CN208663357U - A kind of wafer chamfering machine is in sheet devices - Google Patents
A kind of wafer chamfering machine is in sheet devices Download PDFInfo
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- CN208663357U CN208663357U CN201821321820.0U CN201821321820U CN208663357U CN 208663357 U CN208663357 U CN 208663357U CN 201821321820 U CN201821321820 U CN 201821321820U CN 208663357 U CN208663357 U CN 208663357U
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Abstract
What it is the utility model discloses a kind of wafer chamfering machine is in sheet devices, belong to silicon chip process technology field, including pedestal, movable plate, transverse moving mechanism, longitudinal moving mechanism, mounting plate, lateral fixed block, longitudinally fixed piece, fixed block pillar, in piece motor, in piece shaft coupling, PLC controller and vacuum chuck, transverse moving mechanism is set on pedestal, movable plate is arranged in transverse moving mechanism, longitudinal moving mechanism is set on movable plate, mounting plate is set on longitudinal moving mechanism, setting is in piece motor on mounting plate, in piece shaft coupling and vacuum chuck, PLC controller and servo longitudinal motor, lateral servo motor is connected in piece motor.It is fixed that the utility model has many advantages, such as that the sum suitable for sizes facilitates.
Description
Technical field
The utility model belongs to silicon chip process technology field, and in particular to a kind of wafer chamfering machine is in sheet devices.
Background technique
Silicon is a kind of very typical semiconductor material, and content at the earth's surface is only second to oxygen, is widely used and two
Pole pipe, triode, thyristor, field-effect tube and various integrated circuits, aerospace, in the multiple fields such as optical fiber, right and wrong
Often important material.In the process of silicon wafer, after being cut into silicon wafer from silicon ingot, if be directly ground, it is easy to produce
Chipping is scrapped so as to cause silicon wafer, therefore needs to carry out chamfering to silicon wafer before grinding.Current technology is by artificial
Reconditioning is carried out to the silicon wafer of chipping, labour's investment is big, and yield is small, and product qualification rate is low.
Notification number is CN205904810U, and the day for announcing is that on 01 25th, 2017 Chinese patent literatures disclose a kind of circle
Shape silicon wafer fast chamfering machine, including motor, driving pulley, transmission belt, driven pulley, rotation axis, grinding wheel, fixed block, workbench,
Body；It is characterized by: body is fixedly connected with workbench, workbench is fixedly connected with fixed block, body and the fixed company of motor
It connects, motor is coaxially connected with driving pulley, and driving pulley is connect by transmission belt with driven pulley, and driven pulley passes through rotation axis
It is fixedly connected with grinding wheel.
The patent is fixedly connected by body with workbench, and workbench is fixedly connected with fixed block, and body is fixed with motor
Connection, motor is coaxially connected with driving pulley, and driving pulley is connect by transmission belt with driven pulley, and driven pulley passes through rotation
Axis is fixedly connected with grinding wheel, and the present apparatus uses the grinding wheel of inner cone cavity configuration, improves chamfering efficiency, improves Business Economic Benefit, but
It is that the fixed silicon wafer of fixed block is inconvenient, and the silicon wafer of not applicable sizes is fixed.
Summary of the invention
The purpose of this utility model is to provide a kind of suitable for sizes and facilitates fixed wafer chamfering machine in piece
Device.
The purpose of this utility model is achieved through the following technical solutions:
A kind of wafer chamfering machine is in sheet devices, it is characterised in that: including pedestal, movable plate, transverse moving mechanism, longitudinal direction
Mobile mechanism, mounting plate, lateral fixed block, longitudinally fixed piece, fixed block pillar, control in piece motor, in piece shaft coupling, PLC
Device and vacuum chuck；
The transverse moving mechanism includes lateral servo motor, cross motor retainer, transverse ball lead screw, laterally fixes
Seat, lateral nut seat, 2 cross slide ways and 4 transverse sliders, 2 cross slide ways are arranged on the base, the pedestal institute
2 transverse sliders of setting on every cross slide way are stated, are fixedly installed transverse holder, the transverse direction between the cross slide way
Fixing seat is connected with transverse ball lead screw by nut, and lateral nut seat, the laterally rolling are arranged on the transverse ball lead screw
Ballscrew is connected with cross motor retainer, the transverse direction retainer and lateral servo motor phase far from transverse holder one end
Even, it is fixedly connected with movable plate on the transverse direction nut seat, the movable plate is slidably connected by transverse slider with cross slide way；
The longitudinal moving mechanism includes servo longitudinal motor, longitudinal motor retainer, longitudinal ball screw, longitudinally fixed
Seat, longitudinal nut seat, 2 longitudinal rails and 4 longitudinal sliding blocks, 2 longitudinal rails are arranged on movable plate, every described
2 longitudinal sliding blocks are set on longitudinal rail, and every longitudinal rail is provided with limited block close to servo longitudinal motor side, institute
It states and is fixedly installed longitudinally fixed seat between longitudinal rail, the longitudinally fixed seat is connected with longitudinal ball screw by nut,
Longitudinal nut seat is arranged on the longitudinal direction ball screw, the longitudinal direction ball screw is connected with longitudinal direction far from longitudinally fixed seat one end
Motor drive seat, the longitudinal direction retainer are connected with servo longitudinal motor, are fixedly connected with mounting plate on the longitudinal direction nut seat, institute
It states mounting plate and is slidably connected by longitudinal sliding block with longitudinal rail, is provided in the middle part of the transverse holder and longitudinally fixed seat
Pointer；
Fixed setting is in piece motor on the mounting plate, and described connect in piece motor output end is in piece shaft coupling, described to be in
Piece shaft coupling other end connection connection vacuum chuck；Fixed block pillar is set on the pedestal, is arranged on the fixed block pillar
Lateral fixed block and longitudinally fixed piece, the transverse direction fixed block are connected with longitudinally fixed piece, the transverse direction fixed block and it is longitudinal admittedly
Determine to be provided with scale on block；
The PLC controller is connected with servo longitudinal motor, lateral servo motor and in piece motor.
Preferably, the height of the pedestal is gradually reduced from lateral servo motor end to transverse holder end.
Preferably, two cross slide ways are linear guide, and the cross slide way is arranged in parallel；Described two vertical
Direction guiding rail is linear guide, and the longitudinal rail is arranged in parallel.
Preferably, multiple installation bolts hole are provided on the pedestal.
Preferably, the lateral fixed block and longitudinally fixed piece are all made of silica gel material.
The technical program has the beneficial effect that:
One, wafer chamfering machine provided by the utility model is in sheet devices, and when first used, lateral servo motor rotation drives
Transverse ball lead screw rotation, transverse ball lead screw rotation drive lateral nut seat mobile, and lateral nut seat is mobile to drive movable plate
It is mobile, the transverse moving mechanism when the processing dimension of pointer silicon wafer at this time corresponding with lateral fixed block high scale in transverse holder
Stop motion；The rotation of servo longitudinal motor drives longitudinal ball screw rotation, and longitudinal ball screw rotation drives longitudinal nut seat
Mobile, longitudinal nut seat is mobile to drive mounting plate mobile, when on longitudinally fixed seat pointer it is corresponding with longitudinally fixed piece of high scale this
When silicon wafer processing dimension when longitudinal moving mechanism stop motion, put silicon wafer it is longitudinal so that silicon chip edge is contacted with fixed block
Mobile mechanism's reversion is in piece motor operation when longitudinal sliding block contacts limited block, 20s longitudinal moving mechanism inverted running again,
When silicon wafer contacts fixed block, silicon wafer is removed in longitudinal moving mechanism stop motion, puts new silicon wafer, longitudinal moving mechanism weight
Multiple above-mentioned movement；Transverse motion mechanism and longitudinal motion mechanism are used cooperatively, so that fixed device is able to satisfy the silicon of more sizes
Piece processing, it is higher that PLC controller automatically controls also service efficiency；Vacuum chuck uses so that fixed silicon wafer is more convenient.
Two, wafer chamfering machine provided by the utility model is in sheet devices, and the height of pedestal is from lateral servo motor end to cross
It being gradually reduced to fixing seat end, pedestal has certain gradient, and the wastes such as silicon powder that silicon wafer is ground when processing are slided along the gradient,
It is deposited on the right side of pedestal, is convenient to clean.
Three, wafer chamfering machine provided by the utility model is in sheet devices, and two cross slide ways are linear guide, the transverse direction
Guide rail is arranged in parallel, and two longitudinal rails are linear guide, and the longitudinal rail is arranged in parallel, cross slide way and vertical
The sliding on guide rail of plate and mounting plate easy to remove is arranged in parallel in direction guiding rail.
Four, wafer chamfering machine provided by the utility model is in sheet devices, is provided with multiple installation bolts hole on pedestal, is convenient for
Wafer chamfering machine is in the installation of sheet devices.
Five, wafer chamfering machine provided by the utility model is in sheet devices, and lateral fixed block and longitudinally fixed piece are all made of silicon
Glue material matter reduces the impact of silicon wafer and fixed block, prevents silicon wafer from damaging.
Detailed description of the invention
The utility model aforementioned and being detailed description below becomes more apparent upon when reading in conjunction with the following drawings, in attached drawing:
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the top view of the utility model；
Fig. 3 is the control schematic diagram of the utility model；
In figure:
1, pedestal；2, movable plate；3, mounting plate；4, lateral fixed block；5, longitudinally fixed piece；6, fixed block pillar；7, it is in
Piece motor；It 8, is in piece shaft coupling；9, PLC controller；10, vacuum chuck；11, lateral servo motor；12, transverse ball lead screw；
13, transverse holder；14, cross slide way；15, servo longitudinal motor；16, longitudinal ball screw；17, longitudinally fixed seat；18, it indulges
Direction guiding rail；19, limited block；20, pointer；21, scale.
Specific embodiment
It is further illustrated below by several specific embodiments and realizes the utility model aim technical solution, needed
Bright, the technical solution of the requires of the utility model protection includes but is not limited to following embodiment.
Embodiment 1
As a kind of most basic embodiment of the utility model, what it is present embodiment discloses a kind of wafer chamfering machine is in piece
Device, as depicted in figs. 1 and 2, including pedestal 1, movable plate 2, transverse moving mechanism, longitudinal moving mechanism, mounting plate 3, transverse direction
Fixed block 4, longitudinally fixed piece 5, fixed block pillar 6, in piece motor 7, be in piece shaft coupling 8, PLC controller 9 and vacuum chuck 10；
The transverse moving mechanism includes lateral servo motor 11, cross motor retainer, transverse ball lead screw 12, transverse direction
Fixing seat 13, lateral nut seat, 2 cross slide way 14 and 4 transverse sliders, 2 cross slide ways 14 are arranged in pedestal 1
On, 2 transverse sliders are set on every cross slide way 14, are fixedly installed transverse holder between the cross slide way 14
13, the transverse holder 13 is connected with transverse ball lead screw 12 by nut, is arranged transverse direction on the transverse ball lead screw 12
Nut seat, the transverse ball lead screw 12 is connected with cross motor retainer far from 13 one end of transverse holder, described laterally to pass
Dynamic seat is connected with lateral servo motor 11, is fixedly connected with movable plate 2 on the transverse direction nut seat, the movable plate 2 passes through transverse direction
Sliding block is slidably connected with cross slide way 14；
The longitudinal moving mechanism includes servo longitudinal motor 15, longitudinal motor retainer, longitudinal ball screw 16, longitudinal direction
Fixing seat 17, longitudinal nut seat, 2 longitudinal rail 18 and 4 longitudinal sliding blocks, 2 longitudinal rails 18 are arranged in movable plate 2
On, 2 longitudinal sliding blocks are set on every longitudinal rail 18, and every longitudinal rail 18 is close to 15 side of servo longitudinal motor
Be provided with limited block 19, be fixedly installed longitudinally fixed seat 17 between the longitudinal rail 18, the longitudinally fixed seat 17 with
Longitudinal ball screw 16 is connected by nut, and longitudinal nut seat, the longitudinal direction ball wire are arranged on the longitudinal direction ball screw 16
Bar 16 is connected with longitudinal motor retainer, the longitudinal direction retainer and 15 phase of servo longitudinal motor far from longitudinally fixed 17 one end of seat
Even, it is fixedly connected with mounting plate 3 on the longitudinal direction nut seat, the mounting plate 3, which is slided by longitudinal sliding block with longitudinal rail 18, to be connected
It connects, is provided with pointer 20 in the middle part of the transverse holder 13 and longitudinally fixed seat 17；
Fixed setting is in piece motor 7 on the mounting plate 3, and described connect in 7 output end of piece motor is in piece shaft coupling 8, institute
It states in 8 other end of piece shaft coupling connection connection vacuum chuck 10；Multiple fixed block pillars 6 are arranged in 1 upper right side of pedestal, described
Lateral fixed block 4 and longitudinally fixed piece 5 are set on fixed block pillar 6, and the transverse direction fixed block 4 is connected with longitudinally fixed piece 5, institute
It states lateral fixed block 4 and longitudinally fixed piece 5 L-shaped, be provided with scale 21 on the transverse direction fixed block 4 and longitudinally fixed piece 5；
As shown in figure 3, the PLC controller 9 is with servo longitudinal motor 15, lateral servo motor 11 and in 7 phase of piece motor
Even, the PLC controller uses Siemens S7-400.
Wafer chamfering machine provided by the utility model is in sheet devices, and when first used, the lateral rotation of servo motor 11 drives
Transverse ball lead screw 12 rotates, and the rotation of transverse ball lead screw 12 drives lateral nut seat mobile, and mobile drive of lateral nut seat is moved
Movable plate 2 is mobile, horizontal when the processing dimension of the silicon wafer at this time corresponding with lateral fixed block high scale 21 of pointer 20 in transverse holder
To mobile mechanism's stop motion；The rotation of servo longitudinal motor 15 drives longitudinal ball screw 16 to rotate, 16 turns of longitudinal ball screw
Dynamic to drive longitudinal nut seat movement, longitudinal nut seat is mobile to drive mounting plate 3 mobile, when pointer 20 on longitudinally fixed seat and longitudinal direction
When fixed block high scale 21 corresponds to the processing dimension of silicon wafer at this time, silicon wafer is put in longitudinal moving mechanism stop motion, so that silicon wafer
Edge is contacted with fixed block, longitudinal moving mechanism reversion, when longitudinal sliding block contact limit 19, is brought into operation in piece motor 7,
20s longitudinal moving mechanism inverted running again, when silicon wafer contacts fixed block, silicon wafer is removed in longitudinal moving mechanism stop motion,
New silicon wafer is put, longitudinal moving mechanism repeats above-mentioned movement；Being used cooperatively for transverse motion mechanism and longitudinal motion mechanism, makes
The silicon wafer processing that wafer chamfering machine is able to satisfy more sizes in sheet devices is obtained, PLC controller 9 automatically controls but also more efficient；
Vacuum chuck 10 uses so that fixed silicon wafer is more convenient.
Embodiment 2
As a kind of preferred embodiment of the utility model, present embodiment discloses a kind of wafer chamfering machines on chip
It sets, as depicted in figs. 1 and 2, including pedestal 1, movable plate 2, transverse moving mechanism, longitudinal moving mechanism, mounting plate 3, transverse direction are solid
Determine block 4, longitudinally fixed piece 5, fixed block pillar 6, in piece motor 7, in piece shaft coupling 8, PLC controller 9 and vacuum chuck 10；
The transverse moving mechanism includes lateral servo motor 11, cross motor retainer, transverse ball lead screw 12, transverse direction
Fixing seat 13, lateral nut seat, 2 cross slide way 14 and 4 transverse sliders, 2 cross slide ways 14 are arranged in pedestal 1
On, 2 transverse sliders are set on every cross slide way 14, are fixedly installed transverse holder between the cross slide way 14
13, the transverse holder 13 is connected with transverse ball lead screw 12 by nut, is arranged transverse direction on the transverse ball lead screw 12
Nut seat, the transverse ball lead screw 12 is connected with cross motor retainer far from 13 one end of transverse holder, described laterally to pass
Dynamic seat is connected with lateral servo motor 11, is fixedly connected with movable plate 2 on the transverse direction nut seat, the movable plate 2 passes through transverse direction
Sliding block is slidably connected with cross slide way 14；
The longitudinal moving mechanism includes servo longitudinal motor 15, longitudinal motor retainer, longitudinal ball screw 16, longitudinal direction
Fixing seat 17, longitudinal nut seat, 2 longitudinal rail 18 and 4 longitudinal sliding blocks, 2 longitudinal rails 18 are arranged in movable plate 2
On, 2 longitudinal sliding blocks are set on every longitudinal rail 18, and every longitudinal rail 18 is close to 15 side of servo longitudinal motor
Be provided with limited block 19, be fixedly installed longitudinally fixed seat 17 between the longitudinal rail 18, the longitudinally fixed seat 17 with
Longitudinal ball screw 16 is connected by nut, and longitudinal nut seat, the longitudinal direction ball wire are arranged on the longitudinal direction ball screw 16
Bar 16 is connected with longitudinal motor retainer, the longitudinal direction retainer and 15 phase of servo longitudinal motor far from longitudinally fixed 17 one end of seat
Even, it is fixedly connected with mounting plate 3 on the longitudinal direction nut seat, the mounting plate 3, which is slided by longitudinal sliding block with longitudinal rail 18, to be connected
It connects, is provided with pointer 20 in the middle part of the transverse holder 13 and longitudinally fixed seat 17；
Fixed setting is in piece motor 7 on the mounting plate 3, and described connect in 7 output end of piece motor is in piece shaft coupling 8, institute
It states in 8 other end of piece shaft coupling connection connection vacuum chuck 10；Multiple fixed block pillars 6 are arranged in 1 upper right side of pedestal, described
Lateral fixed block 4 and longitudinally fixed piece 5 are set on fixed block pillar 6, and the transverse direction fixed block 4 is connected with longitudinally fixed piece 5, institute
It states lateral fixed block 4 and longitudinally fixed piece 5 L-shaped, be provided with scale 21 on the transverse direction fixed block 4 and longitudinally fixed piece 5；
As shown in figure 3, the PLC controller 9 is with servo longitudinal motor 15, lateral servo motor 11 and in 7 phase of piece motor
Even, the PLC controller uses Siemens S7-400.
Preferably, the height of the pedestal 1 is gradually reduced from lateral 11 end of servo motor to 13 end of transverse holder.
Preferably, two cross slide ways 14 are linear guide, and the cross slide way 14 is arranged in parallel；Described two
Longitudinal rail 18 is linear guide, and the longitudinal rail 18 is arranged in parallel.
Preferably, multiple installation bolts hole are provided on the pedestal 1.
Preferably, the lateral fixed block 4 and longitudinally fixed piece 5 are all made of silica gel material.
Wafer chamfering machine provided by the utility model is in sheet devices, and when first used, the lateral rotation of servo motor 11 drives
Transverse ball lead screw 12 rotates, and the rotation of transverse ball lead screw 12 drives lateral nut seat mobile, and mobile drive of lateral nut seat is moved
Movable plate 2 is mobile, horizontal when the processing dimension of the silicon wafer at this time corresponding with lateral fixed block high scale 21 of pointer 20 in transverse holder
To mobile mechanism's stop motion；The rotation of servo longitudinal motor 15 drives longitudinal ball screw 16 to rotate, 16 turns of longitudinal ball screw
Dynamic to drive longitudinal nut seat movement, longitudinal nut seat is mobile to drive mounting plate 3 mobile, when pointer 20 on longitudinally fixed seat and longitudinal direction
When fixed block high scale 21 corresponds to the processing dimension of silicon wafer at this time, silicon wafer is put in longitudinal moving mechanism stop motion, so that silicon wafer
Edge is contacted with fixed block, longitudinal moving mechanism reversion, when longitudinal sliding block contact limit 19, is brought into operation in piece motor 7,
20s longitudinal moving mechanism inverted running again, when silicon wafer contacts fixed block, silicon wafer is removed in longitudinal moving mechanism stop motion,
New silicon wafer is put, longitudinal moving mechanism repeats above-mentioned movement；Being used cooperatively for transverse motion mechanism and longitudinal motion mechanism, makes
The silicon wafer processing that wafer chamfering machine is able to satisfy more sizes in sheet devices is obtained, PLC controller 9 automatically controls but also more efficient；
Vacuum chuck 10 uses so that fixed silicon wafer is more convenient.
The height of pedestal 1 is gradually reduced from lateral 11 end of servo motor to 13 end of transverse holder, and pedestal 1 has certain slope
Degree, the wastes such as silicon powder that silicon wafer is ground when processing are slided along the gradient, are deposited in 1 right side of pedestal, are convenient to clean.Two transverse directions
Guide rail 14 is linear guide, and the cross slide way 14 is arranged in parallel, and two longitudinal rails 18 are linear guide, the longitudinal direction
Guide rail 18 is arranged in parallel, cross slide way 14 and longitudinal rail 18 be arranged in parallel plate 2 and mounting plate 3 easy to remove in guide rail
On sliding.It is provided with multiple installation bolts hole on pedestal 1, is in the installation of sheet devices convenient for wafer chamfering machine.Lateral fixed block 4
It is all made of silica gel material with longitudinally fixed piece 5, reduces the impact of silicon wafer and fixed block, prevents silicon wafer from damaging.
Claims (5)
1. a kind of wafer chamfering machine be in sheet devices, it is characterised in that: including pedestal (1), movable plate (2), transverse moving mechanism,
Longitudinal moving mechanism, mounting plate (3), lateral fixed block (4), longitudinally fixed piece (5), fixed block pillar (6), in piece motor (7),
In piece shaft coupling (8), PLC controller (9) and vacuum chuck (10)；
The transverse moving mechanism includes lateral servo motor (11), cross motor retainer, transverse ball lead screw (12), transverse direction
Fixing seat (13), lateral nut seat, 2 cross slide ways (14) and 4 transverse sliders, 2 cross slide ways (14) setting exist
On pedestal (1), on pedestal (1) every cross slide way (14) be arranged 2 transverse sliders, the cross slide way (14) it
Between be fixedly installed transverse holder (13), the transverse holder (13) is connected with transverse ball lead screw (12) by nut,
Lateral nut seat is arranged on the transverse ball lead screw (12), the transverse ball lead screw (12) is far from transverse holder (13) one
End is connected with cross motor retainer, and the transverse direction retainer is connected with lateral servo motor (11), on the transverse direction nut seat
It is fixedly connected movable plate (2), the movable plate (2) is slidably connected by transverse slider with cross slide way (14)；
The longitudinal moving mechanism includes servo longitudinal motor (15), longitudinal motor retainer, longitudinal ball screw (16), longitudinal direction
Fixing seat (17), longitudinal nut seat, 2 longitudinal rails (18) and 4 longitudinal sliding blocks, 2 longitudinal rails (18) setting exist
On movable plate, 2 longitudinal sliding blocks are set, every longitudinal rail (18) is watched close to longitudinal on every longitudinal rail (18)
It takes motor (15) side to be provided with limited block (19), is fixedly installed longitudinally fixed seat (17) between the longitudinal rail (18),
The longitudinally fixed seat (17) is connected with longitudinal ball screw (16) by nut, is arranged on the longitudinal direction ball screw (16) vertical
To nut seat, the longitudinal direction ball screw (16) is connected with longitudinal motor retainer far from longitudinally fixed seat (17) one end, described
Longitudinal retainer is connected with servo longitudinal motor (15), is fixedly connected with mounting plate (3), the mounting plate on the longitudinal direction nut seat
(3) it is slidably connected by longitudinal sliding block with longitudinal rail (18), in the middle part of the transverse holder (13) and longitudinally fixed seat (17)
It is provided with pointer (20)；
Fixed setting is in piece motor (7) on the mounting plate (3), and described connect in piece motor (7) output end is in piece shaft coupling
(8), described in piece shaft coupling (8) other end connection connection vacuum chuck (10)；Fixed block pillar is set on the pedestal (1)
(6), lateral fixed block (4) and longitudinally fixed piece (5) be set on the fixed block pillar (6), the transverse direction fixed block (4) and is indulged
It is connected to fixed block (5), is provided with scale on the transverse direction fixed block (4) and longitudinally fixed piece (5)；
The PLC controller (9) is connected with servo longitudinal motor (15), lateral servo motor (11) and in piece motor (7).
2. a kind of wafer chamfering machine according to claim 1 is in sheet devices, it is characterised in that: the height of the pedestal (1)
Degree is gradually reduced from lateral servo motor (11) end to transverse holder (13) end.
3. a kind of wafer chamfering machine according to claim 1 is in sheet devices, it is characterised in that: two cross slide ways
It (14) is linear guide, the cross slide way (14) is arranged in parallel；Two longitudinal rails (18) are linear guide, institute
It is arranged in parallel to state longitudinal rail (18).
4. a kind of wafer chamfering machine according to claim 1 is in sheet devices, it is characterised in that: set on the pedestal (1)
It is equipped with multiple installation bolts hole.
5. a kind of wafer chamfering machine according to claim 1 is in sheet devices, it is characterised in that: the transverse direction fixed block
(4) and longitudinally fixed piece (5) is all made of silica gel material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821321820.0U CN208663357U (en) | 2018-08-16 | 2018-08-16 | A kind of wafer chamfering machine is in sheet devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821321820.0U CN208663357U (en) | 2018-08-16 | 2018-08-16 | A kind of wafer chamfering machine is in sheet devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208663357U true CN208663357U (en) | 2019-03-29 |
Family
ID=65836472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821321820.0U Active CN208663357U (en) | 2018-08-16 | 2018-08-16 | A kind of wafer chamfering machine is in sheet devices |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208663357U (en) |
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2018
- 2018-08-16 CN CN201821321820.0U patent/CN208663357U/en active Active
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