CN202208644U - Polycrystalline silicon hydrogenation furnace - Google Patents
Polycrystalline silicon hydrogenation furnace Download PDFInfo
- Publication number
- CN202208644U CN202208644U CN2011203264817U CN201120326481U CN202208644U CN 202208644 U CN202208644 U CN 202208644U CN 2011203264817 U CN2011203264817 U CN 2011203264817U CN 201120326481 U CN201120326481 U CN 201120326481U CN 202208644 U CN202208644 U CN 202208644U
- Authority
- CN
- China
- Prior art keywords
- gas
- reaction zone
- hydrogenation furnace
- bell jar
- interchanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000005984 hydrogenation reaction Methods 0.000 title claims abstract description 33
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 23
- 238000006243 chemical reaction Methods 0.000 claims abstract description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound 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- FDNAPBUWERUEDA-UHFFFAOYSA-N Silicon tetrachloride Chemical compound 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Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 230000001105 regulatory Effects 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Abstract
The utility model discloses a polycrystalline silicon hydrogenation furnace which comprises a support, a chassis and a bell jar arranged above the chassis, wherein a reaction zone surrounded by carbon felt is arranged in the bell jar, a reactor is arranged in the reaction zone, and gas inlets are arranged on the reactor; a heat exchanger is arranged above the reaction zone and is connected with the reaction zone through a gas distributor and connected with the reactor through a gas guide tube penetrating into the reaction zone; and the heat exchanger is also connected with a gas inlet tube and a gas outlet tube which penetrate out of the bell jar. The polycrystalline silicon hydrogenation furnace can be good in the effects of saving energy as well as improving the efficiency and the rate of conversion.
Description
Technical field
The utility model relates to a kind of hydrogenation furnace, belongs to the photovoltaic energy technology field, particularly a kind of energy-saving polysilicon hydrogenation furnace of novel inlet, outlet structure.
Background technology
In recent years, along with the develop rapidly of photovoltaic industry, photovoltaic industry also was faced with severe energy situation and ecotope pressure.In production of polysilicon technology, the problem that the silicon tetrachloride hydrogenation furnace energy consumption is high highlights day by day, has a strong impact on the health science development of polysilicon industry.And along with the aggravation of market competition, industry is also urgently hoped the raising the output consumption reduction, reduces running cost, therefore, project organization rationally, transformation efficiency efficiently hydrogenation furnace become the emphasis of research.
Usually, the hydrogenation furnace reactor temperature need reach more than 1000 ℃, and reaction below 1000 ℃ is carried out very slow, and temperature surpasses 1000 ℃, and reaction just significantly accelerates, and therefore keeps to be reflected at comparatively high temps and to carry out, and hydrogenation furnace gas reforming rate is had great effect.The tradition hydrogenation furnace adopts the double thermal insulation cover; The air inlet that gas is enterprising to be gone out on going out down or advancing the down frame mode of giving vent to anger is though the hydrogenation furnace of this structure also can play certain insulation effect, owing to there is not the better carbon felt of the insulation effect of having adopted; Be unfavorable for improving reactor temperature; Influential to the gas reaction transformation efficiency, gas goes out under enterprising on the other hand, the structural pattern that goes out on perhaps advancing down also be unfavorable for gas in reactor drum uniform distribution with increase gas residence time; Reaction is produced undesirable action, and what be unfavorable for reacting fully carries out.
The utility model content
The technical problem that the utility model will solve provides a kind of polysilicon hydrogenation furnace, can overcome above-mentioned deficiency, realizes the efficient utilization of the energy, improves the processing efficiency of hydrogenation furnace, and is energy-saving and cost-reducing, reduces production costs, and improves device security and stability.
In order to solve the problems of the technologies described above, the utility model provides a kind of polysilicon hydrogenation furnace, comprises bearing, chassis and is located at the bell jar of chassis top, is provided with the reaction zone that the carbon felt surrounds in the said bell jar, is provided with reactor drum in the reaction zone, and reactor drum is provided with inlet mouth; Said reaction zone top is provided with interchanger, and said interchanger is connected with said reaction zone through gas distributor, is connected with said reactor drum through the gas tube that penetrates reaction zone; Said interchanger also is connected with inlet pipe and the escape pipe that passes bell jar.
Further, also be provided with division plate in the said bell jar bell jar is separated into two chambers up and down, said interchanger is positioned at the top chamber, and said reaction zone is positioned at the below chamber.
Further, said inlet mouth has a plurality of, is located at the side lower part and the top of reactor drum respectively.
Further, the said inlet mouth of being located at the reactor-side bottom and/or quantity different with the intake port shape of being located at reactor head does not wait.
Further, said gas tube and the coaxial setting of said gas distributor, and gas tube is positioned at gas distributor inside.
Further, said interchanger is a spiral-plate heat exchanger.
Further, said carbon felt has multilayer.
Further, said inlet pipe and escape pipe are the multiunit tube of big pipe box tubule or the single tube that is separated from each other.
The polysilicon hydrogenation furnace of the utility model has following beneficial effect: the first has realized outlet pipe high-temperature tail gas and the energy exchange of inlet pipe cold air in spiral-plate heat exchanger, recuperable significant amount of energy; It two is to have improved the temperature that gets into reaction zone gas, has improved the processing power of hydrogenation furnace; The 3rd is the intake method that adopts top and sidepiece air inlet simultaneously, and it is more even that gas is mixed in reactor drum, and gas residence time increases, and helps gas and participates in reaction, improves reaction conversion ratio; It four is escape pipe tail gas has reduced tail gas after the thermal exchange in spiral-plate heat exchanger temperature, and the difficulty of vent gas treatment is reduced, the equipment operation more safety with stable.
Description of drawings
Fig. 1 is the structure iron of a kind of polysilicon hydrogenation furnace of the utility model.
Among the figure: 1. bell jar, 2. interchanger, 3. escape pipe, 4. gas distributor, 5. gas tube, 6. inlet mouth, 7. reactor drum, 8. carbon felt, 9. inlet mouth, 10. chassis, 11. bearings, 12. inlet pipe.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the utility model is described further so that those skilled in the art can understand the utility model and implementing better, but the embodiment that lifts not conduct to the qualification of the utility model.
As shown in Figure 1, the preferred embodiment of the polysilicon hydrogenation furnace of the utility model, its structure comprises bearing 11, chassis 10 and is located at the bell jar 1 of 10 tops, chassis.Be provided with division plate in the bell jar 1 bell jar 1 is separated into two chambers up and down, wherein, be provided with the reaction zone that carbon felt 8 surrounds in the chamber of below, be provided with reactor drum 7 in the reaction zone, reactor drum 7 is provided with inlet mouth 6,9; Be provided with interchanger 2 in the chamber of top, interchanger 2 is connected with reaction zone through gas distributor 4, is connected with reactor drum 7 through the gas tube 5 that penetrates reaction zone, and the interchanger 2 preferred spiral-plate heat exchangers that adopt also can adopt other general interchanger of arbitrary this area; In addition, interchanger 2 also is connected with the inlet pipe 12 and escape pipe 3 that passes bell jar, and inlet pipe 12 is in order to the polysilicon hydrogenation furnace transport of reactant gases body to the utility model, and escape pipe 3 is in order to discharge reacted gas outside the bell jar.
The inlet pipe 12 of the utility model can adopt the multiunit tube of big pipe box tubule or separate single tube with escape pipe 3; When adopting the multiunit tube coaxial arrangement, preferably adopting bassoon is inlet pipe, and tubule is the structure of escape pipe; Present embodiment is for separating single tube, and air inlet is carried out heat exchange from inlet pipe 12 entering interchanger 2 with giving vent to anger of heat and obtained preheating interchanger 2, and the gas after the preheating gets into the reaction zone that carbon felt 8 surrounds through gas distributor 4; In the present embodiment, gas distributor adopts gas distributor 4 modes, in the actual production not as limit.Gas distributes in carbon felt 8 and the regional disperse that reactor drum 7 forms afterwards; Inlet mouth 6,9 entering high-temperature reactors 7 through reactor head and side lower part react again; Adopt gas mixed distribution that the hydrogenation furnace of this intake method obtains uniform flow field more; The residence time of reaction prolongs, and has improved the transformation efficiency of gas reaction.What need particularly point out is, inlet mouth 6,9 can be circle, different shapes such as square, can similar shape or similar shape not, and inlet mouth 6,9 quantity can be identical or inequality, and distributing position can independently be set on reactor drum; Preferably, the shape difference of inlet mouth 6,9 and/or quantity do not wait.In addition, the carbon felt thickness of the utility model can be adjusted, with the holding temperature of regulating hydrogenation furnace reactor drum 7 through the carbon felt 8 that adopts different thickness; The mode of adjustment carbon felt 8 thickness is fixing, during like increase thickness, can adopt multilayer carbon felt to increase thickness, also can directly adopt the carbon felt of individual layer thickening.
In the present embodiment, gas tube 5 adopts coaxial design with gas distributor 4, and gas tube 5 is positioned at gas distributor inside, and not as limit, gas tube 5 also can divide with gas distributor 4 and is arranged in the actual production.Reacted gas upwards gets into interchanger 2 through gas tube 5; High temperature outlet tail gas carries out heat exchange at this through the interchanger 2 and the cold air inlet of inlet pipe 12 inputs; Reduce air outlet temperature, given cold air thermal exchange simultaneously, improved efficiency; Practiced thrift the energy, gas is derived reactor drum through escape pipe 3 afterwards.
The advantage of the polysilicon hydrogenation furnace of the utility model comprises: first; Cold air inlet is given vent to anger with heat in interchanger and is carried out energy exchange; Cold air inlet obtains preheating, has improved the reaction conversion ratio of gas in reactor drum, and heat is given vent to anger and obtained precooling; Lower cold intractability of giving vent to anger, also improved efficiency of energy utilization.Second; Also made optimization design at reactor drum inlet mouth and air outlet; Be employed in reactor head and side respectively and open several inlet mouths that vary in size, one side has increased the degree of uniformity behind the gas entering reactor drum, and the gas of the gas of bottom entering and top entering meets in reactor drum on the other hand; Gas residence time in reactor drum is increased considerably, thereby strengthened reaction conversion ratio.The 3rd, removed the insulation plate in traditional hydrogenation furnace, replace with the adjustable carbon felt of a layer thickness, this structure Design has reduced the device fabrication cost, has improved the temperature of reactor drum simultaneously, has saved energy consumption significantly, has improved reaction conversion ratio.The polysilicon hydrogenation furnace of the utility model can play good save energy, raises the efficiency, and improves the effect of transformation efficiency.
The above embodiment is the preferred embodiment that proves absolutely that the utility model is lifted, and the protection domain of the utility model is not limited thereto.Being equal to that the technician in present technique field is done on the utility model basis substitutes or conversion, all within the protection domain of the utility model.The protection domain of the utility model is as the criterion with claims.
Claims (8)
1. polysilicon hydrogenation furnace comprises bearing, chassis and is located at the bell jar of top, chassis, it is characterized in that, is provided with the reaction zone that the carbon felt surrounds in the said bell jar, is provided with reactor drum in the reaction zone, and reactor drum is provided with inlet mouth; Said reaction zone top is provided with interchanger, and said interchanger is connected with said reaction zone through gas distributor, is connected with said reactor drum through the gas tube that penetrates reaction zone; Said interchanger also is connected with inlet pipe and the escape pipe that passes bell jar.
2. polysilicon hydrogenation furnace according to claim 1 is characterized in that, also is provided with division plate in the said bell jar bell jar is separated into two chambers up and down, and said interchanger is positioned at the top chamber, and said reaction zone is positioned at the below chamber.
3. polysilicon hydrogenation furnace according to claim 1 is characterized in that said inlet mouth has a plurality of, is located at the side lower part and the top of reactor drum respectively.
4. polysilicon hydrogenation furnace according to claim 3 is characterized in that, the said inlet mouth of being located at the reactor-side bottom and/or quantity different with the intake port shape of being located at reactor head does not wait.
5. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said gas tube and the coaxial setting of said gas distributor, and gas tube is positioned at gas distributor inside.
6. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said interchanger is a spiral-plate heat exchanger.
7. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said carbon felt has multilayer.
8. polysilicon hydrogenation furnace according to claim 1 is characterized in that, said inlet pipe and escape pipe are the multiunit tube of big pipe box tubule structure or the single tube that is separated from each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203264817U CN202208644U (en) | 2011-09-02 | 2011-09-02 | Polycrystalline silicon hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203264817U CN202208644U (en) | 2011-09-02 | 2011-09-02 | Polycrystalline silicon hydrogenation furnace |
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| Publication Number | Publication Date |
|---|---|
| CN202208644U true CN202208644U (en) | 2012-05-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203264817U Expired - Fee Related CN202208644U (en) | 2011-09-02 | 2011-09-02 | Polycrystalline silicon hydrogenation furnace |
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| CN (1) | CN202208644U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106287745A (en) * | 2016-08-30 | 2017-01-04 | 滁州朝昱农业科技有限公司 | A kind of agricultural crop straw burns heating system |
| CN106322384A (en) * | 2016-08-26 | 2017-01-11 | 滁州菲扬农业科技有限公司 | Environmentally-friendly heat supply system capable of providing water steam for straw incineration |
-
2011
- 2011-09-02 CN CN2011203264817U patent/CN202208644U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106322384A (en) * | 2016-08-26 | 2017-01-11 | 滁州菲扬农业科技有限公司 | Environmentally-friendly heat supply system capable of providing water steam for straw incineration |
| CN106287745A (en) * | 2016-08-30 | 2017-01-04 | 滁州朝昱农业科技有限公司 | A kind of agricultural crop straw burns heating system |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120502 Termination date: 20160902 |