CN106915746B - A kind of 48 pairs of rod chassis of reducing furnace - Google Patents
A kind of 48 pairs of rod chassis of reducing furnace Download PDFInfo
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- CN106915746B CN106915746B CN201710218196.5A CN201710218196A CN106915746B CN 106915746 B CN106915746 B CN 106915746B CN 201710218196 A CN201710218196 A CN 201710218196A CN 106915746 B CN106915746 B CN 106915746B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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Abstract
The invention discloses a kind of 48 pairs of rod chassis of reducing furnace, include chassis body and electrode, electrode has 48 pairs, divides the circular rings of Lie Cheng tetra- to be arranged on chassis and forms four circle electrode retaining collars, the ring of electrode one, the ring of electrode two, the ring of electrode three and electrode Fourth Ring are followed successively by outward from interior；The both sides of each circle electrode retaining collar be equipped with a circle by some gas outlets form go out compression ring and a circle by what some air inlets were formed enters compression ring；Enter compression ring and be provided with three circles altogether, be wherein respectively provided with a circle on the outside of the inner side and electrode Fourth Ring of the ring of electrode one.The main beneficial effect of the present invention has：The material gas on silicon rod surface can be promoted to circulate, obtain high-quality polycrystalline silicon rod；The internal cooling of bell jar inwall can be realized, reduces the cleaning frequency of bell jar inwall, thermal radiation loss in stove is reduced and improves production efficiency；Materials conversion rate can be improved, reduces energy consumption.
Description
Technical field
The present invention relates to polysilicon preparing device technical field, and in particular to a kind of chassis in polycrystalline silicon reducing furnace
Structure.
Background technology
Improved Siemens are the mainstream technologys for producing polysilicon in the world, and its nucleus equipment is reduction furnace, reduction furnace
Operation principle is that the mixed gas reaction of trichlorosilane and hydrogen is generated into polysilicon by energization high temperature silicon core and is deposited on silicon
On core, final product is deposited on the polysilicon on silicon core, and product is finally produced in the form of polycrystalline silicon rod from reduction furnace.
General reduction furnace type is 12 pairs of rod reduction furnaces, 24 pairs of rod reduction furnaces and 36 pairs of rod reduction furnaces at present, due to
Above-mentioned reduction furnace has that single furnace output is low, specific energy consumption is difficult to further reduction, equal production capacity produces the restrictions such as land area is big
Property feature, so large-scale reduction furnace based on 48 pairs of rod reduction furnaces turns into a new generation that domestic and international polysilicon giant falls over each other exploitation
Polysilicon key technology.By taking 48 pairs of rod reduction furnaces as an example, its single furnace output can be up to 11~12 tons, and unit power consumption is less than
50kwh, under same size, factory building takes up an area the half for there was only 24 pairs of rod reduction furnaces, can while high efficiency production product is realized
So that production cost is greatly reduced, 48 pairs of rod reduction furnaces show the incomparable economy of small-sized reduction furnace.
Polycrystalline silicon reducing furnace is mainly made up of chassis and body of heater, and wherein chassis is the core component of reduction furnace, the knot on chassis
Structure and performance directly affect distribution and flowing of the material in stove, the growth quality of silicon rod and reduction energy consumption.Also set on chassis
Electrode connection device, material air inlet-outlet device and cooling device are equipped with, wherein electrode has two kinds of fixed spread patterns, i.e., same
Heart circle best-fit and honeycomb arrangement, the cooling medium in cooling device are generally water or oil.Above two device is more
Maturation, the space of optimization is smaller, and the optimization space of air inlet-outlet device is still larger, especially the quantity of air inlet/outlet, position
And the height of nozzle, by improving, optimizing air inlet-outlet device, it can further optimize in stove thermal field in material flow field and stove,
And then improve utilization of materials, improve crystal structure performance and reduce reduction energy consumption, and then realize the low energy consumption of high-quality product
Production.
Trichlorosilane in the range of 900~1050 DEG C mainly based on thermal decomposition, between 1050~1200 DEG C with hydrogen also
Based on original, when temperature is less than 900 DEG C, the unformed silicon of loose crineous can be formed, when temperature is more than 1200 DEG C, it may occur that inverse rotten
Erosion reaction, makes silicon easily melt.In addition, in reduction furnace running, red-hot silicon rod surface can form one layer of gas phase interface, root
Understand that the small hydrogen chloride of molecular weight is better than trichlorosilane to the taxis of silicon rod, is limited reaction rate according to Soret effects
System.Distribution of the material in stove directly decides that thermal field is distributed in stove, and the fluidity determining of material silicon rod surface vapor layer
Property, and distribution and flowing of the material in stove are entered outlet by chassis and determined, therefore it is that influence is high-quality that outlet mode is entered on chassis
The deciding factor of polysilicon efficient growth.
Reduce the expansion of heat size so that feed flow rate, material flow field, thermal field etc. influence the key parameter of polycrystalline silicon growth
Become more complicated, it is necessary to develop series of key techniques, to ensure the stabilization of key parameter, and then realize large-scale reduction furnace
Efficiently, stable operation, chassis are to ensure polycrystalline silicon growth and the critical component of reduction furnace stable operation, are to realize that reduction furnace is large-scale
Change and reduce the key of reduction furnace energy consumption.
Therefore, how for 48 pairs of more rational chassis of rod reduction furnace design structure, can solve foregoing presence
The problem of as be currently needed for be badly in need of solve problem.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of structure design more rationally, material fluidity can be made in stove more
Good, 48 pairs of rod chassis of reducing furnace structures that thermal field is more evenly distributed, materials conversion rate is higher.
In order to solve the above technical problems, the present invention adopts the following technical scheme that：A kind of 48 pairs of rod chassis of reducing furnace, include
Chassis body and electrode, electrode are arranged in chassis body, it is characterised in that：The electrode includes 48 pairs, 48 pairs of electrodes point
The circular rings of Lie Cheng tetra- be arranged on chassis formed four circle electrode retaining collars, from it is interior be followed successively by outward the ring of electrode one, the ring of electrode two,
The ring of electrode three and electrode Fourth Ring, the number of electrodes positioned at outer ring are more than the number of electrodes positioned at inner ring；The two of each circle electrode retaining collar
Side is equipped with the mixed gas that a circle is made up of some gas outlets and goes out the mixed gas that compression ring and a circle are made up of some air inlets
Enter compression ring, gas outlet and air inlet are opened in chassis body；It is described enter compression ring be provided with three circles altogether, be followed successively by outward from interior
The ring of air inlet one, the ring of air inlet two and the ring of air inlet three, wherein the ring of air inlet three is arranged at the outside at electrode Fourth Ring, and the ring of air inlet one is arranged at
The inner side of the ring of electrode one.
Further, it is described go out compression ring be provided with three circles altogether, be followed successively by the ring of outlet one, the ring of outlet two and outlet outward from interior
Three rings, the wherein ring of outlet one are arranged at the inner side of the ring of air inlet one, and the ring of outlet two is arranged between the ring of electrode one and the ring of electrode two, gone out
The ring of gas three is arranged between the ring of electrode three and electrode Fourth Ring；And the ring of air inlet two is arranged between the ring of electrode two and the ring of electrode three.
Further, the electrode on each circle electrode retaining collar is to be uniformly distributed；Each gas outlet for irising out on compression ring is
It is uniformly distributed, and the diameter of each gas outlet is identical；Each enclose into the air inlet on compression ring is to be uniformly distributed, and each air inlet
The diameter of mouth is identical.
Further, the chassis body is disc structure, the ring of outlet one, the ring of air inlet one, the ring of electrode one, the ring of outlet two,
The ring of electrode two, the ring of air inlet two, the ring of electrode three, the ring of gaseous mixture outlet three, electrode Fourth Ring and the ring of gaseous mixture air inlet three are with chassis sheet
The center of body is the center of circle, forms the concentric circles being arranged in order from inside to outside.
Further, 3 gas outlets are evenly distributed with the ring of outlet one, 3~6 air inlets are evenly distributed with the ring of air inlet one
Mouthful, 6 pairs of electrodes are evenly distributed with the ring of electrode one, are evenly distributed with 5~10 gas outlets on the ring of outlet two, on the ring of electrode two
It is even that 10 pairs of electrodes are distributed with, 10~20 air inlets are evenly distributed with the ring of air inlet two, 14 pairs are evenly distributed with the ring of electrode three
Electrode, 5~10 gas outlets are evenly distributed with the ring of gaseous mixture outlet three, 18 pairs of electrodes are evenly distributed with electrode Fourth Ring, are entered
20~30 air inlets are evenly distributed with the ring of gas three.
Further, the gas outlet gone out on compression ring forms mistake with the air inlet entered on compression ring along the warp direction of chassis body
Position set, it is any through on line position only with air inlet or only with gas outlet, that is to say, that it is adjacent enter compression ring on air inlet
With go out the gas outlet on compression ring all the time not on the same warp on chassis, and be distributed across with certain angle it is adjacent two warp
On line；The air inlet entered on compression ring and the gas outlet gone out on compression ring arrange along broken line from inside to outside.
Further, 3-6 is provided between the electrode of the ring of electrode two and aids in gas outlet, between adjacent auxiliary gas outlet
It is separated with some to electrode, aids in the diameter of gas outlet to be less than the diameter for being located at each gas outlet on compression ring；Gas outlet is aided in silicon
Rod is opened when growing to a diameter of 20~50mm.
Further, it is provided between the ring of electrode two and the ring of air inlet two and aids in out compression ring, aids in out being uniformly arranged on compression ring
There is 3-6 gas outlet, the diameter of the gas outlet is less than each gas outlet diameter on compression ring, and the gas outlet is grown to directly in silicon rod
Opened when being 80~120mm in footpath.
Further, unit bodies are controlled by adjusting into the air inlet quantity on compression ring and the gas outlet quantity gone out on compression ring
The unit volume solid circulating rate of Matter Transfer in product, the ring of electrode one and the ring of electrode two is more than the ring of electrode three and electrode Fourth Ring
Unit volume solid circulating rate.
The present invention has advantages below and beneficial effect compared with prior art：
First, electrode retaining collar both sides are provided with that gaseous mixture enters compression ring and gaseous mixture goes out compression ring, and this structure design can promote silicon
The material gas circulation on rod surface so that the temperature (vapour deposition temperature and surface vapor temperature) on silicon rod surface remains at conjunction
Suitable material conversion temperature, and then material conversion speed and silicon grain sedimentation rate is reached preferably matching value, it is excellent so as to obtain
The polycrystalline silicon rod of matter, it can farthest reduce the generation of coarse fodder and silica soot；
Second, the ring of mixed gas air inlet three is provided with outside electrode Fourth Ring, i.e., neighbour reduction furnace bell jar inwall is provided with one
Air inlet is enclosed, this structure design can realize the internal cooling of bell jar inwall, and can farthest utilize hot spoke in stove
Penetrate, reduce the loss of heat radiation, so as to reduce reduction energy consumption.In addition the structure can make the gas phase temperature close to bell jar inwall begin
It is less than 500 DEG C eventually, and then the generation of material corrosion bell jar and silica soot can be avoided, and silica soot caused by its complementary space
It will not be recycled on inwall, therefore can ensure that bell jar inwall has high finish for a long time, and then bell jar inwall can be reduced
The cleaning frequency, further reduce stove in heat radiation loss and improve production efficiency；
3rd, the air inlet entered on compression ring and the gas outlet gone out on compression ring arrange according to broken line from inside to outside, and this design can
To promote the turbulence of material, and then improve the conversion ratio of material.When reduction furnace is run, hot silicon rod surface can form one layer of gas
Boundary, because the molecular weight of hydrogen chloride and hydrogen is small compared with trichlorosilane, therefore hydrogen chloride and hydrogen can preferentially diffuse to silicon rod
Surface, conversion ratio is caused to be restricted, and the turbulence of material can break the gas phase interface on silicon rod surface, and then improve trichlorine hydrogen
The contact probability of silicon and silicon rod, so as to improve conversion ratio of the trichlorosilane on silicon rod surface；
4th, the unit volume solid circulating rate of the ring of electrode one and the ring of electrode two is more than the ring of electrode three and electrode Fourth Ring, this
Design can ensure the silicon rod homoepitaxial on the ring of electrode one and the ring of electrode two, can reduce the production of silica soot near internal silicon rod
Raw rate.As the change of silicon rod diameter is big, the ring of comparative electrode three and electrode Fourth Ring, thermal diffusion corresponding to the ring of electrode one and the ring of electrode two
Space is smaller, and then causes gas phase temperature to raise, and aggravates the generation of silica soot and accessory substance, also results in coarse fodder life at the top of silicon rod
Improved into rate, and foregoing problems existing for traditional 48 pairs of rod reduction furnaces can be avoided by the design, ensure the ring of electrode one and electricity
Silicon rod homoepitaxial on the ring of pole two；
5th, air inlet and gas outlet quantity are more than traditional 48 pairs of rod reduction furnaces, and air inlet and gas outlet interval point
Cloth, from the point of view of overall atmosphere in stove, the increase of air inlet/outlet quantity and air inlet/outlet, which are spaced apart, can promote macroscopical gas in stove
The circulation and turbulence of atmosphere, but for microcosmic, the air-flow on silicon rod surface is more uniform.The lifting of macroscopical atmosphere circulation and turbulence
The Matter Transfer and temperature in furnace roof portion can especially be reduced, can solve 48 pairs of rod reduction furnace top materials of tradition it is insufficient,
The problems such as temperature is high, silicon core crossbeam easily fuses；
6th, creatively by the way that large-scale reduction furnace is divided into multiple fluids by the arrangement of air inlet/outlet, temperature is uniformly distributed
Region, that is, remain the advantage of small-sized reduction furnace, there is the characteristics of large-scale reduction furnace again, it is possible to achieve electronic-grade polycrystalline silicon
Large-scale reduction furnace production.
Brief description of the drawings
Fig. 1 is the structural representation of the first embodiment of the invention；
Fig. 2 is the structural representation of second of embodiment of the invention；
Fig. 3 is the structural representation of the third embodiment of the invention.
1 is chassis body, and 2 be the ring of outlet one, and 3 be the ring of air inlet one, and 4 be the ring of electrode one, and 5 be the ring of outlet two, and 6 be electrode two
Ring, 7 be the ring of air inlet two, and 8 be the ring of electrode three, and 9 be the ring of outlet three, and 10 be electrode Fourth Ring, and 11 be the ring of air inlet three, and 12 be auxiliary outlet
Ring, 13 be auxiliary gas outlet, and 14 be gas outlet, and 15 be air inlet, and 16 be electrode.
Embodiment
Embodiment 1, reference picture 1,48 pairs of rod chassis of reducing furnace, including chassis body 1, the ring 2 of outlet one, the ring of air inlet one
3rd, the ring 4 of electrode one, the ring 5 of outlet two, the ring 6 of electrode two, the ring 7 of air inlet two, the ring 8 of electrode three, the ring 9 of outlet three, electrode Fourth Ring 10, air inlet
Three rings 11.
Chassis body 1 is disc structure, the ring 2 of outlet one, the ring 3 of air inlet one, the ring 4 of electrode one, the ring 5 of outlet two, the ring of electrode two
6th, the ring 7 of air inlet two, the ring 8 of electrode three, the ring 9 of outlet three, electrode Fourth Ring 10 and the ring 11 of air inlet three are using the center of chassis body 1 as circle
The heart, form the concentric circles being arranged in order from inside to outside.
3 gas outlets 14 are evenly distributed with the ring 2 of outlet one, 3 air inlets 15 are evenly distributed with the ring 3 of air inlet one, electricity
6 pairs of electrodes 16 are evenly distributed with the ring 4 of pole one, are evenly distributed with 5 gas outlets 14 on the ring 5 of outlet two, on the ring 6 of electrode two uniformly
10 pairs of electrodes 16 are distributed with, 15 air inlets 15 are evenly distributed with the ring 7 of air inlet two, 14 pairs are evenly distributed with the ring 8 of electrode three
Electrode 16,10 gas outlets 14 are evenly distributed with the ring 9 of outlet three, 18 pairs of electrodes 16 are evenly distributed with electrode Fourth Ring 10, are entered
20 air inlets 15 are evenly distributed with the ring 11 of gas three.
It is adjacent enter compression ring on air inlet 15 and go out the gas outlet 14 on compression ring not on the same warp of chassis body 1,
And it is distributed across on adjacent two warps with certain angle, that is to say, that position is offset from each other, and enters entering on compression ring
Gas port 15 and the gas outlet 14 gone out on compression ring arrange according to broken line from inside to outside.
Unit bodies are controlled by adjusting into the quantity of the air inlet 15 on compression ring and the quantity of the gas outlet 14 gone out on compression ring
Matter Transfer in product；The unit volume solid circulating rate of the ring 4 of electrode one and the ring 6 of electrode two is more than the ring 8 of electrode three and electrode four
The unit volume solid circulating rate of ring 10.
Embodiment 2, reference picture 2, it is with 1 difference of embodiment, 3 outlets is evenly distributed with the ring 2 of outlet one
Mouthfuls 14,4 air inlets 15 are evenly distributed with the ring 3 of air inlet one, and 6 pairs of electrodes 16, the ring of outlet two are evenly distributed with the ring 4 of electrode one
5 gas outlets 14 are evenly distributed with 5,10 pairs of electrodes 16 are evenly distributed with the ring 6 of electrode two, are uniformly distributed on the ring 7 of air inlet two
There are 15 air inlets 15,14 pairs of electrodes 16 are evenly distributed with the ring 8 of electrode three, 10 outlets are evenly distributed with the ring 9 of outlet three
Mouthfuls 14,18 pairs of electrodes 16 are evenly distributed with electrode Fourth Ring 10, and 20 air inlets 15 are evenly distributed with the ring 11 of air inlet three.
Embodiment 3, reference picture 3, it is with 1 difference of embodiment, 3 outlets is evenly distributed with the ring 2 of outlet one
Mouthfuls 14,6 air inlets 15 are evenly distributed with the ring 3 of air inlet one, and 6 pairs of electrodes 16, the ring of outlet two are evenly distributed with the ring 4 of electrode one
6 gas outlets 14 are evenly distributed with 5,10 pairs of electrodes 16 are evenly distributed with the ring 6 of electrode two, are uniformly distributed on the ring 7 of air inlet two
There are 15 air inlets 15,14 pairs of electrodes 16 are evenly distributed with the ring 8 of electrode three, 10 outlets are evenly distributed with the ring 9 of outlet three
Mouthfuls 14,18 pairs of electrodes 16 are evenly distributed with electrode Fourth Ring 10, and 20 air inlets 15 are evenly distributed with the ring 11 of air inlet three.
It is provided between the ring 6 of electrode two and the ring 7 of air inlet two and aids in out compression ring 12, aids in out being evenly arranged with three on compression ring 12
Individual gas outlet, the diameter of this gas outlet are less than the diameter positioned at the gas outlet 14 that mixed gas goes out on compression ring；Aid in out compression ring
Opened when silicon rod grows to a diameter of 80~120mm gas outlet on 12.
Auxiliary gas outlet 13 is provided between the electrode 16 of the ring 6 of electrode two, the quantity of auxiliary gas outlet 13 is 3, auxiliary
The diameter of gas outlet 13 is less than the diameter positioned at the gas outlet 14 that mixed gas goes out on compression ring；Gas outlet 13 is aided in be grown in silicon rod
Opened during to a diameter of 20~50mm.
The present invention is described in detail above, described above, only the preferred embodiments of the invention, when can not
Limit the scope of the present invention, i.e., it is all to make equivalent changes and modifications according to the application scope, it all should still belong to covering scope of the present invention
It is interior.
Claims (9)
1. a kind of 48 pairs of rod chassis of reducing furnace, include chassis body and electrode, electrode is arranged in chassis body, and its feature exists
In：The electrode includes 48 pairs, and 48 pairs of electrodes divide the circular rings of Lie Cheng tetra- to be arranged at the circle of formation four electrode retaining collars on chassis,
The ring of electrode one, the ring of electrode two, the ring of electrode three and electrode Fourth Ring are followed successively by outward from interior, and the number of electrodes positioned at outer ring, which is more than, to be located at
The number of electrodes of inner ring；If it is each circle electrode retaining collar both sides be equipped with a circle by some gas outlets form go out compression ring and one circle by
What dry air inlet was formed enters compression ring, and gas outlet and air inlet are opened in chassis body；It is described enter compression ring be provided with three circles altogether,
The ring of air inlet one, the ring of air inlet two and the ring of air inlet three are followed successively by outward from interior, the wherein ring of air inlet three is arranged at the outside at electrode Fourth Ring, and
The ring of air inlet one is arranged at the inner side of the ring of electrode one.
2. 48 pairs of rod chassis of reducing furnace according to claim 1, it is characterised in that：It is described go out compression ring be provided with three circles altogether,
The ring of outlet one, the ring of outlet two and the ring of outlet three are followed successively by outward from interior, and the wherein ring of outlet one is arranged at the inner side of the ring of air inlet one, goes out
The ring of gas two is arranged between the ring of electrode one and the ring of electrode two, and the ring of outlet three is arranged between the ring of electrode three and electrode Fourth Ring；And enter
The ring of gas two is arranged between the ring of electrode two and the ring of electrode three.
3. 48 pairs of rod chassis of reducing furnace according to claim 1, it is characterised in that：Electrode on each circle electrode retaining collar is
It is uniformly distributed；Each gas outlet irised out on compression ring is to be uniformly distributed, and the diameter of each gas outlet is identical；Each circle air inlet
Air inlet on ring is to be uniformly distributed, and the diameter of each air inlet is identical.
4. 48 pairs of rod chassis of reducing furnace according to claim 1, it is characterised in that：The chassis body is disc structure,
The ring of outlet one, the ring of air inlet one, the ring of electrode one, the ring of outlet two, the ring of electrode two, the ring of air inlet two, the ring of electrode three, gaseous mixture outlet three
Using the center of chassis body as the center of circle, formation is arranged in order same from inside to outside for ring, electrode Fourth Ring and the ring of gaseous mixture air inlet three
The heart is justified.
5. 48 pairs of rod chassis of reducing furnace according to claim 4, it is characterised in that：3 are evenly distributed with the ring of outlet one
Gas outlet, 3~6 air inlets are evenly distributed with the ring of air inlet one, 6 pairs of electrodes, the ring of outlet two are evenly distributed with the ring of electrode one
On be evenly distributed with 5~10 gas outlets, 10 pairs of electrodes are evenly distributed with the ring of electrode two, 10 are evenly distributed with the ring of air inlet two
~20 air inlets, 14 pairs of electrodes are evenly distributed with the ring of electrode three, being evenly distributed with 5~10 on the ring of gaseous mixture outlet three goes out
Gas port, 18 pairs of electrodes are evenly distributed with electrode Fourth Ring, 20~30 air inlets are evenly distributed with the ring of air inlet three.
6. 48 pairs of rod chassis of reducing furnace according to claim 5, it is characterised in that：The gas outlet gone out on compression ring is with entering compression ring
On warp direction of the air inlet along chassis body formed and shift to install, it is any through on line position only with air inlet or only with
Gas outlet, the air inlet entered on compression ring and the gas outlet gone out on compression ring arrange along broken line from inside to outside.
7. 48 pairs of rod chassis of reducing furnace according to claim 1, it is characterised in that：It is provided between the electrode of the ring of electrode two
3~6 auxiliary gas outlets, aid in the diameter of gas outlet to be less than the diameter for being located at each gas outlet on compression ring；Auxiliary gas outlet exists
Silicon rod is opened when growing to a diameter of 20~50mm.
8. 48 pairs of rod chassis of reducing furnace according to claim 7, it is characterised in that：Set between the ring of electrode two and the ring of air inlet two
It is equipped with and aids in out compression ring, aid in out being evenly arranged with 3~6 gas outlets on compression ring, the diameter of the gas outlet is less than the outlet
Each gas outlet diameter on ring, and the gas outlet is opened when silicon rod grows to a diameter of 80mm~120mm.
9. 48 pairs of rod chassis of reducing furnace according to claim 8, it is characterised in that：By adjusting into the air inlet on compression ring
The unit bodies of quantity and the Matter Transfer gone out in the gas outlet quantity control unit volume on compression ring, the ring of electrode one and the ring of electrode two
Product solid circulating rate is more than the ring of electrode three and the unit volume solid circulating rate at electrode Fourth Ring.
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| CN201710218196.5A CN106915746B (en) | 2017-04-05 | 2017-04-05 | A kind of 48 pairs of rod chassis of reducing furnace |
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| CN201710218196.5A CN106915746B (en) | 2017-04-05 | 2017-04-05 | A kind of 48 pairs of rod chassis of reducing furnace |
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| CN106915746B true CN106915746B (en) | 2017-11-28 |
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| CN111039292A (en) * | 2019-12-18 | 2020-04-21 | 上海市特种设备监督检验技术研究院 | Reduction furnace chassis structure |
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| US5735928A (en) * | 1993-06-18 | 1998-04-07 | Tsl Group Plc | Apparatus for manufacturing a vitreous silica article |
| CN101870471A (en) * | 2010-07-08 | 2010-10-27 | 江苏中能硅业科技发展有限公司 | High-efficiency large polycrystalline silicon reducing furnace |
| CN102259862A (en) * | 2011-06-24 | 2011-11-30 | 天津大学 | Novel polysilicon reduction furnace with 42 rods and connection mode |
| JP2016510305A (en) * | 2013-03-18 | 2016-04-07 | ワッカー ケミー アクチエンゲゼルシャフトＷａｃｋｅｒ Ｃｈｅｍｉｅ ＡＧ | Deposition method of polycrystalline silicon |
| CN205687570U (en) * | 2016-06-15 | 2016-11-16 | 上海韵申新能源科技有限公司 | A kind of 45 to rod compact polycrystalline silicon reducing furnace |
| CN106430215A (en) * | 2016-10-21 | 2017-02-22 | 哈尔滨化兴软控科技有限公司 | Siemens method improved 12 pair bar electronic grade polycrystalline silicon reduction furnace chassis |
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2017
- 2017-04-05 CN CN201710218196.5A patent/CN106915746B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5735928A (en) * | 1993-06-18 | 1998-04-07 | Tsl Group Plc | Apparatus for manufacturing a vitreous silica article |
| CN101870471A (en) * | 2010-07-08 | 2010-10-27 | 江苏中能硅业科技发展有限公司 | High-efficiency large polycrystalline silicon reducing furnace |
| CN102259862A (en) * | 2011-06-24 | 2011-11-30 | 天津大学 | Novel polysilicon reduction furnace with 42 rods and connection mode |
| JP2016510305A (en) * | 2013-03-18 | 2016-04-07 | ワッカー ケミー アクチエンゲゼルシャフトＷａｃｋｅｒ Ｃｈｅｍｉｅ ＡＧ | Deposition method of polycrystalline silicon |
| CN205687570U (en) * | 2016-06-15 | 2016-11-16 | 上海韵申新能源科技有限公司 | A kind of 45 to rod compact polycrystalline silicon reducing furnace |
| CN106430215A (en) * | 2016-10-21 | 2017-02-22 | 哈尔滨化兴软控科技有限公司 | Siemens method improved 12 pair bar electronic grade polycrystalline silicon reduction furnace chassis |
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| CN106915746A (en) | 2017-07-04 |
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