CN208517575U - A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal furnace - Google Patents
A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal furnace Download PDFInfo
- Publication number
- CN208517575U CN208517575U CN201820948870.5U CN201820948870U CN208517575U CN 208517575 U CN208517575 U CN 208517575U CN 201820948870 U CN201820948870 U CN 201820948870U CN 208517575 U CN208517575 U CN 208517575U
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- Prior art keywords
- water inlet
- water
- skirt
- turnover panel
- single crystal
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- Withdrawn - After Issue
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- 239000013078 crystal Substances 0.000 title claims abstract description 32
- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 16
- 239000010703 silicon Substances 0.000 title claims abstract description 16
- 230000007306 turnover Effects 0.000 claims abstract description 48
- 239000000498 cooling water Substances 0.000 claims abstract description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 80
- 230000008676 import Effects 0.000 claims description 15
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 2
- 102000010637 Aquaporins Human genes 0.000 claims 11
- 108091006146 Channels Proteins 0.000 claims 5
- 108010063290 Aquaporins Proteins 0.000 claims 1
- 238000001816 cooling Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000012010 growth Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000029087 digestion Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000021332 multicellular organism growth Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of flap valve for semiconductor silicon single crystal furnace, the connecting plate including turnover panel, torsion shaft, connection torsion shaft and turnover panel；Water channel is wherein provided with inside turnover panel, can the water channel flowing by way of introducing cooling water inside turnover panel take away the heat of turnover panel, it is cooling to achieve the effect that, intake tunnel and drainage channel are introduced respectively from two axis bodies in torsion shaft simultaneously, it does not need that other pipeline configurations are arranged again again in this way, the introducing of cooling water directly can be realized using torsion shaft existing for itself.
Description
Technical field
The utility model relates to monocrystal stove technical fields.
Background technique
Monocrystalline silicon is the crystal with basic complete lattice structure, is a kind of good semiconductor material, purity is reachable
To 99.9999999% or more, it can be used for diode grade, rectifying device grade, circuit-level and solar battery grade single crystal product article
Production and deep processing manufacture, subsequent product integrated circuit and semiconductor separation part are widely used to every field and are in
The forward position of new material development.Semiconductor grade monocrystal stove is crystal growth equipment important in monocrystalline silicon industrial chain, currently, the world
There are mainly two types of the upper main stream approach for silicon single crystal body growth: one is zone-melting process, another kind is vertical pulling method, wherein vertical pulling method
Have many advantages, such as that growth monocrystalline quality is big, diameter is big, low in cost, high production efficiency, is always prepared by bulk silicon substrate
Main means.
In the single crystal growing furnace using vertical pulling method, middle section is equipped with an isolation valve seat, and flap valve is equipped in isolation valve seat, main
It is used to be isolated main furnace chamber and secondary furnace chamber, realizes the different job requirement of two furnace chambers.
In the technical solution of a kind of single crystal growing furnace turnover panel unscrewing mechanism as disclosed in Chinese patent ZL 201720398047.7,
A kind of flap valve suitable for valve seat is isolated is disclosed, is equally also disclosed in Chinese patent ZL 201220040686.3
A kind of flap valve suitable for valve seat is isolated in single crystal growing furnace.
But flap valve in the prior art the problem is that: due in single crystal growing furnace main furnace chamber and secondary furnace chamber temperature very
Height, the flap valve inevitably generate high temperature deformation at high temperature, and sealing effect when obviously cannot keep initial after deforming.
Summary of the invention
Goal of the invention: a kind of flap valve for semiconductor silicon single crystal furnace is provided, how be able to solve uses flap valve
When cooling technical problem, and keep part-structure of the flap valve for cooling secured, be hardly damaged.
In addition the utility model provides a kind of single crystal growing furnace comprising flap valve, which can be cooling to flap valve.
Technical solution: in order to achieve the above objectives, flap valve of the utility model for semiconductor silicon single crystal furnace furnace can be used
Following technical solution:
A kind of flap valve for semiconductor silicon single crystal furnace, the connection including turnover panel, torsion shaft, connection torsion shaft and turnover panel
Plate；The second axle body that the torsion shaft includes axle sleeve, is plugged in axle sleeve one end the first axle body, is plugged in the axle sleeve other end, first
Axis body, the second axle body and axle sleeve are coaxially disposed；The turnover panel central location is equipped with a pair of of pedestal protruding upward, between the pedestal
It is transversely provided with shaft, one end of the connecting plate is fixedly connected on axle sleeve and the other end of connecting plate is cut with scissors by shaft and pedestal
It connects；Several interconnected water channels are equipped in the turnover panel, and the import of the water channel and outlet are close positioned at the upper surface of turnover panel
The position of axle sleeve；The drainpipe for also setting up and being connected to the water inlet pipe of the water channel import, be connected to water channel outlet；The first axle body is set
Have intake tunnel, one end of the intake tunnel penetrates through the outer end of the first axle body, the other end connection of the intake tunnel it is described into
Water pipe simultaneously passes through water inlet pipe and water channel inlet communication；The second axle body is equipped with drainage channel, and one end of the drainage channel penetrates through
The outer end of the second axle body, the other end of the drainage channel connect the drainpipe and by drainpipe and water channel outlets；
The water inlet pipe includes water inlet skirt and water inlet bend pipe, and the water inlet bend pipe is bent extension above turnover panel, and bend pipe of intaking
One end connection water inlet skirt and the other end is connected to water channel import, described water inlet skirt one end connection water inlet bend pipe and other end connection
Intake tunnel；The drainpipe includes draining skirt and drain elbow, and the drain elbow is bent extension above turnover panel, and arranges
One end connection draining skirt of water bend pipe and the outlet of other end connection water channel, described draining skirt one end connection drain elbow and it is another
One end communicated drainage channel.
The utility model has the advantages that water channel is provided in the flap valve of the utility model inside turnover panel, it can be by introducing cooling water
Water channel flowing of the mode inside turnover panel take away the heat of turnover panel, it is cooling to achieve the effect that.And how to introduce cooling water
Turnover panel, two axis bodies used from torsion shaft innovated in the utility model introduce intake tunnel and drainage channel respectively,
It does not need that other pipeline configurations are arranged again again in this way, drawing for cooling water directly can be realized using torsion shaft existing for itself
Enter.
Simultaneously as one end of connecting plate is fixedly connected on axle sleeve and the other end of connecting plate is cut with scissors by shaft and pedestal
It connects；If directly by torsion shaft intake tunnel and drainage channel connected by the water channel in the metal tube and turnover panel of linear
It is logical, then it will appear when turnover panel lifts or decline, turnover panel can rotate one relative to connecting plate because of connecting plate and pedestal hinged
The metal tube of a angle, such linear will obviously be pullled and is damaged, in order to further solve this problem, this reality
With also being set as including the two-part of skirt and bend pipe of intaking of intaking by water inlet pipe in novel, same drainpipe also includes that draining is drawn
The two-part of pipe and drain elbow pulls deformation for water inlet pipe and drainpipe in this way when turnover panel is with respect to connecting plate rotation
By being distributed on water inlet bend pipe and drain elbow for dispersion, and since metal winding pipe itself can have certain elastic deformation energy
Power, and when bend pipe of intaking is longer with drain elbow, the deformation of pullling of generation is uniformly distributed digestion in water inlet bend pipe and row
Without causing biggish deformation to individual pipeline sections in the entirety of water bend pipe, thus while ensure that turnover panel rotation, also not
Water inlet pipe and drainpipe can be damaged, makes the integrated piping sound construction of cooling water introducing, be hardly damaged.
Further, the water inlet bend pipe is arc-shaped, and the drain elbow is also arc-shaped, and bend pipe of intaking is draining
The outside of bend pipe extends.Can make full use of in this way the space above turnover panel and make into water bend pipe, drain elbow length as far as possible
Extend, so that water inlet bend pipe and drain elbow can adapt to bigger deformation.
Further, the water inlet bend pipe surrounds similar round, and drain elbow equally surrounds similar round, and drains skirt and be located at
It intakes between bend pipe and water channel import junction and water inlet bend pipe and the junction for skirt of intaking.Similar round is i.e. in the utility model
In be a kind of longest arrangement mode.
Further, the water inlet skirt, water inlet bend pipe, draining skirt, drain elbow are metal tube.
Further, the draining skirt is longer than water inlet skirt.
Further, cooling water is injected to the intake tunnel of the first axle body, cooling water successively passes through intake tunnel, water inlet is drawn
Pipe, water inlet bend pipe, water channel, drain elbow, draining skirt, drainage channel.
Following technical scheme can be used in single crystal growing furnace provided by the utility model:
A kind of single crystal growing furnace comprising such as above-mentioned flap valve, further includes cooling water source, which connects the first axle
The intake tunnel of body.
Beneficial effect, the single crystal growing furnace is interior to inject cooling water to the cooling water source of offer to the intake tunnel of the first axle body, cold
But water successively passes through intake tunnel, water inlet skirt, water inlet bend pipe, water channel, drain elbow, draining skirt, drainage channel, then arranges
Out, the heat that can be taken away by cooling water in turnover panel can be cooling to flap valve.
Detailed description of the invention
Fig. 1 is the perspective view of the utility model flap valve.
Fig. 2 is the perspective view that flap valve is shown in turn in Fig. 1.
Fig. 3 is the schematic cross-sectional view of flap valve in Fig. 1.
Fig. 4 is that flap valve takes away the perspective view after torsion shaft and connecting plate in Fig. 1.
Specific embodiment
Embodiment one
The present embodiment one provides a kind of embodiment of flap valve for semiconductor silicon single crystal furnace.
Incorporated by reference to shown in Fig. 1 to Fig. 4, a kind of flap valve for semiconductor silicon single crystal furnace, including turnover panel 1, torsion shaft 2,
Connect the connecting plate 3 of torsion shaft 2 and turnover panel 1.The torsion shaft 2 include axle sleeve 21, be plugged in 21 one end the first axle body 22 of axle sleeve,
It is plugged in the second axle body 23 of 21 other end of axle sleeve.The first axle body 22, the second axle body 23 and axle sleeve 21 are coaxially disposed.The turnover panel
1 central location is equipped with a pair of of pedestal 12 protruding upward, is transversely provided with shaft 13 between the pedestal 12, and the one of the connecting plate 3
End is fixedly connected on axle sleeve 21 and the other end of connecting plate 3 is hinged by shaft 13 and pedestal 12.Lift when the turnover panel 1 or
When decline, turnover panel 1 can be because of connecting plate 3 with the hinged of pedestal 12 and relative to one angle of rotation of connecting plate 3.
It is equipped with several interconnected water channels 11 in the turnover panel 1, and the import 12 of the water channel 11 and outlet 13 are positioned at turning over
The upper surface of plate 1 is close to the position of axle sleeve 2.In the present embodiment, the water channel 11 in the turnover panel 1 can be uniformly by turning over
Intralamellar part is such as arranged to continuous to can uniformly take away the heat inside turnover panel 1 when cooling water flows through water channel 11
The water channels shape such as S-shaped.
And a kind of preferred embodiment of the water channel 11 can be referred to and be provided in Chinese patent ZL 201410713212.4
Channel structure, the water channel in Chinese patent ZL 201410713212.4 is arranged in a kind of long crystal furnace sealing plate, is similarly
One circular plate body, can also be using in turnover panel 1 in the present embodiment.In Chinese patent ZL 201410713212.4
Water channel include positioned at entire plate body the same side water inlet (import 12 that can be applied as the present embodiment) and water outlet (can
With the outlet 13 for the embodiment that bases on practicality), and it is internal provided with several water-cooling channels, the higher sky being utilized inside plate body
Between, so as to achieve the effect that good cooling water flow circulation.
And in order to cooling water is discharged into and excluded in turnover panel 1, also set up in the embodiment be connected to the water channel import 12 into
Water pipe 4, the drainpipe 5 for being connected to water channel outlet 13.The first axle body 22 is equipped with intake tunnel 221, the intake tunnel 221
One end penetrates through the outer end of the first axle body 22, and the other end of the intake tunnel 221 connects the water inlet pipe 4 and passes through water inlet pipe 4
It is connected to water channel import 12；The second axle body 23 be equipped with drainage channel 231, one end of the drainage channel 231 penetrate through this second
The outer end of axis body 23, the other end of the drainage channel 231 connect the drainpipe 5 and are connected by drainpipe 5 and water channel outlet 13
It is logical.The water inlet pipe 4 is bent extension including water inlet skirt 41 and water inlet bend pipe 42, the water inlet bend pipe 42 above turnover panel, and
One end of water inlet bend pipe 42 connects water inlet skirt 41 and the other end is connected to water channel import 12.Described 41 one end of water inlet skirt connect into
Water bend pipe 42 and the other end is connected on the first axle body 22 and is connected to intake tunnel 221.The drainpipe 5 includes draining skirt 51
And drain elbow 52, the drain elbow 52 are bent extension, and one end connection draining skirt of drain elbow 52 above turnover panel 1
51 and other end connection water channel outlet 13, described 51 one end of draining skirt connection drain elbow 52 and the other end is connected to the second axis
On body 23 and communicated drainage channel 231.The water inlet skirt 41, water inlet bend pipe 42, draining skirt 51, drain elbow 52 are gold
Belong to pipe.It is additionally provided with the first fixed card buckle 43 of fixed water inlet bend pipe 42 on the upper surface of the turnover panel 1 and fixes drain elbow 52
The second fixed card buckle 53.First fixed card buckle 43 is located proximate to water channel import 12, the position of the second fixed card buckle 53
Close to water channel outlet 13.
In the present embodiment, it is set as including the two-part of skirt 41 and bend pipe 42 of intaking of intaking due to water inlet pipe 4, it is same to arrange
Water pipe 5 also include draining skirt 51 and drain elbow 52 two-part, in this way turnover panel 1 with respect to connecting plate rotation when, for into
Water pipe 4 and drainpipe 5 pull deformation being distributed on water inlet bend pipe 42 and drain elbow 52 by dispersion, and due to metal itself
Bend pipe can have certain elastic deformability, and when water inlet curved 42 is longer with drain elbow 52, deformation is pullled in generation
Uniform distribution digests in the entirety of water inlet bend pipe 42 and drain elbow 52 without causing biggish deformation to individual pipeline sections,
To which water inlet pipe 4 and drainpipe 5 will not be damaged while ensure that turnover panel 1 rotates, the integral tube for introducing the cooling water
Road sound construction is hardly damaged.The water inlet bend pipe 42 is arc-shaped, and the drain elbow 52 is also arc-shaped, and it is curved to intake
Pipe 42 extends in the outside of drain elbow 52, can make full use of the space above turnover panel in this way and make into water bend pipe 42, draining
The length of bend pipe 52 extends as far as possible, so that water inlet bend pipe 42 and drain elbow 52 can adapt to bigger deformation.And one more excellent
The mode of choosing is, the water inlet bend pipe surround similar round (similar round has the circle of a notch, is not complete circle,
Similar round is longer relative to the length of general arc), drain elbow 52 equally surrounds similar round, and drain skirt 51 be located at into
Between water bend pipe 42 and 12 junction of water channel import and water inlet bend pipe 42 and the junction for skirt 41 of intaking.Similar round is i.e. in this reality
It is a kind of longest arrangement mode in novel.
Cooling water is injected to the intake tunnel of the first axle body 22, cooling water successively passes through intake tunnel 221, water inlet skirt
41, it is discharged after water inlet bend pipe 42, water channel 11, drain elbow 52, draining skirt 51, drainage channel 231, to take away turnover panel and axis
Intracorporal heat.
Embodiment two
The embodiment two provides a kind of single crystal growing furnace comprising above-mentioned flap valve.
It further include cooling water source (not shown) in the single crystal growing furnace, which connects the intake tunnel of the first axle body
And cooling water is injected to the intake tunnel of the first axle body, cooling water successively passes through intake tunnel, water inlet skirt, water inlet bend pipe, water
Road, drain elbow, draining skirt, drainage channel, are then discharged out, the heat that can be taken away by cooling water in turnover panel can be right
Flap valve is cooling.
In addition, there are many concrete methods of realizing and approach of the utility model, the above is only the preferred of the utility model
Embodiment.It should be pointed out that for those skilled in the art, before not departing from the utility model principle
It puts, several improvements and modifications can also be made, these improvements and modifications also should be regarded as the protection scope of the utility model.This reality
The available prior art of each component part being not known in example is applied to be realized.
Claims (7)
1. a kind of flap valve for semiconductor silicon single crystal furnace, the connection including turnover panel, torsion shaft, connection torsion shaft and turnover panel
Plate；The second axle body that the torsion shaft includes axle sleeve, is plugged in axle sleeve one end the first axle body, is plugged in the axle sleeve other end, first
Axis body, the second axle body and axle sleeve are coaxially disposed；It is characterized by: the turnover panel central location is equipped with a pair of of seat protruding upward
Body is transversely provided with shaft between the pedestal, and one end of the connecting plate is fixedly connected on axle sleeve and the other end of connecting plate is logical
It is hinged with pedestal to cross shaft；It is equipped with several interconnected water channels in the turnover panel, and the import of the water channel and outlet are positioned at turning over
The upper surface of plate is close to the position of axle sleeve；The drainpipe for also setting up and being connected to the water inlet pipe of the water channel import, be connected to water channel outlet；
The first axle body is equipped with intake tunnel, and one end of the intake tunnel penetrates through the outer end of the first axle body, the intake tunnel
The other end connect the water inlet pipe and by water inlet pipe and water channel inlet communication；
The second axle body is equipped with drainage channel, and one end of the drainage channel penetrates through the outer end of the second axle body, the drainage channel
The other end connect the drainpipe and by drainpipe and water channel outlet；
The water inlet pipe includes water inlet skirt and water inlet bend pipe, and the water inlet bend pipe is bent extension above turnover panel, and it is curved to intake
One end connection water inlet skirt of pipe and the other end are connected to water channel import, and the connection of described water inlet skirt one end intakes bend pipe and the other end
It is connected to intake tunnel；
The drainpipe includes draining skirt and drain elbow, and the drain elbow is bent extension above turnover panel, and drains curved
One end connection draining skirt of pipe and the outlet of other end connection water channel, described draining skirt one end connection drain elbow and the other end
Communicated drainage channel.
2. the flap valve according to claim 1 for semiconductor silicon single crystal furnace, it is characterised in that: the water inlet bend pipe is
Arc-shaped, the drain elbow are also arc-shaped, and bend pipe of intaking extends in the outside of drain elbow.
3. the flap valve according to claim 1 or 2 for semiconductor silicon single crystal furnace, it is characterised in that: the water inlet is curved
Pipe surrounds similar round, and drain elbow equally surrounds similar round, and drain skirt be located at water inlet bend pipe and water channel import junction and
It intakes between bend pipe and the junction for skirt of intaking.
4. the flap valve according to claim 3 for semiconductor silicon single crystal furnace, it is characterised in that: the water inlet skirt,
Water inlet bend pipe, draining skirt, drain elbow are metal tube.
5. the flap valve according to claim 4 for semiconductor silicon single crystal furnace, it is characterised in that: the draining skirt ratio
Skirt of intaking is long.
6. the flap valve according to claim 1 for semiconductor silicon single crystal furnace, it is characterised in that: to the first axle body into
Aquaporin injects cooling water, and cooling water successively passes through intake tunnel, water inlet skirt, water inlet bend pipe, water channel, drain elbow, draining
Skirt, drainage channel.
7. a kind of single crystal growing furnace comprising the flap valve as described in any one of claim 1-6, it is characterised in that: further include cooling water
Source, the cooling water source connect the intake tunnel of the first axle body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820948870.5U CN208517575U (en) | 2018-06-20 | 2018-06-20 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820948870.5U CN208517575U (en) | 2018-06-20 | 2018-06-20 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208517575U true CN208517575U (en) | 2019-02-19 |
Family
ID=65325878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820948870.5U Withdrawn - After Issue CN208517575U (en) | 2018-06-20 | 2018-06-20 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208517575U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
-
2018
- 2018-06-20 CN CN201820948870.5U patent/CN208517575U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
| CN108456918B (en) * | 2018-06-20 | 2024-04-05 | 南京晶能半导体科技有限公司 | Flap valve for semiconductor silicon single crystal furnace and single crystal furnace |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Flip valve for semiconductor silicon single crystal furnace and single crystal furnace Effective date of registration: 20200102 Granted publication date: 20190219 Pledgee: Zijin Branch of Nanjing Bank Co.,Ltd. Pledgor: NANJING ADVANCED SEMICONDUCTOR TECHNOLOGY (NAST), CO.,LTD. Registration number: Y2019320000421 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20211119 Granted publication date: 20190219 Pledgee: Zijin Branch of Nanjing Bank Co.,Ltd. Pledgor: NANJING ADVANCED SEMICONDUCTOR TECHNOLOGY (NAST), CO.,LTD. Registration number: Y2019320000421 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20190219 Effective date of abandoning: 20240405 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190219 Effective date of abandoning: 20240405 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |