CN109957776A - TFT-LCD glass substrate double-sided coating production line - Google Patents
TFT-LCD glass substrate double-sided coating production line Download PDFInfo
- Publication number
- CN109957776A CN109957776A CN201711336507.4A CN201711336507A CN109957776A CN 109957776 A CN109957776 A CN 109957776A CN 201711336507 A CN201711336507 A CN 201711336507A CN 109957776 A CN109957776 A CN 109957776A
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- China
- Prior art keywords
- glass substrate
- tft
- frame
- production line
- support component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
Abstract
The present invention discloses a kind of TFT-LCD glass substrate double-sided coating production line, including successively upstream chamber, pickling room, sputtering chamber and rotating room, and the washing room connecting with pickling room；Sputtering chamber connect with rotating room, the rotating room includes transmission storehouse and rotating cabin, the rotating cabin includes rotary components, transfer assembly and support component, glass substrate is installed in substrate frame, the transfer assembly and support component are installed on rotary components, and the rotary components drive transfer assembly and support component rotation, and the substrate frame is sent by transmitting storehouse to support component, the rotary components drive support component and substrate frame rotation, and the substrate frame after steering returns to sputtering chamber by transmission storehouse.TFT-LCD glass substrate double-sided coating production line of the invention is able to carry out rotation turn-over, and high degree of automation, process is coherent, improves the yield of product.
Description
Technical field
The present invention relates to coating film on glass technical field of structures more particularly to a kind of TFT-LCD glass substrate double-sided coating are raw
Producing line.
Background technique
TFT-LCD is the large-scale semiconductive completely inegrated circuit manufacturing technology using new material and new process, is liquid crystal
(LC), the basis of inorganic and organic thin film electroluminescent (EL and OEL) flat-panel monitor.TFT is in glass or plastic base etc.
On-monocrystalline on piece (can certainly be on chip) forms various films necessary to manufacture circuit by sputtering, chemical deposition process,
Pass through the processing and fabricating large-scale semiconductive integrated circuit (LSIC) to film.It can be greatly reduced into using non-single crystal substrate
This is traditional large scale integrated circuit to large area, the extension in multi-functional, inexpensive direction.In large-area glass or plastics base
The TFT of manufacture control pixel (LC or OLED) switch performance is bigger than the technical difficulty for manufacturing extensive IC on silicon wafer on plate.
Requirement (degree of purification be 100 grades) to production environment, (purity of electronics spy's gas is the requirement to material purity
99.999985%), the requirement to production equipment and production technology is above semiconductor large-scale integrated, is modern mass production
Top technology.
TFT-LCD panel is made of upper and lower two substrates, and upper substrate is CF substrate, is provided with CF (Color Filter, coloured silk
Colo(u)r filter), for generating color, lower substrate is TFT substrate, and being provided with TFT, (Thin Film Transistor, film are brilliant
Body pipe) matrix, it is shown for controlling the grayscale of picture element matrix, is liquid crystal cell between two substrates.Apply different drives to pixel
The deflection of different angle will occur with the size of voltage for dynamic voltage, liquid crystal molecule, and adjustment backlight incident ray penetrates
Rate generates different grayscale and shows.The side CF is usually provided with the colored filter matrix of Red Green Blue composition, with TFT
The film transistor matrix of side corresponds, and carries out colour mixture by the RGB of different grayscale and generates different color and light and shade
Degree.
Coated glass (Coated glass) is also referred to as reflecting glass.Coated glass be glass surface coating one or more layers
Metal, alloy or metal compound film meet certain particular requirement to change the optical property of glass.Coated glass is by production
The different characteristics of product can be divided into following a few classes: heat-reflecting glass, low emissivity glass (Low-E), electropane etc..
There are many production method of coated glass, mainly there is vacuum magnetic-control sputtering method, vacuum vapor deposition method, chemical vapour deposition technique
And sol-gel processing etc..Magnetron sputtering film glass can manufacture and design multilayer complexity membrane system using magnetron sputtering technique,
Multiple color can be plated out in the glass substrate of white, the corrosion-resistant and wear-resisting property of film layer is preferable, is produced and using most
One of product.The kind and quality of vacuum evaporation coating film glass and magnetron sputtering plating glass phase than there is certain gap,
Gradually replaced by vacuum sputtering.Chemical vapour deposition technique is that reaction gas is passed through on floatation glass production line scorching hot
Glass surface decomposes, and is uniformly deposited on glass surface and forms coated glass.The characteristics of this method is that equipment investment is few, easy tune
Control, product cost is low, chemical stability is good, can carry out hot-working, is most promising one of production method.Colloidal sol-is solidifying
Glue method produces coated glass simple process, and stability, shortcoming is that product luminous transmittance is too high, decorative poor.
For current filming equipment by the way of double-sided coating, equipment has tow sides differentiation, and equipment both sides are equipped with simultaneously
Target, and the substrate frame for loading glass also divides tow sides, heater cartridge heart position in a vacuum chamber, is an entirety up and down
Formula is vacantly hung up using lifting mode, in coating process, loads glass respectively in the front and back sides of substrate frame, and when plated film is equipped with
The substrate frame of glass is walked in vacuum chamber, and the front and back sides of substrate frame are located at the two sides of intermediate heater, logical by target area
The mode for crossing magnetron sputtering carries out plated film, this mode once can only glass plating one side, if the other one side of glass also needs
Want plated film, then after must having plated glass one side, by the glass for having plated one side again through over cleaning, then again pass by vacuum chamber into
Row plated film, i.e. filming process, which will be repeated twice, to be completed, and not only waste of manpower, financial resources, low output but also glass pass through in this way
Repeatedly its yield can be also greatly reduced after turnover.
The structure design of entire vacuum cavity once can be only done the film layer preparation of glass substrate single side, if glass base
Two surfaces of plate are required to preparation film layer, after the way of the prior art can only be the film layer for having prepared one surface of glass substrate,
The process that glass substrate repeats first time plated film is gone to the preparation of the second face mask layer of completion, this technique is preparing film for the second time
During layer, the performance of first time film layer can be influenced, and since secondary film coating will cause the decline of yield, it is overall
Production cost is higher.
Summary of the invention
The technical problem to be solved in the present invention is that, for technical problem of the existing technology, the present invention provides one
Kind TFT-LCD glass substrate double-sided coating production line is able to carry out rotation turn-over, and high degree of automation, process is coherent, mentions
The high yield of product.
In order to solve the above technical problems, technical solution proposed by the present invention are as follows:
A kind of TFT-LCD glass substrate double-sided coating production line, including successively upstream chamber, pickling room, sputtering chamber and rotation
Room, and the washing room being connect with pickling room；Sputtering chamber connect with rotating room, and the rotating room includes transmitting storehouse and rotating cabin,
The rotating cabin includes rotary components, transfer assembly and support component, and glass substrate is installed in substrate frame, the transfer assembly
It is installed on rotary components with support component, the rotary components drive transfer assembly and support component rotation, the substrate frame
It is sent by transmitting storehouse to support component, the rotary components drive support component and substrate frame rotation, and the substrate frame after steering is logical
It crosses transmission storehouse and returns to sputtering chamber.
As a further improvement of the above technical scheme:
The transmission storehouse is equipped with two or more, and the transmission storehouse is set there are two transmission cavity, and the bottom in the transmission storehouse is equipped with
Two rows of driving wheels.
The driving wheel is located at the bottom of transmission cavity.
The transmission cavity is connected with support component, and the substrate frame passes through transmission cavity and enters support component.
The rotary components include rotating electric machine, swivel mount, and the rotating electric machine is installed on coating film production line process chamber bottom
The lower section of plate, the swivel mount are located at the top of bottom plate, and the rotating electric machine is fixedly connected with swivel mount, and swivel mount is driven to turn
It is dynamic；The transfer assembly includes multiple driving wheels, and the driving wheel is respectively arranged in the two sides of swivel mount；The support component packet
Support frame is included, support frame as described above is fixed on swivel mount；There are two the substrate frame of glass substrate is set, it is located at the two of support frame
Side, the substrate frame are clamped between support frame and driving wheel, and the substrate frame is moved by the rolling of driving wheel.
Support frame as described above top is fixed with upper support seat, and the both ends of the upper support seat are equipped with photoelectric conversion seat, described
The side plate of photoelectric conversion seat is equipped with photoelectric reflection plate, and the top that the photoelectric conversion seat is equipped with substrate frame described in groove is located at groove
It is interior.
The transfer assembly further includes driving motor and transmission belt, and the driving wheel passes through transmission band connection, the transmission
The rotation of motor driven transmission belt, drives driving wheel to roll.
The rotary components further include shaft, and the rotating electric machine drives swivel mount, the shaft and bottom plate by shaft
Between be equipped with bearing.
Compared with the prior art, the advantages of the present invention are as follows:
TFT-LCD glass substrate double-sided coating production line of the invention carries out turn-over to substrate frame by rotating room, passes through
Rotary components can rotate substrate frame, and substrate frame is made just to be able to carry out rotation turn-over without leaving production line, automate
Degree is high, and process is coherent, improves the yield of product.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of rotating room of the present invention.
Fig. 2 is the structural schematic diagram in present invention transmission storehouse.
Fig. 3 is the right side structural representation of Fig. 2.
Fig. 4 is the structural schematic diagram of rotating cabin of the present invention.
Fig. 5 is that structural schematic diagram is used in rotating cabin embodiment of the present invention.
Fig. 6 is the structural schematic diagram of rotary components and transfer assembly of the present invention.
Figure number explanation:
1, rotating electric machine；11, shaft；2, swivel mount；3, driving wheel；31, driving motor；32, transmission belt；4, support frame；
41, upper support seat；42, groove；43, photoelectric reflection plate；45, photoelectric conversion seat；5, bottom plate；6, substrate frame；7, storehouse is transmitted；71,
Transmission cavity；8, rotating cabin.
Specific embodiment
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
Fig. 1 to Fig. 6 shows a kind of embodiment of TFT-LCD glass substrate double-sided coating production line of the present invention, including
Successively upstream chamber, pickling room, sputtering chamber and rotating room, and the washing room being connect with pickling room；Sputtering chamber connect with rotating room,
Rotating room includes transmission storehouse 7 and rotating cabin 8, and rotating cabin 8 includes rotary components, transfer assembly and support component, glass substrate peace
Loaded in substrate frame 6, transfer assembly and support component are installed on rotary components, and rotary components drive transfer assembly and support group
Part rotation, substrate frame 6 are sent by transmitting storehouse 7 to support component, and rotary components drive support component and substrate frame 6 to rotate, and turn to
Substrate frame 6 afterwards returns to sputtering chamber by transmission storehouse 7.
In the present embodiment, transmission storehouse 7 is equipped with two or more, and transmission storehouse 7 is set there are two transmission cavity 71, transmits the bottom in storehouse 7
Equipped with two rows of driving wheels 3.Driving wheel 3 is located at the bottom of transmission cavity 71.Transmission cavity 71 is connected with support component, and substrate frame 6 passes through
Transmission cavity 71 enters support component.
In the present embodiment, rotary components include rotating electric machine 1, swivel mount 2, and rotating electric machine 1 is installed on coating film production line work
The lower section of skill room bottom plate 5, swivel mount 2 are located at the top of bottom plate 5, and rotating electric machine 1 is fixedly connected with swivel mount 2, and drives rotation
Frame 2 rotates；Transfer assembly includes multiple driving wheels 3, and driving wheel 3 is respectively arranged in the two sides of swivel mount 2；Support component includes branch
Support 4, support frame 4 are fixed on swivel mount 2；The substrate frame 6 of glass substrate is located at the two sides of support frame 4 there are two setting,
Substrate frame 6 is clamped between support frame 4 and driving wheel 3, and substrate frame 6 is moved by the rolling of driving wheel 3.
In the present embodiment, 4 top of support frame is fixed with upper support seat 41, and the both ends of upper support seat 41 are respectively equipped with groove
42, the top of substrate frame 6 is located in groove 42.
In the present embodiment, the both ends of upper support seat 41 are equipped with photoelectric conversion seat 45, and the side plate of photoelectric conversion seat 45 is equipped with light
Galvanic reflex plate 43, groove 42 are set in photoelectric conversion seat 45.
In the present embodiment, magnetic steering 44 is equipped in groove 42.
In the present embodiment, transfer assembly further includes driving motor 31 and transmission belt 32, and driving wheel 3 is connected by transmission belt 32
It connects, two adjacent driving wheels 3 are connected by a transmission belt 32, and driving motor 31 drives transmission belt 32 to rotate, and drive transmission
Wheel 3 rolls.Bearing is equipped between driving wheel 3 and swivel mount 2.There are two driving motor 31 is set, 2 two sides of swivel mount are respectively driven
Driving wheel 3.
In the present embodiment, rotary components further include shaft 11, and rotating electric machine 1 drives swivel mount 2, shaft 11 by shaft 11
Bearing is equipped between bottom plate 5.
TFT-LCD glass substrate double-sided coating production line of the invention, substrate frame 6 enter transmission storehouse 7, substrate from sputtering chamber
Frame 6 is equipped with roller bearing, and roller bearing is located in the race of driving wheel 3.Two substrate frames 6 are respectively by the driving wheel 3 on both sides from transmission cavity
71 pass through transmission storehouse 7, send to rotating cabin 8, between the driving wheel 3 and photoelectric conversion seat 45 of rotating cabin 8, rotating electric machine 1
It drives swivel mount 2 to rotate, substrate frame 6 is driven to rotate, postrotational substrate frame 6 returns to sputtering chamber from former transmission cavity 71 and carries out second
The sputter in a face.Substrate frame of the invention controls 6 turn-over of substrate frame by the rotational angle of swivel mount 2, then passes through driving wheel 3
It rolls and substrate frame 6 is driven to leave rotating cabin and transmission storehouse, return to filming process.
Above-mentioned only presently preferred embodiments of the present invention, is not intended to limit the present invention in any form.Although of the invention
It has been disclosed in a preferred embodiment above, however, it is not intended to limit the invention.Therefore, all without departing from technical solution of the present invention
Content, technical spirit any simple modifications, equivalents, and modifications made to the above embodiment, should all fall according to the present invention
In the range of technical solution of the present invention protection.
Claims (8)
1. a kind of TFT-LCD glass substrate double-sided coating production line, which is characterized in that including successively upstream chamber, pickling room, sputter
Room and rotating room, and the washing room being connect with pickling room；Sputtering chamber connect with rotating room, and the rotating room includes transmission storehouse
(7) and rotating cabin (8), the rotating cabin (8) includes rotary components, transfer assembly and support component, and glass substrate is installed on base
On horse (6), the transfer assembly and support component are installed on rotary components, and the rotary components drive transfer assembly and branch
Support component rotation, the substrate frame (6) are sent by transmitting storehouse (7) to support component, the rotary components drive support component and
Substrate frame (6) rotation, the substrate frame (6) after steering return to sputtering chamber by transmission storehouse (7).
2. TFT-LCD glass substrate double-sided coating production line according to claim 1, which is characterized in that the transmission storehouse
(7) it is equipped with two or more, the transmission storehouse (7) sets there are two transmission cavity (71), and the bottom of transmission storehouse (7) is equipped with two rows of pass
Driving wheel (3).
3. TFT-LCD glass substrate double-sided coating production line according to claim 2, which is characterized in that the driving wheel
(3) it is located at the bottom of transmission cavity (71).
4. TFT-LCD glass substrate double-sided coating production line according to claim 2, which is characterized in that the transmission cavity
(71) it is connected with support component, the substrate frame (6) passes through transmission cavity (71) and enters support component.
5. TFT-LCD glass substrate double-sided coating production line according to claim 1, which is characterized in that the rotation group
Part includes rotating electric machine (1), swivel mount (2), and the rotating electric machine (1) is installed under coating film production line process chamber bottom plate (5)
Side, the swivel mount (2) are located at the top of bottom plate (5), and the rotating electric machine (1) is fixedly connected with swivel mount (2), and drives rotation
Pivoted frame (2) rotation；The transfer assembly includes multiple driving wheels (3), and the driving wheel (3) is respectively arranged in swivel mount (2)
Two sides；The support component includes support frame (4), and support frame as described above (4) is fixed on swivel mount (2)；The substrate of glass substrate
There are two frame (6) is set, the two sides of support frame (4) are located at, the substrate frame (6) is clamped in support frame (4) and driving wheel (3)
Between, the substrate frame (6) is moved by the rolling of driving wheel (3).
6. TFT-LCD glass substrate double-sided coating production line according to claim 5, which is characterized in that support frame as described above
(4) top is fixed with upper support seat (41), and the both ends of the upper support seat (41) are equipped with photoelectric conversion seat (45), the photoelectricity
The side plate of conversion seat (45) is equipped with photoelectric reflection plate (43), and the photoelectric conversion seat (45) is equipped with groove (42) described substrate frame
(6) top is located in groove (42).
7. TFT-LCD glass substrate double-sided coating production line according to claim 5, which is characterized in that the transmission group
Part further includes driving motor (31) and transmission belt (32), and the driving wheel (3) is connected by transmission belt (32), the driving motor
(31) driving transmission belt (32) rotation drives driving wheel (3) to roll.
8. TFT-LCD glass substrate double-sided coating production line according to claim 5, which is characterized in that the rotation group
Part further includes shaft (11), and the rotating electric machine (1) passes through shaft (11) driving swivel mount (2), the shaft (11) and bottom plate
(5) bearing is equipped between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711336507.4A CN109957776A (en) | 2017-12-14 | 2017-12-14 | TFT-LCD glass substrate double-sided coating production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711336507.4A CN109957776A (en) | 2017-12-14 | 2017-12-14 | TFT-LCD glass substrate double-sided coating production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109957776A true CN109957776A (en) | 2019-07-02 |
Family
ID=67017646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711336507.4A Pending CN109957776A (en) | 2017-12-14 | 2017-12-14 | TFT-LCD glass substrate double-sided coating production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109957776A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111889324A (en) * | 2020-08-19 | 2020-11-06 | 柳兆华 | Low-E glass manufacturing and processing technology |
| CN113086641A (en) * | 2021-03-16 | 2021-07-09 | 深圳市华星光电半导体显示技术有限公司 | Conveying device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111889324A (en) * | 2020-08-19 | 2020-11-06 | 柳兆华 | Low-E glass manufacturing and processing technology |
| CN113086641A (en) * | 2021-03-16 | 2021-07-09 | 深圳市华星光电半导体显示技术有限公司 | Conveying device |
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Application publication date: 20190702 |