CN202124659U - Multi-chamber continuous vacuum film coating device - Google Patents
Multi-chamber continuous vacuum film coating device Download PDFInfo
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- CN202124659U CN202124659U CN 201120216053 CN201120216053U CN202124659U CN 202124659 U CN202124659 U CN 202124659U CN 201120216053 CN201120216053 CN 201120216053 CN 201120216053 U CN201120216053 U CN 201120216053U CN 202124659 U CN202124659 U CN 202124659U
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- divider wall
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- vakuumkammer
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Abstract
The utility model relates to a multi-chamber continuous vacuum film coating device, which is capable of realizing continuous vacuum film coating since a large vacuum chamber is divided into a plurality of small vacuum film coating chambers with independent atmospheres. The multi-chamber continuous vacuum film coating device comprises the large vacuum chamber and a plurality of vacuum pumps, a plurality of air chamber partition walls are arranged in the large vacuum chamber uniformly, the small vacuum film coating chambers are formed among the air chamber partition walls, and each of the large vacuum chamber and the small vacuum film coating chambers is connected with at least one vacuum pump. The multi-chamber continuous vacuum film coating device is applicable to continuous multi-layer film coating under the vacuum environment.
Description
Technical field
The utility model relates to a kind of vacuum coater, particularly relates to a kind of air chamber divider wall that contains, and can be used in multicell continuous vacuum coating device.
Background technology
At present, sputtering technology is the main mode of vacuum plating, in the prior art, relates to repeatedly sputter, generally adopts discontinuous formula gradation sputter, intermediate demand running and store link.Middle-chain not only makes manufacturing cost improve, and is plated the also oxidized or pollution in middle-chain easily of base material, directly influences the plated film quality.Existing vacuum sputtering device can't be realized the continous way operation, and the especially preparation of multilayer film if adopt when once plating the method for thin film, had not only been lost time but also the wasting manpower and material resources, and production efficiency is low; In addition, the working gas and the vacuum tightness of different sputtering chambers are different, and working continuously to cause confusing of working gas, can't plated film.
The utility model content
The technical problem that the utility model will solve is in big vacuum film coating chamber, a kind of air chamber divider wall to be set, and cooperates vacuum-pumping system that big Vakuumkammer is divided into the independently little vacuum film coating chamber of several atmosphere, realizes the continuous multilayer plated film under the vacuum environment.
For solving the problems of the technologies described above, a kind of multicell continuous vacuum coating of the utility model device comprises a big Vakuumkammer, the vacuum pump that links to each other with said big Vakuumkammer, and the quilt plating base material that is arranged in said big Vakuumkammer; Sealing is provided with several air chamber divider walls between the big Vakuumkammer two ends, and the bottom of air chamber divider wall is fixed with big vacuum chamber interior walls; When carrying out vacuum plating, the gap of the maintenance 0.1～1mm of base material and said air chamber divider wall forms little vacuum film coating chamber between the adjacent arbitrarily gas barrier wall, and each little vacuum film coating chamber all links to each other with at least one vacuum pump.
The air chamber divider wall adopts hollow structure; Several sizes of its top uniform distribution consistent with divider wall hollow structure UNICOM circular through-hole; Air chamber divider wall bottom is provided with a circular through-hole with divider wall hollow structure UNICOM, in air chamber divider wall two side walls with serpentine structural arrangement layout recirculated cooling water pipeline.
When flexible parent metal was carried out vacuum plating, said big Vakuumkammer was cylindrical Vakuumkammer, and said air chamber divider wall is prismatoid.Said big internal vacuum chamber is provided with a cold drum, the flexible parent metal of reeling between cold drum and the trapezoidal air chamber divider wall top.
When hard substrate was carried out vacuum plating, said big Vakuumkammer was the rectangular vacuum chamber, and said air chamber divider wall is rectangular.Hard substrate is laid at said big Vakuumkammer top and rectangle air chamber divider wall top.
In the utility model big Vakuumkammer by the incomplete closed of air chamber divider wall be divided into some little Vakuumkammers, thereby form some independently little vacuum film coating chambers; And can cooperate vacuum air pump, can reach that atmosphere is independent of each other between the little vacuum film coating chamber, guarantee between the little vacuum film coating chamber that atmosphere is isolated preferably, the preparation of differential responses magnetron sputtering multilayer film is provided convenience; And this air chamber divider wall adopts hollow structure, can save steel, alleviates Vakuumkammer weight; Reserve a plurality of circular holes at this air chamber divider wall top, used in order to vacuum suction, can reduce the time that vacuumizes, raise the efficiency; The circulating water line that is provided with in the two side walls of wall simultaneously can reduce the coating chamber temperature, prevents that temperature is too high to cause by the distortion of plating base material or ablate.
The utility model is the divider wall between a kind of incomplete airtight vacuum chamber.Simple in structure, easily manufactured, economical and practical, but wide range of industrial applications; To vacuum plating; Especially continuous multilayer plated film, and the reactive sputtering that is coated with the different films of multilayer continuously take out from Vakuumkammer after need not plated a skim; Change Coating Materials and vacuumize again again, on the first layer film, be coated with the film of second layer differing materials again; The utility model can be avoided these repeated plated film prior steps, vacuumizes the step with these repetitions of clean vacuum chamber and the energy of losing time especially again.
Description of drawings
Fig. 1 is the sectional view of a kind of multicell continuous vacuum coating device of the utility model.
Fig. 2 is the side-view of the trapezoidal divider wall in the middle multicell continuous vacuum coating device shown in Figure 1.
Fig. 3 is the vertical view of trapezoidal air chamber divider wall.
Fig. 4 is the water circulation pipe layout n. of trapezoidal divider wall entrance of cooling water one side wall surface.
Fig. 5 is the another kind of multicell continuous vacuum coating device cross-sectional view of the utility model.
Among the figure, 1 is circular big Vakuumkammer, and 2 is cold drum, and 3 is that 4 is vacuum pump by the plating base material; 5 is trapezoidal air chamber divider wall, and 6 is little vacuum film coating chamber, and 7 is wrap-up, and 8 is unwinding device, and 9 is tensioning roller; 10 is divider wall top circular hole, and 11 is the divider wall wall, and 12 is divider wall wall recirculated cooling water pipeline water-in, and 13 is divider wall wall recirculated cooling water pipeline water outlet; 14 is divider wall wall recirculated cooling water pipeline top, horizontal pipeline, and 15 is rectangle air chamber divider wall, and 16 are the material transfer roller.
Embodiment
Be described further below in conjunction with the embodiment of accompanying drawing the utility model.
Embodiment 1
To shown in Figure 4, cylindrical big Vakuumkammer 1 set inside has cold drum 2 like Fig. 1, evenly at interval 3 trapezoidal air chamber divider walls 5 is set between cylindrical big Vakuumkammer 1 and the cold drum 2, and the bottom of trapezoidal air chamber divider wall 5 and cylindrical big Vakuumkammer 1 inwall are fixed; Form little vacuum film coating chamber 6 between the adjacent arbitrarily trapezoidal air chamber divider wall 5, two little vacuum film coating chambers 6 of formation link to each other with a vacuum pump respectively, and the rest part of cylindrical big Vakuumkammer 1 links to each other with two vacuum pumps; Trapezoidal air chamber divider wall 5 adopts hollow structure; The some circular holes 10 with hollow structure UNICOM of its top uniform distribution; Circular hole 10 numbers and gap size are selected according to actual needs voluntarily; Be provided with a circular hole with hollow structure UNICOM in addition in body of wall bottom, these circular holes all are to be convenient to rapid vacuumizing and to be provided with; The two side walls of trapezoidal air chamber divider wall 5 is furnished with the recirculated cooling water pipeline; Cooling circulating water is flowed into by divider wall wall recirculated cooling water pipeline water-in 12; Flow to the top along serpentine structure pipeline from top to bottom at trapezoidal air chamber divider wall 5 one side wall surfaces; Carry out the transition to trapezoidal air chamber divider wall 5 opposite side walls through divider wall wall recirculated cooling water pipeline top, horizontal pipeline 14; And flow to the bottom along serpentine structure pipeline from top to bottom at this side wall surface, at last by be divider wall wall recirculated cooling water pipeline water outlet 13 outflows.
Trapezoidal air chamber divider wall 5 is adjacent with cold drum 2, is by plating base material 3 therebetween, when carrying out vacuum plating, is plated the gap of base material 3 with divider wall 5 tops maintenance 0.1～1mm, for example optional 0.1mm, 0.5mm or 1mm.Under the effect of cooperatively interacting of vacuum pump 4 and trapezoidal air chamber divider wall 5, and the distance of suitably regulating between cold drum 2 and divider wall 5 tops can guarantee little vacuum film coating chamber 6 and cylindrical big Vakuumkammer 1 and little vacuum film coating chamber 6 independence of vacuum tightness each other; Wrap-up 7, unwinding device 8 and tensioning roller 9 are positioned at cylindrical big Vakuumkammer 1 inside; Unreel by plating base material 3 through unwinding device 8; Setting up tension force by tensioning roller 9 makes by plating base material 3 around twisting on the cold drum 2; Through operating with common, realize the purpose of plating the different films of multilayer continuously again to by the vacuum of plating base material with tensioning roller 9 and wrap-up 7.
Be applicable to flexible parent metal (like flexible parent metals such as PET) continuous coiling and coating from Fig. 1 to embodiment shown in Figure 4.
Embodiment 2
As shown in Figure 5, and embodiment 1 different being: adopt 3 rectangle air chamber divider walls 15 that big Vakuumkammer is divided into 4 little vacuum film coating chambers 6, each little vacuum film coating chamber 7 links to each other with a vacuum pump 4 respectively; Lay by plating base material 3 at each little vacuum film coating chamber 6 tops and rectangle air chamber divider wall 15 tops; Material transfer roller 16 runnings through being arranged on the Vakuumkammer outside realize by the continuous coating of plating base material 3 between each coating chamber.
Embodiment shown in Figure 5 is applicable to hard substrate (like glass, the Si sheet) plane continuous coating.
Claims (6)
1. multicell continuous vacuum coating device; Comprise a big Vakuumkammer, the vacuum pump that links to each other with said big Vakuumkammer; And the quilt plating base material that is arranged in said big Vakuumkammer; It is characterized in that: sealing is provided with several air chamber divider walls between the big Vakuumkammer two ends, and the bottom of said air chamber divider wall and said big vacuum chamber interior walls are fixed; When carrying out vacuum plating, base material and said air chamber are isolated the gap that keeps 0.1～1mm between the coping, form little vacuum film coating chamber between the adjacent arbitrarily gas barrier wall, and said each little vacuum film coating chamber all links to each other with at least one vacuum pump.
2. a kind of multicell continuous vacuum coating device according to claim 1; It is characterized in that: said air chamber divider wall each other evenly at interval; Said air chamber divider wall adopts hollow structure, the circular through-hole in several of the same size and said divider wall hollow structure UNICOMs of its top uniform distribution; Arrange the recirculated cooling water pipeline in said air chamber divider wall two side walls with the serpentine structural arrangement.
3. a kind of multicell continuous vacuum coating device according to claim 1 and 2, it is characterized in that: said big Vakuumkammer is cylindrical Vakuumkammer, said air chamber divider wall is prismatoid.
4. a kind of multicell continuous vacuum coating device according to claim 1 and 2, it is characterized in that: said big Vakuumkammer is the rectangular vacuum chamber, said air chamber divider wall is rectangular.
5. a kind of multicell continuous vacuum coating device according to claim 3, it is characterized in that: said big internal vacuum chamber is provided with a cold drum, the flexible parent metal of reeling between said cold drum and the said air chamber divider wall top.
6. a kind of multicell continuous vacuum coating device according to claim 4 is characterized in that: hard substrate is laid at said big Vakuumkammer top and said air chamber divider wall top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120216053 CN202124659U (en) | 2011-06-24 | 2011-06-24 | Multi-chamber continuous vacuum film coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120216053 CN202124659U (en) | 2011-06-24 | 2011-06-24 | Multi-chamber continuous vacuum film coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202124659U true CN202124659U (en) | 2012-01-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120216053 Expired - Lifetime CN202124659U (en) | 2011-06-24 | 2011-06-24 | Multi-chamber continuous vacuum film coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202124659U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103590082A (en) * | 2013-12-03 | 2014-02-19 | 厦门建霖工业有限公司 | Phosphor-less hexavalent chromium-less environmentally-friendly plastic electroplating method |
| CN110344018A (en) * | 2018-04-08 | 2019-10-18 | 北京七星华创集成电路装备有限公司 | A kind of more cathode continuous coating chambers |
| CN111962037A (en) * | 2020-09-07 | 2020-11-20 | 温岭市华航电子科技有限公司 | Magnetron sputtering evaporation dual-system winding vacuum coating machine and coating process thereof |
-
2011
- 2011-06-24 CN CN 201120216053 patent/CN202124659U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103590082A (en) * | 2013-12-03 | 2014-02-19 | 厦门建霖工业有限公司 | Phosphor-less hexavalent chromium-less environmentally-friendly plastic electroplating method |
| CN103590082B (en) * | 2013-12-03 | 2016-03-02 | 厦门建霖工业有限公司 | A kind of without phosphorus, non-hexavalent chromium environment friendly shape glue electro-plating method |
| CN110344018A (en) * | 2018-04-08 | 2019-10-18 | 北京七星华创集成电路装备有限公司 | A kind of more cathode continuous coating chambers |
| CN110344018B (en) * | 2018-04-08 | 2020-09-08 | 北京七星华创集成电路装备有限公司 | Multi-cathode continuous coating chamber |
| CN111962037A (en) * | 2020-09-07 | 2020-11-20 | 温岭市华航电子科技有限公司 | Magnetron sputtering evaporation dual-system winding vacuum coating machine and coating process thereof |
| CN111962037B (en) * | 2020-09-07 | 2023-09-22 | 温岭市华航电子科技有限公司 | Magnetron sputtering evaporation dual-system winding vacuum coating machine and coating process thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120125 |
|
| CX01 | Expiry of patent term |