CN208663356U - A kind of wafer chamfering machine with dedusting function - Google Patents

A kind of wafer chamfering machine with dedusting function Download PDF

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Publication number
CN208663356U
CN208663356U CN201821321253.9U CN201821321253U CN208663356U CN 208663356 U CN208663356 U CN 208663356U CN 201821321253 U CN201821321253 U CN 201821321253U CN 208663356 U CN208663356 U CN 208663356U
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longitudinal
transverse
motor
rotary electric
electric machine
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陆敏
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Sichuan Jingmei Silicon Industry Technology Co Ltd
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Sichuan Jingmei Silicon Industry Technology Co Ltd
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Abstract

The utility model discloses a kind of wafer chamfering machine with dedusting function, belong to silicon chip process technology field, including rack and cabinet, it is provided in cabinet in sheet devices, dust-extraction unit, PLC control cabinet and rotating mechanism, rotary electric machine case is fixed on cabinet, rotary electric machine is mounted in rotary electric machine case, rotary electric machine output end connects rotating joint, the rotating joint other end connects grinding wheel, PLC control cabinet includes display screen, button and PLC controller, display screen and button are connected with PLC controller, PLC controller also with servo longitudinal motor, lateral servo motor, in piece motor, dedusting fan is connected with rotary electric machine.The utility model has many advantages, such as that processing dimension is wide, the degree of automation is higher and prevents silicon powder floating is aerial from influencing processing staff's health.

Description

A kind of wafer chamfering machine with dedusting function
Technical field
The utility model belongs to silicon chip process technology field, and in particular to a kind of wafer chamfering machine with dedusting function.
Background technique
Silicon is a kind of very typical semiconductor material, and content at the earth's surface is only second to oxygen, is widely used and two Pole pipe, triode, thyristor, field-effect tube and various integrated circuits, aerospace, in the multiple fields such as optical fiber, right and wrong Often important material.In the process of silicon wafer, after being cut into silicon wafer from silicon ingot, if be directly ground, it is easy to produce Chipping is scrapped so as to cause silicon wafer, therefore needs to carry out chamfering to silicon wafer before grinding.Current technology is by artificial right The silicon wafer of chipping carries out reconditioning, and labour's investment is big, and yield is small, and product qualification rate is low.
Notification number is CN205904810U, and the day for announcing is that on 01 25th, 2017 Chinese patent literatures disclose a kind of circle Shape silicon wafer fast chamfering machine, including motor, driving pulley, transmission belt, driven pulley, rotation axis, grinding wheel, fixed block, workbench, Body;It is characterized by: body is fixedly connected with workbench, workbench is fixedly connected with fixed block, body and the fixed company of motor It connects, motor is coaxially connected with driving pulley, and driving pulley is connect by transmission belt with driven pulley, and driven pulley passes through rotation axis It is fixedly connected with grinding wheel.
The patent is fixedly connected by body with workbench, and workbench is fixedly connected with fixed block, and body is fixed with motor Connection, motor is coaxially connected with driving pulley, and driving pulley is connect by transmission belt with driven pulley, and driven pulley passes through rotation Axis is fixedly connected with grinding wheel, and the present apparatus uses the grinding wheel of inner cone cavity configuration, improves chamfering efficiency, improves Business Economic Benefit, but The a large amount of silicon powders generated when being that processing dimension is single, and producing float on the health for being easy to influence processing staff in the air.
Summary of the invention
The purpose of this utility model is to provide a kind of more sizes of processing, the degree of automation is higher and prevents silicon powder floating empty The middle wafer chamfering machine for influencing processing staff's health.
The purpose of this utility model is achieved through the following technical solutions:
A kind of wafer chamfering machine with dedusting function, including rack and cabinet, it is characterised in that: setting in the cabinet Have in sheet devices, dust-extraction unit, PLC control cabinet and rotating mechanism, described in sheet devices includes pedestal, movable plate, transverse shifting Mechanism, longitudinal moving mechanism, mounting plate, lateral fixed block, longitudinally fixed piece, fixed block pillar, in piece motor, be in piece shaft coupling And vacuum chuck;
The transverse moving mechanism includes lateral servo motor, cross motor retainer, transverse ball lead screw, laterally fixes Seat, lateral nut seat, 2 cross slide ways and 4 transverse sliders, 2 cross slide ways are arranged on the base, every cross 2 transverse sliders are set on direction guiding rail, are fixedly installed transverse holder between the cross slide way, the transverse holder with Transverse ball lead screw is connected by nut, lateral nut seat is arranged on the transverse ball lead screw, the transverse ball lead screw is remote It is connected with cross motor retainer from transverse holder one end, the transverse direction retainer is connected with lateral servo motor, the cross Movable plate is fixedly connected on nut seat, the movable plate is slidably connected by transverse slider with cross slide way;Longitudinal shifting Motivation structure includes servo longitudinal motor, longitudinal motor retainer, longitudinal ball screw, longitudinally fixed seat, longitudinal nut seat, 2 Longitudinal rail and 4 longitudinal sliding blocks, 2 longitudinal rails are arranged on movable plate, and 2 are arranged on every longitudinal rail Longitudinal sliding block, longitudinally fixed seat is fixedly installed between the longitudinal rail, and the longitudinally fixed seat and longitudinal ball screw are logical It crosses nut to be connected, longitudinal nut seat is arranged on the longitudinal direction ball screw, the longitudinal direction ball screw is far from longitudinally fixed seat one End is connected with longitudinal motor retainer, and the longitudinal direction retainer is connected with servo longitudinal motor, fixed on the longitudinal direction nut seat Connection plate, the mounting plate are slidably connected by longitudinal sliding block with longitudinal rail, the transverse holder and longitudinally fixed Seat middle part is provided with pointer;Fixed setting is in piece motor on the mounting plate, described to join in the connection of piece motor output end in piece Axis device, it is described to connect vacuum chuck in the piece shaft coupling other end;Fixed block pillar, the fixed block pillar are set on the pedestal The lateral fixed block of upper setting and longitudinally fixed piece, the transverse direction fixed block is connected with longitudinally fixed piece, the transverse direction fixed block with Scale is provided on longitudinally fixed piece;
The dust-extraction unit is located above rotating mechanism, the dust-extraction unit include dust cleaning case, dust suction disc, dust absorption fan, Filter screen, exhaust outlet and sweep-up pipe, the dust cleaning case, dust absorption fan and dust suction disc are connected by sweep-up pipe, on the dust cleaning case End setting filter screen, the exhaust outlet are arranged at the top of dust cleaning case;
The rotating mechanism includes rotary electric machine, rotating joint, grinding wheel and rotary electric machine case, and the rotary electric machine case is solid Fixed to be arranged on cabinet, the rotary electric machine is mounted in rotary electric machine case, the rotary electric machine output end connection rotation shaft coupling Device, the rotating joint other end connect grinding wheel;
The PLC control cabinet includes display screen, button and PLC controller, and the display screen and button are and PLC controller It is connected, the PLC controller is also with servo longitudinal motor, lateral servo motor, in piece motor, dust absorption fan and rotary electric machine phase Even.
Preferably, the dedusting lower box part is provided with dust discharge door.
Preferably, rotary electric machine lower box part is provided with support rod, and described support rod one end is connected with rotary electric machine bottom portion, The support rod other end is connected with cabinet wall.
Preferably, the surface of revolution of the grinding wheel is provided with grind reliefs, and the grind reliefs are T-type or R type.
Preferably, universal wheel is provided with below the rack, the universal wheel has brake gear.
The technical program has the beneficial effect that:
One, the wafer chamfering machine provided by the utility model with dedusting function, including rack and cabinet, in the cabinet Be provided in sheet devices, dust-extraction unit, PLC control cabinet and rotating mechanism, PLC control cabinet control in sheet devices, rotating mechanism and Dust-extraction unit, the degree of automation are higher, more energy efficient;Preset time is first preset by PLC controller, transverse moving mechanism is mobile Stop movement to position corresponding to production die size, longitudinal moving mechanism is moved to position corresponding to production die size Stop motion is put into silicon wafer, contacts silicon chip edge with lateral fixed block and longitudinally fixed piece, longitudinal moving mechanism is moved to silicon When piece and rotating mechanism contact, longitudinal moving mechanism stop motion runs preset time in piece motor and rotary electric machine at this time, in advance If longitudinal moving mechanism counter motion after the time, the longitudinal moving mechanism stop motion when silicon wafer contacts fixed block is removed Silicon wafer, is put into new silicon wafer, and longitudinal moving mechanism repeats above-mentioned movement;Pointer cooperation on indentation and fixing seat on fixed block The processing dimension for determining wafer chamfering machine at this time can be made by transverse moving mechanism and being used cooperatively for longitudinal moving mechanism The processing dimension of the utility model is wider, and practicability is stronger;Movable plate is slidably connected by transverse slider with cross slide way, is increased Stationarity when movable plate is mobile, mounting plate are slidably connected with longitudinal rail by longitudinal sliding block, increase mounting plate and move When stationarity;Silicon powder is sucked dust cleaning case by dust-extraction unit when wafer chamfering, and the limited silicon powder that reduces floats in the sky, guarantees to add Worker person will not be because of actual bodily harm caused by silicon powder.
Two, the wafer chamfering machine provided by the utility model with dedusting function, dedusting lower box part are provided with dust discharge door, remove The silicon powder discharge for being piled up in dust cleaning case is conveniently said in the setting of dirt door, facilitates operation.
Three, the wafer chamfering machine provided by the utility model with dedusting function, rotary electric machine lower box part are provided with support Bar, described support rod one end are connected with rotary electric machine bottom portion, and the support rod other end is connected with cabinet wall, increase rotation The stability of motor housing.
Four, the wafer chamfering machine provided by the utility model with dedusting function, the surface of revolution of grinding wheel are provided with grind reliefs, The grind reliefs are T-type or R type, and T-type or R type are the common shape of wafer chamfering processing, meet normal production needs.
Five, the wafer chamfering machine provided by the utility model with dedusting function, rack lower section is provided with universal wheel, described Universal wheel has brake gear, so that the present apparatus is mobile more convenient, the setting of brake gear guarantees that device makes for the setting of universal wheel Used time position is fixed.
Detailed description of the invention
The utility model aforementioned and being detailed description below becomes more apparent upon when reading in conjunction with the following drawings, in attached drawing:
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is the structural schematic diagram that the utility model is in sheet devices;
Fig. 3 is the top view that the utility model is in sheet devices;
In figure:
1, rack;2, cabinet;It 3, is in sheet devices;4, tank for coolant;5, PLC control cabinet;6, pedestal;7, movable plate;8, pacify Loading board;9, lateral fixed block;10, longitudinally fixed piece;11, fixed block pillar;It 12, is in piece motor;It 13, is in piece shaft coupling;14, true Suction disk;15, lateral servo motor;16, transverse ball lead screw;17, transverse holder;18, cross slide way;19, servo longitudinal Motor;20, longitudinal ball screw;21, longitudinally fixed seat;22, longitudinal rail;23, dust cleaning case;24, dust suction disc;25, dust suction wind Machine;26, filter screen;27, exhaust outlet;28, sweep-up pipe;29, rotary electric machine;30, rotating joint;31, grinding wheel;32, rotation electricity Cabinet;33, display screen;34, button;35, dust discharge door;36, support rod;37, universal wheel;38, brake gear.
Specific embodiment
It is further illustrated below by several specific embodiments and realizes the utility model aim technical solution, needed Bright, the technical solution of the requires of the utility model protection includes but is not limited to following embodiment.
Embodiment 1
As a kind of most basic embodiment of the utility model, present embodiment discloses a kind of silicon with dedusting function Piece beveler is provided in the cabinet 2 in sheet devices 3, dust-extraction unit 4, PLC as shown in Figure 1, including rack 1 and cabinet 2 Control cabinet 5 and rotating mechanism, it is described to include pedestal 6, movable plate 7, transverse moving mechanism, longitudinal moving mechanism, peace in sheet devices 3 Loading board 8, lateral fixed block 9, longitudinally fixed piece 10, fixed block pillar 11, in piece motor 12, be in piece shaft coupling 13 and vacuum chuck 14;
As shown in Figures 2 and 3, the transverse moving mechanism includes lateral servo motor 15, cross motor retainer, transverse direction Ball screw 16, transverse holder 17, lateral nut seat, 2 cross slide way 18 and 4 transverse sliders, 2 cross slide ways 18 are arranged on pedestal 7, and 2 transverse sliders are arranged on every cross slide way 18, and fixation is set between the cross slide way 18 It is equipped with transverse holder 17, the transverse holder 17 is connected with transverse ball lead screw 16 by nut, the transverse direction ball wire Lateral nut seat is arranged on bar 16, the transverse ball lead screw 16 is connected with cross motor transmission far from 17 one end of transverse holder Seat, the transverse direction retainer are connected with lateral servo motor 15, are fixedly connected with movable plate 7, the shifting on the transverse direction nut seat Movable plate 7 is slidably connected by transverse slider with cross slide way 18;The longitudinal moving mechanism includes servo longitudinal motor 19, longitudinal direction Motor drive seat, longitudinal ball screw 20, longitudinally fixed seat 21, longitudinal nut seat, 2 longitudinal rail 22 and 4 longitudinal sliding blocks, 2 longitudinal rails 2 are arranged on movable plate 7, and 2 longitudinal sliding blocks, the longitudinal direction are arranged on every longitudinal rail 22 Longitudinally fixed seat 21 is fixedly installed between guide rail 22, the longitudinally fixed seat 21 passes through nut phase with longitudinal ball screw 20 Even, longitudinal nut seat is arranged on the longitudinal direction ball screw 20, the longitudinal direction ball screw 20 is far from longitudinally fixed 21 one end of seat It is connected with longitudinal motor retainer, the longitudinal direction retainer is connected with servo longitudinal motor 19, fixed on the longitudinal direction nut seat Connection plate 8, the mounting plate 8 are slidably connected by longitudinal sliding block with longitudinal rail 22, the transverse holder 17 and vertical Pointer is provided in the middle part of to fixing seat 21;Fixed setting is in piece motor 12 on the mounting plate 8, described to export in piece motor 12 End connection is in piece shaft coupling 13, and described in 13 other end of piece shaft coupling connection connection vacuum chuck 14, the vacuum chuck 14 connects Vacuum generator is connect, the vacuum generator is arranged in cabinet;Multiple fixed block pillars 11 are arranged in 6 upper right side of pedestal, Lateral fixed block 9 and longitudinally fixed piece 10 be set on the fixed block pillar 11, the transverse direction fixed block 9 and longitudinally fixed piece 10 Be connected, it is described transverse direction fixed block 9 be connected with longitudinally fixed piece 10 it is L-shaped, it is described transverse direction fixed block 9 and longitudinally fixed piece 10 on set It is equipped with scale;
The dust-extraction unit 4 is located above rotating mechanism, and the dust-extraction unit 4 includes dust cleaning case 23, dust suction disc 24, dust suction Blower 25, filter screen 26, exhaust outlet 27 and sweep-up pipe 28, the dust cleaning case 23, dust absorption fan 25 and dust suction disc 24 pass through dust suction Pipe 28 connects, and filter screen 26 is arranged in 23 upper end of dust cleaning case, and the setting of exhaust outlet 27 is at 23 top of dust cleaning case;
The rotating mechanism includes rotary electric machine 29, rotating joint 30, rotation described in grinding wheel 31 and rotary electric machine case 32 Motor housing 32 is fixed on cabinet 2, and the rotary electric machine 29 is mounted in rotary electric machine case 32, and the rotary electric machine 29 is defeated Outlet connects rotating joint 30, and 30 other end of rotating joint connects grinding wheel 31, and 31 surface of revolution of grinding wheel is close to be in One end of sheet devices 3 is flushed with longitudinally fixed piece 10 close in one end of sheet devices 3;
The PLC control cabinet 5 includes display screen 33, button 34 and PLC controller, and the PLC controller uses Siemens S7-400, the display screen 33 and button 34 are connected with PLC controller, and the button 34 cooperates with PLC controller for adjusting Whole preset time, the PLC controller is also with servo longitudinal motor 19, lateral servo motor 15, in piece motor 12, rotary electric machine 29, dust absorption fan 25 is connected with vacuum generator, and the display screen 33 is for showing servo longitudinal motor 19, lateral servo motor 15, in the operating status of piece motor 12, rotary electric machine 29, dust absorption fan 25 and vacuum generator.
Wafer chamfering machine provided by the utility model with dedusting function, including rack 1 and cabinet 2, in the cabinet 2 It is provided in sheet devices 3, dust-extraction unit 4, PLC control cabinet 5 and rotating mechanism, the control of PLC control cabinet 5 is in sheet devices 3 and rotation Mechanism kinematic, the degree of automation are higher, more energy efficient;Preset time is first preset by PLC controller, transverse moving mechanism is mobile Stop movement to position corresponding to production die size, longitudinal moving mechanism is moved to position corresponding to production die size Stop motion is put into silicon wafer, contacts silicon chip edge with lateral fixed block 9 and longitudinally fixed piece 10, longitudinal moving mechanism is mobile When contacting to silicon wafer and rotating mechanism, longitudinal moving mechanism stop motion is run in piece motor 12 and rotary electric machine 24 pre- at this time If the time, longitudinal moving mechanism counter motion after preset time, when silicon wafer contacts fixed block, longitudinal moving mechanism stops Movement, removes silicon wafer, is put into new silicon wafer, and longitudinal moving mechanism repeats above-mentioned movement;On indentation and fixing seat on fixed block Pointer cooperation determine the processing dimension of wafer chamfering machine at this time, made by the cooperation of transverse moving mechanism and longitudinal moving mechanism With the processing dimension of the utility model can be made wider, practicability is stronger;Movable plate 7 is by transverse slider with cross slide way 18 It being slidably connected, increases the stationarity when movement of movable plate 7, mounting plate 8 is slidably connected by longitudinal sliding block with longitudinal rail 22, Increase the stationarity when movement of mounting plate 8;Silicon powder is sucked dust cleaning case 23 by dust-extraction unit 4 when wafer chamfering, limited to reduce Silicon powder floats in the sky, guarantees that processing staff will not be because of actual bodily harm caused by silicon powder.
The working principle of the utility model are as follows: when first used, the lateral rotation of servo motor 15 drives transverse ball lead screw 16 rotations, the rotation of transverse ball lead screw 16 drive lateral nut seat mobile, and lateral nut seat is mobile to drive movable plate 7 mobile, when Transverse moving mechanism stops when the processing dimension of pointer silicon wafer at this time corresponding with lateral 9 high scale of fixed block in transverse holder 17 Movement;The rotation of servo longitudinal motor 19 drives longitudinal ball screw 20 to rotate, and longitudinal rotation of ball screw 20 drives longitudinal nut Seat is mobile, and longitudinal nut seat is mobile to drive mounting plate 8 mobile, when pointer on longitudinally fixed seat 21 and longitudinally fixed piece of 10 high scales Longitudinal moving mechanism stop motion when the corresponding processing dimension of silicon wafer at this time, puts silicon wafer, so that silicon chip edge connects with fixed block Touching, longitudinal moving mechanism reversion are run, preset time knot when silicon wafer contacts grinding wheel 31 in piece motor 12 and rotary electric machine 29 Shu Hou, longitudinal moving mechanism inverted running again, when silicon wafer contacts fixed block, silicon is removed in longitudinal moving mechanism stop motion Piece, puts new silicon wafer, and longitudinal moving mechanism repeats above-mentioned movement.
Embodiment 2
As a kind of preferred embodiment of the utility model, present embodiment discloses a kind of silicon wafers with dedusting function Beveler is provided in the cabinet 2 as shown in Figure 1, including rack 1 and cabinet 2 in sheet devices 3, dust-extraction unit 4, PLC control Case 5 and rotating mechanism processed, it is described to include pedestal 6, movable plate 7, transverse moving mechanism, longitudinal moving mechanism, installation in sheet devices 3 Plate 8, lateral fixed block 9, longitudinally fixed piece 10, fixed block pillar 11, in piece motor 12, be in piece shaft coupling 13 and vacuum chuck 14;
As shown in Figures 2 and 3, the transverse moving mechanism includes lateral servo motor 15, cross motor retainer, transverse direction Ball screw 16, transverse holder 17, lateral nut seat, 2 cross slide way 18 and 4 transverse sliders, 2 cross slide ways 18 are arranged on pedestal 7, and 2 transverse sliders are arranged on every cross slide way 18, and fixation is set between the cross slide way 18 It is equipped with transverse holder 17, the transverse holder 17 is connected with transverse ball lead screw 16 by nut, the transverse direction ball wire Lateral nut seat is arranged on bar 16, the transverse ball lead screw 16 is connected with cross motor transmission far from 17 one end of transverse holder Seat, the transverse direction retainer are connected with lateral servo motor 15, are fixedly connected with movable plate 7, the shifting on the transverse direction nut seat Movable plate 7 is slidably connected by transverse slider with cross slide way 18;The longitudinal moving mechanism includes servo longitudinal motor 19, longitudinal direction Motor drive seat, longitudinal ball screw 20, longitudinally fixed seat 21, longitudinal nut seat, 2 longitudinal rail 22 and 4 longitudinal sliding blocks, 2 longitudinal rails 2 are arranged on movable plate 7, and 2 longitudinal sliding blocks, the longitudinal direction are arranged on every longitudinal rail 22 Longitudinally fixed seat 21 is fixedly installed between guide rail 22, the longitudinally fixed seat 21 passes through nut phase with longitudinal ball screw 20 Even, longitudinal nut seat is arranged on the longitudinal direction ball screw 20, the longitudinal direction ball screw 20 is far from longitudinally fixed 21 one end of seat It is connected with longitudinal motor retainer, the longitudinal direction retainer is connected with servo longitudinal motor 19, fixed on the longitudinal direction nut seat Connection plate 8, the mounting plate 8 are slidably connected by longitudinal sliding block with longitudinal rail 22, the transverse holder 17 and vertical Pointer is provided in the middle part of to fixing seat 21;Fixed setting is in piece motor 12 on the mounting plate 8, described to export in piece motor 12 End connection is in piece shaft coupling 13, described to connect vacuum chuck 14 in 13 other end of piece shaft coupling, and the vacuum chuck 14 connects very Empty generator, the vacuum generator are arranged in cabinet;Multiple fixed block pillars 11 are arranged in 6 upper right side of pedestal, described Lateral fixed block 9 and longitudinally fixed piece 10, the transverse direction fixed block 9 and longitudinally fixed piece of 10 phases are set on fixed block pillar 11 Even, it is described transverse direction fixed block 9 be connected with longitudinally fixed piece 10 it is L-shaped, it is described transverse direction fixed block 9 and longitudinally fixed piece 10 on be arranged There is scale;
The dust-extraction unit 4 is located above rotating mechanism, and the dust-extraction unit 4 includes dust cleaning case 23, dust suction disc 24, dust suction Blower 25, filter screen 26, exhaust outlet 27 and sweep-up pipe 28, the dust cleaning case 23, dust absorption fan 25 and dust suction disc 24 pass through dust suction Pipe 28 connects, and filter screen 26 is arranged in 23 upper end of dust cleaning case, and the setting of exhaust outlet 27 is at 23 top of dust cleaning case;
The rotating mechanism includes rotary electric machine 29, rotating joint 30, rotation described in grinding wheel 31 and rotary electric machine case 32 Motor housing 32 is fixed on cabinet 2, and the rotary electric machine 29 is mounted in rotary electric machine case 32, and the rotary electric machine 29 is defeated Outlet connects rotating joint 30, and 30 other end of rotating joint connects grinding wheel 31, and 31 surface of revolution of grinding wheel is close to be in One end of sheet devices 3 is flushed with longitudinally fixed piece 10 close in one end of sheet devices 3;
The PLC control cabinet 5 includes display screen 33, button 34 and PLC controller, and the PLC controller uses Siemens S7-400, the display screen 33 and button 34 are connected with PLC controller, and the button 34 cooperates with PLC controller for adjusting Whole preset time, the PLC controller is also with servo longitudinal motor 19, lateral servo motor 15, in piece motor 12, rotary electric machine 29, dust absorption fan 25 is connected with vacuum generator, and the display screen 33 is for showing servo longitudinal motor 19, lateral servo motor 15, in the operating status of piece motor 12, rotary electric machine 29, dust absorption fan 25 and vacuum generator.
Preferably, 23 lower part of dust cleaning case is provided with dust discharge door 35.
Preferably, 32 lower part of rotary electric machine case is provided with support rod 36, described 36 one end of support rod and rotary electric machine case 32 Bottom is connected, and 36 other end of support rod is connected with 2 inner wall of cabinet.
Preferably, the surface of revolution of the grinding wheel 31 is provided with grind reliefs, and the grind reliefs are T-type or R type.
Preferably, universal wheel 37 is provided with below the rack 1, the universal wheel 37 has brake gear 38.
Wafer chamfering machine provided by the utility model with dedusting function, including rack 1 and cabinet 2, in the cabinet 2 It is provided in sheet devices 3, dust-extraction unit 4, PLC control cabinet 5 and rotating mechanism, the control of PLC control cabinet 5 is in sheet devices 3 and rotation Mechanism kinematic, the degree of automation are higher, more energy efficient;Preset time is first preset by PLC controller, transverse moving mechanism is mobile Stop movement to position corresponding to production die size, longitudinal moving mechanism is moved to position corresponding to production die size Stop motion is put into silicon wafer, contacts silicon chip edge with lateral fixed block 9 and longitudinally fixed piece 10, longitudinal moving mechanism is mobile When contacting to silicon wafer and rotating mechanism, longitudinal moving mechanism stop motion is run in piece motor 12 and rotary electric machine 24 pre- at this time If the time, longitudinal moving mechanism counter motion after preset time, when silicon wafer contacts fixed block, longitudinal moving mechanism stops Movement, removes silicon wafer, is put into new silicon wafer, and longitudinal moving mechanism repeats above-mentioned movement;On indentation and fixing seat on fixed block Pointer cooperation determine the processing dimension of wafer chamfering machine at this time, made by the cooperation of transverse moving mechanism and longitudinal moving mechanism With the processing dimension of the utility model can be made wider, practicability is stronger;Movable plate 7 is by transverse slider with cross slide way 18 It being slidably connected, increases the stationarity when movement of movable plate 7, mounting plate 8 is slidably connected by longitudinal sliding block with longitudinal rail 22, Increase the stationarity when movement of mounting plate 8;Silicon powder is sucked dust cleaning case 23 by dust-extraction unit 4 when wafer chamfering, limited to reduce Silicon powder floats in the sky, guarantees that processing staff will not be because of actual bodily harm caused by silicon powder.
The working principle of the utility model are as follows: when first used, the lateral rotation of servo motor 15 drives transverse ball lead screw 16 rotations, the rotation of transverse ball lead screw 16 drive lateral nut seat mobile, and lateral nut seat is mobile to drive movable plate 7 mobile, when Transverse moving mechanism stops when the processing dimension of pointer silicon wafer at this time corresponding with lateral 9 high scale of fixed block in transverse holder 17 Movement;The rotation of servo longitudinal motor 19 drives longitudinal ball screw 20 to rotate, and longitudinal rotation of ball screw 20 drives longitudinal nut Seat is mobile, and longitudinal nut seat is mobile to drive mounting plate 8 mobile, when pointer on longitudinally fixed seat 21 and longitudinally fixed piece of 10 high scales Longitudinal moving mechanism stop motion when the corresponding processing dimension of silicon wafer at this time, puts silicon wafer, so that silicon chip edge connects with fixed block Touching, longitudinal moving mechanism reversion are run, preset time knot when silicon wafer contacts grinding wheel 31 in piece motor 12 and rotary electric machine 29 Shu Hou, longitudinal moving mechanism inverted running again, when silicon wafer contacts fixed block, silicon is removed in longitudinal moving mechanism stop motion Piece, puts new silicon wafer, and longitudinal moving mechanism repeats above-mentioned movement.
23 lower part of dust cleaning case is provided with dust discharge door 35, and the silicon powder row for being piled up in dust cleaning case 23 is conveniently said in the setting of dust removal door 35 Out, facilitate operation.32 lower part of rotary electric machine case is provided with support rod 36, described 36 one end of support rod and 32 bottom of rotary electric machine case It is connected, 36 other end of support rod is connected with 2 inner wall of cabinet, increases the stability of rotary electric machine case 32.The revolution of grinding wheel 31 Face is provided with grind reliefs, and the grind reliefs are T-type or R type, and T-type or R type are the common shape of wafer chamfering processing, meets normal Production need.Universal wheel 37 is provided with below rack 1, the universal wheel 37 has brake gear 38, the setting of universal wheel 37 So that the present apparatus is mobile more convenient, the setting of brake gear 38 guarantee device using when position fix.

Claims (5)

1. a kind of wafer chamfering machine with dedusting function, including rack (1) and cabinet (2), it is characterised in that: the cabinet (2) it is provided in sheet devices (3), dust-extraction unit (4), PLC control cabinet (5) and rotating mechanism, it is described to include in sheet devices (3) It is pedestal (6), movable plate (7), transverse moving mechanism, longitudinal moving mechanism, mounting plate (8), lateral fixed block (9), longitudinally fixed Block (10), fixed block pillar (11) are in piece motor (12), in piece shaft coupling (13) and vacuum chuck (14);
The transverse moving mechanism includes lateral servo motor (15), cross motor retainer, transverse ball lead screw (16), transverse direction Fixing seat (17), lateral nut seat, 2 cross slide ways (18) and 4 transverse sliders, 2 cross slide ways (18) setting exist On pedestal (6), 2 transverse sliders are set on every cross slide way (18), are fixedly installed between the cross slide way (18) Have transverse holder (17), the transverse holder (17) is connected with transverse ball lead screw (16) by nut, the laterally rolling Lateral nut seat is arranged on ballscrew (16), the transverse ball lead screw (16) is connected with cross far from transverse holder (17) one end To motor drive seat, the transverse direction retainer is connected with lateral servo motor (15), is fixedly connected with shifting on the transverse direction nut seat Movable plate (7), the movable plate (7) are slidably connected by transverse slider with cross slide way (18);The longitudinal moving mechanism includes Servo longitudinal motor (19), longitudinal motor retainer, longitudinal ball screw (20), longitudinally fixed seat (21), longitudinal nut seat, 2 Longitudinal rail (22) and 4 longitudinal sliding blocks, 2 longitudinal rails (22) are arranged on movable plate (7), every longitudinal direction 2 longitudinal sliding blocks are set on guide rail (22), are fixedly installed longitudinally fixed seat (21) between the longitudinal rail (22), it is described vertical It is connected to fixing seat (21) with longitudinal ball screw (20) by nut, is arranged longitudinal nut on the longitudinal direction ball screw (20) Seat, the longitudinal direction ball screw (20) are connected with longitudinal motor retainer, longitudinal biography far from longitudinally fixed seat (21) one end Dynamic seat is connected with servo longitudinal motor (19), is fixedly connected mounting plate (8) on the longitudinal direction nut seat, the mounting plate (8) is logical It crosses longitudinal sliding block to be slidably connected with longitudinal rail (22), be respectively provided in the middle part of the transverse holder (17) and longitudinally fixed seat (21) There is pointer;Fixed setting is in piece motor (12) on the mounting plate (8), and described connect in piece motor (12) output end is in piece shaft coupling Device (13), it is described in piece shaft coupling (13) other end connection connection vacuum chuck (14);Fixed block branch is set on the pedestal (6) Lateral fixed block (9) and longitudinally fixed piece (10), the lateral fixed block are arranged on the fixed block pillar (11) for column (11) (9) it is connected with longitudinally fixed piece (10), is provided with scale on the transverse direction fixed block (9) and longitudinally fixed piece (10);
The dust-extraction unit (4) is located above rotating mechanism, the dust-extraction unit (4) include dust cleaning case (23), dust suction disc (24), Dust absorption fan (25), filter screen (26), exhaust outlet (27) and sweep-up pipe (28), the dust cleaning case (23), dust absorption fan (25) and Dust suction disc (24) is connected by sweep-up pipe (28), and filter screen (26) are arranged in dust cleaning case (23) upper end, the exhaust outlet (27) Setting is at the top of dust cleaning case (23);
The rotating mechanism includes rotary electric machine (29), rotating joint (30), grinding wheel (31) and rotary electric machine case (32), described Rotary electric machine case (32) is fixed on cabinet (2), and the rotary electric machine (29) is mounted in rotary electric machine case (32), described Rotary electric machine (29) output end connects rotating joint (30), and rotating joint (30) other end connects grinding wheel (31);
The PLC control cabinet (5) includes display screen (33), button (34) and PLC controller, the display screen (33) and button (34) it is connected with PLC controller, the PLC controller is also with servo longitudinal motor (19), lateral servo motor (15), in piece Motor (12), dust absorption fan (25) are connected with rotary electric machine (29).
2. a kind of wafer chamfering machine with dedusting function according to claim 1, it is characterised in that: the dust cleaning case (23) lower part is provided with dust discharge door (35).
3. a kind of wafer chamfering machine with dedusting function according to claim 1, it is characterised in that: the rotary electric machine Case (32) lower part is provided with support rod (36), and described support rod (36) one end is connected with rotary electric machine case (32) bottom, the branch Strut (36) other end is connected with cabinet (2) inner wall.
4. a kind of wafer chamfering machine with dedusting function according to claim 1, it is characterised in that: the grinding wheel (31) The surface of revolution be provided with grind reliefs, the grind reliefs are T-type or R type.
5. a kind of wafer chamfering machine with dedusting function according to claim 1, it is characterised in that: the rack (1) Lower section is provided with universal wheel (37), and the universal wheel (37) has brake gear (38).
CN201821321253.9U 2018-08-16 2018-08-16 A kind of wafer chamfering machine with dedusting function Active CN208663356U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110473774A (en) * 2019-08-23 2019-11-19 大同新成新材料股份有限公司 A kind of dustless processing technology of chip silicon production
CN113084685A (en) * 2021-06-09 2021-07-09 江苏振宁半导体研究院有限公司 Device and method for manufacturing electric element of power electronic

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110473774A (en) * 2019-08-23 2019-11-19 大同新成新材料股份有限公司 A kind of dustless processing technology of chip silicon production
CN113084685A (en) * 2021-06-09 2021-07-09 江苏振宁半导体研究院有限公司 Device and method for manufacturing electric element of power electronic

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