck is turned over described
The center for turning driving driver plate is symmetrical centre symmetry arrangement；Turnover driving mechanism is installed on vacuum coating equipment, turnover driving mechanism
With at least one telescopic driving lever, driving lever bearing, the outer profile size of driving lever bearing and the groove of neck are set with driving lever
Mouth size, which is coincide, to be adapted to, and driving lever is extended to driving lever bearing and neck rolling cooperation.Above as can be seen that existing substrate fixture
Overturn system architecture complicated, overturn extremely dumb.
Utility model content
To solve, existing substrate fixture upset system architecture is complicated, overturn inflexible defect, and the utility model spy carries
For a kind of coating machine of substrate frame flexible overturning.
The technical solution of the utility model is as follows：
It is provided with vacuum chamber, vacuum chamber and is covered with a kind of coating machine of substrate frame flexible overturning, including frame, frame
Bell jar, the top of vacuum chamber, which is rotated, is provided with turntable, and the edge of table of turntable is evenly arranged with multiple support plates, and the back side of support plate is provided with
Spider gear shaft is connected with rotatable star-wheel, star-wheel, one end of spider gear shaft through support plate is connected with clamping frame；Set in the frame
There are cylinder and the driving lever being connected with cylinder piston rod, driving lever acts on two adjacent wheel between cog of star-wheel.By base to be coated
Piece is fastened on clamping frame, is deposited in substrate surface after heated target evaporation in vacuum chamber, now driving lever is in retracted state,
Clamping frame will not be caused to overturn.After the completion of the first face plated film for treating substrate, start cylinder, cylinder will start driving lever and be allowed to elongation effect
In the two neighboring wheel between cog of star-wheel.Star-wheel will be moved along under the drive of turntable, because the position of driving lever is fixed, and star-wheel will
Realize upset.Star-wheel is 90 ° of quarterings, and each flip angle is 90 °, and the plating that the second face is the back side can be achieved in upset twice
Film, visible above, the upset system architecture of this programme is simple, and flexible overturning.
For the support meanss that support turntable rotation is provided with the utility model, the frame are better achieved, turntable
Lower end, which is provided with gear ring, the side wall of frame, is provided with motor and the belt pulley A with motor connection, is provided with and turns in frame
Bar, the lower end of bull stick is provided with belt pulley B, and belt pulley B is transmitted with belt pulley A by belt, and the upper end of bull stick is provided with and tooth
Enclose the gear being meshed.This programme is compared with original upset system, and type of drive is changed to from the driving of box coating machine top center
Coating machine bottom sides be driven, compact conformation, for noble metal thermal evaporation plated film it is relatively inexpensive, save.
Further, the support meanss include offering on support base, the side wall of support base in through hole A, through hole A and set
Have and bull stick A is equipped with bearing A, bearing A, bull stick A front end is connected with roller A, and roller A is located at the lower end of turntable.This programme
In, it is arranged on the rotation that the roller A of turntable lower surface is used to support turntable.
As preferred structure of the present utility model, it is provided with the frame on base, base and offers through hole B, through hole B
Bearing B is inside provided with, bearing B transfers are furnished with connecting rod B, and connecting rod B upper end is connected with the roller B contacted with table side.At this
In scheme, the roller B slewing area for being provided for limiting turntable in the horizontal direction, to ensure the center of rotation and vacuum of turntable
Chamber body center runout error≤2mm of room.
In summary, the beneficial effects of the utility model are：
1st, substrate to be coated is fastened on clamping frame, substrate table is deposited in after heated target evaporation in vacuum chamber
Face, now driving lever be in retracted state, clamping frame will not be caused to overturn.After the completion of the first face plated film for treating substrate, cylinder will start
Driving lever is allowed to extend the two neighboring wheel between cog for acting on star-wheel.Star-wheel will be moved along under the drive of turntable, due to driving lever
Position fix, star-wheel by realize overturn.Star-wheel is 90 ° of quarterings, and each flip angle is 90 °, and upset twice can be achieved
Second face is the plated film at the back side, visible above, and the upset system architecture of this programme is simple, and flexible overturning.
2nd, this programme is compared with original upset system, and type of drive is changed to coating machine from the driving of box coating machine top center
Bottom sides be driven, compact conformation, for noble metal thermal evaporation plated film it is relatively inexpensive, save.
3rd, in this programme, it is arranged on the rotation that the roller A of turntable lower surface is used to support turntable.
4th, the roller B slewing area for being provided for limiting turntable in the horizontal direction, with ensure the center of rotation of turntable with
Chamber body center runout error≤2mm of vacuum chamber.
Brief description of the drawings
Fig. 1 is the structural representation of coating machine；
Fig. 2 is the sectional view of coating machine；
Fig. 3 is the structural representation of support meanss；
Fig. 4 is base, roller B structural representation；
Parts title wherein corresponding to reference is as follows：1- frames, 2- vacuum chambers, 3- bell jars, 4- turntables, 5- branch
Plate, 6- star-wheels, 7- spider gear shafts, 8- clamping frames, 9- cylinders, 10- driving levers, 11- support meanss, 12- gear rings, 13- motors, 14- belts
Take turns A, 15- bull sticks, 16- belt pulleys B, 17- gear, 18- support bases, 19- rollers A, 20- base, 21- connecting rods B, 22- roller B.
Embodiment
For the utility model is better achieved, below in conjunction with the accompanying drawings and specific embodiment the utility model is done further in detail
Carefully illustrate, but embodiment of the present utility model is not limited to this.
As shown in Figure 1, Figure 2, Figure 3, Figure 4, set in a kind of coating machine of substrate frame flexible overturning, including frame 1, frame 1
It is equipped with vacuum chamber 2, vacuum chamber 2 and is covered with bell jar 3, the top of vacuum chamber 2, which is rotated, is provided with turntable 4, and the edge of table of turntable 4 is uniform
Multiple support plates 5 are provided with, the back side of support plate 5, which is provided with rotatable star-wheel 6, star-wheel 6, is connected with spider gear shaft 7, and spider gear shaft 7 is worn
The one end for crossing support plate 5 is connected with clamping frame 8；Cylinder 9 and the driving lever 10 being connected with the piston rod of cylinder 9 are provided with the frame 1,
Driving lever 10 acts on two adjacent wheel between cog of star-wheel 6.Substrate to be coated is fastened on clamping frame 8, is heated in vacuum chamber 2
Target evaporation after be deposited in substrate surface, now driving lever 10 be in retracted state, clamping frame 8 will not be caused to overturn.Treat substrate
After the completion of first face plated film, start cylinder 9, cylinder 9 is allowed to extend the two neighboring gear teeth for acting on star-wheel 6 by driving lever 10 is started
Between.Star-wheel 6 will be moved along under the drive of turntable, because the position of driving lever 10 is fixed, and star-wheel 6 will be realized and overturn.Star-wheel 6 is
90 ° of quarterings, each flip angle is 90 °, and the plated film that the second face is the back side, visible above, this reality can be achieved in upset twice
The upset system architecture for applying example is simple, and flexible overturning.
The support meanss 11 that support turntable 4 rotates are provided with the utility model, the frame 1 to be better achieved, are turned
The lower end of platform 4, which is provided with gear ring 12, the side wall of frame 1, is provided with motor 13 and the belt pulley A14 being connected with motor 13, machine
Bull stick 15 is provided with frame 1, the lower end of bull stick 15 is provided with belt pulley B16, and belt pulley B16 is passed with belt pulley A14 by belt
Send, the upper end of bull stick 15 is provided with the gear 17 being meshed with gear ring 12.The present embodiment is compared with original upset system, driving side
Formula is changed to the transmission of coating machine bottom sides, compact conformation, for the thermal evaporation of noble metal from the driving of box coating machine top center
Plated film is relatively inexpensive, save.
Further, the support meanss 11 include offering through hole A, through hole A on support base 18, the side wall of support base 18
Inside it is provided with bearing A, bearing A and is equipped with bull stick A, bull stick A front end is connected with roller A19, and roller A19 is located at turntable 4
Lower end.In the present embodiment, the rotation that the roller A19 of the lower surface of turntable 4 is used to support turntable 4 is arranged on.
As preferred structure of the present utility model, it is provided with the frame 1 on base 20, base 20 and offers through hole B,
Bearing B is provided with through hole B, bearing B transfers are furnished with connecting rod B21, and connecting rod B21 upper end is connected with what is contacted with the side wall of turntable 4
Roller B22.In the present embodiment, the roller B22 slewing area for being provided for limiting turntable 4 in the horizontal direction, to ensure to turn
The center of rotation of platform 4 and chamber body center runout error≤2mm of vacuum chamber 2.
Embodiment 1
Vacuum chamber 2, the upper cover of vacuum chamber 2 are provided with a kind of coating machine of substrate frame flexible overturning, including frame 1, frame 1
Provided with bell jar 3, the top of vacuum chamber 2, which is rotated, is provided with turntable 4, and the edge of table of turntable 4 is evenly arranged with multiple support plates 5, support plate 5
The back side, which is provided with rotatable star-wheel 6, star-wheel 6, is connected with spider gear shaft 7, and one end of spider gear shaft 7 through support plate 5 is connected with clamping frame
8；Cylinder 9 and the driving lever 10 being connected with the piston rod of cylinder 9 are provided with the frame 1, it is adjacent that driving lever 10 acts on star-wheel 6
Two wheel between cog.
Embodiment 2
The present embodiment is provided with the support meanss 11 that support turntable 4 rotates on the basis of embodiment 1 in the frame 1,
The lower end of turntable 4, which is provided with gear ring 12, the side wall of frame 1, is provided with motor 13 and the belt pulley A14 being connected with motor 13,
Bull stick 15 is provided with frame 1, the lower end of bull stick 15 is provided with belt pulley B16, belt pulley B16 and belt pulley A14 and passes through belt
Transmission, the upper end of bull stick 15 is provided with the gear 17 being meshed with gear ring 12.
Embodiment 3
The present embodiment is on the basis of embodiment 2, and the support meanss 11 are included on support base 18, the side wall of support base 18
Offer to be provided with through hole A, through hole A in bearing A, bearing A and be equipped with bull stick A, bull stick A front end is connected with roller A19, roll
Take turns the lower end that A19 is located at turntable 4.
Embodiment 4
The present embodiment is provided with base 20 on the basis of embodiment 1 or embodiment 2 or embodiment 3 in the frame 1,
Offered on base 20 and bearing B is provided with through hole B, through hole B, bearing B transfers are furnished with connecting rod B21, connecting rod B21 upper end is connected
There is the roller B22 contacted with the side wall of turntable 4.
As described above, the utility model can be realized preferably.
Claims (4)
1. a kind of coating machine of substrate frame flexible overturning, it is characterised in that：Including frame (1), vacuum chamber is provided with frame (1)
(2) bell jar (3), is covered with vacuum chamber (2), the top of vacuum chamber (2), which is rotated, is provided with turntable (4), and the edge of table of turntable (4) is equal
Even to be provided with multiple support plates (5), the back side of support plate (5) is provided with rotatable star-wheel (6), and star-wheel is connected with spider gear shaft on (6)
(7), one end of spider gear shaft (7) through support plate (5) is connected with clamping frame (8)；Be provided with the frame (1) cylinder (9) and with
The driving lever (10) of cylinder (9) piston rod connection, driving lever (10) acts on two adjacent wheel between cog of star-wheel (6).
2. a kind of coating machine of substrate frame flexible overturning according to claim 1, it is characterised in that：On the frame (1)
The support meanss (11) of support turntable (4) rotation are provided with, the lower end of turntable (4) is provided with gear ring (12), the side wall of frame (1)
On be provided with motor (13) and the belt pulley A (14) being connected with motor (13), frame (1) and be provided with bull stick (15), bull stick
(15) lower end is provided with belt pulley B (16), and belt pulley B (16) and belt pulley A (14) is transmitted by belt, bull stick (15) it is upper
End is provided with the gear (17) being meshed with gear ring (12).
3. a kind of coating machine of substrate frame flexible overturning according to claim 2, it is characterised in that：The support meanss
(11) include offering to be provided with through hole A, through hole A in bearing A, bearing A on support base (18), the side wall of support base (18) filling
Equipped with bull stick A, bull stick A front end is connected with roller A (19), and roller A (19) is located at the lower end of turntable (4).
4. a kind of coating machine of substrate frame flexible overturning according to claim 1, it is characterised in that：On the frame (1)
It is provided with to offer on base (20), base (20) and bearing B is provided with through hole B, through hole B, bearing B transfers is furnished with connecting rod B
(21), connecting rod B (21) upper end is connected with the roller B (22) contacted with turntable (4) side wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720290604.3U CN206538470U (en) | 2017-03-23 | 2017-03-23 | A kind of coating machine of substrate frame flexible overturning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720290604.3U CN206538470U (en) | 2017-03-23 | 2017-03-23 | A kind of coating machine of substrate frame flexible overturning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206538470U true CN206538470U (en) | 2017-10-03 |
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ID=59942945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720290604.3U Active CN206538470U (en) | 2017-03-23 | 2017-03-23 | A kind of coating machine of substrate frame flexible overturning |
Country Status (1)
| Country | Link |
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| CN (1) | CN206538470U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108193187A (en) * | 2017-11-29 | 2018-06-22 | 北京中科优唯科技有限公司 | A kind of substrate frame of achievable automatic turning |
-
2017
- 2017-03-23 CN CN201720290604.3U patent/CN206538470U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108193187A (en) * | 2017-11-29 | 2018-06-22 | 北京中科优唯科技有限公司 | A kind of substrate frame of achievable automatic turning |
| CN108193187B (en) * | 2017-11-29 | 2024-03-29 | 山西中科潞安紫外光电科技有限公司 | Substrate frame capable of realizing automatic overturning |
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