CN205687571U - A kind of polycrystalline silicon reducing furnace of band internal cooling system - Google Patents
A kind of polycrystalline silicon reducing furnace of band internal cooling system Download PDFInfo
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- CN205687571U CN205687571U CN201620580879.6U CN201620580879U CN205687571U CN 205687571 U CN205687571 U CN 205687571U CN 201620580879 U CN201620580879 U CN 201620580879U CN 205687571 U CN205687571 U CN 205687571U
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Abstract
This utility model relates to production of polysilicon and manufactures field, discloses the polycrystalline silicon reducing furnace of a kind of band internal cooling system, and body of heater bell jar top is provided with body of heater top cooling system, including body of heater top cooling coil, inlet tube and outlet；Body of heater top cooling coil is made up of one or more groups coil pipe；Inlet tube connects cooling coil one end, each group of body of heater top in stretching into bell-type furnace body in the middle of end socket；The body of heater top cooling coil other end is respectively connecting to outlet, stretches out from the top of bell-jar body of heater.This utility model, by reduction furnace top augmentation of heat transfer, is offset owing to the impact of thermal convection current causes the reduction furnace internal upper part temperature phenomenon higher than temperature of lower, makes top and the bottom temperature equalization in stove, beneficially polysilicon compactness growth, improves polysilicon quality；Avoid center gas that atomizating phenomenon occurs owing to radiation temperature is too high, improve the conversion ratio of silicon.
Description
Technical field
This utility model relates to production of polysilicon and manufactures field, particularly relates to add top independence cooling system inside one
The polycrystalline silicon reducing furnace of system.
Background technology
At present, in production of polysilicon, the main process used is improved Siemens both at home and abroad, after purifying
High-purity trichlorosilane is passed through body of heater after mixing by a certain percentage with hydrogen, gives the silicon core being arranged on electrode plus certain simultaneously
Voltage, silicon core has electric current to flow through, and makes silicon core produce heat.In body of heater there is the chemistry of complexity in gas under uniform temperature and pressure
Deposition reaction, makes polysilicon deposit at silicon core, finally prepares polysilicon product.Generally, in stove, operating temperature is 1000
About DEG C, body of heater material is generally rustless steel or carbon steel stainless steel composite material, for protection body of heater not by high temperature failure, is also
Avoid the generation of side reaction in stove, general use chuck cooling, be passed through circulating cooling medium, remove the heat being radiated to furnace wall
Amount, to maintain suitable furnace body temperature.
Traditional polysilicon equipment generally uses the method improving body of heater volume increase silicon core quantity to produce to improve polysilicon
Amount, reduces observable index, therefore occurs in that the large-scale energy-saving type reduction furnace of Multiple Type.Although this kind of method is effective, but to polycrystalline
The product quality impact of silicon is bigger.Large-scale polycrystalline silicon reducing furnace common problem is: silicon core is passed through electric current and produces heat
After, due to the impact of thermal convection current, it will make the temperature temperature higher than bottom of reduction furnace internal upper part, make top and the bottom temperature in stove
The polysilicon amount that unbalanced, the polysilicon causing polysilicon core bottom to deposit is many and fine and close, overburden goes out is few and loose, raw
The polysilicon core top become presents " puffed rice " shape and has micropore, poor product quality；Additionally, the reduction furnace cloth rod of big dense type
Compact, center gas is easier to " atomization " phenomenon occur due to impacts such as radiation temperatures, and side reaction ratio is high, and trichlorosilane once turns
Rate is low.
Therefore need a kind of novel method that can improve product quality badly, and energy consumption can be reduced, improve utilization of energy
Rate.And the method using band internal cooling system, then it is possible not only to offset owing to the impact of thermal convection current causes reduction furnace internal upper part temperature
Degree, higher than the phenomenon of temperature of lower, makes top and the bottom temperature equalization in stove, beneficially Uniform polycrystalline silicon densification growth, improves polysilicon
Product quality, improve materials conversion rate, and independent built-in cooling system can be utilized, significantly decrease energy consumption.
Patent ZL 200720306396.8 discloses the reduction furnace of a kind of dual-cooled system, it is characterized in that at reduction furnace
Chuck internal upper part increases sub-cooled coil pipe and reduction furnace chuck carries out isolation is divided into two cooling systems, by reduction furnace
The cooling medium of upper and lower different temperatures cools down.Its shortcoming is that the cooling system of top independence is attached to chuck
Inwall, is only capable of reduction top bell jar or the temperature of outer ring silicon core, and the crossbeam position of reduction furnace inner ring silicon core is not had effect,
Especially cannot take away the internal radiation heat of large-scale compact reduction furnace.
Utility model content
In view of the temperature of tradition reduction furnace internal upper part is higher than the temperature of bottom, in stove, top and the bottom temperature is unbalanced, thus
The problem that the polysilicon causing polysilicon core bottom to deposit is many and fine and close, overburden goes out polysilicon amount is few and loose, with
Time the side reaction ratio that causes due to non-uniform temperature high, the problem that conversion ratio of trichlorosilane is low, and tradition reduction furnace
Internal being only silicon core, other structure the most internal, particularly top does not has the problem of independent chiller, and this practicality is newly
Type proposes the polycrystalline silicon reducing furnace of a kind of band internal cooling system, optimizes due to the impact of thermal convection current inside consersion unit, solves
The large-scale reduction furnace of tradition reduction furnace particularly compact produces the defect of polysilicon.
For reaching above-mentioned purpose, embodiment of the present utility model adopts the following technical scheme that
The polycrystalline silicon reducing furnace of a kind of band internal cooling system, including chassis, bell-jar body of heater, end socket, chuck, electrode, silicon
Core, mixed gas air inlet pipe and tail gas escape pipe；End socket is located at above bell-jar body of heater, and bell-jar body of heater covers at chassis
On, chuck covers at bell-type furnace external body；Electrode is arranged in pairs on chassis, and silicon core is arranged on every pair by graphite chuck
On electrode；Gaseous mixture air inlet pipe and tail gas escape pipe are divided into several spout to be uniformly arranged on chassis；Described bell-jar body of heater
Top is provided with a body of heater top cooling system, including body of heater top cooling coil, body of heater top cooling coil inlet tube and
Body of heater top cooling coil outlet；Described body of heater top cooling coil is made up of one or more groups coil pipe；Described body of heater top
Cooling coil inlet tube stretches in bell-type furnace body in the middle of end socket, is connected with one end of each group of body of heater top cooling coil；
The other end of described body of heater top cooling coil is respectively connecting to body of heater top cooling coil outlet；Described body of heater top cools down
Coil outlets pipe stretches out from the top of bell-jar body of heater.
According to an aspect of the present utility model, described body of heater top cooling coil uses spiral coil structure, and the number of plies is 4
～8 layers.
According to an aspect of the present utility model, the mounting means of described body of heater top cooling system is, the top of system
Being welded in end socket, the middle part of system hangs on bell-jar body of heater top, and coiled tube supports and bell-type furnace are passed through in the bottom of system
Body is fixed.
According to an aspect of the present utility model, described chuck is provided with a body of heater jacket cooling system, presss from both sides including body of heater
Set cooling medium inlet pipe and body of heater chuck cooling medium outlet；Chuck cooling medium passes through described body of heater chuck cooling medium
After inlet tube imports chuck, warp is derived by described body of heater chuck cooling medium outlet.
According to an aspect of the present utility model, described chassis is provided with a chassis cooling system, is situated between including chassis cooling
Matter inlet tube and chassis cooling medium outlet；After chassis cooling medium imports chassis by described chassis cooling medium inlet pipe
Derive via described chassis cooling medium outlet.
The advantage that this utility model is implemented:
This utility model increases sub-cooled coil pipe in reduction furnace bell jar, carries out dual cold to reduction furnace body of heater top
But, augmentation of heat transfer, offset owing to the impact of thermal convection current causes the reduction furnace internal upper part temperature phenomenon higher than temperature of lower, in making stove
Top and the bottom temperature equalization, beneficially polysilicon compactness growth, improves polysilicon quality；Avoid center gas due to radiation temperature
Too high appearance " is atomized " phenomenon, improves the conversion ratio of silicon.Improve energy utilization efficiency simultaneously, reduce energy consumption.
Accompanying drawing explanation
In order to be illustrated more clearly that the technical scheme in this utility model embodiment, will make required in embodiment below
Accompanying drawing be briefly described, it should be apparent that, below describe in accompanying drawing be only embodiments more of the present utility model,
For those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to obtain according to these accompanying drawings
Other accompanying drawing.
Fig. 1 is the polycrystalline silicon reducing furnace front view according to this utility model one better embodiment.
Fig. 2 is the top cooling coil structural representation according to this utility model one better embodiment.
Description of reference numerals: 1-bell-jar body of heater；2-body of heater top cooling coil；3-chuck；4-chassis；5-body of heater top
Cooling coil inlet tube；6-body of heater top cooling coil outlet；7-mixed air air inlet pipe；8-spout；9-tail gas escape pipe；
10-electrode；11-graphite chuck；12-silicon core；13-coiled tube supports；14-end socket.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
As it is shown in figure 1, this utility model comprise chassis 4, bell-jar body of heater 1, end socket 14, chuck 3, electrode 10, silicon core 12,
Gaseous mixture air inlet pipe 7, tail gas escape pipe 9, body of heater top cooling coil 2, body of heater top cooling coil inlet tube 5 and body of heater top
Cooling coil outlet 6.End socket 14 is located at the top of bell-jar body of heater 1, and bell-jar body of heater 1 covers on chassis 4, and chuck 3 covers
It is located at the outside of bell-jar body of heater 1.10 points of positive and negative electrodes of electrode are arranged in pairs on chassis 4, and silicon core 12 is by graphite chuck 11
It is arranged on every pair of electrode 10.Gaseous mixture air inlet pipe 7 and tail gas escape pipe 9 are divided into several spout 8 to be uniformly arranged on chassis 4.
As it is shown in figure 1, this utility model is provided with body of heater top cooling system, this body of heater top cooling system is by body of heater top
Portion's cooling coil 2, body of heater top cooling coil inlet tube 5 and body of heater top cooling coil outlet 6 form.As in figure 2 it is shown,
Body of heater top cooling coil 2 is made up of one or more groups coil pipe, uses spiral coil structure, and the number of plies is 4～8 layers.Body of heater top
Cooling coil inlet tube 5 is passed in bell jar, with one or more groups body of heater top in the middle of the end socket 14 from bell-jar body of heater 1 top
Portion's cooling coil 2 connects, and the other end of one or more groups body of heater top cooling coil 2 connects body of heater top cooling coil outlet
6, the body of heater top cooling coil outlet 6 non-central location from the bell jar top of bell-jar body of heater 1 stretches out body of heater.Top is cold
But medium enters from the body of heater top cooling coil inlet tube 5 at bell jar top, and it is right to be assigned to often to organize in body of heater top cooling coil 2
Bell jar top carries out augmentation of heat transfer, and the cooling medium after heat exchange is aggregated into body of heater top cooling coil outlet 6 and flows out.Body of heater top
Coolant temperature in portion's cooling coil 2 can be with chuck cooling medium same or below the temperature of chuck cooling medium.
As depicted in figs. 1 and 2, the mounting means of this body of heater top cooling system is: welded top in end socket 14, middle part
Being suspended on bell jar top, bottom is fixed by the furnace wall of coiled tube supports 13 with bell-jar body of heater 1.
This utility model increases sub-cooled coil pipe at bell jar inner top, by reduction furnace top augmentation of heat transfer, offsets
Owing to the impact of thermal convection current causes the reduction furnace internal upper part temperature phenomenon higher than temperature of lower, make top and the bottom temperature equalization in stove,
Being conducive to depositing on silicon core of Uniform polycrystalline silicon, compactness is high；Avoid center gas due to radiation temperature too high appearance " mist
Change " phenomenon, improves the conversion ratio of silicon.Improve energy utilization efficiency simultaneously, reduce energy consumption.
Additionally, chuck 3 is provided with body of heater jacket cooling system same as the prior art, including body of heater chuck cooling medium
Inlet tube, body of heater chuck cooling medium outlet and other appurtenances.Chuck cooling medium passes through body of heater chuck cooling medium
After inlet tube imports chuck, warp is derived by body of heater chuck cooling medium outlet.By body of heater top cooling system, body of heater chuck
Cooling system carries out dual-cooled, augmentation of heat transfer to reduction furnace body of heater top.
Additionally, chassis 4 is provided with chassis cooling system same as the prior art, including chassis cooling medium inlet pipe,
Chassis cooling medium outlet and other appurtenances.After chassis cooling medium imports chassis by chassis cooling medium inlet pipe
Derive via chassis cooling medium outlet.
The above cooling medium, can be water or conduction oil.
The above, detailed description of the invention the most of the present utility model, but protection domain of the present utility model does not limit to
In this, any those skilled in the art in technical scope disclosed in this utility model, the change that can readily occur in
Change or replace, all should contain within protection domain of the present utility model.Therefore, protection domain of the present utility model should be with described
Scope of the claims is as the criterion.
Claims (5)
1. a polycrystalline silicon reducing furnace for band internal cooling system, including chassis, bell-jar body of heater, end socket, chuck, electrode, silicon core,
Mixed gas air inlet pipe and tail gas escape pipe；End socket is located at above bell-jar body of heater, and bell-jar body of heater covers on chassis, folder
Set covers at bell-type furnace external body；Electrode is arranged in pairs on chassis, and silicon core is arranged on every pair of electrode by graphite chuck
On；Gaseous mixture air inlet pipe and tail gas escape pipe are divided into several spout to be uniformly arranged on chassis；It is characterized in that, described bell-jar
The top of body of heater is provided with a body of heater top cooling system, including body of heater top cooling coil, the cooling coil import of body of heater top
Pipe and body of heater top cooling coil outlet；Described body of heater top cooling coil is made up of one or more groups coil pipe；Described stove
Body top cooling coil inlet tube stretches in bell-type furnace body in the middle of end socket, with one end phase of each group of body of heater top cooling coil
Connect；The other end of described body of heater top cooling coil is respectively connecting to body of heater top cooling coil outlet；Described body of heater top
Portion's cooling coil outlet stretches out from the top of bell-jar body of heater.
The polycrystalline silicon reducing furnace of band internal cooling system the most according to claim 1, it is characterised in that described body of heater top is cold
But coil pipe uses spiral coil structure, and the number of plies is 4～8 layers.
The polycrystalline silicon reducing furnace of band internal cooling system the most according to claim 1, it is characterised in that described body of heater top is cold
But the mounting means of system is, the welded top of system is in end socket, and the middle part of system hangs on bell-jar body of heater top, system
Bottom fixed with bell-jar body of heater by coiled tube supports.
The polycrystalline silicon reducing furnace of band internal cooling system the most according to claim 1, it is characterised in that described chuck is provided with
One body of heater jacket cooling system, including body of heater chuck cooling medium inlet pipe and body of heater chuck cooling medium outlet；Chuck is cold
But after medium imports chuck by described body of heater chuck cooling medium inlet pipe, warp is by described body of heater chuck cooling medium outlet
Derive.
The polycrystalline silicon reducing furnace of band internal cooling system the most according to claim 1, it is characterised in that described chassis is provided with
One chassis cooling system, including chassis cooling medium inlet pipe and chassis cooling medium outlet；Chassis cooling medium passes through institute
State after chassis cooling medium inlet pipe imports chassis through being derived by described chassis cooling medium outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620580879.6U CN205687571U (en) | 2016-06-15 | 2016-06-15 | A kind of polycrystalline silicon reducing furnace of band internal cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620580879.6U CN205687571U (en) | 2016-06-15 | 2016-06-15 | A kind of polycrystalline silicon reducing furnace of band internal cooling system |
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| Publication Number | Publication Date |
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| CN205687571U true CN205687571U (en) | 2016-11-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620580879.6U Active CN205687571U (en) | 2016-06-15 | 2016-06-15 | A kind of polycrystalline silicon reducing furnace of band internal cooling system |
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| Country | Link |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110282627A (en) * | 2019-07-24 | 2019-09-27 | 中国恩菲工程技术有限公司 | The cooling system and method for polycrystalline silicon reducing furnace |
| CN110953768A (en) * | 2019-12-18 | 2020-04-03 | 张锦鹏 | Ground source heat pump device for villa |
-
2016
- 2016-06-15 CN CN201620580879.6U patent/CN205687571U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110282627A (en) * | 2019-07-24 | 2019-09-27 | 中国恩菲工程技术有限公司 | The cooling system and method for polycrystalline silicon reducing furnace |
| CN110282627B (en) * | 2019-07-24 | 2023-09-19 | 中国恩菲工程技术有限公司 | Cooling system and method for polycrystalline silicon reduction furnace |
| CN110953768A (en) * | 2019-12-18 | 2020-04-03 | 张锦鹏 | Ground source heat pump device for villa |
| CN110953768B (en) * | 2019-12-18 | 2021-11-26 | 张锦鹏 | Ground source heat pump device for villa |
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