CN213327923U - Water cooling screen structure of single crystal furnace - Google Patents
Water cooling screen structure of single crystal furnace Download PDFInfo
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- CN213327923U CN213327923U CN202021749374.0U CN202021749374U CN213327923U CN 213327923 U CN213327923 U CN 213327923U CN 202021749374 U CN202021749374 U CN 202021749374U CN 213327923 U CN213327923 U CN 213327923U
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Abstract
The utility model relates to a single crystal material production technical field, concretely relates to single crystal growing furnace water-cooling screen structure. The main technical scheme is as follows: a water-cooling screen structure of a single crystal furnace comprises a first cylinder, a second cylinder, a first pipeline and a second pipeline; the second cylinder is sleeved on the outer side of the first cylinder; the second cylinder is coaxial with the first cylinder; a gap is formed between the second cylinder and the first cylinder; the first cylinder is internally provided with a first fluid channel; a second fluid channel is arranged in the second cylinder; the first pipeline is respectively communicated with the first fluid channel and the second fluid channel; the first pipeline is connected to the tops of the first cylinder and the second cylinder respectively; the second pipeline is respectively communicated with the first fluid channel and the second fluid channel; the second pipeline is connected to the tops of the first cylinder and the second cylinder respectively. Adopt the utility model discloses can improve the cooling effect.
Description
Technical Field
The utility model relates to a single crystal material production technical field especially relates to a single crystal growing furnace water-cooling screen structure.
Background
As a semiconductor material, single crystal silicon is generally used for manufacturing integrated circuits and other electronic components, and there are two growing techniques of single crystal silicon at present, the float zone method and the Czochralski method, which is a method commonly used at present. In the production of single crystal silicon by the czochralski method, polycrystalline silicon is placed in a quartz crucible, melted by high temperature, and then a seed crystal is lowered from the top into the melted polycrystalline silicon, and the melted seed crystal is recrystallized around by controlling the temperature of the liquid surface, thereby producing a well-aligned single crystal silicon rod. When the silicon single crystal grows from the solution, heat is released, and the heat can slow down the crystallization speed of the silicon single crystal, thereby influencing the production efficiency of the silicon single crystal. And in the process of moving the crystal bar upwards, the crystal bar needs to be cooled, so that the crystal bar is fixedly formed. The existing cooling mode is that a cooling screen is fixedly arranged at a certain height in a single crystal furnace, cooling liquid is introduced into the cooling screen, and the crystal bar takes away heat generated by crystallization through a water-cooling screen when moving upwards through the cooling screen.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a single crystal growing furnace water-cooling screen structure, main aim at can improve the radiating effect.
In order to achieve the above object, the utility model mainly provides the following technical scheme:
the embodiment of the utility model provides a water-cooling screen structure of a single crystal furnace, which comprises a first cylinder, a second cylinder, a first pipeline and a second pipeline;
the second cylinder is sleeved on the outer side of the first cylinder; the second cylinder is coaxial with the first cylinder; a gap is formed between the second cylinder and the first cylinder;
the first cylinder is internally provided with a first fluid channel;
a second fluid channel is arranged in the second cylinder;
the first pipeline is respectively communicated with the first fluid channel and the second fluid channel; the first pipeline is connected to the tops of the first cylinder and the second cylinder respectively;
the second pipeline is respectively communicated with the first fluid channel and the second fluid channel; the second pipeline is connected to the tops of the first cylinder and the second cylinder respectively.
Further, the first cylinder is made of copper materials;
the second cylinder is made of copper materials.
Further, the first pipeline and the second pipeline are detachably connected with the first cylinder respectively;
the first pipeline and the second pipeline are detachably connected with the second cylinder respectively.
Furthermore, a first spacing bar is fixedly arranged on the outer side of the first cylinder; the first spacing bars are multiple; the first plurality of spacing strips are arranged at intervals along the circumferential direction of the first cylinder.
Further, the first spacing bar is made of copper materials.
Further, a second spacing bar is fixedly arranged on the inner side of the second cylinder; the number of the second spacing bars is multiple; the second plurality of spacing bars are arranged at intervals along the circumferential direction of the second cylinder body.
Furthermore, the second spacing bar is made of copper materials.
Furthermore, a first control valve is arranged between the first pipeline and the first fluid channel and used for controlling the on-off of fluid between the first pipeline and the first fluid channel;
and a second control valve is arranged between the first pipeline and the second fluid channel and is used for controlling the on-off of the fluid between the first pipeline and the second fluid channel.
Further, the first fluid channel is of a spiral structure;
the second fluid channel is of a spiral structure.
Further, the first cylinder has an inner sidewall and an outer sidewall; a spiral isolating strip is arranged between the inner side wall and the outer side wall; the spiral spacer forms the first fluid passage connecting the first pipe and the second pipe inside the first cylinder.
By means of the technical scheme, the utility model discloses single crystal growing furnace water-cooling screen structure has following advantage at least:
the cooling effect can be improved.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
Fig. 1 is a schematic view of a water-cooling shield structure of a single crystal furnace provided by an embodiment of the present invention.
Shown in the figure:
1 is the first barrel, 2 is the second barrel, 3 is the first pipeline, and 4 is the second pipeline.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the intended purpose of the present invention, the following detailed description is given with reference to the accompanying drawings and preferred embodiments, in order to explain the detailed embodiments, structures, features and effects of the present invention. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
As shown in fig. 1, a water-cooling shield structure of a single crystal furnace according to an embodiment of the present invention comprises a first cylinder 1, a second cylinder 2, a first pipeline 3 and a second pipeline 4;
the second cylinder 2 is sleeved on the outer side of the first cylinder 1; the second cylinder 2 and the first cylinder 1 are coaxially arranged; a gap is reserved between the second cylinder 2 and the first cylinder 1; the first cylinder 1 can be detached to facilitate selective application, and can adapt to different application scenarios, for example, a thicker crystal bar can select the second cylinder 2 with a larger diameter, and a thinner crystal bar can select the first cylinder 1 with a smaller diameter. The first cylinder 1 and the second cylinder 2 are used simultaneously, so that the cooling effect on the crystal bar can be improved. The first cylinder 1 is internally provided with a first fluid channel for cooling water or oil to flow through; a second fluid channel is arranged in the second cylinder 2 for cooling water or oil to flow through;
the first pipeline 3 is respectively communicated with the first fluid channel and the second fluid channel; the first pipeline 3 is respectively connected to the tops of the first cylinder 1 and the second cylinder 2; the first pipeline 3 is a liquid inlet pipe, and cooling water or oil enters the first cylinder 1 and/or the second cylinder 2 from the first pipeline 3;
the second pipeline 4 is respectively communicated with the first fluid channel and the second fluid channel; the second pipeline 4 is respectively connected to the tops of the first cylinder 1 and the second cylinder 2. The second pipe 4 is a liquid outlet pipe, and the cooling water or oil flowing out of the first cylinder 1 and the second cylinder 2 is discharged from the second pipe 4.
The embodiment of the utility model provides a single crystal growing furnace water-cooling screen structure can improve the cooling effect.
The utility model discloses a single crystal growing furnace water-cooling screen structure that an embodiment provided, first barrel 1 and 2 simultaneous actions of second barrel, the crystallization latent heat of release when taking away silicon material crystallization that can be more, effectual reduction crystal bar ambient temperature for crystallization rate, and then improve production efficiency to can compromise the production of multiple product, follow-up no change water-cooling screen cost pressure.
As the preferred embodiment, the first cylinder 1 is made of copper material, so that the heat conduction effect is good.
The second cylinder 2 is made of copper material, and the heat conduction effect is good.
As a preference of the above embodiment, the first pipe 3 and the second pipe 4 are detachably connected to the first cylinder 1, respectively, so as to facilitate the detachment of the first cylinder 1.
As a preference of the above embodiment, a first spacing bar is fixedly arranged outside the first cylinder 1; the first spacing bars are multiple; a plurality of first spacing bars are arranged at intervals along the circumferential direction of the first cylinder 1 so as to keep a gap between the first cylinder 1 and the second cylinder 2; preferably a plurality of spacer bars-evenly distributed. Preferably, the first spacer is made of copper material to improve heat conduction.
Alternatively, a second spacing bar is fixedly arranged on the inner side of the second cylinder 2; a plurality of second spacing bars are arranged; the second plurality of spacing bars are arranged at intervals along the circumferential direction of the second cylinder 2 so as to keep a gap between the first cylinder 1 and the second cylinder 2; preferably, the second plurality of spacing bars are uniformly distributed. Preferably, the second spacer is made of copper material to improve heat conduction effect.
As a preferable example of the above embodiment, a first control valve is arranged between the first pipeline 3 and the first fluid channel, and is used for controlling the on-off of the fluid between the first pipeline 3 and the first fluid channel; and a second control valve is arranged between the first pipeline 3 and the second fluid channel and is used for controlling the on-off of the fluid between the first pipeline 3 and the second fluid channel so as to conveniently control the flow of the cooling water of the first cylinder 1 and the second cylinder 2.
Preferably, the first fluid channel is of a spiral structure to increase the flowing time of the cooling liquid in the first cylinder 1, so that the cooling liquid is in sufficient contact with the first cylinder 1 to achieve sufficient heat exchange.
The second fluid channel is of a spiral structure, so that the flowing time of the cooling liquid in other cylinders is prolonged, the cooling liquid is in full contact with other cylinders, and heat exchange is fully realized.
As a preference of the above embodiment, the first cylinder 1 has an inner side wall and an outer side wall; a spiral isolating strip is arranged between the inner side wall and the outer side wall; the spiral spacer forms a first fluid passage connecting the first pipe 3 and the second pipe 4 inside the first cylinder 1. The second cylinder 2 is preferably identical in structure to the first cylinder 1.
Preferably, the inner wall of the first cylinder 1 is wavy along the circumferential direction, so as to increase the contact between the first cylinder 1 and the liquid and increase the heat exchange area.
Preferably, the inner wall of the second cylinder 2 is undulated along the circumferential direction to increase the contact between the second cylinder 2 and the liquid and increase the heat exchange area.
As a preference of the above embodiment, the height of the second cylinder 2 is higher than the height of the first cylinder 1 so that the second cylinder 2 can also sufficiently receive radiant heat.
Preferably, a first lifting lug is fixedly arranged at the top of the first cylinder 1 to facilitate the lifting of the first cylinder 1.
Preferably, a first lifting lug is fixedly arranged at the top of the second cylinder 2 to facilitate the lifting of the second cylinder 2.
Further still, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, with such terms being used only to distinguish one element from another. Without departing from the scope of the exemplary embodiments. Similarly, the terms first, second, etc. do not denote any order or order, but rather the terms first, second, etc. are used to distinguish one element from another. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent change and modification made by the technical spirit of the present invention to the above embodiments are all within the scope of the technical solution of the present invention.
Claims (10)
1. A water cooling screen structure of a single crystal furnace is characterized by comprising a first cylinder, a second cylinder, a first pipeline and a second pipeline;
the second cylinder is sleeved on the outer side of the first cylinder; the second cylinder is coaxial with the first cylinder; a gap is formed between the second cylinder and the first cylinder;
the first cylinder is internally provided with a first fluid channel;
a second fluid channel is arranged in the second cylinder;
the first pipeline is respectively communicated with the first fluid channel and the second fluid channel; the first pipeline is connected to the tops of the first cylinder and the second cylinder respectively;
the second pipeline is respectively communicated with the first fluid channel and the second fluid channel; the second pipeline is connected to the tops of the first cylinder and the second cylinder respectively.
2. The single crystal furnace water-cooling screen structure of claim 1,
the first cylinder is made of copper material;
the second cylinder is made of copper materials.
3. The single crystal furnace water-cooling screen structure of claim 1,
the first pipeline and the second pipeline are detachably connected with the first cylinder respectively;
the first pipeline and the second pipeline are detachably connected with the second cylinder respectively.
4. The single crystal furnace water-cooling screen structure of claim 1,
a first spacing bar is fixedly arranged on the outer side of the first cylinder; the first spacing bars are multiple; the first plurality of spacing strips are arranged at intervals along the circumferential direction of the first cylinder.
5. The single crystal furnace water-cooling screen structure of claim 4,
the first spacing bar is made of copper materials.
6. The single crystal furnace water-cooling screen structure of claim 1,
a second spacing bar is fixedly arranged on the inner side of the second cylinder; the number of the second spacing bars is multiple; the second plurality of spacing bars are arranged at intervals along the circumferential direction of the second cylinder body.
7. The single crystal furnace water-cooling screen structure of claim 6,
and the second spacing bar is made of copper material.
8. The single crystal furnace water-cooling screen structure of claim 1,
a first control valve is arranged between the first pipeline and the first fluid channel and used for controlling the on-off of fluid between the first pipeline and the first fluid channel;
and a second control valve is arranged between the first pipeline and the second fluid channel and is used for controlling the on-off of the fluid between the first pipeline and the second fluid channel.
9. The single crystal furnace water-cooling screen structure of claim 1,
the first fluid channel is of a spiral structure;
the second fluid channel is of a spiral structure.
10. The single crystal furnace water-cooling screen structure of claim 9,
the first barrel has an inner sidewall and an outer sidewall; a spiral isolating strip is arranged between the inner side wall and the outer side wall; the spiral spacer forms the first fluid passage connecting the first pipe and the second pipe inside the first cylinder.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021749374.0U CN213327923U (en) | 2020-08-20 | 2020-08-20 | Water cooling screen structure of single crystal furnace |
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| CN202021749374.0U CN213327923U (en) | 2020-08-20 | 2020-08-20 | Water cooling screen structure of single crystal furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150368A (en) * | 2021-10-19 | 2022-03-08 | 宇泽半导体(云南)有限公司 | Material melting device and using method thereof |
| CN114381794A (en) * | 2021-12-10 | 2022-04-22 | 四川晶科能源有限公司 | Cooling screen and single crystal furnace |
-
2020
- 2020-08-20 CN CN202021749374.0U patent/CN213327923U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150368A (en) * | 2021-10-19 | 2022-03-08 | 宇泽半导体(云南)有限公司 | Material melting device and using method thereof |
| CN114150368B (en) * | 2021-10-19 | 2024-02-20 | 云南宇泽新能源股份有限公司 | Material melting device and application method thereof |
| CN114381794A (en) * | 2021-12-10 | 2022-04-22 | 四川晶科能源有限公司 | Cooling screen and single crystal furnace |
| CN114381794B (en) * | 2021-12-10 | 2024-01-23 | 四川晶科能源有限公司 | Cooling screen and single crystal furnace |
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