CN209297108U - A kind of yellow light is to Barebone and using the yellow light to the litho machine of Barebone - Google Patents
A kind of yellow light is to Barebone and using the yellow light to the litho machine of Barebone Download PDFInfo
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- CN209297108U CN209297108U CN201822093259.1U CN201822093259U CN209297108U CN 209297108 U CN209297108 U CN 209297108U CN 201822093259 U CN201822093259 U CN 201822093259U CN 209297108 U CN209297108 U CN 209297108U
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- 239000000758 substrate Substances 0.000 claims abstract description 41
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 17
- 239000004579 marble Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 5
- 239000003086 colorant Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- -1 stability is good Substances 0.000 description 1
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model provides a kind of yellow light to Barebone, under use of the yellow light to Barebone, loci display in the image of contraposition camera crawl is clear, the position for the loci that can accurately obtain, Barebone is arranged above moveable substrate table top, substrate table top is for carrying pcb board, it include the fixed alignment component being mounted on gantry and movement to prospective component to Barebone, fixed alignment component includes the fixed alignment camera being fixed on gantry, the camera lens of fixed alignment camera is arranged downward, fixed alignment component further includes the lighting source being fixed on gantry, lighting source is yellow light sources, mobile includes the sliding rail being arranged along gantry to prospective component, be provided on sliding rail can be moved along sliding rail move alignment cameras, the camera lens of mobile alignment cameras is arranged downward, fixed alignment camera and mobile alignment cameras cooperation grab Loci on pcb board, while the utility model additionally provides the litho machine using the yellow light to Barebone.
Description
Technical field
The utility model relates to technical field of lithography, and in particular to a kind of yellow light is aligned to Barebone and using the yellow light
The litho machine of system.
Background technique
Photoetching technique is for printing the composition with feature on the surface of a substrate.Such substrate may include for manufacturing
Semiconductor devices, a variety of integrated circuits, flat-panel screens (such as liquid crystal display), circuit board, biochip, micromechanics electronics
The substrate of chip, photoelectron circuit chip etc..Direct-write photoetching technology is to substitute the exposures such as traditional mask plate or film egative film
The direct transfer techniques of image have very important effect in semiconductor and PCB production field.
Pcb board light-sensitive surface is placed on table top down, burns point using the laser illumination below table top, the point definition burnt
For loci, exposure system is enabled to prepare to be exposed on pcb board by the contraposition of loci, in the prior art,
Direct-write type lithography machine generallys use feux rouges system irradiation loci to Barebone, so that loci is shown so that aligning phase
Machine can grab loci, however discovery is in the case where feux rouges system irradiation loci in actually using, loci and pcb board
Environmental colors contrast it is lower, loci shows unintelligible in the image of contraposition camera crawl, can not accurately obtain
The position of loci.
Utility model content
In view of the above-mentioned problems, the utility model provides a kind of yellow light to Barebone, under use of the yellow light to Barebone,
Loci display in the image of contraposition camera crawl is clear, the position for the loci that can accurately obtain, while this is practical new
Type additionally provides the litho machine using the yellow light to Barebone.
Its technical solution be such that a kind of yellow light to Barebone, it is described that Barebone is arranged in moveable Substrate table
Above face, the substrate table top is for carrying pcb board, it is characterised in that: described includes being mounted on consolidating on gantry to Barebone
To determine to prospective component and movement to prospective component, the fixed alignment component includes the fixed alignment camera being fixed on described gantry,
The camera lens of the fixed alignment camera is arranged downward, and the fixed alignment component further includes the illumination light being fixed on described gantry
Source, the lighting source are yellow light sources, and the movement is to the sliding rail that prospective component includes along the setting of described gantry, on the sliding rail
It is provided with the alignment cameras that moves that can be moved along the sliding rail, the camera lens of the mobile alignment cameras is arranged downward, described solid
Determine the loci in alignment cameras and the mobile alignment cameras cooperation crawl pcb board.
Further, the fixed alignment camera and the lighting source are integrally installed.
Further, the lighting source uses yellow light small lamp bulb.
A kind of litho machine, the multiaxial motion platform including pedestal and setting on the base, the multiaxial motion platform
On substrate table top is installed, pcb board is arranged on the substrate table top, and the multiaxial motion platform is able to drive pcb board three
Moved in dimension space, be provided with gantry on the pedestal, it is characterised in that: be equipped on described gantry it is above-mentioned to Barebone,
Exposure system is also equipped on described gantry.
Further, the multiaxial motion platform includes y-axis moving parts, x-axis moving parts, z-axis moving parts and θ
Axis moving parts, the y-axis moving parts are set on the base, and the x-axis moving parts are arranged on y-axis moving parts, institute
It states z-axis moving parts and the θ axis moving parts is wholely set and is fixed on x-axis moving parts, the substrate table top setting exists
In in the z-axis and θ axis moving parts being wholely set, the X-axis moving parts and the cooperation of y-axis moving parts enable to the base
Pallet face is moved in the plane for being parallel to the pedestal, and the z-axis moving parts enable to the PCB on the substrate table top
Plate moves to the focal plane of exposure and contraposition, and the θ axis moving parts can be realized the rotation of the PCB plate on the substrate table top.
Further, sucker is installed on the substrate table top.
Further, the exposure system includes exposure cameras.
Further, the pedestal is marble pedestal.
Further, the side of the substrate table top is additionally provided with Position Scale, and the PCB is fixed by the Position Scale
Position is on the substrate table top.
The yellow light of the utility model uses yellow light as lighting source Barebone, compared with traditional red-light source,
Under the irradiation of yellow light, the contrast of the environmental colors of loci and pcb board is higher, and loci is in the image of contraposition camera crawl
Display is clear, and the position for the loci that can accurately obtain, can not be crawled under feux rouges environment a little can be in yellow light environment
It clearly indicates and can also be grabbed by contraposition camera, the time for exposure can be reduced, more successfully grab loci, improved
The operational efficiency of equipment；
The substrate table top for carrying pcb board is moved to alignment system by multiaxial motion platform by the litho machine of the utility model
System lower section, opens the irradiation pcb board of yellow light sources, so that the loci on pcb board shows under yellow light sources irradiation, by solid
Surely the loci on the contraposition camera crawl one of angle of pcb board, then move in contraposition camera crawl X-direction other are right
The Y-axis movement mechanism in site, multiaxial motion platform continues to move, and fixed camera grabs other locis in Y direction again, leads to
It crosses 1 three points not point-blank and determines a plane, complete the crawl to the registration holes on pcb board, determine
Then it finds exposure starting point using the positional relationship of known fixed contraposition camera and exposure cameras and starts in the position of pcb board
It exposes, exposure figure is high-quality on the pcb board produced.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the litho machine of the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
See that Fig. 1, a kind of yellow light of the utility model Barebone are arranged in the moveable substrate of litho machine to Barebone
1 top of table top, substrate table top 1 includes the fixed alignment component being mounted on gantry 2 and shifting to Barebone for carrying pcb board
It moves to prospective component, fixed alignment component includes the fixed alignment camera 3 being fixed on gantry 2, the camera lens court of fixed alignment camera 3
Under be arranged towards pcb board, fixed alignment component further includes the lighting source 4 being fixed on gantry 2, and lighting source 4 is yellow light light
Source, fixed alignment camera 3 and 4 one of lighting source are installed, and mobile includes the sliding rail 5 being arranged along gantry 1, sliding rail 5 to prospective component
On be provided with can be moved along sliding rail 5 move alignment cameras 6, mobile alignment cameras 6 can move under the drive of the drive
Dynamic, driving device can be arranged downward using the equipment such as servo motor, the camera lens of mobile alignment cameras 6, fixed alignment camera 3 with
Loci on the mobile cooperation of alignment cameras 6 crawl pcb board, feux rouges can not catch light loci, and yellow light sources irradiation can
To catch light loci, thus the alignment that makes smooth advances, the processes such as exposure, yellow light sources use yellow light small lamp bulb, in identical photograph
It penetrates under area, yellow light small lamp bulb light source irradiates more evenly, and dead angle and dark place are less.
Specifically, the litho machine in the present embodiment includes pedestal 7 and the multiaxial motion platform that is arranged on pedestal 7, pedestal 7
For marble pedestal, stability is good, substrate table top 1 is equipped on multiaxial motion platform, pcb board is arranged on substrate table top 1, more
Axis motion platform is able to drive pcb board and moves in three dimensions, and gantry 2 is provided on pedestal 7, exposure is also equipped on gantry 2
Photosystem 12, exposure system include exposure cameras.
Specifically, multiaxial motion platform includes y-axis moving parts 8, x-axis moving parts 9, z-axis moving parts and θ axis fortune
Dynamic component, y-axis moving parts 8 are arranged on pedestal 1, and x-axis moving parts 9 are arranged on y-axis moving parts 8, z axis exercise group
Part and θ axis moving parts are integrated setting and are fixed on x-axis moving parts 9, and substrate table top 1 is arranged in the z-axis being wholely set
On θ axis moving parts 10, the side of substrate table top 1 is additionally provided with Position Scale 11, and pcb board is set by the positioning of Position Scale 11
In on substrate table top 1, X-axis moving parts 9 and the cooperation of y-axis moving parts 8 enable to substrate table top 1 being parallel to pedestal 1
It is moved in plane, the z-axis moving parts of z-axis and θ axis moving parts 10 enable to the pcb board on substrate table top 1 to move to exposure
The θ axis moving parts of the focal plane of light and contraposition, z-axis and θ axis moving parts 10 can be realized the rotation of the pcb board on substrate table top 1
Turn, sucker be set on substrate table top and is used to fix pcb board,
In the present embodiment, the width direction for the pcb board of x-axis being oriented parallel on substrate table top, y-axis are oriented parallel to
The length direction of pcb board on substrate table top, x-axis moving parts realize that stepping is mobile in the x-direction with pcb board, guarantee alignment
The width of system, exposure system covering pcb board, y-axis, which is realized, to be moved with pcb board in the direction y, and realization is to Barebone, exposure
The length areas of system covering pcb board, z-axis realize that the focal plane that exposure and contraposition are moved to pcb board, θ axis realize exposure base
The rotation of table top is realized graph exposure to the corresponding position of pcb board quickly, and in the present embodiment, y-axis moving parts, x-axis are moved
Component, z-axis moving parts use straight line mould group, and θ axis moving parts are the turntable structure being driven by motor in straight line mould group.
The motion process of the litho machine of the utility model is described below, pcb board will be carried by multiaxial motion platform
Substrate table top is moved to below Barebone, the irradiation pcb board of yellow light sources is opened, so that the loci on pcb board is in yellow light
Show under light source irradiation, the loci in the pcb board upper left corner is grabbed by fixed contraposition camera, then mobile contraposition camera grabs X
The Y-axis movement mechanism of other locis in axis direction, multiaxial motion platform continues to move, and fixed camera grabs Y direction again
On other locis, determine a plane by 1 three points not point-blank, complete on pcb board
The crawl of registration holes determines the position of pcb board, and the positional relationship of camera and exposure cameras is then aligned using known fixation,
Exposure starting point post-exposure system is found to start to expose.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
Claims (9)
1. a kind of yellow light is to Barebone, described that Barebone is arranged above moveable substrate table top, the substrate table top is used
In carrying pcb board, it is characterised in that: described includes the fixed alignment component being mounted on gantry and mobile alignment group to Barebone
Part, the fixed alignment component include the fixed alignment camera being fixed on described gantry, the camera lens of the fixed alignment camera
It is arranged downward, the fixed alignment component further includes the lighting source being fixed on described gantry, and the lighting source is yellow light
Light source, the movement include the sliding rail being arranged along described gantry to prospective component, and being provided on the sliding rail can be along the sliding rail
The camera lens of mobile mobile alignment cameras, the mobile alignment cameras is arranged downward, the fixed alignment camera and the movement
Loci on alignment cameras cooperation crawl pcb board.
2. a kind of yellow light according to claim 1 is to Barebone, it is characterised in that: the fixed alignment camera and the photograph
It integrally installs in Mingguang City source.
3. a kind of yellow light according to claim 1 is to Barebone, it is characterised in that: the lighting source uses yellow light lampet
Pearl.
4. a kind of litho machine, multiaxial motion platform including pedestal and setting on the base, on the multiaxial motion platform
Substrate table top is installed, pcb board is arranged on the substrate table top, and the multiaxial motion platform is able to drive pcb board in three-dimensional
It is moved in space, is provided with gantry on the pedestal, it is characterised in that: it is described in claim 1 right to be equipped on described gantry
Barebone is also equipped with exposure system on described gantry.
5. a kind of litho machine according to claim 4, it is characterised in that: the multiaxial motion platform includes y-axis exercise group
Part, x-axis moving parts, z-axis moving parts and θ axis moving parts, the y-axis moving parts are set on the base, the x-axis
Moving parts are arranged on y-axis moving parts, and the z-axis moving parts and the θ axis moving parts are wholely set and are fixed on x-axis
On moving parts, the substrate table top is arranged in in the z-axis and θ axis moving parts that are wholely set, the X-axis moving parts and
The cooperation of y-axis moving parts enables to the substrate table top to move in the plane for being parallel to the pedestal, the z-axis exercise group
Part enables to the pcb board on the substrate table top to move to the focal plane of exposure and contraposition, and the θ axis moving parts can be realized
The rotation of pcb board on the substrate table top.
6. a kind of litho machine according to claim 4, it is characterised in that: be equipped with sucker on the substrate table top.
7. a kind of litho machine according to claim 4, it is characterised in that: the exposure system includes exposure cameras.
8. a kind of litho machine according to claim 4, it is characterised in that: the pedestal is marble pedestal.
9. a kind of litho machine according to claim 4, it is characterised in that: the side of the substrate table top is additionally provided with positioning
Scale, the PCB are placed on the substrate table top by Position Scale positioning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822093259.1U CN209297108U (en) | 2018-12-13 | 2018-12-13 | A kind of yellow light is to Barebone and using the yellow light to the litho machine of Barebone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822093259.1U CN209297108U (en) | 2018-12-13 | 2018-12-13 | A kind of yellow light is to Barebone and using the yellow light to the litho machine of Barebone |
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| Publication Number | Publication Date |
|---|---|
| CN209297108U true CN209297108U (en) | 2019-08-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201822093259.1U Active CN209297108U (en) | 2018-12-13 | 2018-12-13 | A kind of yellow light is to Barebone and using the yellow light to the litho machine of Barebone |
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| CN (1) | CN209297108U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358476A (en) * | 2018-12-13 | 2019-02-19 | 苏州源卓光电科技有限公司 | Yellow light is to Barebone, litho machine and its alignment methods |
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2018
- 2018-12-13 CN CN201822093259.1U patent/CN209297108U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358476A (en) * | 2018-12-13 | 2019-02-19 | 苏州源卓光电科技有限公司 | Yellow light is to Barebone, litho machine and its alignment methods |
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Address after: 215000 Room 102, building C5, Ting LAN lane, Suzhou Industrial Park, Jiangsu, China, 192 Patentee after: Yuanzhuo Micro Nano Technology (Suzhou) Co.,Ltd. Address before: 215000 Room 102, building C5, Ting LAN lane, Suzhou Industrial Park, Jiangsu, China, 192 Patentee before: ADVANCED MICRO OPTICS.INC |