CN209584358U - A kind of roll-to-roll vacuum coating equipment of continuity - Google Patents
A kind of roll-to-roll vacuum coating equipment of continuity Download PDFInfo
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- CN209584358U CN209584358U CN201920192213.7U CN201920192213U CN209584358U CN 209584358 U CN209584358 U CN 209584358U CN 201920192213 U CN201920192213 U CN 201920192213U CN 209584358 U CN209584358 U CN 209584358U
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Abstract
The utility model relates to technical field of vacuum plating more particularly to a kind of roll-to-roll vacuum coating equipments of continuity.The vacuum coating equipment, including the first filming chamber, the second coating chamber and delivery chamber, it include evaporation boat and evaporation shield in the first filming chamber, it include cathodic arc evaporation source, cathode tube and the second shading net in second coating chamber, it include driving means, winding device and the first shading net in delivery chamber, the driving means includes the first driving means, the second driving means, push rod and cylindrical steel web, it is provided with partition between the first filming chamber and the delivery chamber, wherein the partition and the delivery chamber airtight connection.The utility model combines two kinds of techniques of organic vapor phase deposition and vacuum evaporation coating, and joined winding device, and plating membrane efficiency greatly improves, and solves the problems, such as that flexible optoelectronic film production efficiency is insufficient.
Description
Technical field
The utility model relates to technical field of vacuum plating more particularly to a kind of roll-to-roll vacuum coating equipments of continuity.
Background technique
In recent years, flexible substrates film using more and more extensive, with the development of photoelectric technology, to flexible optoelectronic film
Production efficiency and quality requirement be also gradually increased.The coating process of traditional optoelectronic film uses single method, such as magnetic control more
Sputtering, chemical vapor deposition etc., production efficiency is slow, is much unable to satisfy the market demand.In terms of filming equipment, takeup type plating
Film device is because of its efficient production efficiency and can prepare the excellent characteristics of fexible film and gradually be concerned by people, but
Since plating paper and plastic film technique require difference to machine, for different film types, need to produce special plating paper and plating modeling
Film machine.
Utility model content
(1) technical problems to be solved
In order to solve the above problem of the prior art, the utility model provides a kind of roll-to-roll vacuum coating of continuity
Machine, makes organic vapor phase deposition and is evaporated in vacuo both coating process can to complete on a coating machine.
(2) technical solution
In order to achieve the above object, the main technical schemes of the utility model use include:
The utility model provides a kind of roll-to-roll vacuum coating equipment of continuity, the coating machine include the first filming chamber,
Second coating chamber and delivery chamber include evaporation boat and evaporation shield, the second plating membrane cavity in the first filming chamber
Interior includes cathodic arc evaporation source, cathode tube and the second shading net, and driving means, winding device and the are included in delivery chamber
One shading net, the driving means include the first driving means, the second driving means, push rod and cylindrical steel web.
It is provided with partition between the first filming chamber and the delivery chamber, wherein the partition and the conveyor chamber
Room airtight connection is connected with electromagnetic valve between second coating chamber and the delivery chamber.
According to the utility model, the first filming chamber bottom surface is provided with 4 or 6 evaporation boats, and the evaporation boat is in circle
Week is uniformly distributed.
According to the utility model, the first filming exterior thereto has been sequentially connected in series main pump and fore pump, wherein the first plating
On-off valve is provided between membrane cavity room and main pump, between main pump and fore pump.
According to the utility model, it includes 3 cathode tubes, the cathode that second coating chamber, which is cylindrical structure,
Pipe is in equilateral triangle arrangement, passes perpendicularly through the circular end face of cylindrical drum, and the cathode length of tube is 250-300mm, diameter 20-
30mm is wrapped up by quartz outside the cathode tube, and there is cathodic arc evaporation source in inside.
According to the utility model, equipped with pump is maintained inside second coating chamber, it is externally connected to gas cylinder, the gas
It is provided with plug valve between bottle and second coating chamber, the port position of the cathode tube is arranged in the plug valve.
According to the utility model, the center of the partition is equipped with blow vent, and the is provided with right above the blow vent
One shading net is provided with the evaporation shield immediately below the blow vent, between the evaporation shield and the partition room exist
Gap, the evaporation shield pass through the support thin bar placed vertically and are fixedly connected on the bottom plate of the first filming chamber.
According to the utility model, first driving means and second driving means are placed in parallel, and with cylinder
Steel web is fixedly connected, and cylindrical steel web side end face is fixedly connected with the second shading net, second shading net and institute
State the depth of parallelism of holding ± 0.1mm and the distance of 20mm between the second driving means.
According to the utility model, first driving means, second driving means are intermediate flat, two lateral bend knots
Structure, with a thickness of 30-100 μm, crooked radian radius is 100mm, and body structure surface is equipped with SiO2Bright and clean coating.
According to the utility model, the push rod is vertical with first driving means, second driving means, and with
First driving means, the second driving means are fixedly connected, the push shank diameter 100-150mm, and adjustable in length range is 1-
2m, U-shaped water cooling tube is additionally provided with inside the push rod, and the diameter of the U-shaped water cooling tube is 40-60mm.
According to the utility model, the winding device has included winding up roller, debatching roller, multiple deflector rolls, and the deflector roll includes the
One deflector roll, the second deflector roll and third deflector roll, each winding up roller have included that the diameter of winding up roller, debatching roller and multiple deflector rolls is all the same, diameter
For 150-250mm, each winding up roller surface uses Al2O3/TiO2Nano composite dope, paint thickness are 50 μm.
(3) beneficial effect
The beneficial effects of the utility model are: the utility model is by two kinds of techniques of organic vapor phase deposition and vacuum evaporation coating
It combines, the film for needing both techniques is enable to be completed at the same time on a coating machine, and because joined winding device,
Plating membrane efficiency greatly improves, and solves the problems, such as that flexible optoelectronic film production efficiency is insufficient.Because using organic vapor phase deposition
Technique, therefore fertile film not only only has solar battery thin film, fenestrated membrane, photochromic films, amberplex, flexibility are deposited
The films such as storage film can be manufactured with the utility model, and the production cost of film is greatly saved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
[description of symbols]
1: cathodic arc evaporation source；2: cathode tube；3: the second coating chambers；4: electromagnetic valve；5: the first driving means；6:
Delivery chamber；7: playing winding up roller；8: push rod；9:U type water cooling tube；10: playing winding up roller；11: the first shading nets；12: evaporation shield；
13: evaporation boat；14: the first filming chamber；15: partition；16: deflector roll；17: cylindrical steel web；18: venthole；Push away at 19: the second
Send device；20: the second shading nets；21: plug valve；22: the first deposition positions；23: the second deposition positions.
Specific embodiment
It is with reference to the accompanying drawing, right by specific embodiment in order to understand in order to preferably explain the utility model
The utility model is described in detail.
The utility model provides a kind of roll-to-roll coating machine of continuity, the apparatus structure of the utility model as shown in Figure 1
Schematic diagram, the vacuum coating equipment include the first filming chamber 14, the second coating chamber 3 and delivery chamber 6, the first filming chamber 14
In include evaporation boat 13 and evaporation shield 12, include cathode tube 2, the second shading net 20 and electromagnetic valve in the second coating chamber 3
4, include driving means, winding device and the first shading net 11 in delivery chamber 6, driving means include the first driving means 5,
Second driving means 19, push rod 8, cylindrical steel web 17, the winding device have included winding up roller 10, debatching roller 7 and multiple
Deflector roll 16.
Vacuum vapor plating is used in the first filming chamber 14, and 14 bottom surface of the first filming chamber is provided with 4 or 6 evaporations
Boat 13, multiple evaporation boats 13 are circularly and evenly distributed, and the material of the evaporation boat 13 is the metal or alloy such as tungsten or nickel, the first plating
Main pump and fore pump are sequentially connected in series outside membrane cavity room 14, wherein between the first filming chamber 14 and main pump, main pump and fore pump
Between be provided with on-off valve, in coating process, open on-off valve, main pump and fore pump collective effect, extract the first filming chamber
Gas inside room 14 makes the indoor vacuum degree of the chamber reach 10-2Pa-10-5Pa also includes heat source in the first filming chamber 14,
Heat source heats in coating process, and the temperature in the first filming chamber 14 is made to reach 573K-773K, in 14 cavity wall of the first filming chamber
It is provided with the first vacuum meter and the first thermometer, for showing 14 internal pressure of the first filming chamber and temperature, in the present embodiment
In, main pump is using molecular pump, and fore pump is using lobe pump.
Organic vapor phase deposition is used in second coating chamber 3, the second coating chamber 3 is cylindrical structure, including 3 cathodes
Pipe 2, plug valve 21 and the second shading net 20,2 length of cathode tube are 250-300mm, diameter 20-30mm, and 3 cathode tubes 2 are in
Equilateral triangle arrangement passes perpendicularly through the circular end face of cylindrical drum, is wrapped up outside cathode tube 2 by quartz, there is cathode arc steaming in inside
Rise 1, the second coating chamber 3 is externally connected to gas cylinder, and organic gas required when gas-phase deposition coating, cock are housed in gas cylinder
Valve 21 is placed between gas cylinder and the second coating chamber 3, and specific location is arranged in the port position of cathode tube 2, gas cylinder when plated film
Organic gas is passed through into cathode tube 2 by plug valve 21, and carries out the adjusting of gas flow by plug valve 21, while to the
380V voltage is accessed in two coating chambers 3, is carried out organic vapor phase deposition, is pumped, maintain equipped with maintenance inside the second coating chamber 3
Pump is connected with the second coating chamber 3, so that pressure in the second coating chamber 3 is maintained 1Pa by pumping, due to the first filming chamber
13 temperature-controllable of evaporation boat in 14, and the temperature can be regulated and controled by changing the material of evaporation boat 13, in order not to destroy
Film or apparatus structure make the temperature in the second coating chamber 3 maintain 470K-530K, and 3 cavity wall of the second coating chamber is equipped with the
Two vacuum meters and second temperature meter, for showing the pressure and temperature of the second coating chamber 3, wherein 3 upside of the second coating chamber
Cavity wall is opened there are four venthole 18, which is in that quadrangle is symmetrical, and aperture 10-20mm, venthole 18 prevents
When organic gas starts vapor deposition into the second coating chamber 3, gas pressure is excessively high in chamber 3.
Partition 15 is provided between the first filming chamber 14 and delivery chamber 6, wherein partition 15 and the closed company of delivery chamber 6
It connects, with a thickness of 5-10mm, the center of partition 15 is equipped with blow vent, and in the present embodiment, which is square through hole, ventilation
It is provided with the first shading net 11 above mouthful, the moving position of the first shading net 11 is adjustable, the deflector roll being placed in parallel with its top
Extreme lower position keeps the vertical range of 20-30mm, and the boil-off gas in the first filming chamber 14 is merely able to enter from blow vent defeated
Chamber 6 is sent, and is deposited on film by the first shading net 11, which is set as the first deposition position 22, this is logical
Evaporation shield 12 is provided with immediately below port, there are gap between evaporation shield 12 and partition 15, evaporation shield 12 passes through one
The support thin bar placed vertically is fixedly connected on the bottom plate of the first filming chamber 14, the second coating chamber 3 and delivery chamber 6
Between be connected with electromagnetic valve 4, need the second coating chamber carry out organic vapor phase deposition when, electromagnetic valve 4 can be opened.
Transport mechanism, including driving means and winding device are placed in delivery chamber 6, wherein driving means includes push rod
8, the first driving means 5 and the second driving means 19, the first driving means 5 and the second driving means 19 are placed in parallel and have certain
Distance, this is apart from adjustable and have electric control system controls, wherein the first driving means 5, the second driving means 19 with a thickness of 30-
100 μm, entire driving means is intermediate flat, two sides warp architecture, and crooked radian radius is 100mm, and body structure surface is equipped with SiO2
Bright and clean coating.
Push rod 8 diameter 100-150mm, adjustable in length 1-2m are equipped with U-shaped water cooling tube 9, circulation inside push rod 8
Cooling water is inputted, the diameter of U-shaped water cooling tube 9 is 40-60mm, wherein push rod 8 and the first driving means 5, the second driving means
19 is vertical, and is fixedly connected with the first driving means 5, the second driving means 19, the first driving means 5 and the second driving means 19
It is fixedly connected by cylindrical steel web 17, when pushing push rod 8,5 He of the first driving means that is fixedly connected in push rod 8
Second driving means 19 also moves therewith, is fixedly connected with the second shading net 20 outside cylindrical steel web 17, and second
Shading net 20 is in rectangular configuration, between the second driving means 19 at a distance from the depth of parallelism of holding ± 0.1mm and 20mm.
Winding device has included winding up roller 10, debatching roller 7, multiple deflector rolls 16, deflector roll 16 include the first deflector roll, the second deflector roll and
Third deflector roll, each winding up roller have included that the diameter of winding up roller 10, debatching roller 7 and multiple deflector rolls 16 is all the same, diameter 150-250mm,
Each winding up roller surface uses Al2O3/TiO2Nano composite dope, with a thickness of 50 μm, film has been wound after winding up roller 10 clockwise counterclockwise
The first deflector roll and the second deflector roll are wound, third deflector roll is wound counterclockwise, using cylindrical steel web 17, clockwise second
On the outer surface of driving means 20, finally counterclockwise in debatching roller 7, organic gas enters the second plating from cathode tube 2
Start organic vapor phase deposition in membrane cavity room 3, and be deposited on film by the second shading net 20, which is set as the
Two deposition positions 23, each winding up roller are wound film with the identical speed of 0.3-0.5m/s, and delivery chamber 6 is circumscribed with water cooling
Case, water cooling box are passed through cooling water to U-shaped water cooling tube 9 with the flow velocity of 0.2m/s, carry out to the film being wrapped on winding device cold
But cool down.
The entire production procedure of the utility model specifically:
Evaporation coating process: installing film on each winding up roller in advance, opens heat source, fore pump and main pump, plates to first
Membrane cavity room 14 is heated and is extracted its internal gas, circulation input cooling water, at this time plug valve 21, electromagnetic valve 4, each
On-off valve remains off, when the pressure in the first filming chamber 14 reaches required pressure, heating temperature to required temperature
When, enable the source material on evaporation boat 13 evaporate, the gas after evaporation passes through blow vent and the first shading net 11, deposits position first
It sets and is deposited at 22, each winding up roller drives film to be wound movement around winding up roller with the speed of 0.3-0.5m/s, when all films are equal
After the completion of steam plated film, the heat source and fore pump and main pump of closing the first filming chamber 14 stop evaporation coating process.
Organic vapor phase deposition coating process: opening electromagnetic valve 4, makes the second coating chamber 3 and the first filming chamber 14, defeated
Chamber 6 is sent to be connected to, the mixing of boil-off gas can be such that in the second coating chamber 3 gas pressure increases, and open maintain pump at this time, make the
Gas pressure in two coating chambers 3 maintains 1Pa, while driving means can push to film and the second shading net 20 etc.
In second coating chamber 3, when the temperature and pressure in the second coating chamber 3 reaches necessary requirement, gas cylinder, You Jiqi are opened
Body is discharged in cathode tube 2 by cathodic arc evaporation source 1, and organic vapor phase deposition is carried out, and organic gas passes through the second shading net
20, it is deposited in the second deposition position 23, in the coating process, winding transposition is inversely wound, when organic vapor phase deposition plates
It when film is completed, closes and maintains pump, gas cylinder, water cooling box and all power supplys, opening vent valve makes chamber interior pressure recovery, plated film
Terminate.
The utility model combines two kinds of techniques of organic vapor phase deposition and vacuum evaporation coating, makes to need both techniques
Film can be completed at the same time on a coating machine, and because joined winding device, plating membrane efficiency is greatly improved, and is solved
The problem of flexible optoelectronic film production efficiency deficiency.Because using organic vapor phase deposition technique, fertile film is not
Only there was only solar battery thin film, the films such as fenestrated membrane, photochromic films, amberplex, flexible memory films can use this reality
With the novel manufacturing, the production cost of film is greatly saved.
It is to be appreciated that the description to specific embodiment of the utility model progress is simply to illustrate that this is practical above
Novel technology path and feature, its object is to allow those skilled in the art that can understand the content of the utility model simultaneously
Implement accordingly, but the utility model is not limited to above-mentioned particular implementation.All ranges in the utility model claims
The various change or modification inside made should all cover within the protection scope of the present utility model.
Claims (10)
1. a kind of roll-to-roll vacuum coating equipment of continuity, it is characterised in that:
Including the first filming chamber (14), the second coating chamber (3) and delivery chamber (6), in the first filming chamber (14)
It include cathodic arc evaporation source (1), cathode in second coating chamber (3) comprising evaporation boat (13) and evaporation shield (12)
(2) and the second shading net (20) are managed, delivery chamber (6) is interior comprising driving means, winding device and the first shading net (11), described
Driving means includes the first driving means (5), the second driving means (19), push rod (8) and cylindrical steel web (17)；
Partition (15) are provided between the first filming chamber (14) and the delivery chamber (6), wherein the partition (15)
With the delivery chamber (6) airtight connection, electromagnetism is connected between second coating chamber (3) and the delivery chamber (6)
Gate valve (4).
2. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
The first filming chamber (14) bottom surface is provided with 4 or 6 evaporation boats (13), and the evaporation boat (13) is circumferentially uniformly divided
Cloth.
3. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
It is sequentially connected in series main pump and fore pump outside the first filming chamber (14), wherein the first filming chamber (14) and main pump
Between, between main pump and fore pump be provided with on-off valve.
4. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
Second coating chamber (3) is cylindrical structure, includes 3 cathode tubes (2), and the cathode tube (2) is in positive triangle
Shape arrangement, passes perpendicularly through the circular end face of cylindrical drum；
Cathode tube (2) length is 250-300mm, diameter 20-30mm, and the cathode tube (2) is external to be wrapped up by quartz, interior
Portion has cathodic arc evaporation source (1).
5. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
Second coating chamber (3) is internal equipped with pump is maintained, and is externally connected to gas cylinder, the gas cylinder and second plated film
It is provided between chamber (3) plug valve (21), port position of plug valve (21) setting in the cathode tube (2).
6. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
The center of the partition (15) is equipped with blow vent, is provided with the first shading net (11), institute right above the blow vent
It states and is provided with immediately below blow vent the evaporation shield (12), between existing between the evaporation shield (12) and the partition (15)
Gap, the evaporation shield (12) pass through the bottom plate that the support thin bar placed vertically is fixedly connected on the first filming chamber (14)
On.
7. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
First driving means (5) and second driving means (19) are placed in parallel, and solid with cylindrical steel web (17)
Fixed connection, cylindrical steel web (17) side end face are fixedly connected with the second shading net (20), second shading net (20)
Between second driving means (19) at a distance from the depth of parallelism of holding ± 0.1mm and 20mm.
8. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
First driving means (5), second driving means (19) are intermediate flat, two sides warp architecture, with a thickness of 30-
100 μm, crooked radian radius is 100mm, and body structure surface is equipped with SiO2Bright and clean coating.
9. the roll-to-roll vacuum coating equipment of continuity according to claim 1, it is characterised in that:
The push rod (8) is vertical with first driving means (5), the second driving means (19), and pushes with first
Device (5), the second driving means (19) are fixedly connected, push rod (8) the diameter 100-150mm, and adjustable in length range is
1-2m, the push rod (8) is internal to be additionally provided with U-shaped water cooling tube (9), and the diameter of the U-shaped water cooling tube (9) is 40-60mm.
10. the roll-to-roll vacuum coating equipment of continuity described in -9 any one according to claim 1, it is characterised in that:
The winding device has included winding up roller (10), debatching roller (7), multiple deflector rolls (16), and the deflector roll (16) is led including first
Roller, the second deflector roll and third deflector roll, each winding up roller have included that the diameter of winding up roller (10), debatching roller (7) and multiple deflector rolls (16) is homogeneous
Together, diameter 150-250mm, each winding up roller surface use Al2O3/TiO2Nano composite dope, paint thickness are 50 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920192213.7U CN209584358U (en) | 2019-02-12 | 2019-02-12 | A kind of roll-to-roll vacuum coating equipment of continuity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920192213.7U CN209584358U (en) | 2019-02-12 | 2019-02-12 | A kind of roll-to-roll vacuum coating equipment of continuity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209584358U true CN209584358U (en) | 2019-11-05 |
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ID=68354443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920192213.7U Active CN209584358U (en) | 2019-02-12 | 2019-02-12 | A kind of roll-to-roll vacuum coating equipment of continuity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109554669A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of roll-to-roll vacuum coating equipment of continuity |
-
2019
- 2019-02-12 CN CN201920192213.7U patent/CN209584358U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109554669A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of roll-to-roll vacuum coating equipment of continuity |
| CN109554669B (en) * | 2019-02-12 | 2024-02-06 | 浙江德佑新材料科技有限公司 | Continuous roll-to-roll vacuum coating machine |
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