CN207672152U - A kind of big kilogram of sapphire crystal growth water-cooling apparatus - Google Patents
A kind of big kilogram of sapphire crystal growth water-cooling apparatus Download PDFInfo
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- CN207672152U CN207672152U CN201721583292.1U CN201721583292U CN207672152U CN 207672152 U CN207672152 U CN 207672152U CN 201721583292 U CN201721583292 U CN 201721583292U CN 207672152 U CN207672152 U CN 207672152U
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Abstract
The utility model discloses a kind of big kilogram of sapphire crystal growth water-cooling apparatus, including growing furnace main body, it is plugged with seed crystal rod heat exchanger at the top of the growth furnace main body, the seed crystal rod heat exchanger includes water inlet inverting chamber and draining inner sleeve, and it drains inner sleeve and is located at the lumen centers of water inlet inverting chamber, the bottom of the draining inner sleeve is connected with the inner cavity of water inlet inverting chamber, it is communicated with aqueduct at the top of draining inner sleeve in the seed crystal rod heat exchanger, it is provided with water cooling box on the right side of the aqueduct, and the right end of aqueduct stretches into the inner cavity of water cooling box.The structure design of the utility model is reasonable, cooling circulating water is distributed by water distributor, and further cooling circulating water is disperseed by deflector, cooling down is carried out to flow finally by the cold airflow opposite with water (flow) direction, water is contacted more fully and uniform with cold airflow, and then circulating water effect can be improved.
Description
Technical field
The utility model is related to sapphire production technical fields, more particularly to a kind of big kilogram of sapphire crystal growth water cooling
But device.
Background technology
Sapphire single-crystal has excellent comprehensive performance, is widely used in aerospace, military and civilian industry, electronics
The various fields such as technology are the preferred materials of current GaN blue-ray LEDs epitaxial substrate piece.It is commercialized the side of growing sapphire crystal
Method mainly has kyropoulos, heat-exchanging method, czochralski method, VHGF methods etc., wherein kyropoulos because possessing comprehensive technology and cost advantage,
Leading position is occupied on the market.
With the development of science and technology and the continuous expansion of sapphire application field, to the quality and size of sapphire single-crystal
More stringent requirements are proposed.It is the precondition of growing high quality sapphire single-crystal that equipment for growing sapphire single crystal is reasonable for structure,
Only thermal field is reasonable, is possible to grow the sapphire single-crystal that shape is ideal, internal flaw is few.Especially large-size sapphire list
Brilliant growth cycle is long, and at later stages since radiating rate is fast, the tendency bigger of crystal autonomous growth, the speed of growth is easily-controllable
System may be such that matter crystal internal defect increases since the speed of growth fluctuates.Therefore, growing large-size, high-quality sapphire list
It is stringenter to the requirement of thermal field when brilliant.
Thermal field is mainly influenced by calandria, insulation construction and cooling system, the cooling system of traditional kyropoulos single crystal growing furnace
Structure is generally divided into seed crystal rod heat exchanger, upper of furnace body, side wall and the part of bottom four and individually controls, the main mesh of cooling water
Be protect furnace shell only hot, and sapphire growth is higher to the technological requirement of cooling water, and in order to save water resource, passes
The sapphire crystal growth device of system is both provided with cooling water recirculation system, and the technical staff in the field of the relevant technologies carries out this
It improves, if Chinese Patent Application No. is " the improved kyropoulos sapphire single-crystal furnaces cooling that CN201520409598.X is proposed
System structure " is increased in this application file by cooling water pipe caliber, and the wind of pipeline blockage is on the one hand advantageously reduced
Danger, keeps radiating condition more uniform.On the other hand the modification scope of cooling system is increased, and then enhances it to thermal field in stove
Adjustment effect, but the water quality of cycling use of water can not be detected in the technical solution, and pass through sealed cooling tower pair
Recirculated water is cooled down, and common sealed cooling tower is not uniform enough due to the dispersion to water so that cooling efficiency is relatively low.
Utility model content
The purpose of the utility model is to overcome the above-mentioned problems in the prior art, provide a kind of big kilogram of sapphire
Cooling circulating water is distributed by crystal growth water-cooling apparatus by water distributor, and is further followed to cooling by deflector
Ring water is disperseed, and carries out cooling down to flow finally by the cold airflow opposite with water (flow) direction so that water and cold airflow
Contact is more fully and uniform, and then can improve circulating water effect.
To realize above-mentioned technical purpose and the technique effect, the utility model is achieved through the following technical solutions：
A kind of big kilogram of sapphire crystal growth water-cooling apparatus, including growth furnace main body, the top of the growth furnace main body
Portion is plugged with seed crystal rod heat exchanger, and the seed crystal rod heat exchanger includes water inlet inverting chamber and draining inner sleeve, and in draining
Casing is located at the lumen centers of water inlet inverting chamber, and the bottom of the draining inner sleeve is connected with the inner cavity of water inlet inverting chamber,
It is communicated with aqueduct at the top of draining inner sleeve in the seed crystal rod heat exchanger, water cooling is provided on the right side of the aqueduct
Case, and the right end of aqueduct stretches into the inner cavity of water cooling box；
One end bottom that the aqueduct stretches into water cooling box is provided with water distributor, and the inner cavity of the water cooling box is provided with cooling
Cover, the inner cavity of the cooling dome is provided with water conservancy diversion board group, and cooling dome is located at the underface of water distributor, the inner cavity of the water cooling box
Bottom has been set gradually from left to right liquid level sensor, inlet box and water quality testing meter, the top left and right sides of the inlet box
Air guide port is offered, water retaining cover is provided at the top of the inlet box, the left side wall of the water cooling box is provided with water pump, and water pump
Water inlet end be connected with water cooling box by conduit, the discharge ends of the water pump are communicated with water-supply-pipe, and water-supply-pipe is far from water pump
One end be connected with water inlet inverting chamber, the right side of the water cooling box is disposed with drainpipe, inlet channel, pure from top to bottom
Water water inlet pipe and controller, and the left end of inlet channel is connected with inlet box, and exhaust pipe is provided at the top of the water cooling box；
The controller is electrically connected liquid level sensor, water quality testing meter and water pump.
Preferably, in above-mentioned big kilogram of sapphire crystal growth water-cooling apparatus, the water conservancy diversion board group is mutually isostructural
Three groups, and three groups of water conservancy diversion board groups are arranged in the inner cavity of cooling dome at equal intervals.
Preferably, in above-mentioned big kilogram of sapphire crystal growth water-cooling apparatus, the water conservancy diversion board group is combined by deflector
It forms, and deflector is herringbone.
Preferably, in above-mentioned big kilogram of sapphire crystal growth water-cooling apparatus, on the drainpipe and pure water water inlet pipe
It is both provided with solenoid valve, and controller is electrically connected solenoid valve.
Preferably, in above-mentioned big kilogram of sapphire crystal growth water-cooling apparatus, the inner cavity of the inlet box was provided with
Strainer, and filter screen is located at the top of inlet channel.
Preferably, in above-mentioned big kilogram of sapphire crystal growth water-cooling apparatus, the controller is programmable single chip computer
Controller.
Preferably, in above-mentioned big kilogram of sapphire crystal growth water-cooling apparatus, the inner cavity of the exhaust pipe be provided with every
Dirt filter core.
The utility model has the beneficial effects that：
The structure design of the utility model is reasonable, is on the one hand distributed cooling circulating water by water distributor, and pass through water conservancy diversion
Plate further disperses cooling circulating water, to flow cool down finally by the cold airflow opposite with water (flow) direction cold
But so that water contacts more fully and uniform with cold airflow, and then can improve circulating water effect, on the other hand pass through gear
The cooling water that water cover can obstruct whereabouts enters the inner cavity of inlet box, and water retaining cover can further scatter moisture, be convenient for
Carry out cooling work.
Certainly, any product for implementing the utility model does not necessarily require achieving all the advantages described above at the same time.
Description of the drawings
In order to illustrate more clearly of the technical solution of the utility model embodiment, make required for being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the utility model,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the portions A schematic enlarged-scale view in Fig. 1；
Fig. 3 is the portions B schematic enlarged-scale view in Fig. 1；
Fig. 4 is the control principle block diagram of the utility model；
In attached drawing, parts list represented by the reference numerals are as follows：
1- grows furnace main body, 2- seed crystal rod heat exchangers, 21- water inlet inverting chambers, 22- draining inner sleeves, 3- aqueducts, 4-
Water cooling box, 5- water distributors, 6- cooling domes, 7- water conservancy diversion board groups, 8- liquid level sensors, 9- inlet boxs, 91- air guide ports, 92- water blocking
Cover, 10- water quality testing meters, 11- water pumps, 12- water-supply-pipes, 13- drainpipes, 14- inlet channels, 15- pure water water inlet pipes, 16- controls
Device processed, 17- solenoid valves, 18- exhaust pipes.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
The all other embodiment obtained, shall fall within the protection scope of the present invention.
It please refers to Fig.1 shown in -4, the present embodiment is a kind of big kilogram of sapphire crystal growth water-cooling apparatus, including growth
The top of furnace main body 1, growth furnace main body 1 is plugged with seed crystal rod heat exchanger 2, and seed crystal rod heat exchanger 2 includes water inlet inverting chamber
21 and draining inner sleeve 22, and drain inner sleeve 22 be located at water inlet inverting chamber 21 lumen centers at, drain inner sleeve 22 bottom
Portion is connected with the inner cavity of water inlet inverting chamber 21, and 22 top of draining inner sleeve in seed crystal rod heat exchanger 2 is communicated with aqueduct
3, the right side of aqueduct 3 is provided with water cooling box 4, and the right end of aqueduct 3 stretches into the inner cavity of water cooling box 4；Aqueduct 3 stretches into water cooling
One end bottom of case 4 is provided with water distributor 5, and the inner cavity of water cooling box 4 is provided with cooling dome 6, and the inner cavity of cooling dome 6 is provided with water conservancy diversion
Board group 7, and cooling dome 6 is located at the underface of water distributor 5, the intracavity bottom of water cooling box 4 has been set gradually from left to right liquid level biography
The top left and right sides of sensor 8, inlet box 9 and water quality testing meter 10, inlet box 9 offers air guide port 91, the top of inlet box 9
It is provided with water retaining cover 92, the left side wall of water cooling box 4 is provided with water pump 11, and the water inlet end of water pump 11 passes through conduit and water cooling box 4
It is connected, the discharge ends of water pump 11 are communicated with water-supply-pipe 12, and the one end of water-supply-pipe 12 far from water pump 11 and water inlet inverting chamber 21
It is connected, the right side of water cooling box 4 is disposed with drainpipe 13, inlet channel 14, pure water water inlet pipe 15 and control from top to bottom
Device 16, and the left end of inlet channel 14 is connected with inlet box 9, the top of water cooling box 4 is provided with exhaust pipe 18；Controller 16 divides
It electricity Lian Jie not liquid level sensor 8, water quality testing meter 10 and water pump 11.
Drainpipe 13 is connected with sewage-treatment plant first, cooling water is passed through into the draining in seed crystal rod heat exchanger 2
Inner sleeve 22 is displaced into aqueduct 3, then inlet channel 14 is connected with air conditioning air cooler unit, pure water water inlet pipe 15 and pure water system
Standby system is connected, and is transported to the water distributor 5 in water cooling box 4 by aqueduct 3, water distributor 5 will be transmitted to the water in water cooling box 4
Carry out cloth water process so that water uniformly drops into cooling dome 6, and water conservancy diversion board group 7 carries out the flow of entrance in cooling dome 6
Diffusion so that flow is flowed along baffle surface, then drops into the intracavity bottom of water cooling box 4, and liquid level sensor 8 is to water
The liquid level of water is incuded in 4 inner cavity of ice chest, and sensed data is passed to controller 16, and personnel easy to operation are to water cooling box 4
In liquid level understood, water quality testing meter 10 is detected the water quality in water cooling box 4, and sensed data is passed to control
Device 16 can be beaten if personnel easy to operation understand water quality less than sapphire growth requirement to the water quality of cooling circulating water
The solenoid valve 17 to begin to rehearse on water pipe 13, water is discharged, then pure water, water are conveyed into water cooling box 4 by pure water water inlet pipe 15
Cooling water in water cooling box 4 is transported to by water-supply-pipe 12 in the water inlet inverting chamber 21 in seed crystal rod heat exchanger 2 by pump 11, into
Row heat exchange works, and the component that entire flow of cooling water is passed through forms a cooling water recirculation system, and is carrying out cooling work
When, the transporting cold-air stream into inlet box 9 of inlet channel 14, cold airflow is transported to the inner cavity of water cooling box 4 by air guide port 91, due to
The effect of water retaining cover 92 so that cold airflow is moved upwards along the outer wall of water retaining cover 92 so that cold airflow is spread, and is made
The time that cold airflow flows in water cooling box 4 is longer, and in cooling dome 6, the flow of upper air cooler and whereabouts is contacted,
The area bigger for enabling flow and cold air fully to be contacted in this way, and contacting, and then cooling efficiency, gas can be improved
Stream is discharged finally by exhaust pipe 18.
Water conservancy diversion board group 7 is mutually isostructural three groups, and three groups of water conservancy diversion board groups 7 are arranged in the inner cavity of cooling dome 6 at equal intervals,
Water conservancy diversion board group 7 is composed of deflector, and deflector is herringbone, and multigroup water conservancy diversion board group 7 can enable flow to carry out
Be diffused step by step, and but also air-flow is flowed along between deflector so that flow and air flow contacts more fully,
Solenoid valve 17 is both provided on the area bigger of contact, drainpipe 13 and pure water water inlet pipe 15, and controller 16 is electrically connected
The inner cavity of solenoid valve 17, inlet box 9 is provided with filter screen, and filter screen is located at the top of inlet channel 14, and filter screen can
It is filtered processing with the air-flow to entrance, reduces the inner cavity that impurity enters water cooling box 4 by air-flow, controller 16 is that can compile
Journey singlechip controller, is convenient for programming Control, and the inner cavity of exhaust pipe 18 is provided with dust-separation filter core.
One of the present embodiment has particular application as：The structure design of the utility model is reasonable, on the one hand will be cold by water distributor 5
But recirculated water is distributed, and is further disperseed to cooling circulating water by deflector 7, finally by with water (flow) direction phase
Anti- cold airflow carries out cooling down to flow so that water contact more abundant and uniform with cold airflow, and then can improve and follow
Ring water cooling effect, the cooling water that whereabouts on the other hand can be obstructed by water retaining cover 92 enters the inner cavity of inlet box 9, and keeps off
Water cover 92 can further scatter moisture, be convenient for cooling work.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained in at least one of the utility model
In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or
Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiments or example
In can be combined in any suitable manner.
The preferred embodiment in the utility model disclosed above is only intended to help to illustrate the utility model.Preferred embodiment is simultaneously
There is no the details that detailed descriptionthe is all, does not limit the specific implementation mode that the utility model is only described yet.Obviously, according to this theory
The content of bright book can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to preferably
The principles of the present invention and practical application are explained, to enable skilled artisan to be best understood by and utilize this
Utility model.The utility model is limited only by the claims and their full scope and equivalents.
Claims (7)
1. a kind of big kilogram of sapphire crystal growth water-cooling apparatus, including growth furnace main body, it is characterised in that：The growth furnace
Seed crystal rod heat exchanger is plugged at the top of main body, the seed crystal rod heat exchanger includes water inlet inverting chamber and draining inner sleeve,
And drain inner sleeve and be located at the lumen centers of water inlet inverting chamber, the inner cavity of the bottom and water inlet inverting chamber of the draining inner sleeve
It is connected, aqueduct, the right side setting of the aqueduct is communicated at the top of the draining inner sleeve in the seed crystal rod heat exchanger
There is water cooling box, and the right end of aqueduct stretches into the inner cavity of water cooling box；
One end bottom that the aqueduct stretches into water cooling box is provided with water distributor, and the inner cavity of the water cooling box is provided with cooling dome,
The inner cavity of the cooling dome is provided with water conservancy diversion board group, and cooling dome is located at the underface of water distributor, the interior bottom of chamber of the water cooling box
Portion has been set gradually from left to right liquid level sensor, inlet box and water quality testing meter, is opened at left and right sides of the top of the inlet box
Equipped with air guide port, it being provided with water retaining cover at the top of the inlet box, the left side wall of the water cooling box is provided with water pump, and water pump
Water inlet end is connected by conduit with water cooling box, and the discharge ends of the water pump are communicated with water-supply-pipe, and water-supply-pipe is far from water pump
One end is connected with water inlet inverting chamber, and the right side of the water cooling box is disposed with drainpipe, inlet channel, pure water from top to bottom
Water inlet pipe and controller, and the left end of inlet channel is connected with inlet box, and exhaust pipe is provided at the top of the water cooling box；
The controller is electrically connected liquid level sensor, water quality testing meter and water pump.
2. big kilogram of sapphire crystal growth water-cooling apparatus of one kind according to claim 1, it is characterised in that：It is described to lead
Flowing plate group is mutually isostructural three groups, and three groups of water conservancy diversion board groups are arranged in the inner cavity of cooling dome at equal intervals.
3. big kilogram of sapphire crystal growth water-cooling apparatus of one kind according to claim 1, it is characterised in that：It is described to lead
Flowing plate group is composed of deflector, and deflector is herringbone.
4. big kilogram of sapphire crystal growth water-cooling apparatus of one kind according to claim 1, it is characterised in that：The row
Solenoid valve is both provided on water pipe and pure water water inlet pipe, and controller is electrically connected solenoid valve.
5. big kilogram of sapphire crystal growth water-cooling apparatus of one kind according to claim 1, it is characterised in that：It is described into
The inner cavity of gas tank is provided with filter screen, and filter screen is located at the top of inlet channel.
6. big kilogram of sapphire crystal growth water-cooling apparatus of one kind according to claim 1, it is characterised in that：The control
Device processed is programmable single chip computer controller.
7. big kilogram of sapphire crystal growth water-cooling apparatus of one kind according to claim 1, it is characterised in that：The row
The inner cavity of tracheae is provided with dust-separation filter core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721583292.1U CN207672152U (en) | 2017-11-23 | 2017-11-23 | A kind of big kilogram of sapphire crystal growth water-cooling apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721583292.1U CN207672152U (en) | 2017-11-23 | 2017-11-23 | A kind of big kilogram of sapphire crystal growth water-cooling apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207672152U true CN207672152U (en) | 2018-07-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721583292.1U Expired - Fee Related CN207672152U (en) | 2017-11-23 | 2017-11-23 | A kind of big kilogram of sapphire crystal growth water-cooling apparatus |
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| Country | Link |
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| CN (1) | CN207672152U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111850688A (en) * | 2020-07-22 | 2020-10-30 | 哈尔滨秋硕半导体科技有限公司 | Cooling device for inhibiting shoulder shrinkage of sapphire single crystal by kyropoulos method |
-
2017
- 2017-11-23 CN CN201721583292.1U patent/CN207672152U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111850688A (en) * | 2020-07-22 | 2020-10-30 | 哈尔滨秋硕半导体科技有限公司 | Cooling device for inhibiting shoulder shrinkage of sapphire single crystal by kyropoulos method |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180731 Termination date: 20191123 |
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| CF01 | Termination of patent right due to non-payment of annual fee |