CN206635457U - Water cooling core pipe for semiconductor grade monocrystal stove electrode - Google Patents
Water cooling core pipe for semiconductor grade monocrystal stove electrode Download PDFInfo
- Publication number
- CN206635457U CN206635457U CN201720393323.0U CN201720393323U CN206635457U CN 206635457 U CN206635457 U CN 206635457U CN 201720393323 U CN201720393323 U CN 201720393323U CN 206635457 U CN206635457 U CN 206635457U
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- water cooling
- electrode
- mounting seat
- pipe
- core pipe
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Abstract
The utility model provides a kind of water cooling core pipe for semiconductor grade monocrystal stove electrode, and it is made up of water cooling tubule, reducing ring, the big pipe of water cooling, mounting seat, branching block, it is characterised in that：Water cooling tubule is passed sequentially through after installation positioning spigot coordinates with reducing ring, reducing ring and the big pipe of water cooling, the big pipe of water cooling and mounting seat and is weldingly connected, and thus Series connection welding forms water cooling core pipe main body；Water cooling tubule upper surface opening position is provided with 4 water outlet notches, and 4 branching blocks are respectively welded on 4 water outlet notch outer circumference faces；Mounting seat endoporus is provided with taper pipe thread water inlet, while is provided with 4 mounting holes, for being installed with electrode base end face；Mounting seat is provided with seal groove simultaneously, for installing O-ring seals, is sealed between mounting seat and electrode base end face.It the advantage is that：Using reducing type structure, electrode core can be stretched into, cooling is more abundant；Branching block is set so that cooling effect becomes apparent.
Description
Technical field
Water cooling core pipe and its application of a kind of electrode are the utility model is related to, it is especially a kind of to be used for semiconductor grade silicon single crystal
The water cooling core pipe of stove electrode and its application.
Background technology
Monocrystalline silicon is the crystal with basic complete lattice structure, is a kind of good semi-conducting material, purity is reachable
To more than 99.9999999%, it can be used for diode level, rectifying device level, circuit-level and solar battery grade single crystal product article
Production and deep processing manufacture, its subsequent product integrated circuit and semiconductor separation part be widely used to every field,
Also occupy critical role in military avionic equipment, be inNew materialThe forward position of development.
Semiconductor grade monocrystal stove is crystal growth equipment important in monocrystalline silicon industrial chain, due to semiconductor grade silicon single crystal
Slowly growth forms body under conditions of high temperature, therefore the electrode being connected with heater, its vacuum leakproofness, electric conductivity
It is particularly important with heat resistance etc..At present, electrode used in monocrystal stove is not provided with water cooling core pipe or simply setting structure mostly
Simple water cooling straight tube.On the one hand, the scheme of water cooling core pipe is not provided with, simply sets the water inlet of cooling water and delivery port simultaneously
It is placed on electrode, cooling water is not up to circulative convection effect, causes electrode too high because cooling down insufficient temperature when being powered, uses
On larger potential safety hazard be present.On the other hand, the scheme of the simple water cooling straight tube of setting structure, flowed after entering electrode because of cooling water
Speed is slower, and can not realize injection water, and electrode still can not be sufficiently cool.
The cooling of electrode effect of semiconductor grade monocrystal stove how is improved, is the problem that this area is paid close attention to.
Utility model content
The purpose of this utility model is：It is too high because cooling down insufficient temperature when being worked for existing monocrystal stove electrode
A kind of problem, there is provided new reliable water cooling core pipe for being used for semiconductor grade monocrystal stove electrode.
What the purpose of this utility model was realized in：A kind of water cooling core pipe for semiconductor grade monocrystal stove electrode,
Including water cooling core pipe, it is characterised in that：Water cooling core pipe includes water cooling tubule, reducing ring, the big pipe of water cooling, mounting seat and branching block,
The center of mounting seat is water inlet, wherein：The big pipe of water cooling and mounting seat seamless welding, water inlet are located at the big pipe center of water cooling, water
It is provided with and is uniformly distributed by reducing ring seamless welding, the end seals of water cooling tubule, sealing between cold big pipe and water cooling tubule
Effluent trough, each effluent trough is furnished with a piece of branching block.
In the utility model：Mounting seat is provided with electrode seal groove, and sealing ring, electrode seal groove are provided with electrode seal groove
Periphery is provided with equally distributed electrode mounting hole.
In the utility model：The end seals of water cooling tubule are provided with four equally distributed effluent troughs, and described is close
Seal is O-ring seals, and electrode seal groove periphery is provided with four equally distributed electrode mounting holes.
In the utility model：Described water cooling tubule and the big pipe of water cooling are gapless stainless steel tube, reducing ring, mounting seat
Material with branching block is stainless steel.
A kind of application of above-mentioned semiconductor grade monocrystal stove electrode water cold core pipe, it is characterised in that corresponding semiconductor grade
Monocrystal stove electrode contains hollow chamber, and is provided with electrode delivery port, after water cooling core pipe insertion hollow chamber, semiconductor grade silicon
Single crystal growing furnace electrode is docked by electrode mounting hole with mounting seat sealing.
In the application of the water cooling core pipe, refrigerant enters the big pipe of water cooling by the water inlet of mounting seat, adds by reducing ring
Sprayed after pressure by the effluent trough of the small tube end of water cooling, refrigerant is spilt inwall to hollow chamber in the presence of branching block, heat absorption
Returned and recycled by electrode delivery port again after collecting.
The utility model has the advantage of：Due to using subsection welding type water cooling core pipe structure, and by reducing ring to cold
Matchmaker is boosted, and due to the end seals of water cooling tubule, sealing is provided with equally distributed effluent trough, and each effluent trough is furnished with a piece of point
Block is flowed, refrigerant can be made directly to be sprayed onto electrode hollow chamber inwall, improve the heat absorption efficiency of refrigerant, cooling effect is more bright
It is aobvious.Mounting seat and the big pipe seamless welding of water cooling, while docked by mounting hole with electrode, and cavity in electrode is ensured by sealing ring
The sealing effectiveness of room, it is easy to use and compact-sized that these measures all embody the utility model.
Brief description of the drawings
Fig. 1 is a kind of example structure schematic diagram for the electrode water cold core pipe that the utility model is related to；
Fig. 2 is the end view containing 4 branching blocks that the utility model embodiment is related to；
Fig. 3 is the utility model using state structure diagram.
In figure：1st, water cooling tubule, 2, reducing ring, 3, the big pipe of water cooling, 4, mounting seat, 5, branching block, 6, water inlet, 7, electrode
Seal groove, 8, sealing ring, 9, electrode mounting hole, 10, electrode, 11, delivery port, 12, electrode installation base.
Embodiment
Accompanying drawing discloses a kind of concrete structure for the embodiment that the utility model is related to without limitation, below in conjunction with the accompanying drawings
The utility model is further described.
From Fig. 1 and Fig. 2：The water cooling core pipe that the utility model is related to includes water cooling tubule 1, reducing ring 2, the big pipe of water cooling
3rd, mounting seat 4 and branching block 5, the center of mounting seat 4 is water inlet 6, wherein：The big pipe 3 of water cooling and the seamless welding of mounting seat 4, enter
The mouth of a river 6 is located at the big center of pipe 3 of water cooling, passes through the seamless welding of reducing ring 2, water cooling tubule 1 between the big pipe 3 of water cooling and water cooling tubule 1
End seals, sealing is provided with equally distributed effluent trough, and each effluent trough is furnished with a piece of branching block 5.
In the present embodiment：Mounting seat 4 is provided with electrode seal groove 7, and sealing ring 8, electrode sealing are provided with electrode seal groove 7
The periphery of groove 7 is provided with equally distributed electrode mounting hole 9.
In the present embodiment：The end seals of water cooling tubule 1 are provided with four equally distributed effluent troughs, described sealing
Circle 8 is O-ring seals, and the periphery of electrode seal groove 7 is provided with four equally distributed electrode mounting holes 9.
When it is implemented, described water cooling tubule 1 and the big pipe 3 of water cooling are gapless stainless steel tube, reducing ring 2, mounting seat 4
Material with branching block 5 is stainless steel.
As seen from Figure 3, the utility model is in use, corresponding semiconductor grade monocrystal stove electrode 10 contains hollow chamber
Room, and the delivery port 11 provided with electrode 10, after water cooling core pipe inserts hollow chamber, semiconductor grade monocrystal stove electrode 10 passes through electricity
Pole mounting hole 9 docks with the sealing of mounting seat 4.
The outer wall of electrode 10 is provided with the electrode installation base 12 that conventional electrode realizes insulation and sealing with monocrystalline furnace wall.
In practical application, refrigerant enters the big pipe 3 of water cooling by the water inlet 6 of mounting seat 4, by water after the boosting of reducing ring 2
The effluent trough of the cold end of tubule 1 is sprayed, and refrigerant is spilt inwall to hollow chamber in the presence of branching block 5, after heat absorption collects
Recycling is returned to by the delivery port 11 of electrode 10 again.
Claims (4)
1. a kind of water cooling core pipe for semiconductor grade monocrystal stove electrode, including water cooling core pipe, it is characterised in that：Water cooling core pipe
Including water cooling tubule, reducing ring, the big pipe of water cooling, mounting seat and branching block, the center of mounting seat is water inlet, wherein：Water cooling is big
Pipe and mounting seat seamless welding, it is central that water inlet be located at the big pipe of water cooling, between the big pipe of water cooling and water cooling tubule by reducing ring without
Seam welding, the end seals of water cooling tubule, sealing are provided with equally distributed effluent trough, and each effluent trough is furnished with a piece of shunting
Block.
2. the water cooling core pipe according to claim 1 for semiconductor grade monocrystal stove electrode, it is characterised in that：Mounting seat
Provided with electrode seal groove, sealing ring is provided with electrode seal groove, electrode seal groove periphery is provided with equally distributed electrode mounting hole.
3. the water cooling core pipe according to claim 2 for semiconductor grade monocrystal stove electrode, it is characterised in that：Water cooling is small
The end seals of pipe are provided with four equally distributed effluent troughs, and described sealing ring is O-ring seals, electrode seal groove periphery
Provided with four equally distributed electrode mounting holes.
4. the water cooling core pipe for semiconductor grade monocrystal stove electrode according to one of claim 1-3, it is characterised in that：
Described water cooling tubule and the big pipe of water cooling are gapless stainless steel tube, and the material of reducing ring, mounting seat and branching block is stainless
Steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720393323.0U CN206635457U (en) | 2017-04-14 | 2017-04-14 | Water cooling core pipe for semiconductor grade monocrystal stove electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720393323.0U CN206635457U (en) | 2017-04-14 | 2017-04-14 | Water cooling core pipe for semiconductor grade monocrystal stove electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206635457U true CN206635457U (en) | 2017-11-14 |
Family
ID=60246493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720393323.0U Withdrawn - After Issue CN206635457U (en) | 2017-04-14 | 2017-04-14 | Water cooling core pipe for semiconductor grade monocrystal stove electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206635457U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106906512A (en) * | 2017-04-14 | 2017-06-30 | 南京晶能半导体科技有限公司 | Water-cooled core pipe and its application for semiconductor grade monocrystal stove electrode |
-
2017
- 2017-04-14 CN CN201720393323.0U patent/CN206635457U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106906512A (en) * | 2017-04-14 | 2017-06-30 | 南京晶能半导体科技有限公司 | Water-cooled core pipe and its application for semiconductor grade monocrystal stove electrode |
| CN106906512B (en) * | 2017-04-14 | 2023-03-28 | 南京晶能半导体科技有限公司 | Water-cooled core tube for semiconductor grade silicon single crystal furnace electrode and application thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20171114 Effective date of abandoning: 20230328 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20171114 Effective date of abandoning: 20230328 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |