CN108655115A - A kind of continuous feeding/discharging type plasma cleaning equipment - Google Patents
A kind of continuous feeding/discharging type plasma cleaning equipment Download PDFInfo
- Publication number
- CN108655115A CN108655115A CN201810558294.8A CN201810558294A CN108655115A CN 108655115 A CN108655115 A CN 108655115A CN 201810558294 A CN201810558294 A CN 201810558294A CN 108655115 A CN108655115 A CN 108655115A
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- Prior art keywords
- vacuum
- coiled material
- plasma cleaning
- self
- locking
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- 238000004140 cleaning Methods 0.000 title claims abstract description 58
- 238000007599 discharging Methods 0.000 title claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 70
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- 238000004804 winding Methods 0.000 claims abstract description 8
- 238000007789 sealing Methods 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000005406 washing Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
Abstract
The present invention relates to a kind of continuous feeding/discharging type plasma cleaning equipments, including one or more plasma cleaning mechanism, with the self-locking vacuum feed machine and self-locking Vacuum discharge machine for being correspondingly arranged at plasma cleaning mechanism front and back, self-locking vacuum feed machine constitutes charging vacuum block to winding, self-locking Vacuum discharge machine constitutes discharging vacuum block to winding, plasma cleaning mechanism has vacuum cleaned storehouse, coiled material weave in and out in vacuum cleaned storehouse, while the electrode brightness in vacuum cleaned storehouse sends out plasma and is cleaned to coiled material surface.It can realize coiled material continuous plasma washing and cleaning operation under vacuum, vacuum degree is high, and speed of production is fast.
Description
Technical field
The present invention relates to a kind of cleaning equipments, are specifically related to a kind of plasma cleaning equipment.
Background technology
Plasma cleaner, as cleansing medium, is efficiently avoided because of liquid rinse medium pair using vacuum plasma
The secondary pollution that cleaned material is brought and the influence to environment.The external vacuum pump of plasma cleaner, when work, clean chamber
In plasma softly impact the surface of cleaned material, the cleaning of short time just can be such that organic pollution is thoroughly washed
Fall, while pollutant condenses collection again by vacuum pumped, degree of cleaning reaches molecular level.Plasma cleaning device is in addition to having
Outside super cleaning function, it can also change the performance of certain material surfaces as needed under given conditions, action of plasma is in material
Expect surface, so that the chemical bond of surface molecular is recombinated, form new surface characteristic.To certain materials for having specific use,
The glow discharge of the medium ion cleaning device of cleaning process not only strengthens the adhesiveness, compatibility and wellability of these materials, and
It can sterilize and sterilize.Plasma cleaning device is widely used in optics, photoelectronics, electronics, material science, life science, height
The fields such as molecular science, biomedicine, microfluid.
Conventional plasma cleaning is completed in closed vacuum chamber, is limited by vacuum chamber, the size of cleaning object by
To limitation, object unit can only be carried out and cleaned by batch, and cannot achieve continuous wash.One of condition of continuous wash is to connect
Continuous charging, and the presence in continuous feed channel can not necessarily ensure the vacuum degree of clean vacuum chambers；In addition, during continuous wash
Material is constantly walked, and short in the vacuum indoor residence time, cleaning performance can not ensure.The factor of front two limits
Ion technology is cleaned applied to coiled material.
Invention content
The technical problem to be solved by the present invention is to provide for the above-mentioned prior art a kind of on-line continuous vacuum it is equal from
Sub- cleaning equipment realizes the continuous feeding and discharging cleaning of cleaning object, is imitated while improving cleaning efficiency and with preferable cleaning
Fruit.
Technical solution is used by the present invention solves the above problems：A kind of continuous feeding/discharging type plasma cleaning equipment,
Including one or more plasma cleaning mechanism, and it is correspondingly arranged at the self-locking vacuum feed of plasma cleaning mechanism front and back
Machine and self-locking Vacuum discharge machine, self-locking vacuum feed machine constitute charging vacuum block, self-locking Vacuum discharge machine to winding
Discharging vacuum block is constituted to winding, plasma cleaning mechanism has vacuum cleaned storehouse, and coiled material is in vacuum cleaned storehouse before complications
Row, while the electrode brightness in vacuum cleaned storehouse sends out plasma and is cleaned to coiled material surface.
Preferably, several slewing rollers are provided in the vacuum cleaned storehouse, several slewing rollers rule arrangements, coiled material enters true
Slewing rollers are bypassed in empty cleaning storehouse successively and form tortuous stroke in vacuum cleaned storehouse, to increase coiled material in vacuum cleaned storehouse
Interior walks to expect the time, improves the cleaning performance of coiled material.
Specifically, several slewing rollers are divided into positioned opposite two groups, and slewing rollers are close to vacuum cleaned storehouse inner wall, coiled material
It is walked successively between two groups of slewing rollers, for electrode arrangement in the walking gap of coiled material, the walking gap refers to because around scroll
At adjacent two sections of coiled materials between gap.Raising cleaning performance is not only facilitated, eliminates the dead ends of cleanning, and can be to coiled material
Positive and negative effectively cleared up.
The vacuum cleaned storehouse is that the cylindrical shape of accumbency is designed to that cylindrical shape can improve vacuum for vacuum chamber
The intensity of room, and reduce equipment production material.
Good for the ease of being connected between plasma cleaning mechanism and between charging, discharging equipment, the vacuum is clear
It brings down stocks and is provided at both ends with feed pipe and discharge nozzle, sequentially connected by feed pipe and discharge nozzle between adjacent plasma wiper mechanism
It is logical.Also corresponding in connecting tube after connection is vacuum state
In order to ensure the vacuum degree in vacuum cleaned storehouse, the fluctuation of vacuum degree is reduced, the application is to self-locking vacuum feed
The structure of machine and self-locking Vacuum discharge machine is designed, and vacuum block is carried out at plasma cleaning mechanism both ends.Structure is such as
Under
Self-locking vacuum feed machine and self-locking Vacuum discharge machine include respectively vacuum chamber, and coiled material is straight to pass through vacuum
Room is provided with several closing rollers and hold-down roller in vacuum chamber, and closing roller is arranged in the both sides of coiled material and compresses coiled material in pairs,
The walking speed of the linear velocity and coiled material of closing roller roll surface is consistent, and the adjacent two closings roller positioned at coiled material the same side does not contact；Together
A hold-down roller is arranged in two adjacent closing roller peripheries of side, and hold-down roller is pushed against with two closing rollers respectively, opposite symmetrical two groups of coiled material
What hold-down roller and its two closing rollers of abutting were surrounded walks to expect to be provided with vacuum pumping opening in vacuum chamber, to pass through to coiled material
Dynamic walk the micro air brought into of material space and extract out in time.To walk to expect that gap forms multistage pump drainage to realize pair to coiled material
The vacuum of coiled material input and output material is blocked.
Preferably, driving equipment, the power output end and hold-down roller of driving equipment are provided on the shell of the vacuum chamber
Contact, and hold-down roller is equipped with wear-resistant seal press strip with vacuum chamber housing inner wall and forms sealing, allows hold-down roller to hold out against always and connects therewith
Tactile (two) close roller, which may be selected oil cylinder, cylinder.
The vacuum chamber has feed pipe and discharge nozzle, and vacuum chamber isolates the discharge chamber of perforation discharge nozzle and perforation is fed
The feed space of pipe, the discharge chamber and feed space are not connected to independently of each other, to realize the discharge chamber of self-locking vacuum feed machine
Vacuum is kept with the feed space of self-locking Vacuum discharge machine, and the feed space of self-locking vacuum feed machine and self-locking vacuum go out
Whether the discharge chamber of material machine is that influence of the vacuum chamber to the application is little.
Further, the vacuum chamber is that the cylindrical shape of accumbency is designed to that cylindrical shape can improve for vacuum chamber
The time that the bearing capacity of equipment and shortening vacuumize.
Preferably, the center of circle of several hold-down rollers is located on same circumference, the center of circle also position with the closing roller of hold-down roller cooperation
In on same circumference, to allow vacuumize charging and discharging machine in topology layout it is compacter rationally.
Compared with the prior art, the advantages of the present invention are as follows：A kind of plasma cleaning equipment is provided, is especially suitable for flexible
The good material continuous wash of property, cleaning performance are ensured.Vacuum degree in vacuum cleaned storehouse when solving continuous feed simultaneously
The technical barrier of fluctuation, since the application will realize continuous feed, the fluctuation vacuum in the faster vacuum cleaned storehouse of charging rate is more
Greatly, the power requirement higher vacuumized, vacuum degree be difficult to ensure, what in addition the application designed vacuumize, and feeding-discharging machine realizes pair
Continuous feed both ends carry out vacuum block, ensure the vacuum degree in intermediate plasma cleaner vacuum warehouse.
Description of the drawings
Fig. 1 is the schematic diagram of plasma cleaning equipment in the embodiment of the present invention；
Fig. 2 is the vertical view of structure shown in Fig. 1；
Fig. 3 is the schematic diagram that feed space is vacuumized in the embodiment of the present invention；.
Specific implementation mode
Below in conjunction with attached drawing embodiment, present invention is further described in detail.
The present embodiment is related to a kind of plasma cleaning equipment, is applied to coiled material and cleans field, can realize the continuous of coiled material
Plasma cleaning.Feedstock direction according to coiled material includes self-locking vacuum feed machine 1, Liang Tai (or more) plasma cleaning successively
Mechanism 2 and self-locking Vacuum discharge machine 3, self-locking vacuum feed machine 1 constitute charging vacuum block to winding, and self-locking vacuum goes out
Material machine 3 to winding constitute discharging vacuum block, coiled material carried out successively in Liang Tai (or more) plasma cleaning mechanism twice (or
Repeatedly) plasma cleaning works.
It is to be realized by vacuum pump, and vacuum pump is in this application without special designing that the application, which vacuumizes, in specification
It is not shown specifically in attached drawing, those of ordinary skill in the art can be clearly understood from the overall structure of the application according to description.
Plasma cleaning mechanism 2 has the cylindrical shape vacuum cleaned storehouse A1 of accumbency, while by vacuum pump to vacuum cleaned
Storehouse A1 is vacuumized, and several slewing rollers 201 are provided in the A1 of vacuum cleaned storehouse, and several slewing rollers 201 are divided into positioned opposite
Two groups, slewing rollers are arranged close to vacuum cleaned storehouse inner wall rule, into the coiled material in the A1 of vacuum cleaned storehouse in upper and lower two groups of steerings
It is walked successively between roller 201, electrode 202 is arranged in the walking gap of coiled material, and electrode brightness sends out plasma to coiled material surface
Cleaning.The walking gap refers to because of the gap between adjacent two sections of coiled materials that coiling is formed.Coiled material has in vacuum cleaned storehouse
Longer running stroke.
As shown in Figure 1, vacuum cleaned storehouse A1 is provided at both ends with feed pipe and discharge nozzle, between adjacent plasma wiper mechanism
It is sequentially connected to discharge nozzle by feed pipe, is also in vacuum state in feed pipe and discharge nozzle.
Self-locking vacuum feed machine 1 and self-locking Vacuum discharge machine 3 include respectively vacuum chamber A2, and coiled material is straight to be passed through very
Several closing rollers 4 and hold-down roller 5 are provided in empty room A2, vacuum chamber A2, closing roller 4 is arranged in the both sides of coiled material simultaneously in pairs
Coiled material is compressed, the walking speed of the linear velocity and coiled material of closing 4 roll surface of roller is consistent, and is located at the adjacent two closings roller of coiled material the same side
It does not contact；Hold-down roller 5 is arranged in two adjacent closing roller peripheries of homonymy, and hold-down roller 5 is pushed against with two closing rollers respectively, opposite coiled material pair
What two closing rollers of the two groups of hold-down rollers and its abutting that claim were surrounded walks to expect to be provided with vacuum pumping opening 8 in vacuum chamber A3, from
And the material space of walking that coiled material is passed through is carried out vacuumizing realization vacuum block in time.
As shown in figure 3, the vacuum chamber A2 for vacuumizing charging and discharging machine in the present embodiment is the cylindrical shape of accumbency, interior is altogether
Three groups of closing rollers 4 and four hold-down rollers 5 are set, and the center of circle of hold-down roller is located on same circumference, and the center of circle of closing roller 4 also is located at together
On one circumference.Meanwhile driving equipment (cylinder) is provided on the shell of vacuum chamber A2, telescopic shaft spindle nose and the hold-down roller 5 of cylinder
Contact allows hold-down roller 5 to hold out against the two closing rollers contacted always, while spindle nose is equipped with compensating wear-resistant sealing strip 9 and horizontal pressing plate
10, to make to form sealing between hold-down roller 5 and the inner wall of vacuum chamber A2 shells.
The vacuum chamber for vacuumizing charging and discharging machine (1,3) has feed pipe 6 and discharge nozzle 7, and vacuum chamber is by being arranged in it
Closing roller 4 and hold-down roller 5 isolate perforation discharge nozzle 6 discharge chamber a and perforation feed pipe 7 feed space b, discharge chamber a and into
Material room b is not connected to independently of each other.Feed space b for self-locking vacuum feed machine 1 is not vacuum chamber, and discharge chamber a is vacuum chamber；
Feed space b for self-locking Vacuum discharge machine 3 is vacuum chamber, and discharge chamber a is not vacuum chamber.
And to realize said program, it is necessary to ensure the leakproofness between hold-down roller 5 and vacuum chamber housing inner wall.
Coiled material is introduced into self-locking vacuum feed machine in the present embodiment, the forvacuum in self-locking vacuum feed machine, so
After sequentially enter plasma cleaning mechanism, in vacuum cleaned storehouse, A1 convolutions are advanced, and coiled material positive and negative receives plasma cleaning, finally
It is sent out again via self-locking Vacuum discharge machine, completes entire cleaning process.
The feeding-discharging machine that vacuumizes of the application provides vacuum guarantee for plasma continuous wash.
In addition to the implementation, all to use equivalent transformation or equivalent replacement the invention also includes there is an other embodiment
The technical solution that mode is formed should all be fallen within the scope of the hereto appended claims.
Claims (10)
1. a kind of continuous feeding/discharging type plasma cleaning equipment, it is characterised in that：Including one or more plasma cleaning mechanism,
It is true with the self-locking vacuum feed machine and self-locking Vacuum discharge machine, self-locking that are correspondingly arranged at plasma cleaning mechanism front and back
Empty charger constitutes charging vacuum block to winding, and self-locking Vacuum discharge machine constitutes discharging vacuum block, plasma to winding
Wiper mechanism has vacuum cleaned storehouse, coiled material weave in and out in vacuum cleaned storehouse, while the electrode brightness hair in vacuum cleaned storehouse
Go out plasma to clean coiled material surface.
2. plasma cleaning equipment according to claim 1, it is characterised in that：It is provided in the vacuum cleaned storehouse several
Slewing rollers, several slewing rollers rule arrangements, coiled material enters bypasses slewing rollers shape in vacuum cleaned storehouse successively in vacuum cleaned storehouse
At tortuous stroke.
3. plasma cleaning equipment according to claim 2, it is characterised in that：Several slewing rollers are divided into positioned opposite
Two groups, slewing rollers are walked close to vacuum cleaned storehouse inner wall, coiled material between two groups of slewing rollers successively, and electrode arrangement is in coiled material
It walks in gap, the walking gap refers to because of the gap between the adjacent two benches coiled material that coiling is formed.
4. plasma cleaning equipment according to claim 1, it is characterised in that：The vacuum cleaned storehouse is the cylinder of accumbency
Shape.
5. plasma cleaning equipment according to claim 1, it is characterised in that：The vacuum cleaned storehouse be provided at both ends with into
Expects pipe and discharge nozzle are sequentially connected to by feed pipe with discharge nozzle between adjacent plasma wiper mechanism.
6. plasma cleaning equipment according to claim 1, it is characterised in that：The self-locking vacuum feed machine and self-locking
Formula Vacuum discharge machine includes respectively vacuum chamber, and coiled material is straight to pass through vacuum chamber, and several closing rollers and pressure are provided in vacuum chamber
Tight roller, closing roller are arranged in the both sides of coiled material and compress coiled material in pairs, close the walking speed of the linear velocity and coiled material of roller roll surface
It is consistent, the adjacent two closings roller positioned at coiled material the same side does not contact；Two adjacent closing roller periphery settings one of homonymy compress
Roller, hold-down roller are pushed against with two closing rollers respectively, and two closing rollers of the opposite symmetrical two groups of hold-down rollers of coiled material and its abutting are enclosed
At walk to expect to be provided with vacuum pumping opening in vacuum chamber, to coiled material pass through walking material space carry out vacuumizing realization in time it is true
Sky block.
7. plasma cleaning equipment according to claim 6, it is characterised in that：Drive is provided on the shell of the vacuum chamber
Dynamic equipment, the power output end of driving equipment are contacted with hold-down roller, allow hold-down roller to hold out against the closing roller contacted always, simultaneously
Sealing should be constituted between hold-down roller and the outer casing inner wall of vacuum chamber.
8. plasma cleaning equipment according to claim 6, it is characterised in that：The vacuum chamber has feed pipe and discharging
Pipe, vacuum chamber isolate the feed space of the discharge chamber and perforation feed pipe of perforation discharge nozzle, and the discharge chamber and feed space are mutual
It is independent not to be connected to, to realize that the discharge chamber of self-locking vacuum feed machine and the feed space of self-locking Vacuum discharge machine keep true
It is empty.
9. plasma cleaning equipment according to claim 6, it is characterised in that：The vacuum chamber is the cylindrical shape of accumbency.
10. plasma cleaning equipment according to claim 9, it is characterised in that：The center of circle of several hold-down rollers is located at same
On circumference, it also is located on same circumference with the center of circle of the closing roller of hold-down roller cooperation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810558294.8A CN108655115A (en) | 2018-06-01 | 2018-06-01 | A kind of continuous feeding/discharging type plasma cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810558294.8A CN108655115A (en) | 2018-06-01 | 2018-06-01 | A kind of continuous feeding/discharging type plasma cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108655115A true CN108655115A (en) | 2018-10-16 |
Family
ID=63775166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810558294.8A Pending CN108655115A (en) | 2018-06-01 | 2018-06-01 | A kind of continuous feeding/discharging type plasma cleaning equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN108655115A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110005820A (en) * | 2019-03-14 | 2019-07-12 | 江阴瑞兴科技有限公司 | A kind of satellite-type vacuum lock continuous feeding and discharging device |
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