CN209039580U - 化学气相沉积炉 - Google Patents
化学气相沉积炉 Download PDFInfo
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- CN209039580U CN209039580U CN201821327035.6U CN201821327035U CN209039580U CN 209039580 U CN209039580 U CN 209039580U CN 201821327035 U CN201821327035 U CN 201821327035U CN 209039580 U CN209039580 U CN 209039580U
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CN201821327035.6U CN209039580U (zh) | 2018-08-16 | 2018-08-16 | 化学气相沉积炉 |
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Effective date of registration: 20200518 Address after: 239004 east of yongyang Road, west of Nanjing Road, north of Anqing road and south of Lu'an road in Langya Economic Development Zone, Langya District, Chuzhou City, Anhui Province Patentee after: Anhui Guangzhi Technology Co.,Ltd. Address before: 511517 Guangdong province Qingyuan Baijia Industrial Park 27-9B Patentee before: FIRST RARE MATERIALS Co.,Ltd. |
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Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2020990000438 Denomination of utility model: Chemical vapor deposition furnace Granted publication date: 20190628 License type: Common License Record date: 20200821 |
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Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2020990000438 Date of cancellation: 20220413 |
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Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2022980005544 Denomination of utility model: Chemical vapor deposition furnace Granted publication date: 20190628 License type: Common License Record date: 20220520 |
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Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Guangzhi Technology Co.,Ltd. Contract record no.: X2022980005544 Date of cancellation: 20230103 |
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