CN105349961A - Multi-roller and multi-chamber coiling film coating device - Google Patents
Multi-roller and multi-chamber coiling film coating device Download PDFInfo
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- CN105349961A CN105349961A CN201510863999.7A CN201510863999A CN105349961A CN 105349961 A CN105349961 A CN 105349961A CN 201510863999 A CN201510863999 A CN 201510863999A CN 105349961 A CN105349961 A CN 105349961A
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Abstract
The invention discloses a multi-roller and multi-chamber coiling film coating device. The device comprises a plurality of vacuum chambers which are independent from each other, wherein the plurality of vacuum chambers include an uncoiling chamber, a coiling chamber and at least one film coating chamber; the uncoiling chamber and the coiling chamber are correspondingly arranged at two sides of the film coating chamber; a vacuum lock is arranged between any two adjacent vacuum cambers; a plurality of water cooling drums which are correspondingly distributed on the top and at the bottom are arranged in the film coating chamber; at least two sputtering targets are distributed at one side of each water cooling drum; a target cover is arranged in the periphery of each sputtering target; a gap through which a coiled base material can pass is formed between the bottom part of each target cover and the surface of the corresponding water cooling drum; an independent sputtering chamber is formed in each target cover. According to the device, the film coating processes in adjacent film coating chambers are completely separated; the film coating chambers can be arranged according to the quantity of film layers and different types of the film layers; a multi-film composite film can be coated within one working cycle; in addition, the gas isolation of sputtering areas can be also achieved, thus the back flow of gas can be avoided, and as a result, the quality of a product can be improved.
Description
Technical field
The present invention relates to coiled material surface coating technique field, particularly a kind of multiple roll multicell coil film coating apparatus.
Background technology
Flexible intelligent electrochromic film is a kind of novel electrochromic material, it have under electric field action photoabsorption through controllability, the selectively thermal radiation of absorption or reflect ambient and the thermodiffusion of inside, reduce summer and keep nice and cool and keep warm winter and mass energy that is that must consume, play the object improving natural lighting degree, peep-proof simultaneously.Being usually used in the variable color purposes such as the dimming glass on smart window, Anti-glare rearview mirror, high-grade car and aircraft at present, is the product that a kind of market demand is larger.
The processing of electroluminescent for flexible intelligent, photic, thermochromic film, traditional mode adopts coating single side, when needing double-sided coating, put into vacuum chamber after taking out rewinding again after workpiece having been plated one side and plate another side again, the production cycle of which is long, and production efficiency is low, and cost is high.Also have in same vacuum environment at present, the method that the mode adopting horizontal type level to install two water-cooled drum is processed, but due in same vacuum environment, between different coating film area, there will be sputtering diffraction, therefore there will be the phenomenon polluting adjacent target, cause film quality not high, and two water-cooled drum level is put, sputtering target is positioned at water-cooled drum below, have rete in coating process to drop target material surface, cause secondary pollution, quality product cannot improve, and product competitiveness in the market is not strong.
In existing flex circuit application filming equipment, it is all the form that the mechanisms such as water-cooled drum, wind-up roll, let off roll are placed in same vacuum chamber by employing.This just makes in the course of processing, often plate a stove and just need vacuum breaker once, under wind-up roll, let off roll and coating film area are all in atmospheric condition, such coating film area is understood the dust in adsorb water vapor and air and pollutes, and is therefore difficult to obtain high-quality rete.In addition, the every stove of coating chamber all needs again to vacuumize, and the plated film cycle lengthens, and production efficiency is low.Meanwhile, after vacuum breaker, often plating a stove all needs to re-fill reactant gases or shielding gas, and tooling cost is high.
In existing flex circuit application filming equipment, all adopt sputtering target to carry out rete around water-cooled drum to be coated with, each sputtering target is in same vacuum environment, easily occur that diffraction pollutes target, high-quality rete cannot be obtained, especially, when the substrate surface that reels needs multiple coatings of different nature, this phenomenon is more obvious.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, the multiple roll multicell coil film coating apparatus that a kind of coating quality is high, tooling cost is low is provided.
Technical scheme of the present invention is: a kind of multiple roll multicell coil film coating apparatus, comprise multiple separate vacuum chamber, multiple vacuum chamber comprises and unreels room, rolling room and at least one coating chamber, unreel the both sides that room and rolling room are located at coating chamber respectively, between any two adjacent vacuum chambers, be provided with vacuum lock; The multiple water-cooled drums in distributing up and down are provided with in coating chamber, the side of each water-cooled drum is at least distributed with two sputtering targets, each sputtering target periphery is provided with target cover, the gap passed through for the base material that reels is provided with bottom target cover and between water-cooled drum surface, and each target cover is external respectively vacuumizes unit, in each target cover, form independently sputtering chamber.Wherein, each vacuum chamber is also external respectively vacuumizes unit, target cover and vacuum chamber external vacuumize that unit all adopts market general vacuumize unit.Room, rolling room and each coating chamber will be unreeled and be all set to independently vacuum chamber, can realize carrying out different coating process in different coating chamber on the one hand, prevent from producing phenomenon of collaborating between different process, on the other hand, according to the actual needs of coating process, the quantity of coating chamber can be configured flexibly, also conveniently a certain vacuum chamber is safeguarded or changes coiled material, target etc.Two water-cooled drums are set to the form distributed up and down, are located at water-cooled drum side in conjunction with sputtering target, can effectively prevent rete in sputter procedure from dropping and causing secondary pollution to target; With target cover, each sputtering target is isolated, can realize carrying out gas isolating to each sputter area, prevent collaborate phenomenon and affect coating quality, in addition, also facilitate and arrange according to the quantity of actual needs to sputtering target of coating process.
As a kind of preferred version, two water-cooled drums are provided with in described coating chamber, the sputtering target in two water-cooled drum outsides is distributed in the both sides of two water-cooled drum center lines, and the sputtering target being positioned at same water-cooled drum outside is distributed in the same side of two water-cooled drum center lines, winding base material carries out double-sided coating on two water-cooled drums, namely, in the course of conveying of winding base material, on a water-cooled drum, first carry out the plated film of one side, then on another water-cooled drum, carry out the plated film of another side.
As a kind of preferred version, described coating chamber has one, and two water-cooled drums in coating chamber are upper water-cooled drum and lower water-cooled drum, and the left side of upper water-cooled drum is distributed with three sputtering targets, and the right side of lower water-cooled drum is distributed with three sputtering targets.
As another kind of preferred version, described coating chamber has two, is respectively the first filming room and the second coating chamber; Two water-cooled drums of the first filming indoor are water-cooled drum and first time water-cooled drum on first, and on first, the left side of water-cooled drum is distributed with two sputtering targets, and the right side of first time water-cooled drum is distributed with two sputtering targets; Two water-cooled drums in second coating chamber are water-cooled drum and second time water-cooled drum on second, and on second, the right side of water-cooled drum is distributed with two sputtering targets, and the left side of second time water-cooled drum is distributed with two sputtering targets.
Described target cover is the hollow housing structure of bottom opening, and sputtering target is located in the middle part of target cover, and target cover side is provided with bleeding point, and bleeding point is external vacuumizes unit.
As a kind of new vacuum lock structure, described vacuum lock comprises valve seat, valve gap and valve gap driving mechanism, and valve gap is located at above valve seat, and valve gap top is connected with valve gap driving mechanism; Valve seat is provided with the inclined via-hole passed through for winding base material, and inclined via-hole is communicated with the feed port on vacuum chamber sidewall.This vacuum lock structure is simple and small and exquisite, and can directly as required install additional on each vacuum chamber, do not affect the existing structure of vacuum chamber, its manufacturing cost is also low.
On described valve seat, the entrance end of inclined via-hole is positioned on the end face of valve seat, and the exit end of inclined via-hole is positioned on the sidewall of valve seat, and exit end is connected with the feed port on vacuum chamber sidewall; The bottom surface of valve gap is plane, and the end face of valve seat is also plane, and the sidewall of valve seat is fixedly connected with vacuum chamber sidewall; When vacuum lock is in closing condition, the bottom surface of valve gap and the end face close proximity of valve seat, and valve gap bottom surface is covered on the entrance end of inclined via-hole.
Described valve gap driving mechanism comprises cylinder and sealing socket, valve gap and valve seat are located in a vacuum chamber in adjacent two vacuum chambers, cylinder is fixed on the outer wall of this vacuum chamber by sealing socket, and the end of cylinder stretches in vacuum chamber, and is fixedly connected with the end face of valve gap; Valve gap driving mechanism drives valve gap to rise or declines.
When film coating apparatus normally carries out coating process, vacuum lock is in opened condition; When needs carry out change of lap or safeguard certain vacuum chamber, close vacuum lock, open corresponding vacuum chamber.When closing vacuum lock, start cylinder, cylinder promotes valve gap and declines, until valve gap bottom surface is closely attached on valve seat end face, valve gap bottom surface is made to be covered in the entrance end of inclined via-hole, thus by adjacent two vacuum chamber isolation, each self-forming independently cavity, to ensure not need the cleanliness factor in the vacuum chamber of unlatching and vacuum tightness.
In described coating chamber, in the coating chamber connected with rolling room, be also provided with front ion processing mechanism, and front ion processing mechanism is located at the entrance end of multiple water-cooled drum; Also be provided with rear ion processing mechanism in the coating chamber connected with the room of unreeling, and rear ion processing mechanism is located at the exit end of multiple water-cooled drum.Front ion processing mechanism and rear ion processing mechanism all adopt ion processing mechanism general at present.
Also be provided with target car outside described coating chamber, arrange guide rail bottom target car, two water-cooled drums are located on target car, and target car moves along guide rail and sent into or send coating chamber by two water-cooled drums.When needing a certain coating chamber is carried out to the replacing of water-cooled drum or safeguards, as long as close the vacuum lock of its both sides, take water-cooled drum out of coating chamber by target car to carry out safeguarding or changing, fast easy to maintenance, do not affect cleanliness factor and the vacuum tightness of other vacuum chamber yet.
When above-mentioned multiple roll multicell coil film coating apparatus uses, its principle is: after the room of unreeling releases winding base material, coating chamber is entered by vacuum lock, first carry out ion processing through front ion processing mechanism, then a water-cooled drum place in coating chamber carries out a plated film, enter the plated film that another water-cooled drum place carries out another side again, when being provided with multiple coating chamber in film coating apparatus, winding base material is successively by carrying out plated film in each coating chamber, after finally carrying out ion processing by rear ion processing mechanism, send into rolling room and carry out rolling.
The present invention, relative to prior art, has following beneficial effect:
This multiple roll multicell coil film coating apparatus is by being arranged on independently in vacuum chamber by each functional entity, make the coating process in adjacent coating chamber completely isolated, can arrange coating chamber according to the difference of rete quantity and rete kind, realize completing being coated with of multilayer complex films within a work period, thus obtain high-quality rete.
This multiple roll multicell coil film coating apparatus, by arranging vacuum lock between two vacuum chambers of arbitrary neighborhood, realizes, after closedown vacuum lock, keeping vacuum state, thus shortening the follow-up pumpdown time, enhance productivity in coating chamber.In addition, after vacuum breaker, during mounting or dismounting workpiece, in air, dust or moisture content also cannot enter coating chamber, make to keep clean pollution-free in coating chamber, thus realize repeatability and the stability of technique.
This multiple roll multicell coil film coating apparatus, by being isolated by each sputtering target, forms separately independently sputter area, achieves the gas isolating between sputter area, avoid phenomenon of collaborating, thus improve the quality of products, also facilitate the flexible of sputtering target quantity.
The structure formation of this multiple roll multicell coil film coating apparatus by two of coating chamber water-cooled drums are set to distribute up and down, coating chamber compact construction can be made on the one hand, save space, shorten the pumpdown time, thus raise the efficiency, reduce production cost, also effectively can prevent rete drippage in coating process on the other hand, improve the quality of products.
Accompanying drawing explanation
Fig. 1 is the structural representation (the valve gap driving mechanism of not shown vacuum lock) of this multiple roll multicell coil film coating apparatus embodiment 1.
Fig. 2 is the distributed architecture schematic diagram of single water-cooled drum outside sputtering target in Fig. 1.
Fig. 3 is the structural representation of vacuum lock in Fig. 1.
Fig. 4 is the structural representation of this vacuum locking device on A direction in Fig. 3.
Fig. 5 is the structural representation of this multiple roll multicell coil film coating apparatus embodiment 2.
Fig. 6 is the structural representation of this multiple roll multicell coil film coating apparatus embodiment 3.
Fig. 7 is the structural representation of this multiple roll multicell coil film coating apparatus embodiment 4.
Fig. 8 is the structural representation of this multiple roll multicell coil film coating apparatus embodiment 5.
Fig. 9 is the structural representation of this multiple roll multicell coil film coating apparatus embodiment 6.
Embodiment
Below in conjunction with embodiment, the present invention is described in further detail, but embodiments of the present invention are not limited thereto.
Embodiment 1
A kind of multiple roll multicell of the present embodiment coil film coating apparatus, as shown in Figure 1, comprise multiple separate vacuum chamber, multiple vacuum chamber comprises and unreels room 1, rolling room 2 and a coating chamber 3, unreel the both sides that room and rolling room are located at coating chamber respectively, between any two adjacent vacuum chambers, be provided with vacuum lock 4; Two water-cooled drums 5 in distributing up and down are provided with in coating chamber, the side of each water-cooled drum is at least distributed with two sputtering targets 6, each sputtering target periphery is provided with target cover 7, the gap passed through for the base material that reels is provided with bottom target cover and between water-cooled drum surface, and each target cover is external respectively vacuumizes unit, in each target cover, form independently sputtering chamber.Wherein, each vacuum chamber is also external respectively vacuumizes unit, target cover and vacuum chamber external vacuumize that unit all adopts market general vacuumize unit.Room, rolling room and each coating chamber will be unreeled and be all set to independently vacuum chamber, can realize carrying out different coating process in different coating chamber on the one hand, prevent from producing phenomenon of collaborating between different process, on the other hand, according to the actual needs of coating process, the quantity of coating chamber can be configured flexibly, also conveniently a certain vacuum chamber is safeguarded or changes coiled material, target etc.Two water-cooled drums are set to the form distributed up and down, structure sputtering target is located at water-cooled drum side, can effectively prevent rete in sputter procedure from dropping and causing secondary pollution to target; With target cover, each sputtering target is isolated, can realize carrying out gas isolating to each sputter area, prevent collaborate phenomenon and affect coating quality, in addition, also facilitate and arrange according to the quantity of actual needs to sputtering target of coating process.
Wherein, as shown in Figure 2, target cover is the hollow housing structure of bottom opening, and sputtering target is located in the middle part of target cover, and target cover side is provided with bleeding point 7-1, and bleeding point is external vacuumizes unit.
In coating chamber, the sputtering target in two water-cooled drum outsides is distributed in the both sides of two water-cooled drum center line 5-1, and the sputtering target being positioned at same water-cooled drum outside is distributed in the same side of two water-cooled drum center lines, winding base material carries out double-sided coating on two water-cooled drums, namely in the course of conveying of winding base material, on a water-cooled drum, first carry out the plated film of one side, then on another water-cooled drum, carry out the plated film of another side.Two water-cooled drums in coating chamber are upper water-cooled drum and lower water-cooled drum, and the left side of upper water-cooled drum is distributed with three sputtering targets, and the right side of lower water-cooled drum is distributed with three sputtering targets.
As shown in Figure 3 or Figure 4, vacuum lock comprises valve seat 4-1, valve gap 4-2 and valve gap driving mechanism, and valve gap is located at above valve seat, and valve gap top is connected with valve gap driving mechanism; Valve seat is provided with the inclined via-hole 4-3 passed through for winding base material, and inclined via-hole is communicated with the feed port 4-4 on vacuum chamber sidewall.This vacuum lock structure is simple and small and exquisite, and can directly as required install additional on each vacuum chamber, do not affect the existing structure of vacuum chamber, its manufacturing cost is also low.On valve seat, the entrance end of inclined via-hole is positioned on the end face of valve seat, and the exit end of inclined via-hole is positioned on the sidewall of valve seat, and exit end is connected with the feed port on vacuum chamber sidewall; The bottom surface of valve gap is plane, and the end face of valve seat is also plane, and the sidewall of valve seat is fixedly connected with vacuum chamber sidewall; When vacuum lock is in closing condition, the bottom surface of valve gap and the end face close proximity of valve seat, and valve gap bottom surface is covered on the entrance end of inclined via-hole.The cross-sectional shape of valve seat is trilateral, and the entrance end of inclined via-hole is positioned in the middle part of the end face of valve seat, and the exit end of inclined via-hole is positioned in the middle part of the sidewall of valve seat.The cross-sectional shape of valve gap is inverted T-shaped, is convenient to the power utilizing cylinder, and valve gap bottom surface is closely attached on valve seat end face, thus realizes the object of sealing.The cross-sectional shape of inclined via-hole is rectangle or the track type of strip, and its shape mainly coordinates the cross-sectional shape of winding base material.Valve gap driving mechanism comprises cylinder 4-5 and sealing socket 4-6, valve gap and valve seat are located in a vacuum chamber in adjacent two vacuum chambers, cylinder is fixed on the outer wall of this vacuum chamber by sealing socket, and the end of cylinder stretches in vacuum chamber, and is fixedly connected with the end face of valve gap; Valve gap driving mechanism drives valve gap to rise or declines.When film coating apparatus normally carries out coating process, vacuum lock is in opened condition; When needs carry out change of lap or safeguard certain vacuum chamber, close vacuum lock, open corresponding vacuum chamber.When closing vacuum lock, start cylinder, cylinder promotes valve gap and declines, until valve gap bottom surface is closely attached on valve seat end face, valve gap bottom surface is made to be covered in the entrance end of inclined via-hole, thus by adjacent two vacuum chamber isolation, each self-forming independently cavity, to ensure not need the cleanliness factor in the vacuum chamber of unlatching and vacuum tightness.
As shown in Figure 1, in coating chamber, in the coating chamber connected with rolling room, be also provided with front ion processing mechanism 8, and front ion processing mechanism is located at the entrance end of multiple water-cooled drum; Also be provided with rear ion processing mechanism 9 in the coating chamber connected with the room of unreeling, and rear ion processing mechanism is located at the exit end of multiple water-cooled drum.Front ion processing mechanism and rear ion processing mechanism all adopt ion processing mechanism general at present.
Also be provided with target car outside coating chamber, arrange guide rail bottom target car, two water-cooled drums are located on target car, and target car moves along guide rail and sent into or send coating chamber by two water-cooled drums.When needing a certain coating chamber is carried out to the replacing of water-cooled drum or safeguards, as long as close the vacuum lock of its both sides, take water-cooled drum out of coating chamber by target car to carry out safeguarding or changing, fast easy to maintenance, do not affect cleanliness factor and the vacuum tightness of other vacuum chamber yet.Wherein, target car and guide rail can adopt existing general target car and guide rail.
When above-mentioned multiple roll multicell coil film coating apparatus uses, its principle is: after the room of unreeling releases winding base material, coating chamber is entered by vacuum lock, first carry out ion processing through front ion processing mechanism, then a water-cooled drum place in coating chamber carries out a plated film, enter the plated film that another water-cooled drum place carries out another side again, after finally carrying out ion processing by rear ion processing mechanism, send into rolling room and carry out rolling.
Embodiment 2
A kind of multiple roll multicell of the present embodiment coil film coating apparatus, as shown in Figure 5, compared with embodiment 1, its difference is its structure: coating chamber has two, is respectively the first filming room and the second coating chamber; Two water-cooled drums of the first filming indoor are water-cooled drum and first time water-cooled drum on first, and on first, the left side of water-cooled drum is distributed with three sputtering targets, and the right side of first time water-cooled drum is distributed with three sputtering targets; Two water-cooled drums in second coating chamber are water-cooled drum and second time water-cooled drum on second, and on second, the right side of water-cooled drum is distributed with three sputtering targets, and the left side of second time water-cooled drum is distributed with three sputtering targets.
When this multiple roll multicell coil film coating apparatus uses, its principle is: after the room of unreeling releases winding base material, coating chamber is entered by vacuum lock, first carry out ion processing through front ion processing mechanism, then a water-cooled drum place in coating chamber carries out a plated film, then enters the plated film that another water-cooled drum place carries out another side, and winding base material is successively by carrying out plated film in each coating chamber, after finally carrying out ion processing by rear ion processing mechanism, send into rolling room and carry out rolling.
Embodiment 3
A kind of multiple roll multicell of the present embodiment coil film coating apparatus, as shown in Figure 6, compared with embodiment 1, its difference is its structure: coating chamber has two, is respectively the first filming room and the second coating chamber; Two water-cooled drums of the first filming indoor are water-cooled drum and first time water-cooled drum on first, and on first, the left side of water-cooled drum is distributed with two sputtering targets, and the right side of first time water-cooled drum is distributed with two sputtering targets; Two water-cooled drums in second coating chamber are water-cooled drum and second time water-cooled drum on second, and on second, the right side of water-cooled drum is distributed with two sputtering targets, and the left side of second time water-cooled drum is distributed with two sputtering targets.
When this multiple roll multicell coil film coating apparatus uses, its principle is: after the room of unreeling releases winding base material, coating chamber is entered by vacuum lock, first carry out ion processing through front ion processing mechanism, then a water-cooled drum place in coating chamber carries out a plated film, then enters the plated film that another water-cooled drum place carries out another side, and winding base material is successively by carrying out plated film in each coating chamber, after finally carrying out ion processing by rear ion processing mechanism, send into rolling room and carry out rolling.
Embodiment 4
A kind of multiple roll multicell of the present embodiment coil film coating apparatus, as shown in Figure 7, compared with embodiment 1, its difference is its structure: coating chamber has four, is respectively the first filming room, the second coating chamber, the 3rd coating chamber and the 4th coating chamber; Two water-cooled drums of the first filming indoor are water-cooled drum and first time water-cooled drum on first, and on first, the left side of water-cooled drum is distributed with three sputtering targets, and the right side of first time water-cooled drum is distributed with three sputtering targets; Two water-cooled drums in second coating chamber are water-cooled drum and second time water-cooled drum on second, and on second, the right side of water-cooled drum is distributed with three sputtering targets, and the left side of second time water-cooled drum is distributed with three sputtering targets; Two water-cooled drums in 3rd coating chamber are water-cooled drum and the 3rd time water-cooled drum on the 3rd, and on the 3rd, the left side of water-cooled drum is distributed with three sputtering targets, and the right side of the 3rd time water-cooled drum is distributed with three sputtering targets; Two water-cooled drums in 4th coating chamber are water-cooled drum and the 4th time water-cooled drum on the 4th, and on the 4th, the right side of water-cooled drum is distributed with three sputtering targets, and the left side of the 4th time water-cooled drum is distributed with three sputtering targets.
When this multiple roll multicell coil film coating apparatus uses, its principle is: after the room of unreeling releases winding base material, coating chamber is entered by vacuum lock, first carry out ion processing through front ion processing mechanism, then a water-cooled drum place in coating chamber carries out a plated film, then enters the plated film that another water-cooled drum place carries out another side, and winding base material is successively by carrying out plated film in each coating chamber, after finally carrying out ion processing by rear ion processing mechanism, send into rolling room and carry out rolling.
Embodiment 5
A kind of multiple roll multicell of the present embodiment coil film coating apparatus, as shown in Figure 8, compared with embodiment 1, its difference is its structure: coating chamber has four, is respectively the first filming room, the second coating chamber, the 3rd coating chamber and the 4th coating chamber; Two water-cooled drums of the first filming indoor are water-cooled drum and first time water-cooled drum on first, and on first, the left side of water-cooled drum is distributed with two sputtering targets, and the right side of first time water-cooled drum is distributed with two sputtering targets; Two water-cooled drums in second coating chamber are water-cooled drum and second time water-cooled drum on second, and on second, the right side of water-cooled drum is distributed with two sputtering targets, and the left side of second time water-cooled drum is distributed with two sputtering targets; Two water-cooled drums in 3rd coating chamber are water-cooled drum and the 3rd time water-cooled drum on the 3rd, and on the 3rd, the left side of water-cooled drum is distributed with two sputtering targets, and the right side of the 3rd time water-cooled drum is distributed with two sputtering targets; Two water-cooled drums in 4th coating chamber are water-cooled drum and the 4th time water-cooled drum on the 4th, and on the 4th, the right side of water-cooled drum is distributed with two sputtering targets, and the left side of the 4th time water-cooled drum is distributed with two sputtering targets.
When this multiple roll multicell coil film coating apparatus uses, its principle is: after the room of unreeling releases winding base material, coating chamber is entered by vacuum lock, first carry out ion processing through front ion processing mechanism, then a water-cooled drum place in coating chamber carries out a plated film, then enters the plated film that another water-cooled drum place carries out another side, and winding base material is successively by carrying out plated film in each coating chamber, after finally carrying out ion processing by rear ion processing mechanism, send into rolling room and carry out rolling.
Embodiment 6
A kind of multiple roll multicell of the present embodiment coil film coating apparatus, as shown in Figure 9, compared with embodiment 1, its difference is its structure: coating chamber has two, is respectively the first filming room and the second coating chamber; Four water-cooled drums are had in each coating chamber; Four water-cooleds drum of the first filming indoor is followed successively by water-cooled drum and second time water-cooled drum on water-cooled drum on first, first time water-cooled drum, second from top to bottom, on first, on water-cooled drum, second, the left side of water-cooled drum is distributed with two sputtering targets, and the right side of first time water-cooled drum, second time water-cooled drum is distributed with two sputtering targets; Four water-cooleds drum in second coating chamber is followed successively by water-cooled drum and the 4th time water-cooled drum on water-cooled drum on the 3rd, second time water-cooled drum, the 4th from top to bottom, on 3rd, on water-cooled drum, the 4th, the right side of water-cooled drum is distributed with two sputtering targets, and the left side of the 3rd time water-cooled drum, the 4th time water-cooled drum is distributed with two sputtering targets.
As mentioned above, just can realize the present invention preferably, above-described embodiment is only preferred embodiment of the present invention, is not used for limiting practical range of the present invention; Namely all equalizations done according to content of the present invention change and modify, all by the claims in the present invention scope required for protection is contained.
Claims (10)
1. multiple roll multicell coil film coating apparatus, it is characterized in that, comprise multiple separate vacuum chamber, multiple vacuum chamber comprises and unreels room, rolling room and at least one coating chamber, unreel the both sides that room and rolling room are located at coating chamber respectively, between any two adjacent vacuum chambers, be provided with vacuum lock; The multiple water-cooled drums in distributing up and down are provided with in coating chamber, the side of each water-cooled drum is at least distributed with two sputtering targets, each sputtering target periphery is provided with target cover, is provided with the gap passed through for the base material that reels, forms independently sputtering chamber in each target cover bottom target cover and between water-cooled drum surface.
2. multiple roll multicell coil film coating apparatus according to claim 1, it is characterized in that, two water-cooled drums are provided with in described coating chamber, the sputtering target in two water-cooled drum outsides is distributed in the both sides of two water-cooled drum center lines, and the sputtering target being positioned at same water-cooled drum outside is distributed in the same side of two water-cooled drum center lines, winding base material carries out double-sided coating on two water-cooled drums.
3. multiple roll multicell coil film coating apparatus according to claim 2, it is characterized in that, described coating chamber has one, and two water-cooled drums in coating chamber are upper water-cooled drum and lower water-cooled drum, the left side of upper water-cooled drum is distributed with three sputtering targets, and the right side of lower water-cooled drum is distributed with three sputtering targets.
4. multiple roll multicell coil film coating apparatus according to claim 2, it is characterized in that, described coating chamber has two, is respectively the first filming room and the second coating chamber; Two water-cooled drums of the first filming indoor are water-cooled drum and first time water-cooled drum on first, and on first, the left side of water-cooled drum is distributed with two sputtering targets, and the right side of first time water-cooled drum is distributed with two sputtering targets; Two water-cooled drums in second coating chamber are water-cooled drum and second time water-cooled drum on second, and on second, the right side of water-cooled drum is distributed with two sputtering targets, and the left side of second time water-cooled drum is distributed with two sputtering targets.
5. multiple roll multicell coil film coating apparatus according to claim 1, is characterized in that, described target cover is the hollow housing structure of bottom opening, and sputtering target is located in the middle part of target cover, and target cover side is provided with bleeding point.
6. multiple roll multicell coil film coating apparatus according to claim 1, is characterized in that, described vacuum lock comprises valve seat, valve gap and valve gap driving mechanism, and valve gap is located at above valve seat, and valve gap top is connected with valve gap driving mechanism; Valve seat is provided with the inclined via-hole passed through for winding base material, and inclined via-hole is communicated with the feed port on vacuum chamber sidewall.
7. multiple roll multicell coil film coating apparatus according to claim 6, it is characterized in that, on described valve seat, the entrance end of inclined via-hole is positioned on the end face of valve seat, the exit end of inclined via-hole is positioned on the sidewall of valve seat, and exit end is connected with the feed port on vacuum chamber sidewall; The bottom surface of valve gap is plane, and the end face of valve seat is also plane, and the sidewall of valve seat is fixedly connected with vacuum chamber sidewall; When vacuum lock is in closing condition, the bottom surface of valve gap and the end face close proximity of valve seat, and valve gap bottom surface is covered on the entrance end of inclined via-hole.
8. multiple roll multicell coil film coating apparatus according to claim 6, it is characterized in that, described valve gap driving mechanism comprises cylinder and sealing socket, valve gap and valve seat are located in a vacuum chamber in adjacent two vacuum chambers, cylinder is fixed on the outer wall of this vacuum chamber by sealing socket, the end of cylinder stretches in vacuum chamber, and is fixedly connected with the end face of valve gap; Valve gap driving mechanism drives valve gap to rise or declines.
9. multiple roll multicell coil film coating apparatus according to claim 1, is characterized in that, in described coating chamber, is also provided with front ion processing mechanism with rolling room in the coating chamber connected, and front ion processing mechanism is located at the entrance end of multiple water-cooled drum; Also be provided with rear ion processing mechanism in the coating chamber connected with the room of unreeling, and rear ion processing mechanism is located at the exit end of multiple water-cooled drum.
10. multiple roll multicell coil film coating apparatus according to claim 1, it is characterized in that, outside described coating chamber, be also provided with target car, bottom target car, guide rail is set, two water-cooled drums are located on target car, and target car moves along guide rail and sent into or send coating chamber by two water-cooled drums.
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| CN108655115A (en) * | 2018-06-01 | 2018-10-16 | 江阴瑞兴科技有限公司 | A kind of continuous feeding/discharging type plasma cleaning equipment |
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| CN112877669A (en) * | 2021-01-11 | 2021-06-01 | 焦作嵩阳光电科技有限公司 | Coating machine is used in production of ITO conductive film |
| CN114182228A (en) * | 2021-09-29 | 2022-03-15 | 上海治臻新能源股份有限公司 | Roll-to-roll continuous deposition equipment for fuel cell bipolar plate coating |
| CN114481057A (en) * | 2022-02-23 | 2022-05-13 | 王振东 | Ultrathin film vacuum double-sided sputtering device |
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Effective date of registration: 20210826 Address after: 526000 No.2 of West 8 card of Tailong Packaging Machinery Co., Ltd., Sanrong Industrial Development Zone, Zhaoqing City, Guangdong Province Patentee after: GUANGDONG TENGSHENG TECHNOLOGY INNOVATION Co.,Ltd. Address before: 526060 binri industrial village, Duanzhou 1st Road, Zhaoqing City, Guangdong Province Patentee before: GUANGDONG TENGSHENG VACUUM TECHNOLOGY ENGINEERING Co.,Ltd. |