CN209010634U - Directional solidification mechanism for polysilicon preparation - Google Patents
Directional solidification mechanism for polysilicon preparation Download PDFInfo
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- CN209010634U CN209010634U CN201821909628.3U CN201821909628U CN209010634U CN 209010634 U CN209010634 U CN 209010634U CN 201821909628 U CN201821909628 U CN 201821909628U CN 209010634 U CN209010634 U CN 209010634U
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- distribution sleeve
- shell
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- 238000007711 solidification Methods 0.000 title claims abstract description 24
- 230000008023 solidification Effects 0.000 title claims abstract description 24
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 17
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 16
- 230000007246 mechanism Effects 0.000 title claims abstract description 15
- 238000002360 preparation method Methods 0.000 title claims description 15
- 238000009826 distribution Methods 0.000 claims abstract description 69
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 3
- 125000004122 cyclic group Chemical group 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 13
- 238000001816 cooling Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000004781 supercooling Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 101150006573 PAN1 gene Proteins 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses the directional solidification mechanism prepared for polysilicon, gas distribution sleeve I and gas distribution sleeve ∏ are successively arranged in the circular cylindrical shell body of cooler pan；Gas distribution sleeve I and gas distribution sleeve ∏ interior are annular hollow chamber structure, offer venthole on the inner sidewall of gas distribution sleeve ∏, the lateral wall of gas distribution sleeve I；It is connected between annular compartment between the inlet plenum of housing bottom and the hollow chamber of gas distribution sleeve I, the hollow chamber of gas distribution sleeve ∏ and gas distribution sleeve I outer wall and gas distribution sleeve ∏ inner wall by air inlet；The exhaust chamber of housing bottom is distributed between the annular compartment between sleeve ∏ outer wall and inner walls with gas to be connected to by gas vent；The exhaust pipe of housing bottom is connected to environment in the cylinder of gas distribution sleeve I by gas vent.The utility model promotes flow perturbation, is uniformly distributed conducive to gas in case top, improves heat exchange uniformity and heat exchange efficiency.
Description
Technical field
The utility model relates to photovoltaic technology field, and in particular to a kind of directional solidification mechanism for polysilicon preparation.
Background technique
Solar energy has become green energy resource of greatest concern at present, and polysilicon is current most widely used solar-electricity
Pond material, directional solidification are to obtain effective metallurgy purification means of solar grade polycrystalline silicon material.Directional solidification, which refers to, to be solidified
Compulsive means are used in the process, and the temperature gradient of specific direction is set up in frozen metal and non-frozen metal melt, thus
It solidifies melt along the direction opposite with hot-fluid, finally obtains the technology with specific orientation column crystal.Directional solidification is to grind
Study carefully the important means of solidification theory and metal freezing rule, and prepares monocrystal material and micron order (or nanoscale) continuous fiber
The important method of brilliant high performance structures material and functional material.Since the 1960s, directional solidification technique have developed rapidly.
Method is reduced by initial exothermic mixture method, power and develops to the high speed freezing method being widely used at present, liquid metal cooling method and company
Continuous directional solidification technique.Directional solidification technique is widely used in high temperature alloy, magnetic material, crystal growth, in-situ composite
The power face such as preparation, and compound, marmem field have a very broad application prospects between class single-crystal metal.
It is existing independent cooling directional solidification is carried out to crucible bottom using cooler pan or combines the melt that solidified downward
Induction zone is removed, to obtain in the operating process of unidirectional temperature gradient, there are center supercoolings or solidified melt vibration etc.
Deficiency adversely affects crystal growth.
Utility model content
The technical problem to be solved by the utility model is to existing independent use cooler pan carries out cooling to crucible bottom and determines
To solidification or the downward out induction zone of melt that will be solidified is combined, thus obtain in the operating process of unidirectional temperature gradient,
The deficiencies of vibrating there are center supercooling or solidified melt, adversely affects crystal growth, the utility model provides understanding
The certainly directional solidification mechanism for polysilicon preparation of the above problem.
The utility model is achieved through the following technical solutions:
For the directional solidification mechanism of polysilicon preparation, including cooler pan, the cooler pan include cylindrical shell, shell
Interior gas distribution sleeve I and gas equipped with coaxial inner conductor is distributed sleeve П, and the gas distribution sleeve П is set in gas point
Outside cloth sleeve I；The outer diameter that gas is distributed sleeve П is less than the internal diameter of shell, and the internal diameter of the gas distribution sleeve П is greater than gas
It is distributed the outer diameter of sleeve I；
Gas distribution sleeve I and gas distribution sleeve П interior are annular hollow chamber structure, gas distribution set
Venthole is offered on the inner sidewall of cylinder П, the lateral wall of gas distribution sleeve I；
The bottom of the shell is equipped with circumferentially arranged with cyclic annular inlet plenum, and the inlet plenum and gas are distributed in sleeve I
Between plenum chamber, the hollow chamber of gas distribution sleeve П and gas distribution sleeve I outer wall and gas distribution sleeve П inner wall
Annular compartment between pass through air inlet be connected to；
The bottom of shell is distributed in sleeve П outer wall and shell circumferentially arranged with annular exhaust plenum, the exhaust chamber and gas
It is connected between annular compartment between wall by gas vent；
Exhaust pipe is additionally provided at housing bottom geometric center, it is logical that the exhaust pipe and gas are distributed environment in the cylinder of sleeve I
Cross gas vent connection；
The inlet plenum is equipped with admission line, and exhaust chamber and exhaust pipe are equipped with exhaust pipe.
Utility model works principle are as follows: first pass through admission line and ventilate into inlet plenum, the indoor gas of air inlet is through two
Kind approach enters in shell: one of approach is to enter the hollow chamber of gas distribution sleeve I through air inlet and gas is distributed
In the hollow chamber of sleeve П, then through in the venthole and gas distribution sleeve П on corresponding gas distribution sleeve I outer wall
Venthole on wall is distributed in the annular compartment between sleeve I outer wall and gas distribution sleeve П inner wall into gas and converges, and
Heat convection effect is carried out by case top and crucible；Another approach is to be directly entered gas distribution sleeve I through air inlet
In annular compartment between outer wall and gas distribution sleeve П inner wall；
Since the venthole on gas distribution sleeve I outer wall is set in opposite directions with the venthole on gas distribution sleeve П inner wall
It sets, two air-flows mutually collide, the annular chamber being directly entered between gas distribution sleeve I outer wall and gas distribution sleeve П inner wall
Indoor airflow direction is vertical with above-mentioned two strands of airflow directions mutually converged, and flow perturbation is greatly facilitated, and is conducive to gas in shell
Top is uniformly distributed, and improves heat exchange uniformity and heat exchange efficiency, prevents from carrying out crucible bottom cooling manufacture vertical temperature gradient
Occur center supercooling problem in the process, ensures that liquid level is straight or dimpling in crucible, conducive to good crystalline structure silicon ingot finished product is grown up to.
Preferably, on the lateral wall of the venthole on the inner sidewall of the gas distribution sleeve П and gas distribution sleeve I
Venthole it is staggered.
Sufficient perturbation action is provided simultaneously ensureing, reduction pressure drop as far as possible reduces resistance.
Preferably, the open top end of the shell is equipped with cover board, and the cover board is detachably connected by graphite bolt
It connects.
Cover board is connect by graphite bolt with shell, easy disassembly, inspection operation.
Preferably, seal groove is circumferentially offered at outer rim on the lower face of the cover board, is set in the seal groove
There is gasket；Excessively cooperate in the open top end embedding sealing slot of the shell with gasket and is fixed.
Cover board and shell end contact area are improved, the sealing performance of the two junction is improved.
Preferably, the cover board is made of graphite heat conduction plate.
Cover board is made by graphite heat conduction plate, ensures good cooling effect, reduces energy consumption.
Preferably, the inner plate surface of the cover board is equipped with several radiating fins.
By the multiple radiating fins of (i.e. towards the intracorporal plate face of shell on) setting on cover board inner plate surface, to increase heat-transfer surface
Product improves heat exchange efficiency.
Preferably, the radiating fin is radially radially arranged using the geometric center of cover board as basic point.
By the way that by radiating fin arrangement, radially structure is also distributed outside sleeve I to by gas while promoting heat dissipation
The gas that annular compartment between wall and gas distribution sleeve П inner wall comes out plays guiding role, is distributed to gas and is distributed sleeve
Annular compartment flowing in the centre I and gas distribution sleeve П outer wall and inner walls bracket is exchanged heat, is discharged.
Preferably, gas flow control valve is equipped on the admission line and exhaust pipe.
Facilitate control air inlet, extraction flow size.
The utility model has the following advantages and benefits:
Utility model works principle are as follows: first pass through admission line and ventilate into inlet plenum, the indoor gas of air inlet is through two
Kind approach enters in shell: one of approach is to enter the hollow chamber of gas distribution sleeve I through air inlet and gas is distributed
In the hollow chamber of sleeve П, then through in the venthole and gas distribution sleeve П on corresponding gas distribution sleeve I outer wall
Venthole on wall is distributed in the annular compartment between sleeve I outer wall and gas distribution sleeve П inner wall into gas and converges, and
Heat convection effect is carried out by case top and crucible；Another approach is to be directly entered gas distribution sleeve I through air inlet
In annular compartment between outer wall and gas distribution sleeve П inner wall；
Since the venthole on gas distribution sleeve I outer wall is set in opposite directions with the venthole on gas distribution sleeve П inner wall
It sets, two air-flows mutually collide, the annular chamber being directly entered between gas distribution sleeve I outer wall and gas distribution sleeve П inner wall
Indoor airflow direction is vertical with above-mentioned two strands of airflow directions mutually converged, and flow perturbation is greatly facilitated, and is conducive to gas in shell
Top is uniformly distributed, and improves heat exchange uniformity and heat exchange efficiency, prevents from carrying out crucible bottom cooling manufacture vertical temperature gradient
Occur center supercooling problem in the process, ensures that liquid level is straight or dimpling in crucible, conducive to good crystalline structure silicon ingot finished product is grown up to.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the utility model embodiment, constitutes the one of the application
Part does not constitute the restriction to the utility model embodiment.In the accompanying drawings:
Fig. 1 is the cooler pan installation site structural schematic diagram of the utility model；
Fig. 2 is the cooler pan radial section schematic perspective view of the utility model；
Fig. 3 is the cooler pan circumferential cross-section structural schematic diagram of the utility model；
Fig. 4 is the cover board present invention looks up structural representation of the utility model.
Label and corresponding parts title in attached drawing: 1- cooler pan, 101- shell, 102- gas are distributed sleeve I, 103-
Gas is distributed sleeve П, 104- venthole, 105- inlet plenum, 106- air inlet, 107- exhaust chamber, 108- gas vent, 109- row
Tracheae, 110- admission line, 111- exhaust pipe, 112- cover board, 113- graphite bolt, 114- radiating fin, 115- seal groove,
2- furnace body, 3- crucible, 4- graphite heater, 5- heat-preservation cylinder, 6- heating induction coil.
Specific embodiment
For the purpose of this utility model, technical solution and advantage is more clearly understood, below with reference to embodiment and attached drawing,
The utility model is described in further detail, and the exemplary embodiment and its explanation of the utility model are only used for explaining this
Utility model is not intended to limit the scope of the present invention.
Embodiment 1
Present embodiments provide a kind of directional solidification mechanism for polysilicon preparation, including cooler pan 1, the cooler pan
1 includes cylindrical shell 101, gas distribution sleeve I102 and gas distribution sleeve П equipped with coaxial inner conductor in shell 101
103, the gas distribution sleeve П 103 is set in outside gas distribution sleeve I102；The outer diameter of gas distribution sleeve П 103 is less than
The internal diameter of the internal diameter of shell 101, the gas distribution sleeve П 103 is greater than the outer diameter of gas distribution sleeve I102；
It is annular hollow chamber structure, gas that gas, which is distributed sleeve I102 and gas distribution 103 interior of sleeve П,
It is distributed the inner sidewall of sleeve П 103, gas is distributed on the lateral wall of sleeve I102 and offers venthole 104；
The bottom of the shell 101 is equipped with circumferentially arranged with cyclic annular inlet plenum 105, and the inlet plenum 105 is distributed with gas
The hollow chamber of sleeve I102, the hollow chamber of gas distribution sleeve П 103 and gas distribution sleeve I102 outer wall and gas
It is connected between annular compartment between distribution 103 inner wall of sleeve П by air inlet 106；
The bottom of shell 101 is distributed sleeve П 103 with gas circumferentially arranged with annular exhaust plenum 107, the exhaust chamber 107
It is connected between annular compartment between 101 inner wall of outer wall and shell by gas vent 108；
Exhaust pipe 109 is additionally provided at 101 bottom geometric center of shell, the exhaust pipe 109 is distributed sleeve I102 with gas
Cylinder in environment be connected to by gas vent 108；
The inlet plenum 105 is equipped with admission line 110, and exhaust chamber 107 and exhaust pipe 109 are equipped with exhaust pipe 111.
Embodiment 2
It is further improved on the basis of embodiment 1, the venthole on the inner sidewall of the gas distribution sleeve П 103
104 is staggered with the venthole 104 on the lateral wall of gas distribution sleeve I102.The open top end of the shell 101 is set
There is cover board 112, the cover board 112 is detachably connected by graphite bolt 113.Close to outer rim on the lower face of cover board 112
Place circumferentially offers seal groove 115, is equipped with gasket in the seal groove 115；The open top end of the shell 101 is embedded in
Excessively cooperate in seal groove 115 with gasket and is fixed.Cover board 112 is made of graphite heat conduction plate.The inner plate surface of cover board 112
Several radiating fins 114 are equipped with, radiating fin 114 is radially radially arranged using the geometric center of cover board 112 as basic point.
Gas flow control valve is equipped on the admission line 110 and exhaust pipe 111.
Above-described specific embodiment, to the purpose of this utility model, technical scheme and beneficial effects carried out into
One step is described in detail, it should be understood that being not used to limit the foregoing is merely specific embodiment of the present utility model
Determine the protection scope of the utility model, within the spirit and principle of the utility model, any modification for being made equally is replaced
It changes, improve, should be included within the scope of protection of this utility model.
Claims (8)
1. for the directional solidification mechanism of polysilicon preparation, including cooler pan (1), which is characterized in that the cooler pan (1) includes
Cylindrical shell (101), interior gas distribution sleeve I (102) and gas equipped with coaxial inner conductor of shell (101) are distributed sleeve П
(103), gas distribution sleeve П (103) is set in gas distribution sleeve I (102) outside；Gas is distributed sleeve П (103)
Outer diameter is less than the internal diameter of shell (101), and the internal diameter of gas distribution sleeve П (103) is greater than gas distribution sleeve I (102)
Outer diameter；
It is annular hollow chamber structure, gas that gas, which is distributed sleeve I (102) and gas distribution sleeve П (103) interior,
It is distributed the inner sidewall of sleeve П (103), gas is distributed on the lateral wall of sleeve I (102) and offers venthole (104)；
The bottom of the shell (101) is equipped with circumferentially arranged with cyclic annular inlet plenum (105), the inlet plenum (105) and gas point
The hollow chamber of cloth sleeve I (102), the hollow chamber of gas distribution sleeve П (103) and gas distribution sleeve I (102) are outside
It is connected between annular compartment between wall and gas distribution sleeve П (103) inner wall by air inlet (106)；
The bottom of shell (101) is distributed sleeve П circumferentially arranged with annular exhaust plenum (107), the exhaust chamber (107) and gas
(103) it is connected between the annular compartment between outer wall and shell (101) inner wall by gas vent (108)；
It is additionally provided with exhaust pipe (109) at the geometric center of shell (101) bottom, the exhaust pipe (109) and gas are distributed sleeve I
(102) environment is connected to by gas vent (108) in cylinder；
The inlet plenum (105) is equipped with admission line (110), and exhaust chamber (107) and exhaust pipe (109) are equipped with exhaust pipe
(111)。
2. the directional solidification mechanism according to claim 1 for polysilicon preparation, which is characterized in that the gas distribution
Venthole (104) on the inner sidewall of sleeve П (103) and the venthole (104) on the lateral wall of gas distribution sleeve I (102)
It is staggered.
3. the directional solidification mechanism according to claim 1 for polysilicon preparation, which is characterized in that the shell
(101) open top end is equipped with cover board (112), and the cover board (112) is detachably connected by graphite bolt (113).
4. the directional solidification mechanism according to claim 3 for polysilicon preparation, which is characterized in that the cover board
(112) it is circumferentially offered seal groove (115) at outer rim on lower face, gasket is equipped in the seal groove (115)；
Excessively cooperate in the open top end embedding sealing slot (115) of the shell (101) with gasket and is fixed.
5. the directional solidification mechanism according to claim 3 for polysilicon preparation, which is characterized in that the cover board
(112) it is made of graphite heat conduction plate.
6. the directional solidification mechanism according to claim 3 for polysilicon preparation, which is characterized in that the cover board
(112) inner plate surface is equipped with several radiating fins (114).
7. the directional solidification mechanism according to claim 6 for polysilicon preparation, which is characterized in that the radiating fin
(114) it radially radially arranges using the geometric center of cover board (112) as basic point.
8. the directional solidification mechanism according to claim 1 for polysilicon preparation, which is characterized in that the admission line
(110) and on exhaust pipe (111) it is equipped with gas flow control valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821909628.3U CN209010634U (en) | 2018-11-19 | 2018-11-19 | Directional solidification mechanism for polysilicon preparation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821909628.3U CN209010634U (en) | 2018-11-19 | 2018-11-19 | Directional solidification mechanism for polysilicon preparation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209010634U true CN209010634U (en) | 2019-06-21 |
Family
ID=66842720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821909628.3U Active CN209010634U (en) | 2018-11-19 | 2018-11-19 | Directional solidification mechanism for polysilicon preparation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209010634U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021047149A1 (en) * | 2019-09-10 | 2021-03-18 | 浙江大学 | Crucible device suitable for use in supergravity directional solidification |
| CN116833818A (en) * | 2023-08-31 | 2023-10-03 | 山东豪迈数控机床有限公司 | Air seal ring spraying mechanism for main shaft |
-
2018
- 2018-11-19 CN CN201821909628.3U patent/CN209010634U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021047149A1 (en) * | 2019-09-10 | 2021-03-18 | 浙江大学 | Crucible device suitable for use in supergravity directional solidification |
| CN116833818A (en) * | 2023-08-31 | 2023-10-03 | 山东豪迈数控机床有限公司 | Air seal ring spraying mechanism for main shaft |
| CN116833818B (en) * | 2023-08-31 | 2023-11-24 | 山东豪迈数控机床有限公司 | Air seal ring spraying mechanism for main shaft |
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Effective date of registration: 20231027 Granted publication date: 20190621 |