CN216998566U

CN216998566U - Vacuum coating equipment

Info

Publication number: CN216998566U
Application number: CN202123390355.0U
Authority: CN
Inventors: 臧世伟
Original assignee: Chongqing Jinmei New Material Technology Co Ltd
Current assignee: Chongqing Jinmei New Material Technology Co Ltd
Priority date: 2021-12-29
Filing date: 2021-12-29
Publication date: 2022-07-19
Anticipated expiration: 2031-12-29

Abstract

The utility model discloses vacuum coating equipment which comprises a vacuum cavity and a film conveying device arranged in the vacuum cavity, wherein the film conveying device comprises an unwinding roller and a winding roller, the unwinding roller and the winding roller are respectively used for unwinding and winding a film, a magnetron sputtering device and an evaporation device are sequentially arranged on a film conveying path between the unwinding roller and the winding roller, and the magnetron sputtering device and the evaporation device are respectively used for coating the surface of the film. The magnetron sputtering coating and the evaporation coating can be carried out simultaneously without different equipment, thereby improving the production efficiency, reducing the production cost and ensuring the product quality.

Description

Vacuum coating equipment

Technical Field

The utility model relates to the technical field of production of conductive films, in particular to vacuum coating equipment.

Background

The conductive film is a film with a conductive function, strictly speaking, the conductive film is a composite film, the surface of the conductive film is a metal layer, and the interior of the conductive film is a polymer material layer, so that the conductive film has the advantages of light weight, good conductivity and the like. The production of the existing conductive film generally comprises the steps of firstly plating metal or metal oxide on the surface of the film in a magnetron sputtering coating mode for priming, so that the metal or metal oxide plated on the surface of the film is not easy to fall off from the film, and then plating a second layer of metal or metal oxide on the surface of the film in an evaporation coating mode, so that the production of the conductive film is finished. Generally, magnetron sputtering coating and evaporation coating are separately performed in different devices, after the magnetron sputtering coating is completed, a film needs to be taken out, and then another device is replaced for evaporation coating, so that the production cost is high, the production efficiency is low, and the surface of the film is easy to oxidize, thereby affecting the quality of products.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides the vacuum coating equipment, which improves the production efficiency, reduces the production cost and ensures the product quality.

The technical scheme adopted by the utility model for solving the technical problems is as follows:

the utility model provides a vacuum coating equipment, includes the vacuum chamber body, still including setting up film conveyor in the vacuum chamber body, film conveyor is including unreeling roller and wind-up roll, unreel roller and wind-up roll are used for unreeling, rolling the film respectively unreel and have set gradually magnetron sputtering device and evaporation plant on the film transport route between roller and the wind-up roll, magnetron sputtering device and evaporation plant are used for carrying out the coating film to the surface of film respectively.

As preferred technical scheme, film conveyor still includes nip roll, first steering roll and second steering roll, the nip roll is located unwind directly over the roll, unwind roll, nip roll are close to vacuum chamber's first inner wall respectively, first steering roll is close to vacuum chamber's second inner wall and is located nip roll's top, the second steering roll is located directly over first steering roll, the wind-up roll is parallel arrangement and the wind-up roll is located between nip roll and the second steering roll with the second steering roll.

As a preferred technical scheme, the film conveying device further comprises a first cooling roller and a second cooling roller, the second cooling roller is located under the first turning roller, a gap for the film to pass through is formed between the second cooling roller and the first turning roller, the first cooling roller is located between the flattening roller and the second cooling roller, and the first cooling roller is located above the flattening roller and is arranged in parallel with the second cooling roller.

According to a preferable technical scheme, the number of the magnetron sputtering devices is at least two, the two magnetron sputtering devices are respectively a lower magnetron sputtering device and an upper magnetron sputtering device, the lower magnetron sputtering device and the upper magnetron sputtering device are respectively positioned between the flattening roll and the first cooling roll, and the lower magnetron sputtering device and the upper magnetron sputtering device are respectively used for coating the A surface and the B surface of the film.

According to a preferable technical scheme, the number of the evaporation devices is at least two, the two evaporation devices are respectively a lower evaporation device and an upper evaporation device, the lower evaporation device is located between the first cooling roller and the second cooling roller and is used for coating the surface A of the film, and the upper evaporation device is located between the second turning roller and the winding roller and is used for coating the surface B of the film.

As a preferable technical scheme, the evaporation device is an evaporation boat.

Preferably, the outer diameter of the first turning roll is smaller than the outer diameter of the second cooling roll.

As a preferred technical scheme, two ends of the unwinding roller, the flattening roller, the first cooling roller, the second cooling roller, the first steering roller, the second steering roller and the winding roller are respectively arranged on a third inner wall and a fourth inner wall of the vacuum cavity.

The utility model has the beneficial effects that: according to the utility model, through the arrangement of the unwinding roller and the winding roller and the magnetron sputtering device and the evaporation device which are sequentially arranged on the film conveying path between the unwinding roller and the winding roller, magnetron sputtering coating and evaporation coating can be simultaneously carried out without different devices, so that the production efficiency is improved, the production cost is reduced, and the product quality is ensured.

Drawings

The utility model is further illustrated with reference to the following figures and examples.

Fig. 1 is a schematic structural diagram of a vacuum coating apparatus according to an embodiment of the present invention.

Detailed Description

The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention. In addition, all the connection relations related in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. All technical characteristics in the utility model can be interactively combined on the premise of not conflicting with each other.

Referring to fig. 1, a vacuum coating apparatus according to an embodiment of the present invention includes a vacuum chamber 10 and a film conveying device disposed in the vacuum chamber 10. The film conveying device comprises an unwinding roller 20 and a winding roller 30, wherein the unwinding roller 20 and the winding roller 30 are respectively used for unwinding and winding the film 300. A magnetron sputtering device and an evaporation device are sequentially arranged on a film conveying path between the unwinding roller 20 and the winding roller 30, and the magnetron sputtering device and the evaporation device are respectively used for coating the surface of the film 300. According to the utility model, through the arrangement of the unwinding roller 20 and the winding roller 30 and the magnetron sputtering device and the evaporation device which are sequentially arranged on the film conveying path between the unwinding roller 20 and the winding roller 30, in the actual application process, in the conveying process of the film 300, firstly, the magnetron sputtering device is used for plating metal or metal oxide on the surface of the film 300 in a magnetron sputtering film plating mode for priming, and then, the evaporation device is used for plating a second layer of metal or metal oxide on the surface of the film 300 in an evaporation film plating mode, the magnetron sputtering film plating and the evaporation film plating can be simultaneously carried out without different devices, so that the production efficiency is improved, the production cost is reduced, and the product quality is ensured.

In this embodiment, the vacuum chamber 10 has first and second opposing

interior walls

12, 14, and third and fourth opposing

interior walls

16, 16. The film feeding apparatus further includes a nip roll 60, a first cooling roll 90, a second cooling roll 100, a first turning roll 70, and a second turning roll 80. The flattening roller 60, the first cooling roller 90, the second cooling roller 100, the first turning roller 70, and the second turning roller 80 are disposed in this order on the film conveying path between the unwinding roller 20 and the winding roller 30. The first and

second turning rollers

70 and 80 are used to turn the film 300. The first cooling roller 90 and the second cooling roller 100 are used for cooling and reducing the temperature of the film 300 so as to prevent the film from being damaged by burning in the film coating process.

Two ends of the unwinding roller 20, the flattening roller 60, the first cooling roller 90, the second cooling roller 100, the first turning roller 70, the second turning roller 80 and the winding roller 30 are respectively arranged on the third inner wall 16 and the fourth inner wall of the vacuum chamber 10. One end of the unwinding roller 20, the flattening roller 60, the first cooling roller 90, the second cooling roller 100, the first turning roller 70, the second turning roller 80 and the winding roller 30 is connected with an output end of a driving motor respectively, so that the film 300 is conveyed.

In the present embodiment, the outer diameter of the first turning roll 70 is smaller than the outer diameter of the second cooling roll 100 to increase the cooling area. The unwinding roller 20, the flattening roller 60, the first cooling roller 90, the second cooling roller 100, the second turning roller 80, and the winding roller 30 have the same outer diameter, and may be different from each other.

The nip roll 60 is located right above the unwinding roll 20, and the unwinding roll 20 and the nip roll 60 are respectively close to the first inner wall 12 of the vacuum chamber 10. The first turning roll 70 is close to the second inner wall 14 of the vacuum chamber 10 and is positioned above the flattening roll 60, the second turning roll 80 is positioned right above the first turning roll 70, the wind-up roll 30 and the second turning roll 80 are arranged in parallel, and the wind-up roll 30 is positioned between the flattening roll 60 and the second turning roll 80. The second cooling roll 100 is located right below the first turning roll 70, a gap for the film 300 to pass through is formed between the second cooling roll 100 and the first turning roll 70, the first cooling roll 90 is located between the nip roll 60 and the second cooling roll 100, and the first cooling roll 90 is located above the nip roll 60 and is arranged in parallel with the second cooling roll 100. Wind-up roll 30 is located directly above first chill roll 90. The structure of the film conveying device is compact, and the inner space of the vacuum chamber 10 can be reasonably utilized.

The number of the magnetron sputtering devices is two, the two magnetron sputtering devices are respectively a lower magnetron sputtering device 40a and an upper magnetron sputtering device 40B, the lower magnetron sputtering device 40a and the upper magnetron sputtering device 40B are respectively positioned between the flattening roll 60 and the first cooling roll 90, and the lower magnetron sputtering device 40a and the upper magnetron sputtering device 40B are respectively used for coating the surface a and the surface B of the film 300. In practical applications, the lower magnetron sputtering device 40a and the upper magnetron sputtering device 40b are respectively located below and above the thin film 300 between the flattening roller 60 and the first cooling roller 90, and the target of the lower magnetron sputtering device 40a and the target of the upper magnetron sputtering device 40b are respectively opposite to the thin film 300. The number of the evaporation devices is two, and the two evaporation devices are a lower evaporation device 50a and an upper evaporation device 50b respectively. The lower evaporation device 50a is positioned between the first cooling roller 90 and the second cooling roller 100 for coating the a-side of the film 300, and the upper evaporation device 50B is positioned between the second turning roller 80 and the take-up roller 30 for coating the B-side of the film 300. In practice, the lower evaporation device 50a is located below the film 300 between the first cooling roller 90 and the second cooling roller 100, and the upper evaporation device 50b is located below the film 300 between the second turning roller 80 and the take-up roller 30.

In practical application, the film 300 is unreeled by the unreeling roller 20, then sequentially passes through the flattening roller 60, the first cooling roller 90, the gap between the second cooling roller 100 and the first steering roller 70, the second steering roller 80, and then reaches the reeling roller 30, so that the film 300 can be reeled by the reeling roller 30, in the process, the film coating on the a surface and the B surface of the film 300 can be realized by the lower magnetron sputtering device 40a and the upper magnetron sputtering device 40B, the film coating on the a surface and the B surface of the film 300 can be realized by the lower evaporation device 50a and the upper evaporation device 50B, the film coating on both surfaces of the film 300 can be realized, and the production efficiency is further improved.

In other embodiments, the number of the magnetron sputtering devices and the number of the evaporation devices may be other, for example, four magnetron sputtering devices, two of which are the lower magnetron sputtering devices 40a, two of which are the upper magnetron sputtering devices 40b, and two of which are the lower evaporation devices 50a, and two of which are the upper evaporation devices 50 b.

In this embodiment, the evaporation apparatus is an evaporation boat. The magnetron sputtering device is a universal device and can be disassembled, so that the target material can be conveniently replaced.

While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the utility model as defined by the appended claims.

Claims

1. The utility model provides a vacuum coating equipment, includes the vacuum chamber body, its characterized in that still arrives including setting up film conveyor in the vacuum chamber body, film conveyor is including unreeling roller and wind-up roll, unreel roller and wind-up roll are used for unreeling, rolling the film respectively unreel and have set gradually magnetron sputtering device and evaporation plant on the film transport route between roller and the wind-up roll, magnetron sputtering device and evaporation plant are used for carrying out the coating film to the surface of film respectively.

2. The vacuum coating equipment according to claim 1, wherein the film conveying device further comprises a flattening roller, a first steering roller and a second steering roller, the flattening roller is positioned right above the unwinding roller, the unwinding roller and the flattening roller are respectively close to the first inner wall of the vacuum cavity, the first steering roller is close to the second inner wall of the vacuum cavity and positioned above the flattening roller, the second steering roller is positioned right above the first steering roller, the winding roller and the second steering roller are arranged in parallel, and the winding roller is positioned between the flattening roller and the second steering roller.

3. The vacuum plating apparatus according to claim 2, wherein the film feeding device further comprises a first cooling roller and a second cooling roller, the second cooling roller is positioned directly below the first turning roller, a gap is provided between the second cooling roller and the first turning roller for the film to pass through, the first cooling roller is positioned between the flattening roller and the second cooling roller, and the first cooling roller is positioned above the flattening roller and is arranged in parallel with the second cooling roller.

4. The vacuum coating equipment according to claim 3, wherein the number of the magnetron sputtering devices is at least two, the two magnetron sputtering devices are a lower magnetron sputtering device and an upper magnetron sputtering device respectively, the lower magnetron sputtering device and the upper magnetron sputtering device are respectively positioned between the flattening roller and the first cooling roller, and the lower magnetron sputtering device and the upper magnetron sputtering device are respectively used for coating the A surface and the B surface of the film.

5. The vacuum coating apparatus according to claim 3, wherein the number of the evaporation devices is at least two, and the two evaporation devices are a lower evaporation device and an upper evaporation device respectively, the lower evaporation device is positioned between the first cooling roller and the second cooling roller and is used for coating the A side of the film, and the upper evaporation device is positioned between the second turning roller and the wind-up roller and is used for coating the B side of the film.

6. The vacuum coating apparatus according to claim 1, wherein the evaporation device is an evaporation boat.

7. The vacuum plating apparatus according to claim 3, wherein the first turning roll has an outer diameter smaller than that of the second cooling roll.

8. The vacuum coating equipment according to claim 3, wherein two ends of the unwinding roller, the flattening roller, the first cooling roller, the second cooling roller, the first turning roller, the second turning roller and the winding roller are respectively arranged on a third inner wall and a fourth inner wall of the vacuum chamber.