CN208506388U - Double light beam laser colimated light system - Google Patents

Double light beam laser colimated light system Download PDF

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Publication number
CN208506388U
CN208506388U CN201821296613.4U CN201821296613U CN208506388U CN 208506388 U CN208506388 U CN 208506388U CN 201821296613 U CN201821296613 U CN 201821296613U CN 208506388 U CN208506388 U CN 208506388U
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laser
optical path
position sensor
mirror
rotating mirror
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CN201821296613.4U
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朱海
蓝栩砚
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Guangzhou Guang Zhi Technology Co Ltd
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Abstract

The utility model relates to a kind of double light beam laser colimated light systems, comprising: controller;First incident laser source and the second incident laser source, the first incident laser source have first to propagate optical path, and the second incident laser source has second to propagate optical path;First laser collimator apparatus, first laser collimator apparatus include the first optical path adjusting component and first position sensor for being successively laid in the first propagation optical path and electricly connecting with controller;And second laser collimator apparatus, second laser collimator apparatus include the second optical path adjusting component and second position sensor for being successively laid in the second propagation optical path and electricly connecting with controller.This system can fast implement beam path alignment of the two beam laser in long range is propagated, eliminate because spot drift, path optics element the factors such as mechanical displacement caused by misalignment effects, ensure that light beam is precisely conllinear, thus improves use reliability, stability and the measurement accuracy of optical instrument.

Description

Double light beam laser colimated light system
Technical field
The utility model relates to beam path alignment technical fields, more particularly to a kind of double light beam laser colimated light system.
Background technique
Currently, the nonlinear optics microscope excited using multi-beam laser, such as stimulated Raman scattering microscope are concerned with instead Stokes Raman scatters microscope, transient absorption microscope etc., and light source mainly uses titanium sapphire femto-second laser to be equipped with light Parametric oscillator is learned, realizes the confocal of the multiple laser of different wave length, and then generate non linear optical signal.Since laser goes out Farther out mouthful apart from multi-beam confocal focus, so that the factors meeting such as mechanical displacement of the spot drift of laser, path optics element Cause multi-beam laser to lose confocal, even disappears so as to cause the decrease of non linear optical signal, which greatly reduces light The performance and stability for learning instrument and equipment, influence the repeatability, reliability and accuracy of optical measurement.Further, since non-linear Optical microscopy and time resolved spectroscopy instrument optical system be extremely complex, the problem can extreme influence instrument and equipment use The workload of user will be significantly greatly increased in convenience and working efficiency.
Utility model content
Based on this, it is necessary to provide a kind of double light beam laser colimated light system, two beam laser can be fast implemented over long distances Beam path alignment in propagation, it is ensured that light beam is precisely conllinear confocal, thus improves use reliability, stability and the survey of optical instrument Measure accuracy.
Its technical solution is as follows:
A kind of double light beam laser colimated light system, comprising:
Controller;
First incident laser source and the second incident laser source, first incident laser source is for emitting first laser light Line, the first laser light have first to propagate optical path, and second incident laser source is for emitting second laser light, institute It states second laser light and propagates optical path with second;
First laser collimator apparatus, the first laser collimator apparatus include successively being laid in described first to propagate optical path In and the first optical path adjusting component and first position sensor that are electricly connected with the controller;And
Second laser collimator apparatus, the second laser collimator apparatus include successively being laid in described second to propagate optical path In and the second optical path adjusting component and second position sensor that are electricly connected with the controller.
Above-mentioned laser collimation system is used for light path calibration of the double light beam laser in long range propagation path.Specific works When, first laser light and second laser light are projected by the first incident laser source and the second incident laser source respectively, this first Laser beam has first to propagate optical path, and second laser light has second to propagate optical path.When first position sensor and second Position sensor detect the first propagation optical path and second propagation optical path glance off and can not be conllinear when, feedback signal is given immediately Controller, controller distinguish output order to the first optical path adjusting component and the second optical path adjusting component, pass through the first optical path tune The calibration actions for saving component and the second optical path adjusting component, can quickly adjust the direction of propagation and second of the first propagation optical path The direction of propagation of optical path is propagated, and is calibrated under the feedback of first position sensor and second position sensor and returns to benchmark Position is finally completed the alignment procedure of first laser light and second laser light.This system can fast implement two beam laser Beam path alignment in long range is propagated, eliminate because spot drift, path optics element the factors such as mechanical displacement caused by lose Standard influences, it is ensured that light beam is precisely conllinear, thus improves use reliability, stability and the measurement accuracy of optical instrument.
The technical solution of the application is further described below:
The first optical path adjusting component includes propagating optical path for changing described first in one of the embodiments, The first rotating mirror, the second rotating mirror and the third rotating mirror of direction and interval cooperation;The second optical path tune Section component includes the third rotating mirror and the 4th in the direction for propagating optical path for changing described second and interval cooperation Rotating mirror;First rotating mirror and second rotating mirror are arranged in parallel, the third rotating mirror It is arranged in parallel with the 4th rotating mirror.
First rotating mirror, second rotating mirror and the 4th rotation in one of the embodiments, Turn reflecting mirror include reflector mount, the actuator for being set on the reflector mount and being electricly connected with the controller, with And it is set to the Metal film reflector mirror on the reflector mount;The third rotating mirror includes the reflector mount, setting In the actuator electricly connected on the reflector mount and with the controller and it is set on the reflector mount Beam splitting dichroic mirror.
It in one of the embodiments, further include the first optical shutter and the second optical shutter, first optical shutter Described first is set to propagate in optical path and between first incident laser source and the first optical path adjusting component, Second optical shutter is set to described second and propagates in optical path and be located at second incident laser source and second light Road is adjusted between component.
It in one of the embodiments, further include the first sampling reflecting mirror and the second sampling reflecting mirror, first sampling Reflecting mirror is laid between the 4th rotating mirror and the first position sensor, and the second sampling reflecting mirror is laid Between the first sampling reflecting mirror and the second position sensor.
First rotating mirror, second rotating mirror, third rotation in one of the embodiments, Reflecting mirror, the 4th rotating mirror, the first sampling reflecting mirror and described second sample the incidence angle model of reflecting mirror Enclose is 30 °~60 °.
It in one of the embodiments, further include the first convergent lens and the second convergent lens, first convergent lens It is laid between the first sampling reflecting mirror and the first position sensor, second convergent lens is laid in described the Between two sampling reflecting mirrors and the second position sensor.
Reflection light of first convergent lens perpendicular to the first sampling reflecting mirror in one of the embodiments, Beam and the reflected light harness pass through the optical center of first convergent lens, the photosurface of the first position sensor with it is described The focal plane of first convergent lens is overlapped, and the center of the photosurface of the first position sensor and described first is assembled thoroughly The focus of mirror is overlapped;
The reflected light harness and the reflected light harness that second convergent lens samples reflecting mirror perpendicular to described second are logical Cross the optical center of second convergent lens, the focal plane of the photosurface of the second position sensor and second convergent lens It is overlapped, and the center of the photosurface of the second position sensor is overlapped with the focus of second convergent lens.
In one of the embodiments, the focal length of first convergent lens and second convergent lens be 30mm~ 150mm。
First incident laser source and second incident laser source are continuous laser in one of the embodiments, Device or pulse laser;The first position sensor and the second position sensor are four-quadrant position sensor, CCD Camera or CMOS camera.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of double light beam laser colimated light system described in an embodiment of the present invention;
Fig. 2 is the control flow schematic diagram of system shown in Figure 1.
Description of symbols:
10, the first incident laser source, the 20, second incident laser source, 30, first position sensor, 40, second position sensing Device, the 50, first rotating mirror, the 60, second rotating mirror, 70, third rotating mirror, the 80, the 4th rotating mirror, 90, the first optical shutter, the 100, second optical shutter, the 110, first sampling reflecting mirror, the 120, second sampling reflecting mirror, 130, the One convergent lens, the 140, second convergent lens.
Specific embodiment
It is below in conjunction with attached drawing and specifically real for the purpose of this utility model, technical solution and advantage is more clearly understood Mode is applied, the utility model is described in further detail.It should be understood that the specific embodiments described herein Only to explain the utility model, the protection scope of the utility model is not limited.
It should be noted that when element is referred to as " being fixedly arranged on ", " being set to " or " install in " another element, it can be with Directly on the other element or there may also be elements placed in the middle.When an element is considered as " connection " another yuan Part, it can be directly to another element or may be simultaneously present centering elements;One element and another element The concrete mode being fixedly connected can be achieved by the prior art, and details are not described herein, it is preferred to use the fixation side of threaded connection Formula.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term " and or " used herein packet Include any and all combinations of one or more related listed items.
" first " described in the utility model, " second " do not represent specific quantity and sequence, are only used for title It distinguishes.
As shown in Figure 1, the double light beam laser colimated light system of the embodiment shown for the application, comprising: controller (does not show Out);First incident laser source 10 and the second incident laser source 20, first incident laser source 10 is for emitting first laser light Line, the first laser light have first to propagate optical path, and second incident laser source 20 is used to emit second laser light, The second laser light has second to propagate optical path;First laser collimator apparatus, the first laser collimator apparatus include according to It is secondary to be laid in described first and propagate in optical path and the first optical path adjusting component electricly connected with the controller and first Set sensor 30;And second laser collimator apparatus, the second laser collimator apparatus include successively being laid in described second to propagate The the second optical path adjusting component and second position sensor 40 in optical path and electricly connected with the controller.
Above-mentioned laser collimation system is used for light path calibration of the double light beam laser in long range propagation path.Specific works When, first laser light and second laser light are projected by the first incident laser source 10 and the second incident laser source 20 respectively, it should First laser light has first to propagate optical path, and second laser light has second to propagate optical path.When first position sensor 30 With second position sensor 40 detect the first propagation optical path and second propagation optical path glance off and can not be conllinear when, immediately instead For feedback signal to controller, controller distinguishes output order to the first optical path adjusting component and the second optical path adjusting component, by the The calibration actions of one optical path adjusting component and the second optical path adjusting component can quickly adjust the direction of propagation of the first propagation optical path And second propagate optical path the direction of propagation, and by school under the feedback of first position sensor 30 and second position sensor 40 It is quasi- and return to base position, it is finally completed the alignment procedure of first laser light and second laser light.This system can be quick It realizes beam path alignment of the two beam laser in long range is propagated, eliminates because of spot drift, mechanical displacement of path optics element etc. Misalignment effects caused by factor, it is ensured that light beam is precisely conllinear confocal, thus improve the use reliability of optical instrument, stability with Measurement accuracy.
Optionally, first incident laser source 10 and second incident laser source 20 are continuous wave laser or pulse Laser;The first position sensor 30 and the second position sensor 40 are four-quadrant position sensor, CCD camera Or CMOS camera.It so according to different condition and can need to provide diversified composition scheme for the composition of system, be promoted and be applicable in Range.
Please continue to refer to Fig. 1, in an alternative embodiment, the first optical path adjusting component includes for changing described One propagates the first rotating mirror 50, the second rotating mirror 60 and the third rotating mirror in the direction of optical path and interval cooperation 70;The second optical path adjusting component includes the third in the direction for propagating optical path for changing described second and interval cooperation Rotating mirror 70 and the 4th rotating mirror 80;First rotating mirror 50 is parallel with second rotating mirror 60 Arrangement, the third rotating mirror 70 are arranged in parallel with the 4th rotating mirror 80.In this way, making first laser light The wild effects such as light scattering can be avoided the occurrence of by preset path stable delivery with second laser light, influence light biography Defeated stability.
Further, first rotating mirror 50, second rotating mirror 60 and the 4th rotary reflection Actuator, the Yi Jishe that mirror 80 includes reflector mount, is set on the reflector mount and electricly connects with the controller The Metal film reflector mirror being placed on the reflector mount;The third rotating mirror 70 includes the reflector mount, is set to The actuator electricly connected on the reflector mount and with the controller and be set on the reflector mount two To color beam splitter.It is fed back according to the detection signal of position sensor, controller can drive actuator to drive reflector mount rotation, most Reflecting mirror is adjusted eventually rotates adjustment space posture, it is final to realize collimation to change the direction of propagation of light.Using the anti-of metal film Mirror is penetrated, so that light refraction effect is more preferable, more stable.In addition, when two-beam line converges on third rotating mirror 70, together Sample can be by actuator outputting rotary power, to adjust light propagation path, and finally by beam splitting dichroic mirror by two beams Light gives differentiation processing, and then can be calibrated respectively, and the validity of alignment procedure is improved.
Please continue to refer to Fig. 1, in addition, on the basis of the above embodiments, the system (letter to double light beam laser colimated light system Claim, similarly hereinafter) it further include the first optical shutter 90 and the second optical shutter 100, first optical shutter 90 is set to described the One propagates in optical path and between first incident laser source 10 and the first optical path adjusting component, second light Shutter 100 is learned to be set in the second propagation optical path and be located at second incident laser source 20 and the second optical path tune It saves between component.Thus the first optical shutter 90 and the second optical shutter 100 can enter the first incident laser source 10 and second The emergent ray for penetrating laser source 20 is selectively exported, and the treating capacity of subsequent ray signal is mitigated, and lifting system runs energy Power.First optical shutter 90 perpendicular to the first incident laser source 10 shoot laser, and laser spot center pass through the first optics The center of shutter 90;Second optical shutter 100 is perpendicular to the second incident laser source 20 (shoot laser, and laser facula Center passes through the center of the second optical shutter 100.
It should be understood that above-mentioned first optical shutter 90 and the second optical shutter 100 can be electronic shutter, mechanical shutter Or the prior arts such as optical crystal shutter.
Please continue to refer to Fig. 1, further, system further includes the first sampling reflecting mirror 110 and the second sampling reflecting mirror 120, the first sampling reflecting mirror 110 be laid in the 4th rotating mirror 80 and the first position sensor 30 it Between, it is described second sampling reflecting mirror 120 be laid in it is described first sampling reflecting mirror 110 and the second position sensor 40 it Between.Thus the light after beam splitting can be precisely refracted to first by the first sampling reflecting mirror 110 and the second sampling reflecting mirror 120 It sets on sensor 30 and second position sensor 40, lifting system light obtains and the precision and reliability of analysis processing.
Optionally, first rotating mirror 50, second rotating mirror 60, the third rotating mirror 70, the incidence of the 4th rotating mirror 80, the first sampling reflecting mirror 110 and the second sampling reflecting mirror 120 Angular region is 30 °~60 °.
And can not effectively be transmitted in order to avoid the scattering of a part of light is fallen, based on any of the above embodiments, it is System further includes the first convergent lens 130 and the second convergent lens 140, and first convergent lens 130 is laid in described first and adopts Between sample reflecting mirror 110 and the first position sensor 30, it is anti-that second convergent lens 140 is laid in second sampling It penetrates between mirror 120 and the second position sensor 40.In this way, the first convergent lens 130 and the second convergent lens 140 can incite somebody to action The light convergence of relative distribution is a branch of, and is accurately projected on first position sensor 30 and second position sensor 40, is mentioned High light line is propagated and receives validity.
Reflected light harness and the reflected light of first convergent lens 130 perpendicular to the first sampling reflecting mirror 110 Harness passes through the optical center of first convergent lens 130, and the photosurface of the first position sensor 30 and described first are assembled The focal plane of lens 130 is overlapped, and the center of the photosurface of the first position sensor 30 and first convergent lens 130 focus is overlapped;
Reflected light harness and the reflected light of second convergent lens 140 perpendicular to the second sampling reflecting mirror 120 Harness passes through the optical center of second convergent lens 140, and the photosurface of the second position sensor 40 and described second are assembled The focal plane of lens 140 is overlapped, and the center of the photosurface of the second position sensor 40 and second convergent lens 140 focus is overlapped.
Since the arragement construction of above-mentioned each component is reasonable, so that light transmission is relatively reliable, stablizes, it is conducive to two-beam line school It is conllinear after standard, collimation capability of the lifting system to dual-beam.
Wherein, the focal length of first convergent lens 130 and second convergent lens 140 is 30mm~150mm.Thus The light of the conditions such as different type, energy size can be suitable for assembling, expand the scope of application of system.
Optional controller is the control device in the prior art such as PLC, micro-control computer, is used as information exchange and instruction is adjusted Control maincenter, to all optical shutters (including first and second), the rotating mirror (including first in the technical program Four) signal communication, feedback between position sensor (including first and second) etc. carries out automation control, is conducive to promote system The runnability and precision of system.
When the system works, two beam laser share two position sensing detectors.After installation, need manually by two beam laser Collimation is adjusted, realizes that two beam laser generate non linear optical signal jointly, to optimize two by optimizing this optical signalling The confocal state of Shu Jiguang.After optimization, the center of two position sensing detectors is moved to spot center, sets system Standard optical path.
As shown in Fig. 2, being the control flow chart of this system.Firstly, setting variable i=1, indicates to carry out the i-th beam laser Collimation, then carries out determining current i value whether less than 3, to determine whether optical alignment is completed.If collimation is not yet completed, it is System will open i-th of motorized light shutter, and measure the light intensity readings of two position sensors.If light intensity is too low, system will Mistake can be prompted, indicates that laser facula has completely offset from standard optical path, needs artificial optimization's optical path;If light intensity is normal, system By position coordinates of the exploring laser light hot spot in two position sensors, feedback control adjusts the reflector mount of motor with piezoelectricity, Collimation laser optical path is restored to initial preset optical path into feedback regulation circulation until laser alignment finishes.Then similarly continue The 2nd beam laser (i=2) is adjusted, to complete the collimation of two beam laser, realizes that two beam laser are total to except long reach Line.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed, But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.

Claims (10)

1. a kind of double light beam laser colimated light system characterized by comprising
Controller;
First incident laser source and the second incident laser source, first incident laser source is for emitting first laser light, institute It states first laser light and propagates optical path with first, second incident laser source is for emitting second laser light, and described the Dual-laser light has second to propagate optical path;
First laser collimator apparatus, the first laser collimator apparatus include successively be laid in it is described first propagate optical path in and The the first optical path adjusting component and first position sensor electricly connected with the controller;And
Second laser collimator apparatus, the second laser collimator apparatus include successively be laid in it is described second propagate optical path in and The the second optical path adjusting component and second position sensor electricly connected with the controller.
2. double light beam laser colimated light system according to claim 1, which is characterized in that the first optical path adjusting component packet Include the first rotating mirror, second rotating mirror and the in the direction for propagating optical path for changing described first and interval cooperation Three rotating mirrors;The second optical path adjusting component includes the direction for propagating optical path for changing described second and interval cooperation The third rotating mirror and the 4th rotating mirror;First rotating mirror and second rotating mirror are flat Row arrangement, the third rotating mirror and the 4th rotating mirror are arranged in parallel.
3. double light beam laser colimated light system according to claim 2, which is characterized in that first rotating mirror, institute State the second rotating mirror and the 4th rotating mirror include reflector mount, be set on the reflector mount and with institute State the actuator that controller electricly connects and the Metal film reflector mirror being set on the reflector mount;The third rotation The driving that reflecting mirror includes the reflector mount, is set on the reflector mount and electricly connects with the controller Part and the beam splitting dichroic mirror being set on the reflector mount.
4. double light beam laser colimated light system according to claim 1, which is characterized in that further include the first optical shutter and Two optical shutters, first optical shutter are set to described first and propagate in optical path and be located at first incident laser source Between the first optical path adjusting component, second optical shutter is set to described second and propagates in optical path and be located at institute It states between the second incident laser source and the second optical path adjusting component.
5. double light beam laser colimated light system according to claim 2, which is characterized in that further include the first sampling reflecting mirror and Second sampling reflecting mirror, the first sampling reflecting mirror are laid in the 4th rotating mirror and the first position sensor Between, the second sampling reflecting mirror is laid between the first sampling reflecting mirror and the second position sensor.
6. double light beam laser colimated light system according to claim 5, which is characterized in that first rotating mirror, institute State the second rotating mirror, the third rotating mirror, the 4th rotating mirror, it is described first sampling reflecting mirror and The ranges of incidence angles of the second sampling reflecting mirror is 30 °~60 °.
7. double light beam laser colimated light system according to claim 5, which is characterized in that further include the first convergent lens and Two convergent lenses, first convergent lens are laid between the first sampling reflecting mirror and the first position sensor, Second convergent lens is laid between the second sampling reflecting mirror and the second position sensor.
8. double light beam laser colimated light system according to claim 7, which is characterized in that first convergent lens perpendicular to The reflected light harness and the reflected light harness of the first sampling reflecting mirror pass through the optical center of first convergent lens, described The photosurface of first position sensor is overlapped with the focal plane of first convergent lens, and the first position sensor The center of photosurface is overlapped with the focus of first convergent lens;
The reflected light harness and the reflected light harness that second convergent lens samples reflecting mirror perpendicular to described second pass through institute State the optical center of the second convergent lens, the focal plane weight of the photosurface of the second position sensor and second convergent lens It closes, and the center of the photosurface of the second position sensor is overlapped with the focus of second convergent lens.
9. double light beam laser colimated light system according to claim 7, which is characterized in that first convergent lens and described The focal length of second convergent lens is 30mm~150mm.
10. double light beam laser colimated light system according to claim 1, which is characterized in that first incident laser source and Second incident laser source is continuous wave laser or pulse laser;The first position sensor and the second position Sensor is four-quadrant position sensor, CCD camera or CMOS camera.
CN201821296613.4U 2018-08-13 2018-08-13 Double light beam laser colimated light system Expired - Fee Related CN208506388U (en)

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CN201821296613.4U CN208506388U (en) 2018-08-13 2018-08-13 Double light beam laser colimated light system

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Application Number Priority Date Filing Date Title
CN201821296613.4U CN208506388U (en) 2018-08-13 2018-08-13 Double light beam laser colimated light system

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