CN212865066U - Bottom cooling part of crystal growth furnace and crystal growth furnace - Google Patents
Bottom cooling part of crystal growth furnace and crystal growth furnace Download PDFInfo
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- CN212865066U CN212865066U CN202021259039.2U CN202021259039U CN212865066U CN 212865066 U CN212865066 U CN 212865066U CN 202021259039 U CN202021259039 U CN 202021259039U CN 212865066 U CN212865066 U CN 212865066U
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Abstract
The utility model discloses a bottom cooling part and crystal growth stove of crystal growth stove, bottom cooling part includes: the cooling device comprises a chassis and a cooling assembly, wherein the chassis is made of heat-conducting metal; the cooling assembly comprises a plurality of water-cooling pipe sleeves, the water-cooling pipe sleeves are fixed at the bottom end of the chassis, the water-cooling pipe sleeves are sequentially distributed outwards from the middle of the chassis and are concentrically arranged, each water-cooling pipe sleeve is provided with a water inlet and a water outlet, the water-cooling pipe sleeves are independent, and at least one of the flow rate and the flow velocity of each water-cooling pipe sleeve is adjustable. Therefore, the distribution of heat in different areas can be effectively controlled by regulating and controlling the water flow of each group of pipe sleeves, so that the long crystal boundary surface has an obvious effect, and the W-shaped interface can be solved through the temperature distribution of the bottom water-cooling disc; and the bottom heat distribution is more controllable, more interface shapes can be realized, and the process window is widened. In addition, the device also has the advantages of simple structure, low installation cost and convenient installation.
Description
Technical Field
The utility model belongs to the technical field of crystal growth equipment and specifically relates to a bottom cooling part and crystal growth stove of crystal growth stove are related to.
Background
The bottom of the single crystal-like growth ingot furnace is provided with a water-cooling copper disc which is mainly used for taking away bottom heat and enabling the crystal to grow and solidify directionally. The control of a crystal growth interface is very critical, the bottom heat dissipation is carried out by adopting a bottom and side heat dissipation mode in the conventional thermal field structure, a water pipe is coiled below a water-cooled copper plate of the conventional growth furnace, water flow in the water pipe carries away bottom heat, the water-cooled copper plate is a basic heat dissipation structure of the bottom water-cooled copper plate, only one group of water inlet and outlet pipe sleeves is arranged in the water-cooled copper plate, the heat distribution of the whole copper plate is fixed, the height of the final crystal growth is inconsistent, the process control is a fixed quantity, and the heat field structure cannot play a role in controlling the process.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, an object of the present invention is to provide a bottom cooling component of a crystal growth furnace and a crystal growth furnace, wherein the bottom cooling component can make different temperatures in different areas of the bottom, so that the crystal growth height is more consistent.
According to the utility model discloses bottom cooling part of crystal growth furnace of first aspect embodiment includes: the cooling device comprises a chassis and a cooling assembly, wherein the chassis is made of heat-conducting metal; the cooling assembly comprises a plurality of water-cooling pipe sleeves, the water-cooling pipe sleeves are fixed at the bottom end of the chassis, the water-cooling pipe sleeves are sequentially distributed outwards from the middle of the chassis and are concentrically arranged, each water-cooling pipe sleeve is provided with a water inlet and a water outlet, the water-cooling pipe sleeves are independent, and at least one of the flow rate and the flow speed of each water-cooling pipe sleeve is adjustable.
Therefore, the water pipes embedded in the lower surface of the water-cooling copper plate are changed into the plurality of water-cooling pipe sleeves, the plurality of water-cooling pipe sleeves are distributed from the center to the edge in sequence, the distribution of heat in different areas can be effectively controlled by regulating and controlling the water flow of each group of pipe sleeves, so that the obvious effect on the long crystal boundary surface is achieved, and the W-shaped interface can be solved through the temperature distribution of the bottom water-cooling plate; and the bottom heat distribution is more controllable, more interface shapes can be realized, the process window is widened, and more possibilities are provided for process realization. In addition, the bottom cooling part also has the advantages of simple structure, low installation cost and convenient installation.
In some embodiments, the water inlet of each water-cooling pipe sleeve is provided with a regulating valve, and the regulating valve is used for controlling the flow and/or the flow rate of the water-cooling pipeline.
In some embodiments, the water cooling pipe sleeve comprises a plurality of water cooling pipe sleeves, and the water cooling pipe sleeves are connected to the same control valve group.
In some embodiments, the control valve block comprises a main flow path and a plurality of branches, each branch being provided with a flow control valve connected to a respective water cooling jacket.
In some embodiments, the number of the water cooling pipe sleeves is more than or equal to 3, and the interval between the adjacent water cooling pipe sleeves close to the inner side is larger than the interval between the adjacent water cooling pipe sleeves close to the outer side.
In some embodiments, each of the water-cooling pipe casings includes first to fourth pipe sections connected in sequence, the first pipe section is parallel to the third pipe section, the second pipe section is parallel to the fourth pipe section, the first pipe section and the second pipe section are perpendicular to each other, the tail end of the fourth pipe section is spaced apart from the head end of the first pipe section, the water inlet is located at the head end of the first pipe section, and the water outlet is located at the tail end of the fourth pipe section.
In some embodiments, the pipe sections of the water-cooling pipe sleeves are arranged in the same position.
In some embodiments, the inner diameter of the water-cooling jacket of the innermost and outermost rings is smaller than the inner diameter of the water-cooling jacket sandwiched therebetween.
According to the utility model discloses crystal growth stove of second aspect embodiment includes: the cooling device comprises a furnace body, a bottom cooling part and a side cooling part, wherein the bottom cooling part is arranged at the bottom of the furnace body; the side cooling part is positioned at the side part of the furnace body.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic view of the heat dissipation direction of a conventional growth furnace.
FIG. 2 is a schematic view showing the distribution of a crystal growth interface in a conventional growth furnace.
Figure 3 is a bottom cooling section of a crystal growth furnace according to an embodiment of the present invention.
Reference numerals:
a crystal growth furnace 200 ', a bottom heat radiation 201 ', a side heat radiation 202 ',
the bottom cooling element (100) is,
a chassis 10, a water-cooling pipe sleeve 20, a water inlet m and a water outlet n.
Detailed Description
Embodiments of the present invention are described in detail below, and the embodiments described with reference to the drawings are exemplary.
Referring to fig. 1, a W-shaped interface is easily formed at a growth interface of an existing crystal-like body in a crystal growth furnace 200 ', the W-shaped interface is formed by heat dissipation from two sides, namely a bottom heat dissipation 201 ' and a side heat dissipation 202 ', the side heat dissipation is mainly used for controlling a growth grain boundary surface, and the bottom heat dissipation is mainly used for providing growth power.
Specifically, as can be seen from the simulation diagram shown in fig. 1, most of the heat dissipated from the bottom is transferred vertically downward, and the heat dissipation of the central region is large, so the crystal growth speed of the central region is high, the crystal height of the central region is high, the heat dissipation of the edge is small, and the crystal growth speed of the edge is slow due to the action of the side heater, so the crystal growth height is low, but at the same time, the crystal growth speed at the edge is increased due to the increase of the heat dissipation degree at the edge side, so the crystal height is increased, as shown in fig. 2. Therefore, the combination of the two sides forms a W-shaped interface, because the interface is high in the middle, gradually lowers to the edge and starts to rise to the extreme side.
In summary, the main reason for forming the W-shaped interface is the formation of coupled heat dissipation of the side and bottom heat dissipation, and the heat dissipation of the side and bottom easily generates a coupled intersection point, i.e. the root cause of the W-shaped crystal growth interface.
In order to solve the problem, the utility model relates to a bottom cooling part improves bottom cooling part, makes it not only can play the radiating purpose in bottom, makes it still have control interface's ability through the design of structure.
A bottom cooling unit 100 of a crystal growth furnace according to an embodiment of the present invention is described below with reference to fig. 3.
The bottom cooling unit 100 of the crystal growth furnace according to the embodiment of the first aspect of the present invention includes: a chassis 10 and a cooling assembly.
The chassis 10 is made of a heat conductive metal. For example, copper may be selected for its good thermal conductivity, in which case the chassis 10 is a copper disk.
The cooling assembly comprises a plurality of water-cooling pipe sleeves 20, the water-cooling pipe sleeves 20 are fixed at the bottom end of the chassis 10, the water-cooling pipe sleeves 20 are distributed outwards from the middle of the chassis 10 in sequence and are concentrically arranged, each water-cooling pipe sleeve 20 is provided with a water inlet m and a water outlet n, the water-cooling pipe sleeves 20 are independent, and at least one of the flow rate and the flow velocity of each water-cooling pipe sleeve 20 is adjustable.
Therefore, the water pipes embedded in the lower surface of the water-cooling copper plate are changed into the plurality of water-cooling pipe sleeves 20, the plurality of water-cooling pipe sleeves 20 are distributed in sequence from the center to the edge, the distribution of heat in different areas can be effectively controlled by regulating and controlling the water flow of each group of pipe sleeves, so that the obvious effect on a long crystal boundary surface is achieved, and the W-shaped interface can be solved through the temperature distribution of the bottom water-cooling plate; and the bottom heat distribution is more controllable, more interface shapes can be realized, the process window is widened, and more possibilities are provided for process realization. In addition, the bottom cooling part 100 has the advantages of simple structure, low installation cost and convenient installation.
In some embodiments, the water inlet m of each water-cooling jacket 20 is provided with a regulating valve (not shown in the figures) for controlling the flow rate and/or flow velocity of the water-cooling pipeline.
For example, the water flow pipelines of the water-cooling copper plate are divided into a plurality of independent groups by one group, the water flow pipelines are distributed in a ring-by-ring mode from inside to outside, each ring sleeve is provided with a water inlet m and a water outlet n, the water flow speed of each ring can be independently controlled through a regulating valve, if the center grows slowly, the water flow speed of the center ring can be reduced, and therefore the heat loss of the center area is reduced, and the heat loss conditions of different areas can be controlled through the water flow speeds of different areas.
Like this, at least one parameter in the flow and the velocity of flow of governing valve can the control water-cooling pipeline to make each water-cooling pipeline's cooling rate and radiating efficiency differentiation, directly set up the governing valve at water inlet m moreover, just can realize the automatic control to the aperture of governing valve through the controller of furnace body.
In some embodiments, a control valve block (not shown) is also included, with multiple water-cooled sockets 20 connected to the same control valve block. Thus, the whole cooling component has higher integration degree and is more modularized.
Further, the control valve group comprises a main flow path and a plurality of branches, each branch being provided with a flow control valve connected to a corresponding water cooling jacket 20. Therefore, water or other refrigerants flow to each branch through the main flow path and flow to each water cooling pipe sleeve 20 through the branch, and the flow control valve can control the flow rate of liquid flowing to the water cooling pipe sleeves 20 through the branch, so that the assembly and the batch production are convenient.
In some embodiments, the number of water cooling jackets 20 is ≧ 3, and the spacing between adjacent water cooling jackets 20 near the inside is greater than the spacing between adjacent water cooling jackets 20 near the outside. Referring to fig. 3, the water cooling jackets 20 are divided into three groups, and the interval between the water cooling jackets 20a, 20b is greater than the interval between the water cooling jackets 20b, 20 c. Therefore, the heat dissipation area near the center is small, and the area radiated outwards is larger, so that the interval between the outer water cooling pipes is reduced, the heat dissipation of the crystal in the area of the chassis 10 near the edge can be improved, and the crystal growth condition of the area is improved.
In some embodiments, each water-cooling jacket 20 includes first to fourth pipe sections connected in series, the first pipe section is parallel to the third pipe section, the second pipe section is parallel to the fourth pipe section, the first pipe section and the second pipe section are perpendicular to each other, the tail end of the fourth pipe section is spaced apart from the head end of the first pipe section, the water inlet m is located at the head end of the first pipe section, and the water outlet n is located at the tail end of the fourth pipe section. Thus, each water cooling tube is distributed in a generally annular shape, so that the cooling assembly can dissipate heat more uniformly to each area of the chassis 10.
In some embodiments, the pipe sections of the water-cooled jackets 20 are arranged in the same position. Therefore, the water inlets m of the water cooling pipe sections are linearly distributed, and the water outlets n are linearly distributed, so that the arrangement of the regulating valve or the control valve is more centralized and compact.
In some embodiments, the inner diameter of the innermost and outermost water cooling jacket 20 is smaller than the inner diameter of the water cooling jacket 20 sandwiched therebetween. Therefore, the pipe diameters are differentially processed, so that the heat dissipation effect of the water cooling pipe sleeve 20 clamped in the middle is better, and the W-shaped interface is improved.
According to the utility model discloses crystal growth stove of second aspect embodiment includes: the cooling device comprises a furnace body, a bottom cooling part 100 and a side cooling part, wherein the bottom cooling part 100 is arranged at the bottom of the furnace body; the side cooling part is positioned on the side of the furnace body.
Therefore, on one hand, most of heat dissipation is carried out from the bottom, and the heat dissipation capacity of the side part is weakened, so that the formation of a W-shaped interface can be effectively reduced; on the other hand, the water-cooling copper plate participates in the process of process control, and the flow speed of the water flow pipe sleeves at different positions is controlled to control the heat taken away by different areas, so that the temperature distribution of the different areas of the water-cooling copper plate becomes a controllable factor, a dimension variable is added for the control of a process formula, and a process control window is widened.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
In the description of the present invention, "the first feature" and "the second feature" may include one or more of the features. In the description of the present invention, "a plurality" means two or more. In the description of the present invention, the first feature "on" or "under" the second feature may include the first and second features being in direct contact, and may also include the first and second features being in contact with each other not directly but through another feature therebetween. In the description of the invention, the first feature being "on", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (9)
1. A bottom cooling unit for a crystal growth furnace, comprising:
the chassis is made of heat-conducting metal; and
the cooling assembly comprises a plurality of water-cooling pipe sleeves, the water-cooling pipe sleeves are fixed at the bottom end of the chassis and are arranged concentrically, the middle of the chassis is outward distributed in sequence, each water-cooling pipe sleeve is provided with a water inlet and a water outlet, the water-cooling pipe sleeves are independent, and at least one of the flow rate and the flow speed of each water-cooling pipe sleeve is adjustable.
2. The bottom cooling unit of crystal growth furnace of claim 1, wherein the water inlet of each water-cooled jacket is provided with a regulating valve for controlling the flow rate and/or flow velocity of the water-cooled pipeline.
3. The bottom cooling unit of a crystal growth furnace of claim 1, further comprising a control valve block to which a plurality of the water-cooling jackets are connected.
4. The bottom cooling section of a crystal growth furnace of claim 3, wherein the set of control valves comprises a main flow path and a plurality of branches, each branch being provided with a flow control valve connected to a respective water-cooled jacket.
5. The bottom cooling section of a crystal growth furnace according to any one of claims 1 to 4, wherein the number of the water-cooling jackets is 3 or more, and the interval between the adjacent water-cooling jackets near the inner side is larger than the interval between the adjacent water-cooling jackets near the outer side.
6. The bottom cooling section of a crystal growth furnace of any of claims 2-4, wherein each of the water-cooled jackets comprises first to fourth pipe sections connected in series, the first pipe section being parallel to the third pipe section, the second pipe section being parallel to the fourth pipe section, the first pipe section being perpendicular to the second pipe section, the trailing end of the fourth pipe section being spaced from the leading end of the first pipe section, the water inlet being located at the leading end of the first pipe section, and the water outlet being located at the trailing end of the fourth pipe section.
7. The bottom cooling unit of a crystal growth furnace according to claim 6, wherein the pipe sections of the water-cooled jacket are arranged at the same position.
8. The bottom cooling unit of a crystal growth furnace according to claim 1, wherein the inner diameters of the water-cooling jacket of the innermost and outermost rings are smaller than the inner diameter of the water-cooling jacket sandwiched therebetween.
9. A crystal growth furnace, comprising:
a furnace body;
the bottom cooling member of the crystal growth furnace according to any one of claims 1 to 8, which is provided at the bottom of the furnace body; and
and the side cooling part is positioned on the side of the furnace body.
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| CN202021259039.2U CN212865066U (en) | 2020-07-01 | 2020-07-01 | Bottom cooling part of crystal growth furnace and crystal growth furnace |
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| CN202021259039.2U CN212865066U (en) | 2020-07-01 | 2020-07-01 | Bottom cooling part of crystal growth furnace and crystal growth furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115094242A (en) * | 2022-06-23 | 2022-09-23 | 山东有研国晶辉新材料有限公司 | Furnace cooling bed and manufacturing method and smelting device thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115094242A (en) * | 2022-06-23 | 2022-09-23 | 山东有研国晶辉新材料有限公司 | Furnace cooling bed and manufacturing method and smelting device thereof |
| CN115094242B (en) * | 2022-06-23 | 2024-03-15 | 山东有研国晶辉新材料有限公司 | Furnace cooling bed, manufacturing method thereof and smelting device |
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