CN209425438U - A kind of material-feeding and fetching manipulator - Google Patents
A kind of material-feeding and fetching manipulator Download PDFInfo
- Publication number
- CN209425438U CN209425438U CN201921338677.0U CN201921338677U CN209425438U CN 209425438 U CN209425438 U CN 209425438U CN 201921338677 U CN201921338677 U CN 201921338677U CN 209425438 U CN209425438 U CN 209425438U
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- CN
- China
- Prior art keywords
- feeding
- slide way
- sliding block
- grabbing assembly
- cross slide
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of material-feeding and fetching manipulators, it includes bracket, cross slide way, transversal stretching structure, sliding block, crossbeam, lifting structure, grabbing assembly, the pedestal upper end offers cross slide way, sliding block is slidably connected on the cross slide way, the transversal stretching structure that sliding block can be driven to move left and right is equipped in the cross slide way, the slip front connecting cross beam, the other end of the crossbeam are fixedly connected with lifting structure；The lifting structure includes lifting arm, the U-shaped shell set on lifting arm lower end, connection shell, and the connection shell is fixed on crossbeam side, is equipped with grabbing assembly in the U-shaped shell.The setting of motor, shaft and fixing sleeve in grabbing assembly, it can the mechanical head of quick and convenient replacement, to meet the needs of different type product, furthermore grabbing assembly can move up and down under the drive of lifting structure, lifting structure, grabbing assembly can move left and right under the drive of transversal stretching structure, to meet the requirement of product material-feeding and fetching different spaces dimension.
Description
Technical field
The utility model belongs to manipulator technical field more particularly to a kind of material-feeding and fetching manipulator.
Background technique
Manipulator is a kind of certain holding functions that can imitate manpower and arm, to by fixed routine crawl, carrying object
Or the automatic pilot of operational instrument.Feature is that various expected operations can be completed by programming, on construction and performance
Have the advantage of people and robotics respectively concurrently.Manipulator common at present has sucked type and clip type, sucking disc type mechanical hand master
It is used to sending for planar products take, such as paper, eyeglass, plastic sheet-like body, clip type manipulator are mainly used for stereo product
It send and takes, such as electronic component, pipe fitting.Current material-feeding and fetching manipulator only has sucking disc type mechanical hand or clip type manipulator, right
In production line, when needing to grab plane or stereo product, need to carry out sucking disc type mechanical hand or clip type manipulator not
Disconnected replacement, then needs to shut down replacement at this time, influences production efficiency.
Utility model content
In view of this, the present invention provides a kind of material-feeding and fetching manipulators, can effectively solve of the existing technology
The above problem.
To achieve the goals above, the utility model provides following technical scheme: a kind of material-feeding and fetching manipulator comprising
Bracket, cross slide way, transversal stretching structure, sliding block, crossbeam, lifting structure and grabbing assembly, the pedestal upper end offer cross
Direction guiding rail slidably connects sliding block on the cross slide way, is equipped with the cross that sliding block can be driven to move left and right in the cross slide way
To stretching structure, one end of the sliding block connecting cross beam, the other end of the crossbeam is fixedly connected with lifting structure；The lifting knot
Structure includes lifting arm, the U-shaped shell set on lifting arm lower end, connection shell, and the connection shell is fixed on crossbeam side, the lifting arm
Running through from top to bottom and be set in connection shell, and offers sliding rail on the lifting arm, the connection shell is slidably connected with lifting arm,
The sliding rail two sides are equipped with rack gear, are equipped with the gear being used cooperatively with rack gear, the gear and driving motor in the connection shell
By axis connection, the driving motor is fixed on connection shell rear end face；Grabbing assembly, the crawl are equipped in the U-shaped shell
Component includes fixing sleeve, shaft, motor, vacuum generator, vacuum chuck, attachment base, vertical stretching structure, connecting rod, connection
Block, slide bar and clamping jaw, the shaft are set in U-shaped shell, and the shaft is connected to the motor across U-shaped shell and connects, and are covered in the shaft
Fixing sleeve is connect, the upper end of the fixing sleeve is fixedly connected with vacuum generator, and the upper end of the vacuum generator connects vacuum chuck,
The lower end of the fixing sleeve is fixedly connected with attachment base, and vertical stretching structure, the company are fixed in the upper end wall in the attachment base
The lower end of joint chair is equipped with slide bar, and two link blocks are socketed on slide bar, the driving end of the vertical stretching structure with connect
Block is hinged by connecting rod, and the lower end of the attachment base offers strip aperture, and the lower end of the link block passes through strip
Aperture is fixedly connected with clamping jaw.
Further, the transversal stretching structure includes the first stepper motor, the first telescopic adjustment screw rod, the first step
One end of cross slide way is fixed on into motor, the driving end of the first stepper motor is connected with one end of the first telescopic adjustment screw rod
It connects, the other end of the first telescopic adjustment screw rod is connected with sliding block.
Further, the vertical stretching structure includes second stepper motor, the second telescopic adjustment screw rod, the second step
It is fixed in the upper end wall on the inside of attachment base into motor, the driving end of the second stepper motor and the second telescopic adjustment screw rod connect
It connects, the left and right sides of the lower end of the second telescopic adjustment screw rod and connecting rod are hinged, the lower end of the connecting rod and link block
Hingedly.
Further, two opposite sides of the clamping jaw offer arc notch.
Further, the cross section of the sliding rail is T-type structure.
Further, the bracket is portal trestle.
Further, the pedestal lower end is bolted.
Compared with prior art, the utility model has the beneficial effects that motor, shaft and fixing sleeve in (1) grabbing assembly
Setting, can the mechanical head of quick and convenient replacement, to meet the needs of different type product, furthermore grabbing assembly is in lifting structure
It can be moved up and down under driving, lifting structure, grabbing assembly can move left and right under the drive of transversal stretching structure, to meet production
The requirement of product material-feeding and fetching different spaces dimension；(2) grabbing assembly in the utility model, can be according to the feature of product, Lai Xuanyong
Vacuum chuck material-feeding and fetching or using clamping jaw come material-feeding and fetching, when needing using vacuum chuck material-feeding and fetching, motor band turn can be passed through
Axis rotation, shaft drives the fixing sleeve for being sleeved and fixed connection with it to rotate, to drive vacuum generator and vacuum chuck downward
180 ° of rotation, to make vacuum chuck direction, convenient for completing fetching and delivering for product by suction；It is same clamping jaw to be needed to take to send
When material, operating process is same as above.Sucking disc type mechanical hand or clip type manipulator can be changed quickly by the technical solution, to meet
Different type product fetches and delivers the demand of material.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of material-feeding and fetching manipulator described in the utility model；
Fig. 2 is the schematic perspective view of lifting structure described in the utility model；
Fig. 3 is the positive structure schematic of lifting structure described in the utility model；
Fig. 4 is the perspective view of lifting structure described in the utility model；
Fig. 5 is the schematic perspective view of grabbing assembly described in the utility model；
Fig. 6 is the schematic diagram of internal structure of grabbing assembly described in the utility model；
Description of symbols:
Bracket 1, cross slide way 2, sliding block 3, crossbeam 4, lifting arm 5, U-shaped shell 6, connection shell 7, sliding rail 8, rack gear 9, gear
10, driving motor 11, fixing sleeve 12, shaft 13, motor 14, vacuum generator 15, vacuum chuck 16, attachment base 17, connecting rod
18, link block 19, slide bar 20, clamping jaw 21, the first stepper motor 22, the first telescopic adjustment screw rod 23, second stepper motor 24,
Two telescopic adjustment screw rods 25.
Specific embodiment
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result,
Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another
It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition
State the concrete meaning of term in the present invention.
As shown in Figure 1, a kind of material-feeding and fetching manipulator comprising bracket 1, cross slide way 2, transversal stretching structure, sliding block 3,
Crossbeam 4, lifting structure and grabbing assembly, 1 upper end of bracket offer cross slide way 2, are slidably connected on the cross slide way 2
There is sliding block 3, is equipped with the transversal stretching structure that sliding block 3 can be driven to move left and right in the cross slide way 2, the sliding block 3 connects cross
The other end of one end of beam 4, the crossbeam 4 is fixedly connected with lifting structure.Grabbing on crossbeam can be driven by transversal stretching structure
It takes component to move left and right, sending for product is completed and takes.
As shown in figs 2-4, the lifting structure includes lifting arm 5, the U-shaped shell 6 set on 5 lower end of lifting arm and connection shell
7, the connection shell 7 is fixed on crossbeam side, and the lifting arm 5 runs through from top to bottom to be set in connection shell 7, and the lifting arm
Sliding rail 8 is offered on 5, the connection shell 7 is slidably connected with lifting arm 5, and 8 two sides of sliding rail are equipped with rack gear 9, the connection shell
The gear 10 being used cooperatively with rack gear 9 is equipped in 7, the gear 10 passes through axis connection, the driving motor with driving motor 11
11 are fixed on connection 7 rear end face of shell.Rotated by driving motor band moving gear, gear drive engage the rack gear of connection to
It above or moves down, so that lifting arm be driven to move up or down.
As shown in Fig. 5-Fig. 6, it is equipped with grabbing assembly in the U-shaped shell 6, the grabbing assembly includes fixing sleeve 12, shaft
13, motor 14, vacuum generator 15, vacuum chuck 16, attachment base 17, vertical stretching structure, connecting rod 18, link block 19, cunning
Bar 20 and clamping jaw 21, the shaft 13 are set in U-shaped shell 6, and the shaft 13 passes through U-shaped shell 6 and is connected with motor 14, and described turn
Set 12 is sleeved and fixed on axis 13, the upper end of the fixing sleeve 12 is fixedly connected with vacuum generator 15, the vacuum generator 15
Upper end connects vacuum chuck 16, and the lower end of the fixing sleeve 12 is fixedly connected with attachment base 17, the upper end wall in the attachment base 17
The lower end of the upper vertical stretching structure of fixation, the attachment base 17 is equipped with slide bar 20, and two link blocks 19 are socketed in slide bar 20
It above and can horizontally slip, the driving end of the vertical stretching structure and link block 19 are hinged by connecting rod 18, the attachment base
17 lower end offers strip aperture, and the lower end of the link block 19 passes through strip aperture and is fixedly connected with clamping jaw 21.It is right
Grabbing assembly in this present embodiment can be sent according to the feature of product, Lai Xuanyong vacuum chuck material-feeding and fetching or using clamping jaw
Feeding can drive shaft rotation when needing using vacuum chuck material-feeding and fetching by motor, and shaft drives and its company of being sleeved and fixed
The fixing sleeve rotation connect, to drive vacuum generator and vacuum chuck to rotate down 180 °, to make vacuum chuck direction, just
In completing fetching and delivering for product by suction；With when clamping jaw should be needed to carry out material-feeding and fetching, operating process is same as above.Pass through the technology
Sucking disc type mechanical hand or clip type manipulator can be changed quickly in scheme, to meet the needs of different type product fetches and delivers material.
In the above-mentioned technical solutions, in grabbing assembly motor, shaft and fixing sleeve setting, can quick and convenient replacement it is mechanical
Head, to meet the needs of different type product, furthermore grabbing assembly can move up and down under the drive of lifting structure, lifting knot
Structure, grabbing assembly can move left and right under the drive of transversal stretching structure, to meet product material-feeding and fetching different spaces dimension
It is required that.
As a preferred embodiment of the above technical solution, the transversal stretching structure includes the flexible tune of the first stepper motor 22, first
Screw rod 23 is saved, first stepper motor 22 is fixed on one end of cross slide way 2, the driving end and first of the first stepper motor 22
One end of telescopic adjustment screw rod 23 is connected, and the other end of the first telescopic adjustment screw rod 23 is connected with sliding block 3.In this skill
In art scheme, the first stepper motor drives the first telescopic adjustment elongate screw or contraction, so that sliding block be made to move left and right.
As a preferred embodiment of the above technical solution, the vertical stretching structure includes the flexible tune of second stepper motor 24, second
Screw rod 25 is saved, the second stepper motor 24 is fixed in the upper end wall of 17 inside of attachment base, the second stepper motor 24
Driving end is connect with the second telescopic adjustment screw rod 25, the left and right sides of the lower end of the second telescopic adjustment screw rod 25 and connecting rod
18 is hinged, and the lower end of the connecting rod 18 and link block 19 are hinged.In the technical scheme, second stepper motor rotates in the forward direction
When, the second telescopic adjustment elongate screw, connecting rod drives link block, and along slide bar, two sides are moved to the left and right, two symmetrically arranged clamping jaws
It opens；When clamping jaw, which is placed into, to be fetched and delivered on article, second stepper motor is reversely rotated, and the second telescopic adjustment screw rod is shunk, connection
Bar drives link block to move inward along slide bar, and the distance between two symmetrically arranged clamping jaws are gradually shortened, thus by clamping product.
As a preferred embodiment of the above technical solution, two opposite sides of the clamping jaw 21 offer arc notch, convenient for pipe
Shape product is fetched and delivered.
As a preferred embodiment of the above technical solution, the cross section of the sliding rail 8 is T-type structure, and connection shell is engaged with T-shaped slide rail
It is slidably connected.
As a preferred embodiment of the above technical solution, the bracket 1 is portal trestle, and 1 lower end of bracket is bolted.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (7)
1. a kind of material-feeding and fetching manipulator, it is characterised in that: it includes bracket (1), cross slide way (2), transversal stretching structure, sliding block
(3), crossbeam (4), lifting structure and grabbing assembly, bracket (1) upper end offer cross slide way (2), the cross slide way
(2) it is slidably connected on sliding block (3), the transversal stretching knot that sliding block (3) can be driven to move left and right is equipped in the cross slide way (2)
The other end of structure, one end of sliding block (3) connecting cross beam (4), the crossbeam (4) is fixedly connected with lifting structure；
The lifting structure includes lifting arm (5), the U-shaped shell (6) for being set to lifting arm (5) lower end and connection shell (7), the connection
Shell (7) is fixed on crossbeam side, and the lifting arm (5) is interior through connection shell (7) is set to from top to bottom, and the lifting arm (5)
On offer sliding rail (8), the connection shell (7) is slidably connected with lifting arm (5), sliding rail (8) two sides be equipped with rack gear (9),
It is equipped with the gear (10) being used cooperatively with rack gear (9) in connection shell (7), the gear (10) passes through with driving motor (11)
Axis connection, the driving motor (11) are fixed on connection shell (7) rear end face；
Be equipped with grabbing assembly in the U-shaped shell (6), the grabbing assembly include fixing sleeve (12), shaft (13), motor (14),
Vacuum generator (15), attachment base (17), vertical stretching structure, connecting rod (18), link block (19), is slided vacuum chuck (16)
Bar (20) and clamping jaw (21), the shaft (13) are set in U-shaped shell (6), and the shaft (13) passes through U-shaped shell (6) and motor
(14) it is connected, is sleeved and fixed (12) on the shaft (13), the upper end of the fixing sleeve (12) is fixedly connected with vacuum
The upper end of device (15), the vacuum generator (15) connects vacuum chuck (16), and the lower end of the fixing sleeve (12) is fixedly connected
Attachment base (17) fixes vertical stretching structure in the upper end wall in the attachment base (17), and the lower end of the attachment base (17) is set
Have slide bar (20), two link blocks (19) are socketed on slide bar (20) and can horizontally slip, the vertical stretching structure
End and link block (19) is driven to pass through connecting rod (18) hingedly, the lower end of the attachment base (17) offers strip aperture, institute
The lower end for stating link block (19) passes through strip aperture and is fixedly connected with clamping jaw (21).
2. a kind of material-feeding and fetching manipulator according to claim 1, it is characterised in that: the transversal stretching structure includes first
Stepper motor (22), the first telescopic adjustment screw rod (23), first stepper motor (22) are fixed on the one of cross slide way (2)
End, the driving end of the first stepper motor (22) are connected with one end of the first telescopic adjustment screw rod (23), the described first flexible tune
The other end of section screw rod (23) is connected with sliding block (3).
3. a kind of material-feeding and fetching manipulator according to claim 1, it is characterised in that: the vertical stretching structure includes second
Stepper motor (24), the second telescopic adjustment screw rod (25), the second stepper motor (24) are fixed on the inside of attachment base (17)
In upper end wall, the driving end of the second stepper motor (24) is connect with the second telescopic adjustment screw rod (25), and described second is flexible
The left and right sides of the lower end of adjusting screw rod (25) and connecting rod (18) hingedly, the lower end and link block (19) of the connecting rod (18)
Hingedly.
4. a kind of material-feeding and fetching manipulator according to claim 1, it is characterised in that: two clamping jaws (21) it is opposite one
Side offers arc notch.
5. a kind of material-feeding and fetching manipulator according to claim 1, it is characterised in that: the cross section of the sliding rail (8) is T-type
Structure.
6. a kind of material-feeding and fetching manipulator according to claim 1, it is characterised in that: the bracket (1) is portal trestle.
7. a kind of material-feeding and fetching manipulator according to claim 1, it is characterised in that: bracket (1) lower end passes through bolt
It is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921338677.0U CN209425438U (en) | 2019-08-19 | 2019-08-19 | A kind of material-feeding and fetching manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921338677.0U CN209425438U (en) | 2019-08-19 | 2019-08-19 | A kind of material-feeding and fetching manipulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209425438U true CN209425438U (en) | 2019-09-24 |
Family
ID=67979587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921338677.0U Expired - Fee Related CN209425438U (en) | 2019-08-19 | 2019-08-19 | A kind of material-feeding and fetching manipulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209425438U (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110802424A (en) * | 2019-11-22 | 2020-02-18 | 广东书香教育科技有限公司 | Clamping equipment for manufacturing electric meter and using method thereof |
| CN111113825A (en) * | 2019-12-24 | 2020-05-08 | 江苏邦皓塑业有限公司 | High strength thermoplasticity plastics casing subassembly is moulded plastics and is got material arm |
| CN111719356A (en) * | 2020-06-10 | 2020-09-29 | 安徽博晟亿电力科技有限公司 | Auxiliary positioning device and method for railway construction |
| CN112454330A (en) * | 2020-11-16 | 2021-03-09 | 苏州恒旺达信息科技有限公司 | High grabbing and conveying manipulator of stability |
| CN113070570A (en) * | 2021-04-15 | 2021-07-06 | 东莞市金恒晟新材料科技有限公司 | Cutting device is used in screen protection film processing |
| CN113580097A (en) * | 2021-08-06 | 2021-11-02 | 青岛力沃液压机械有限公司 | Automatic hydraulic manipulator |
| CN113664862A (en) * | 2021-10-25 | 2021-11-19 | 江苏中昇电子科技有限公司 | Manipulator is used in production of communication equipment casing |
| CN113815207A (en) * | 2021-08-02 | 2021-12-21 | 蚌埠市多宝塑模科技有限公司 | Mechanical arm material picking device for injection molding processing of plastic cup shell |
| CN113829166A (en) * | 2021-08-14 | 2021-12-24 | 佛山市金博特机械有限公司 | Ceramic tile is upset mechanical equipment for edging |
| CN114208498A (en) * | 2021-12-20 | 2022-03-22 | 安徽鑫洋机电有限公司 | Suspension type dwarf close planting red date harvester |
| CN114407001A (en) * | 2022-01-21 | 2022-04-29 | 安徽智玛利机器人有限公司 | Multi-shaft manipulator capable of automatically replacing clamping jaw |
| CN115122273A (en) * | 2022-07-22 | 2022-09-30 | 盛吉盛半导体科技(北京)有限公司 | Device for replacing processing unit of semiconductor processing equipment |
| CN113580097B (en) * | 2021-08-06 | 2024-04-26 | 青岛力沃液压机械有限公司 | Automatic hydraulic manipulator |
-
2019
- 2019-08-19 CN CN201921338677.0U patent/CN209425438U/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110802424A (en) * | 2019-11-22 | 2020-02-18 | 广东书香教育科技有限公司 | Clamping equipment for manufacturing electric meter and using method thereof |
| CN111113825A (en) * | 2019-12-24 | 2020-05-08 | 江苏邦皓塑业有限公司 | High strength thermoplasticity plastics casing subassembly is moulded plastics and is got material arm |
| CN111719356A (en) * | 2020-06-10 | 2020-09-29 | 安徽博晟亿电力科技有限公司 | Auxiliary positioning device and method for railway construction |
| CN112454330A (en) * | 2020-11-16 | 2021-03-09 | 苏州恒旺达信息科技有限公司 | High grabbing and conveying manipulator of stability |
| CN113070570B (en) * | 2021-04-15 | 2022-11-04 | 东莞市金恒晟新材料科技有限公司 | Cutting device is used in processing of screen protection film |
| CN113070570A (en) * | 2021-04-15 | 2021-07-06 | 东莞市金恒晟新材料科技有限公司 | Cutting device is used in screen protection film processing |
| CN113815207A (en) * | 2021-08-02 | 2021-12-21 | 蚌埠市多宝塑模科技有限公司 | Mechanical arm material picking device for injection molding processing of plastic cup shell |
| CN113580097A (en) * | 2021-08-06 | 2021-11-02 | 青岛力沃液压机械有限公司 | Automatic hydraulic manipulator |
| CN113580097B (en) * | 2021-08-06 | 2024-04-26 | 青岛力沃液压机械有限公司 | Automatic hydraulic manipulator |
| CN113829166A (en) * | 2021-08-14 | 2021-12-24 | 佛山市金博特机械有限公司 | Ceramic tile is upset mechanical equipment for edging |
| CN113664862B (en) * | 2021-10-25 | 2021-12-31 | 江苏中昇电子科技有限公司 | Manipulator is used in production of communication equipment casing |
| CN113664862A (en) * | 2021-10-25 | 2021-11-19 | 江苏中昇电子科技有限公司 | Manipulator is used in production of communication equipment casing |
| CN114208498A (en) * | 2021-12-20 | 2022-03-22 | 安徽鑫洋机电有限公司 | Suspension type dwarf close planting red date harvester |
| CN114407001A (en) * | 2022-01-21 | 2022-04-29 | 安徽智玛利机器人有限公司 | Multi-shaft manipulator capable of automatically replacing clamping jaw |
| CN114407001B (en) * | 2022-01-21 | 2023-07-07 | 安徽智玛利机器人有限公司 | Multi-shaft mechanical arm capable of automatically replacing clamping jaw |
| CN115122273A (en) * | 2022-07-22 | 2022-09-30 | 盛吉盛半导体科技(北京)有限公司 | Device for replacing processing unit of semiconductor processing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190924 Termination date: 20200819 |