CN209232729U - A kind of silicon wafer electrical pumping annealing device - Google Patents
A kind of silicon wafer electrical pumping annealing device Download PDFInfo
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- CN209232729U CN209232729U CN201821910579.5U CN201821910579U CN209232729U CN 209232729 U CN209232729 U CN 209232729U CN 201821910579 U CN201821910579 U CN 201821910579U CN 209232729 U CN209232729 U CN 209232729U
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- reaction warehouse
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Abstract
The utility model relates to a kind of silicon wafer electrical pumping annealing devices, it includes that the left and right sides is provided with the reaction warehouse that can open and close the door entered and left for the gaily decorated basket for being loaded with silicon wafer, it is used to support and transmits and be loaded with the gaily decorated basket of silicon wafer and enter and leave the conveying mechanism of the reaction warehouse, top electrode mechanism, bottom electrode mechanism, it is separately connected the DC power supply of the top electrode mechanism and bottom electrode mechanism, and to the air cooling mechanism to cool down in reaction warehouse.The utility model bottom electrode mechanism can hold up silicon wafer, top electrode mechanism is when pushing down on due to being that activity is suspended on top electrode header board, therefore when it is pressed on silicon wafer, moving downward for top electrode header board would not continue to influence top electrode assembly, therefore top electrode mechanism and bottom electrode mechanism can implement reasonable clamping to silicon wafer, will not damage to silicon wafer.
Description
Technical field
The utility model relates to solar battery sheet processing equipment field more particularly to a kind of silicon wafer electrical pumping annealing dresses
It sets.
Background technique
It is currently to develop most fast that cell piece, which is generally divided into monocrystalline silicon, polysilicon and amorphous silicon monocrystaline silicon solar cell,
A kind of solar battery, its construction and production technology have been formed, and product is widely used in space and ground.This solar energy
Battery is using high-purity silicon single crystal rod as raw material.Silicon single crystal rod is cut into slices, about 0.3 millimeter of general piece thickness.Silicon wafer is by rubbing down, clear
It the processes such as washes, raw material silicon wafer to be processed is made.Containing aerobic in silicon wafer (cell piece), oxygen plays the role of suck up impurity, to silicon wafer
It is made annealing treatment, the oxygen retained in silicon can be promoted to external diffusion, form low-oxygen environment (clean area) in silicon chip surface, from
And reducing even can eliminate the crystal defect as caused by oxygen, be conducive to late device manufacture, wafer anneal can be to its resistance
Rate and minority carrier life time impact.In addition, caused by photo attenuation (LID) refers to solar battery and component in During Illumination
Power attenuation phenomenon.In order to improve battery efficiency, PERC(passivation emitter and back local contact battery are had developed at present) it is high
Battery is imitated, but by practice discovery, if do not handled finished battery, the LID phenomenon of high-efficiency battery can reduce battery
Efficiency gain reduces the transfer efficiency of cell piece.In view of the foregoing drawbacks, annealing is mostly used now, but discovery is moved back in silicon wafer
Energized state is such as maintained it in during fire, enables to the annealing effect of silicon wafer more preferable, has more superior performance, but mesh
Preceding wafer anneal equipment not yet produces corresponding device to this, and it is difficult to ensure that whole temperature is consistent when cell piece annealing
Property, therefore it is badly in need of a kind of wafer anneal equipment of reliably working to solve the problems, such as this.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of silicon wafer electrical pumping annealing devices.
To solve the above problems, technical solution adopted in the utility model is:
A kind of silicon wafer electrical pumping annealing device, key technology are comprising:
Reaction warehouse, the left and right sides, which is provided with, can open and close the door entered and left for the gaily decorated basket for being loaded with silicon wafer；
Conveying mechanism is used to support and transmits the gaily decorated basket discrepancy reaction warehouse for being loaded with silicon wafer；
Top electrode mechanism comprising the top electrode cylinder of fixed setting, with the cylinder rod of top electrode cylinder is fixed powers on
Pole header board, suspension be arranged in the top electrode crossbeam board ends two top electrode pull rods and be fixed at two it is described on
The top electrode assembly of electrode pull rod lower end, the top electrode assembly are located in the reaction warehouse, and the top electrode pull rod passes through anti-
The hole of the top of the warehouse is answered to connect with top electrode assembly, top electrode pull rod upper end is threaded through on the top electrode header board, is powered on
Pole pull rod upper end is hung on top electrode header board by nut movable hanging；
Bottom electrode mechanism comprising the lower electrode cylinder of fixed setting and fixed with the cylinder rod of the lower electrode cylinder
The bottom electrode assembly of connection, the bottom electrode assembly are located at the underface of the top electrode assembly, and bottom electrode mechanism can be by flower
Silicon wafer in basket jacks up, and is clamped in silicon wafer between bottom electrode mechanism and top electrode mechanism and carries out electrical pumping；
DC power supply is separately connected the top electrode assembly and bottom electrode assembly；
Air cooling mechanism comprising the blowing valve on the siding of the reaction warehouse front and rear sides and setting are set described anti-
Answer the air-exhausting duct of the top of the warehouse.
The conveying mechanism includes being arranged two before and after the reaction warehouse lower part as a further improvement of the utility model,
Two rows of conveying axis, motor decelerating mechanism and the transmission shaft of side, one end that the conveying axis is located at outside reaction warehouse are provided with third
Synchronous pulley, the other end inside reaction warehouse are used to support and convey the gaily decorated basket for being loaded with silicon wafer；The motor decelerating mechanism 4
Output shaft on output wheel is set, be provided with the first synchronous pulley corresponding with the output wheel in the middle part of the transmission shaft, pass
End shaft, which is provided with, ranked third corresponding second synchronous pulley of synchronous pulley with two, and the output wheel passes through the first synchronous belt
It is connect with first synchronous belt pulley transmission, second synchronous pulley passes through the third synchronous belt of the second synchronous belt and respective side
Wheel transmission connection.
It is provided between the third synchronous pulley for being tensioned described second as a further improvement of the utility model,
The expansion tightening wheel of synchronous belt.
The blowing valve is in rectangle as a further improvement of the utility model, is provided with two or so perforations
Channel, several through-holes communicated with the channel are provided on side wall, and air-flow is blown by the way that the through-hole is finely dispersed
In reaction warehouse, the snorkel for connecting gas source is provided on the blowing valve.
The control valve for adjusting aperture is provided on the air-exhausting duct as a further improvement of the utility model,.
The beneficial effects of adopting the technical scheme are that
The utility model carries out electrical pumping annealing for the silicon wafer being loaded by the gaily decorated basket, by top electrode mechanism and lower electrode
Mechanism clamps the silicon wafer that hundreds of stack to form access, provides power supply by DC power supply and is passed into realization electricity note in silicon wafer
Enter, bottom electrode mechanism can hold up silicon wafer, and top electrode mechanism is when pushing down on due to being that activity is suspended in top electrode
On header board, therefore when it is pressed on silicon wafer, moving downward for top electrode header board would not continue to influence
Electrode assembly, therefore top electrode mechanism and bottom electrode mechanism can implement reasonable clamping to silicon wafer, will not cause brokenly to silicon wafer
It is bad.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is the schematic perspective view of the utility model.
Fig. 2 is the side structure schematic diagram of the utility model.
Fig. 3 is the positive structure schematic of the utility model.
Fig. 4 is the structural schematic diagram of the utility model top electrode assembly.
Fig. 5 is the structural schematic diagram of the utility model bottom electrode assembly.
Fig. 6 is the structural schematic diagram of the gaily decorated basket.
Wherein: 1 reaction warehouse, 2 blowing valves, 2-1 snorkel, 3 DC power supplies, 4 motor decelerating mechanisms, 5 output wheels, 6 transmissions
Axis, 7 first synchronous pulleys, 8 first synchronous belts, 9 bearing blocks, 10 second synchronous pulleys, 11 second synchronous belts, 12 third synchronous belts
Wheel, 13 expansion tightening wheels, 14 conveying axis, 15 doors, 16 door cylinders, 17 top electrode cylinders, 18 top electrode header boards, 19 air-exhausting ducts,
20 control valves, 21 temperature sensors, 22 top electrode pull rods, 23 top electrode assemblies, 23-1 electric pole plate, the connection of 23-2 top electrode
Electrode under plate, 23-3 top electrode terminal plate, 23-4 top electrode wiring magnetic patch, 24 lower electrode cylinders, 25 bottom electrode assemblies, 25-1
Electrode supporting bars are descended in electrode connection magnetic patch, 26 under electrode connection plate, 25-4 under electrode connecting plate, 25-3 under plate, 25-2；
100 gailys decorated basket, 101 bottom plates, 102 ribs, 103 support legs.
Specific embodiment
To keep the purpose of this utility model, technical solution and advantage clearer, combined with specific embodiments below to practical
It is novel to carry out clear, complete description, it is to be understood that term " center ", " vertical ", " transverse direction ", "upper", "lower", " preceding ",
The orientation or positional relationship of the instructions such as " rear ", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" be based on
Orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair
The limitation of the utility model.
One is illustrated in figure 6 for loading the gaily decorated basket 100 of silicon wafer comprising the bottom plate 101 of a rectangle frame shape is fixed
The support leg 103 of the strip of 101 two sides of bottom plate is set and four of 101 four corners of bottom plate vertically upward are set
Root rib 102, the bottom plate 101 of the gaily decorated basket 100 can hold silicon wafer, and four ribs 102 can block silicon wafer, the support leg
103 pairs of entire gailys decorated basket 100 are played a supporting role, and for contacting with the transmission device of the conveying gaily decorated basket.101 middle part of bottom plate
The duct of rectangle is for holding up device by silicon wafer.
A kind of silicon wafer electrical pumping annealing device as shown in Figs. 1-5 comprising reaction warehouse 1, conveying mechanism, top electrode machine
Structure, bottom electrode mechanism, DC power supply and air cooling mechanism, the left and right sides of the reaction warehouse 1, which is provided with, can open and close for being loaded with silicon
The door 15 that the gaily decorated basket of piece enters and leaves, the door 15 drive vertical operation by door cylinder 16, when about 16 door cylinder is dynamic
Make, lifts door 15 and open reaction warehouse 1, the gaily decorated basket for being loaded with silicon wafer 100 is enable to enter and leave reaction warehouse 1；The conveying mechanism is used for
The gaily decorated basket 100 that support and transmission are loaded with silicon wafer enters and leaves the reaction warehouse 1；The top electrode mechanism includes powering on for fixed setting
Pole cylinder 17, the top electrode header board 18 fixed with the cylinder rod of top electrode cylinder 17, suspension are arranged in the top electrode crossbeam
Two top electrode pull rods 22 at 18 both ends of plate and the top electrode assembly 23 for being fixed at two 22 lower ends of top electrode pull rod,
The top electrode assembly 23 is located in the reaction warehouse 1, hole and top electrode of the top electrode pull rod 22 by 1 top of reaction warehouse
Component 23 connects, and 22 upper end of top electrode pull rod is threaded through on the top electrode header board 18, and 22 upper end of top electrode pull rod is logical
Nut movable hanging is crossed to hang on top electrode header board 18；The bottom electrode mechanism include fixed setting lower electrode cylinder 24 and
The bottom electrode assembly 25 being fixedly connected with the cylinder rod of the lower electrode cylinder 24, the bottom electrode assembly 25 are located at described power on
The underface of pole component 23, the bottom electrode mechanism can jack up the silicon wafer in the gaily decorated basket 100, and silicon wafer is made to be clamped in lower electrode
Electrical pumping is carried out between mechanism and top electrode mechanism；The DC power supply 3 is separately connected the top electrode assembly 23 and lower electrode
Component 25；The air cooling mechanism includes the blowing valve 2 being arranged on the siding of 1 front and rear sides of reaction warehouse and is arranged described
The air-exhausting duct 19 at 1 top of reaction warehouse.
As shown in Figure 1-3, the conveying mechanism includes two rows of conveying axis that the 1 lower part front and rear sides of reaction warehouse are arranged in
14, motor decelerating mechanism 4 and transmission shaft 6, one end that the conveying axis 14 is located at outside reaction warehouse 1 are provided with third synchronous pulley
12, the other end inside reaction warehouse 1 is used to support and conveys the gaily decorated basket for being loaded with silicon wafer；The motor decelerating mechanism 4 it is defeated
Output wheel 5 is set on shaft, is provided with first synchronous pulley 7 corresponding with the output wheel 5 in the middle part of the transmission shaft 6, is passed
6 both ends of moving axis, which are provided with, ranked third corresponding second synchronous pulley 10 of synchronous pulley 12 with two, and the output wheel 5 passes through first
Synchronous belt 8 and first synchronous pulley 7 are sequentially connected, and second synchronous pulley 10 passes through the second synchronous belt 11 and respective side
Third synchronous pulley 12 be sequentially connected.
Each row's delivery wheel 14 is four, is provided between the third synchronous pulley 12 synchronous for being tensioned described second
With 11 expansion tightening wheel 13, in the present embodiment, expansion tightening wheel 13 is set between two intermediate delivery wheels 14, expansion tightening wheel 13 is tensioner
Idle pulley.
As illustrated in fig. 1 and 2, the blowing valve 2 is in rectangle, the channels of two or so perforations is provided with, on side wall
Several through-holes communicated with the channel are provided with, air-flow is blown into reaction warehouse 1 by the way that the through-hole is finely dispersed, described
The snorkel 2-1 for connecting gas source is provided on blowing valve 2.It is connect by snorkel 2-1 with compressed air, by blowing valve 2
It is uniformly blown into inside reaction warehouse 1, can be cooled down to silicon wafer by through-hole thereon to after compressed air dispersion, thus
Control the temperature of silicon wafer in reaction warehouse 1.It is provided with the control valve 20 for adjusting aperture on the air-exhausting duct 19, passes through adjusting
Valve 20 can adjust the aperture of air-exhausting duct 19, to control the flowing velocity of reaction warehouse interior air-flow, realize the adjusting to temperature.
As shown in figure 4, the top electrode assembly 23 includes the electric pole plate 23-1 directly contacted with silicon wafer, powers on described
Top electrode connecting plate 23-2 that pole plate 23-1 is fixedly connected, the top electrode terminal plate being fixed on the electric pole plate 23-1
23-3 and the top electrode wiring porcelain block 23-4 being fixed on the top electrode connecting plate 23-2, two top electrodes are drawn
22 lower end of bar is fixedly connected with the top electrode connecting plate 23-2, between top electrode connecting plate 23-2 and the electric pole plate 23-1
It is provided with insulation board, power supply line first passes through after the top electrode wiring porcelain block 23-4 is fixed and is connected to the top electrode terminal plate
On 23-3.
As shown in figure 5, the bottom electrode assembly 25 includes for holding up the lower electrode plate 25-1 of silicon wafer, by multiple lower electricity
Pole support rod 26 and the lower electrode connecting plate 25-2 of the lower electrode plate 25-1 insulation connection, it is fixed at the lower electrode plate
Lower electrode connection plate 25-3 on 25-1 and the lower electrode connection porcelain block being fixed on the lower electrode connecting plate 25-2
25-4, the cylinder rod of the lower electrode cylinder 24 are fixedly connected with the lower electrode connecting plate 25-2.Power supply line first passes through described
It is connected on the lower electrode connection plate 25-3 after lower electrode connection porcelain block 25-4 is fixed.
The present apparatus can be used as an electrical pumping annealing unit module when in use, and setting shape is set side by side by multiple modules
Electrical pumping annealing is carried out at continuous multiple reaction warehouse, the conveying mechanism in each reaction warehouse is mutually butted the flower for making to be loaded with silicon wafer
Basket can be transmitted continuously, and next reaction warehouse is directly entered after being come out by a reaction warehouse, is only needed between two reaction warehouses
One door is set.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations；
Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that:
It can still modify to technical solution documented by previous embodiment, or be equal to part of technical characteristic
Replacement；And these are modified or replaceed, the utility model embodiment technical solution that it does not separate the essence of the corresponding technical solution
Spirit and scope.
Claims (5)
1. a kind of silicon wafer electrical pumping annealing device, characterized in that it comprises:
Reaction warehouse (1), the left and right sides, which is provided with, can open and close the door (15) entered and left for the gaily decorated basket for being loaded with silicon wafer；
Conveying mechanism is used to support and transmits the gaily decorated basket discrepancy reaction warehouse (1) for being loaded with silicon wafer；
Top electrode mechanism comprising the top electrode cylinder (17) of fixed setting, fixed with the cylinder rod of top electrode cylinder (17)
Top electrode header board (18) hangs setting in two top electrode pull rods (22) at top electrode header board (18) both ends and consolidates
In the top electrode assembly (23) of two top electrode pull rod (22) lower ends, the top electrode assembly (23) is located at described anti-for fixed setting
Answer in storehouse (1), the top electrode pull rod (22) is connect by the hole at the top of reaction warehouse (1) with top electrode assembly (23), it is described on
Electrode pull rod (22) upper end is threaded through on the top electrode header board (18), and top electrode pull rod (22) upper end passes through nut movable hanging
It hangs on top electrode header board (18)；
Bottom electrode mechanism comprising the lower electrode cylinder (24) of fixed setting and the cylinder rod with the lower electrode cylinder (24)
The bottom electrode assembly (25) being fixedly connected, the bottom electrode assembly (25) are located at the underface of the top electrode assembly (23), under
Electrode mechanism can jack up the silicon wafer in the gaily decorated basket, be clamped in silicon wafer between bottom electrode mechanism and top electrode mechanism and carry out electricity
Injection；
DC power supply (3) is separately connected the top electrode assembly (23) and bottom electrode assembly (25)；
Air cooling mechanism comprising the blowing valve (2) being arranged on the siding of the reaction warehouse (1) front and rear sides and setting are described
Air-exhausting duct (19) at the top of reaction warehouse (1).
2. a kind of silicon wafer electrical pumping annealing device according to claim 1, which is characterized in that the conveying mechanism includes setting
The two rows of conveying axis (14), motor decelerating mechanism (4) and transmission shaft (6) in the reaction warehouse (1) lower part front and rear sides are set, it is described
Conveying axis (14) is located at the external one end of reaction warehouse (1) and is provided with third synchronous pulley (12), is located at the another of reaction warehouse (1) inside
One end is used to support and conveys the gaily decorated basket for being loaded with silicon wafer；Output wheel (5) are set on the output shaft of the motor decelerating mechanism (4),
It is provided with the first synchronous pulley (7) corresponding with the output wheel (5) in the middle part of the transmission shaft (6), transmission shaft (6) both ends are set
It is equipped with and ranked third synchronous pulley (12) corresponding second synchronous pulley (10) with two, the output wheel (5) is synchronous by first
Band (8) and first synchronous pulley (7) be sequentially connected, second synchronous pulley (10) by the second synchronous belt (11) with it is right
The third synchronous pulley (12) of side is answered to be sequentially connected.
3. a kind of silicon wafer electrical pumping annealing device according to claim 2, which is characterized in that the third synchronous pulley
(12) expansion tightening wheel (13) for being tensioned second synchronous belt (11) is provided between.
4. a kind of silicon wafer electrical pumping annealing device according to claim 1, which is characterized in that the blowing valve (2) is in square
Shape is provided with the channel of two or so perforations, and several through-holes communicated with the channel are provided on side wall, and air-flow is logical
It is interior to cross the finely dispersed reaction warehouse (1) that is blown into of the through-hole, the ventilation for connecting gas source is provided on the blowing valve (2)
It manages (2-1).
5. a kind of silicon wafer electrical pumping annealing device according to claim 1, which is characterized in that set on the air-exhausting duct (19)
It is equipped with the control valve (20) for adjusting aperture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821910579.5U CN209232729U (en) | 2018-11-20 | 2018-11-20 | A kind of silicon wafer electrical pumping annealing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821910579.5U CN209232729U (en) | 2018-11-20 | 2018-11-20 | A kind of silicon wafer electrical pumping annealing device |
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| Publication Number | Publication Date |
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| CN209232729U true CN209232729U (en) | 2019-08-09 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111129227A (en) * | 2019-12-30 | 2020-05-08 | 浙江鸿禧能源股份有限公司 | Solar wafer electricity injection equipment |
| CN111640826A (en) * | 2020-06-10 | 2020-09-08 | 蒙城县比太新能源发展有限公司 | Preparation method of battery conducting by utilizing selective contact |
-
2018
- 2018-11-20 CN CN201821910579.5U patent/CN209232729U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111129227A (en) * | 2019-12-30 | 2020-05-08 | 浙江鸿禧能源股份有限公司 | Solar wafer electricity injection equipment |
| CN111640826A (en) * | 2020-06-10 | 2020-09-08 | 蒙城县比太新能源发展有限公司 | Preparation method of battery conducting by utilizing selective contact |
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