CN108649007A - Flexible solar battery window layer production equipment - Google Patents
Flexible solar battery window layer production equipment Download PDFInfo
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- CN108649007A CN108649007A CN201810615108.XA CN201810615108A CN108649007A CN 108649007 A CN108649007 A CN 108649007A CN 201810615108 A CN201810615108 A CN 201810615108A CN 108649007 A CN108649007 A CN 108649007A
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- solar battery
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- flexible solar
- roll
- window layer
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 37
- 239000010949 copper Substances 0.000 claims abstract description 37
- 229910052802 copper Inorganic materials 0.000 claims abstract description 37
- 238000004544 sputter deposition Methods 0.000 claims abstract description 24
- 238000001816 cooling Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 20
- 238000005192 partition Methods 0.000 claims abstract description 10
- 238000004804 winding Methods 0.000 claims abstract description 7
- 239000002245 particle Substances 0.000 claims abstract description 5
- 239000010410 layer Substances 0.000 claims description 42
- 238000012546 transfer Methods 0.000 claims description 15
- 238000009826 distribution Methods 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 4
- 239000011229 interlayer Substances 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 1
- 238000004321 preservation Methods 0.000 claims 1
- 238000012864 cross contamination Methods 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of flexible solar battery Window layer production equipments.The flexible solar battery Window layer production equipment is isolated using copper cover, each sputtering of materials room is independently arranged in copper cover, when it can be allowed to use different materials sputter coating in this way, the cross contamination that storeroom will not be caused mutual, realize disposable a variety of different materials sputter coatings simultaneously, let off roll and wind-up roll are set in upper layer by partition board simultaneously, copper cover A and cooling shaft are set in middle level, multiple copper cover B are set in lower layer, three pieces separate, in preferably control cavity layer while temperature sputter coating, further prevent material cross contamination, the particle that steam is brought into when preventing flexible solar battery from winding off volume simultaneously enters sputter coating region.
Description
Technical field
The present invention relates to technical field of solar batteries more particularly to a kind of production of flexible solar battery Window layer to set
It is standby.
Background technology
With the shortage of global warming, the deterioration of the ecological environment and conventional energy resource, it is sustainable that solar energy has become various countries
The grand strategy decision of development.Solar cell is exactly a kind of device converting solar energy into electric energy, is had more than electric energy, wind
The energy of the resources such as energy, and promise to be the mainstay of future electrical energy industry.Wherein, flexible solar battery is even more and has
Vast market prospect.
Flexible solar battery is mainly made of Window layer, buffer layer, absorbed layer, back electrode and substrate.Flexible solar
It needs to carry out sputtering of materials plated film, existing flexible solar battery window on flexible solar battery volume when battery Window layer produces
The production of mouth layer is using one sputtering, the use material identical integrally sputtered, selective few, can not realize that different materials sputter simultaneously
Plated film.Enter the temperature ring that the stage difference of sputtering of materials plated film needs by transfer passage in flexible solar battery volume simultaneously
Border is different.
Invention content
In order to solve the above technical problems, the present invention devises a kind of flexible solar battery Window layer production equipment.
The present invention adopts the following technical scheme that：
A kind of flexible solar battery Window layer production equipment, including cavity, be once provided in cavity let off roll, oil temperature drum,
Cooling shaft and wind-up roll are connected with live-roller, let off roll, live-roller, oil temperature between let off roll, oil temperature drum, cooling shaft and wind-up roll
Drum, cooling shaft and wind-up roll form transfer passage, and copper cover A and multiple copper cover B, copper cover A and multiple copper is distributed on transfer passage
It is respectively arranged with sputtering of materials room in cover B, multiple copper cover B are provided with vacuum system in oil temperature drum distribution, cavity, in cavity
The upper, middle and lower are isolated by partition board, three interlayers only stay the delivery port of transfer passage, let off roll and wind-up roll to be set to
In upper layer, copper cover A and cooling shaft are set in middle level, and multiple copper cover B are set in lower layer.
Preferably, the vacuum system includes roughing vacuum pump group, molecular pump, fore pump and cold pump.
Preferably, being connected to recirculated cooling water pipeline in the cooling shaft, circulating hot oil pipeline is connected in oil temperature drum.
Preferably, being provided with infrared heat lamp in the cavity.
Preferably, being provided with jockey pulley and deviation-rectifying system on the transfer passage.
Preferably, installation settings has camera in the cavity.
Preferably, the let off roll and wind-up roll are fixedly connected with synchronous motor.
Preferably, the partition board is thermal insulation board.
Preferably, the cavity is communicated with gas distribution equipment, gas distribution equipment is connected to cavity by pipeline, is connected on pipeline
Have a flowmeter, cavity is communicated with gas mixing input unit, gas mixing input unit by gas to carry out gas content real
When monitor.
Preferably, square resistance monitoring is provided in the cavity at transfer passage and opens pressure monitoring.
Compared with prior art, the advantageous effect of the flexible solar battery Window layer production equipment is：
1, it is isolated using copper cover, each sputtering of materials room is independently arranged in copper cover, it can be allowed to use so different
When sputtering of materials plated film, the cross contamination that storeroom will not be caused mutual realizes that disposable a variety of different materials splash simultaneously
Penetrate plated film；
2 while let off roll and wind-up roll being set in upper layer by partition board, copper cover A and cooling shaft are set in middle level, multiple
Copper cover B is set in lower layer, and three pieces separate, and in preferably control cavity layer while temperature sputter coating, is further prevented
Material cross contamination, while the particle that steam is brought into when preventing flexible solar battery from winding off volume enters sputter coating region；
3, it is vacuumized using multistage, extracts the particle of water vapor adsorption out when vacuumizing, ensure the cleaning of cavity；
4, the production temperature of solar panel substrate is ensured to 50-200 DEG C of the oil temperature drum heating of volume synchronous operation in production process
Degree is consistent, by contacting cooling shaft after the completion of production sputtering（20-25 DEG C of recirculated cooling water）Surface is quickly cooled down；
5, infrared heat lamp heating temperature is controlled between 100-300 DEG C, by the temperature feedback of thermocouple, control is infrared to be added
The output power of thermolamp, the steam adsorbed in the solar panel substrate before process for producing；
6, together by tension and deviation-rectifying system combination, ensure the smooth of volume face or so, the bending because of volume is prevented to be manufactured into wound membrane layer
Damage；
7, by the installation of camera, the condition of production in real-time feedback cavity body, the position of retractable volume and volume surface appearance；
8, by the way that different parameters is arranged, it is arranged according to the automatic quick closing valve of flowmeter, the gas supply of real-time control gas distribution equipment, Ke Yitong
When mixing multiple gases such as hydrogen, oxygen, argon gas, Krypton wait until inside cavity；
9, increase square resistance monitoring and simulated solar illumination, to open pressure monitoring, then by PLC control system in equipment
Real-time Feedback understands the situation of battery winding in time.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of the present invention；
In figure：1, cavity, 2, let off roll, 3, wind-up roll, 4, live-roller, 5, jockey pulley, 6, deviation-rectifying system, 7, infrared heat lamp,
8, oil temperature is roused, and 9, cooling shaft, 10, copper cover A, 11, copper cover B, 12, molecular pump, 13, cold pump, 14, fore pump, 15, roughing vacuum pump group,
16, upper layer, 17, middle level, 18, lower layer, 19, partition board.
Specific implementation mode
Below by specific embodiment, and in conjunction with attached drawing, technical scheme of the present invention is further described：
Embodiment：As shown in Fig. 1, a kind of flexible solar battery Window layer production equipment, including cavity 1, it is primary in cavity
It is provided with let off roll 2, oil temperature drum 8, cooling shaft 9 and wind-up roll 3, biography is connected between let off roll, oil temperature drum, cooling shaft and wind-up roll
Dynamic roller 4, let off roll, live-roller, oil temperature drum, cooling shaft and wind-up roll form transfer passage, copper cover A10 are distributed on transfer passage
Be respectively arranged with sputtering of materials room in four copper cover B11, copper cover A and four copper cover B, four copper cover B around oil temperature drum distribution,
Vacuum system is provided on cavity, cavity is interior to be isolated into upper layer 16, middle level 17 and lower layer 18 by partition board 19, and three interlayers only stay defeated
The delivery port in channel, let off roll and wind-up roll is sent to be set in upper layer, copper cover A and cooling shaft are set in middle level, multiple copper cover B
It is set in lower layer, vacuum system includes roughing vacuum pump group 15, molecular pump 12, fore pump 14 and cold pump 13, is connected to and follows in cooling shaft
Ring cooling water pipeline is connected to circulating hot oil pipeline in oil temperature drum, is provided with infrared heat lamp 7 in the cavity, on transfer passage
It is provided with jockey pulley 5 and deviation-rectifying system 6, installation settings has camera in cavity.By the installation of camera, real-time feedback cavity
The internal condition of production, the position of retractable volume and volume surface appearance, let off roll and wind-up roll are fixedly connected with synchronous motor, partition board
For thermal insulation board, cavity is communicated with gas distribution equipment, and gas distribution equipment is connected to by pipeline with cavity, and flowmeter, chamber are connected on pipeline
Body is communicated with gas mixing input unit, gas mixing input unit by gas carry out gas content and monitor in real time, cavity
It is provided with square resistance monitoring at interior transfer passage and opens pressure monitoring.
The flexible solar battery Window layer production equipment is soft in use, flexible solar battery is rolled into unwinding roll
Property solar cell roll conveyed along transfer passage, the sputter coating of different materials is carried out by copper cover A and four copper cover B, through cold
But entire sputter coating is completed in axis rolling after cooling roller winding.The flexible solar battery Window layer production equipment uses copper cover
It is isolated, each sputtering of materials room is independently arranged in copper cover, when it can be allowed to use different materials sputter coating in this way,
The cross contamination that storeroom will not be caused mutual is realized disposable a variety of different materials sputter coatings simultaneously, is passed through simultaneously
Let off roll and wind-up roll are set in upper layer by partition board, and copper cover A and cooling shaft are set in middle level, and four copper cover B are set to down
In layer, three pieces separate, and in preferably control cavity layer while temperature sputter coating, further prevent material cross contamination,
The particle that steam is brought into when preventing flexible solar battery from winding off volume simultaneously enters sputter coating region.
Above-mentioned embodiment is only a preferred solution of the present invention, not the present invention is made in any form
Limitation, on the premise of not exceeding the technical scheme recorded in the claims also other variations and modifications.
Claims (10)
1. a kind of flexible solar battery Window layer production equipment, including cavity, characterized in that be once provided in the cavity
Let off roll, oil temperature drum, cooling shaft and wind-up roll are connected with live-roller between let off roll, oil temperature drum, cooling shaft and wind-up roll, unreel
Roller, live-roller, oil temperature drum, cooling shaft and wind-up roll form transfer passage, and copper cover A and multiple copper cover B is distributed on transfer passage,
Sputtering of materials room is respectively arranged in copper cover A and multiple copper cover B, multiple copper cover B are provided with true in oil temperature drum distribution, cavity
Empty set is united, and is isolated into the upper, middle and lower by partition board in cavity, three interlayers only stay the delivery port of transfer passage, let off roll
It is set in upper layer with wind-up roll, copper cover A and cooling shaft are set in middle level, and multiple copper cover B are set in lower layer.
2. flexible solar battery Window layer production equipment according to claim 1, characterized in that the vacuum system
Including roughing vacuum pump group, molecular pump, fore pump and cold pump, vacuumized using multistage, when vacuumizing by the particle of water vapor adsorption into
Row extraction, ensures the cleaning of cavity.
3. flexible solar battery Window layer production equipment according to claim 1, characterized in that connect in the cooling shaft
Logical recirculated cooling water pipeline, oil temperature drum is interior to be connected to circulating hot oil pipeline, adds to the oil temperature drum of volume synchronous operation in production process
Heat ensures that the production temperature of solar panel substrate is consistent, fast by contacting the progress of cooling shaft surface after the completion of production sputtering
The cooling of speed.
4. flexible solar battery Window layer production equipment according to claim 1, characterized in that in the cavity upper layer
It is provided with infrared heat lamp, by the temperature feedback of thermocouple, controls the output power of infrared heat lamp, before process for producing
The steam adsorbed in solar panel substrate.
5. flexible solar battery Window layer production equipment according to claim 1, characterized in that on the transfer passage
It is provided with jockey pulley and deviation-rectifying system, tension and deviation-rectifying system are combined together, ensure the smooth of volume face or so, is prevented because of volume
Bending be manufactured into the damage of wound membrane layer.
6. flexible solar battery Window layer production equipment according to claim 1, characterized in that installation in the cavity
It is provided with camera, by the installation of camera, the condition of production in real-time feedback cavity body, position and the volume table of retractable volume
Planar condition.
7. flexible solar battery Window layer production equipment according to claim 1, characterized in that the let off roll and receipts
Winding up roller is fixedly connected with synchronous motor.
8. flexible solar battery Window layer production equipment according to claim 1, characterized in that the partition board is heat preservation
Plate.
9. flexible solar battery Window layer production equipment according to claim 1, characterized in that the cavity is communicated with
Gas distribution equipment, gas distribution equipment are connected to by pipeline with cavity, and flowmeter is connected on pipeline, and cavity is communicated with gas mixing input
Device, gas mixing input unit by gas carry out gas content monitor in real time.
10. flexible solar battery Window layer production equipment according to claim 1, characterized in that defeated in the cavity
It send and is provided with square resistance monitoring at channel and opens pressure monitoring, increase square resistance monitoring and simulated solar illumination, to open pressure
Monitoring, then by the Real-time Feedback in PLC control system in equipment, the situation of battery winding is understood in time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810615108.XA CN108649007A (en) | 2018-06-14 | 2018-06-14 | Flexible solar battery window layer production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810615108.XA CN108649007A (en) | 2018-06-14 | 2018-06-14 | Flexible solar battery window layer production equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108649007A true CN108649007A (en) | 2018-10-12 |
Family
ID=63752602
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|---|---|---|---|
| CN201810615108.XA Pending CN108649007A (en) | 2018-06-14 | 2018-06-14 | Flexible solar battery window layer production equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110205601A (en) * | 2019-05-06 | 2019-09-06 | 铜陵市启动电子制造有限责任公司 | A kind of thin film capacitor processing metallic film evaporated device |
| CN112599643A (en) * | 2020-12-30 | 2021-04-02 | 尚越光电科技股份有限公司 | Open voltage and sheet resistance online monitoring system of TCO film coating machine |
| CN112626455A (en) * | 2020-12-17 | 2021-04-09 | 尚越光电科技股份有限公司 | Vacuum system for controlling reactive sputtering plume of flexible CIGS (copper indium gallium selenide) film |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102779944A (en) * | 2012-08-06 | 2012-11-14 | 上海电力学院 | Transparent conductive thin film and preparation method thereof |
| CN104651792A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate |
| CN204490985U (en) * | 2015-02-18 | 2015-07-22 | 南京汇金锦元光电材料有限公司 | Flexible transparent conductive film and preparation facilities thereof |
| CN204898063U (en) * | 2015-09-16 | 2015-12-23 | 中国工程物理研究院激光聚变研究中心 | Niobium sputter pump and vacuum system |
| CN106048546A (en) * | 2016-06-30 | 2016-10-26 | 肇庆市科润真空设备有限公司 | Compact type flexible substrate magneto-controlled sputter coating equipment and method |
| CN106684184A (en) * | 2017-01-04 | 2017-05-17 | 浙江尚越新能源开发有限公司 | Copper indium gallium selenide (CIGS) thin-film solar cell window layer and preparation method thereof |
| CN206279263U (en) * | 2016-12-30 | 2017-06-27 | 浙江尚越新能源开发有限公司 | A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating |
-
2018
- 2018-06-14 CN CN201810615108.XA patent/CN108649007A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102779944A (en) * | 2012-08-06 | 2012-11-14 | 上海电力学院 | Transparent conductive thin film and preparation method thereof |
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