CN205374277U - Variable angle's optical element surface absorption characteristic measuring device - Google Patents
Variable angle's optical element surface absorption characteristic measuring device Download PDFInfo
- Publication number
- CN205374277U CN205374277U CN201521120664.8U CN201521120664U CN205374277U CN 205374277 U CN205374277 U CN 205374277U CN 201521120664 U CN201521120664 U CN 201521120664U CN 205374277 U CN205374277 U CN 205374277U
- Authority
- CN
- China
- Prior art keywords
- laser light
- pumping laser
- exploring
- pumping
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model provides a variable angle's optical element surface absorption characteristic measuring device, including the pumping laser lamp -house that is connected with the sample light path respectively, survey laser lamp -house and detection laser detection device, be equipped with pumping laser modulation device, pumping laser coupling device, optic fibre and the setting pumping laser output device on the motion between pumping laser lamp -house and the sample in proper order, pumping laser output device can move the centre of a circle and the focus coincidence of pumping laser beam at the sample surface of this circular trace along the circular trace on the motion. When pumping laser output device moved on the motion, corresponding change took place for pumping laser beam's incident angle, but pumping laser beam does not change at the sample surface's focus position. Therefore, the utility model discloses can ensure measuring result's under different pumping laser entry angles reliability, utilize the advantage of optic fibre to realize freely adjusting of pumping laser entry angle, need not to realign the light path among the accommodation process.
Description
Technical field
This utility model relates to optical element surface absorption characteristic detection technique field, specifically the optical element surface absorption characteristic measurement apparatus of a kind of variable-angle.
Background technology
For optical element, particularly all kinds of optical thin film elements, Surface absorption characteristic is a very important performance parameter, directly influences optical element effect in optical system.The characteristics such as the Surface absorption of optical element are had very strict requirement by a lot of accurate optical systems.Therefore, the Surface absorption characteristic of optical element is accurately measured, is very important.
The method of existing measurement optical element surface absorption characteristic mainly has spectrophotography, ellipsometry, laser light full-boiled process etc..Although spectrophotography and ellipsometry are fairly simple, but maximum problem is the insufficient sensitivity of Optical thin film, generally only has 10-3～10-4Left and right.And the requirement of optical element absorbance is reached 10 by a lot of optical systems now-6(1ppm).Obviously, spectrophotography and ellipsometry cannot meet this requirement.The detection sensitivity of absorbance can be reached 10 by laser light full-boiled process-8Left and right, and there is spatial resolution, it is possible to the Two dimensional Distribution of absorption characteristic is measured.These advantages are not available for other optical absorption characteristic measuring method.Therefore, laser light full-boiled process is especially suitable for for the Surface absorption characteristic particularly weak absorbing characteristic of optical element is measured.
Laser induced surface heat " lens " technology in laser light full-boiled process is adapted to measure optical element surface absorption characteristic.Its ultimate principle is: because of absorbing light energy, optical element causes that local temperature raises at the effect lower surface of pumping laser, thus there is thermal deformation；The spatial distribution of this thermal deformation and being closely related with pumping laser parameter and material behavior over time, and due to this surface heat deformation, the propagation characteristic of the exploring laser light emitted from optical element surface can change, produce newly-increased convergence or effect weakening, just as having increased lens newly.
Utilizing the most commonly seen method that surface heat " lens " effect carries out optical element surface absorption characteristic detection and analysis is utilize a branch of amplitude to irradiate sample surfaces induction generation thermal deformation through the pumping laser of ovennodulation, utilizes the surface heat deformation that another bundle exploring laser light causes to detect pumping laser through sample surfaces thermal deformation region simultaneously.During measurement, adding a spatial filter in the exploring laser light light path reflected, the exploring laser light energy arriving photodetector after spatial filter can because convergence or the effect weakening of exploring laser light be changed by surface heat deformation.
The optical characteristics of a lot of optical elements, the angle including Surface absorption characteristic Yu incident illumination is closely related, under different incident angle of light, characteristic is different, therefore, when the optical characteristics including Surface absorption characteristic is measured, change incident angle is generally required.For laser induced surface heat " lens " technology, what adopt is pumping-detection light channel structure, and the result measured and pumping laser and the relative position of exploring laser light focus, the ratio of focal spot size, focus registration etc. have close relationship, therefore, in measurement process, when changing pumping laser incident angle, keep with the above these parameter constants and be to ensure that the important foundation of measurement result reliability.
Utility model content
The purpose of this utility model is in that to provide the optical element surface absorption characteristic measurement apparatus of a kind of variable-angle, it is possible to freely adjust the incident angle of pumping laser, it is not necessary to readjust calibration light path.
The technical solution of the utility model is:
A kind of optical element surface absorption characteristic measurement apparatus of variable-angle, including the pumping laser light source being connected with sample arm respectively, exploring laser light light source and exploring laser light detecting device, it is sequentially provided with pumping laser modulating device, pumping laser coupling device, optical fiber and the pumping laser output device being arranged on motion between described pumping laser light source and sample, between described exploring laser light light source and sample, is provided with exploring laser light the first focusing arrangement；
Described pumping laser light source, is used for exporting pumping laser beam, and described pumping laser light beam is after pumping laser modulating device is modulated, and then through one end of pumping laser coupling device coupled into optical fibres, the other end of described optical fiber is connected with pumping laser output device；
Described pumping laser output device, for the pumping laser light beam of fiber-optic transfer is focused on sample surfaces, and can along circular motion on motion, the center of circle of described circular trace overlaps in the focus of sample surfaces with pumping laser light beam；
Described exploring laser light light source, is used for exporting exploring laser light light beam, and described exploring laser light light beam focuses on sample surfaces through exploring laser light the first focusing arrangement, and it overlaps in the focus of sample surfaces with described pumping laser light beam in the focus of sample surfaces；
Described exploring laser light detecting device, for collecting the exploring laser light light beam from sample surfaces reflection, and detects the change of the exploring laser light beam propagation characteristic collected.
The optical element surface absorption characteristic measurement apparatus of described variable-angle, also include the pumping laser absorption plant being arranged on motion, described pumping laser absorption plant along circular motion, is used for absorbing the pumping laser from sample surfaces reflection under the control of motion.
The optical element surface absorption characteristic measurement apparatus of described variable-angle, also includes the sample clamping scanning means for placing sample.
The optical element surface absorption characteristic measurement apparatus of described variable-angle, is provided with pumping laser angular adjustment apparatus between described pumping laser light source and pumping laser modulating device.
The optical element surface absorption characteristic measurement apparatus of described variable-angle, it is provided with pumping laser light-dividing device between described pumping laser modulating device and pumping laser coupling device, described pumping laser modulating device is positioned in the input path of pumping laser light-dividing device, described pumping laser coupling device is positioned on the reflected light path of pumping laser light-dividing device, and the transmitted light path of described pumping laser light-dividing device is provided with pump laser power detection device.
The optical element surface absorption characteristic measurement apparatus of described variable-angle, is sequentially provided with exploring laser light angular adjustment apparatus and exploring laser light cosmetic treatment apparatus between described exploring laser light light source and exploring laser light the first focusing arrangement.
The optical element surface absorption characteristic measurement apparatus of described variable-angle, described exploring laser light detecting device includes exploring laser light the second focusing arrangement, exploring laser light the second angular adjustment apparatus, spatial filter arrangement, filtering apparatus and the Electro-Optical Sensor Set that set gradually.
The optical element surface absorption characteristic measurement apparatus of described variable-angle, it is provided with exploring laser light light-dividing device between described exploring laser light the second angular adjustment apparatus and spatial filter arrangement, described exploring laser light the second angular adjustment apparatus is arranged in the input path of exploring laser light light-dividing device, described spatial filter arrangement is arranged on the transmitted light path of exploring laser light light-dividing device, and the reflected light path of described exploring laser light light-dividing device is provided with exploring laser light power detection device.
The beneficial effects of the utility model are:
As shown from the above technical solution, owing to pumping laser output device can along circular motion on motion, and the center of circle of this circular trace overlaps in the focus of sample surfaces with pumping laser light beam, when pumping laser output device moves on motion, the incident angle of pumping laser light beam changes, but pumping laser light beam does not change in the focal position of sample surfaces.Therefore, this utility model may insure that the reliability of measurement result under different pumping laser incident angles, utilizes the advantage of optical fiber to realize freely regulating of pumping laser incident angle, without light path being recalibrated in adjustment process again.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the ultimate principle figure adopting laser induced surface heat " lens " effect measurement optical element surface absorption characteristic；
Fig. 3 is the optical element surface absorption characteristic measuring principle figure of this utility model variable-angle.
Detailed description of the invention
This utility model is further illustrated below in conjunction with the drawings and specific embodiments.
nullAs shown in Figure 1，A kind of optical element surface absorption characteristic measurement apparatus of variable-angle，Including pumping laser light source 1、Pumping laser angular adjustment apparatus 2、Pumping laser modulating device 3、Pumping laser light-dividing device 4、Pump laser power detection device 5、Pumping laser coupling device 6、Optical fiber 7、Pumping laser output device 8、Motion 9、Sample 10、Sample clamping scanning means 11、Pumping laser absorption plant 12、Exploring laser light light source 13、Exploring laser light the first angular adjustment apparatus 14、Exploring laser light cosmetic treatment apparatus 15、Exploring laser light the first focusing arrangement 16、Exploring laser light the second focusing arrangement 17、Exploring laser light the second angular adjustment apparatus 18、Exploring laser light light-dividing device 19、Exploring laser light power detection device 20、Spatial filter arrangement 21、Filtering apparatus 22 and Electro-Optical Sensor Set 23.
Pumping laser angular adjustment apparatus 2, exploring laser light the first angular adjustment apparatus 14 and exploring laser light the second angular adjustment apparatus 18 all adopt high reflective mirror, exploring laser light the first focusing arrangement 16 and exploring laser light the second focusing arrangement 17 all to adopt condenser lens.
The pumping laser light beam of pumping laser light source 1 output reflects through pumping laser angular adjustment apparatus 2, then through pumping laser modulating device 3 to after intensity modulation, it is divided into two bundles by pumping laser light-dividing device 4, wherein the power of pumping laser is monitored by a branch of entrance pump laser power detection device 5, another bundle is coupled to inside optical fiber 7 by pumping laser coupling device 6, the tail end of optical fiber 7 is connected with pumping laser output device 8, and pumping laser light beam is focused on sample 10 surface by pumping laser output device 8.
Pumping laser output device 8 is placed on motion 9, and motion 9 can allow pumping laser output device 8 along circular motion, and the center of circle of this circular trace overlaps in the focus on sample 10 surface with pumping laser light beam.So, when pumping laser output device 8 moves on motion 9, the incident angle generation respective change of pumping laser light beam, but, pumping laser light beam does not change in the focal position on sample 10 surface, may insure that under different pumping laser incident angles, the reliability of measurement result.Being collected by pumping laser absorption plant 12 by the pumping laser light beam of sample 10 surface reflection, pumping laser absorption plant 12 is also disposed on motion 9, and can along circular motion.
Sample 10 is positioned over sample clamping scanning means 11.The exploring laser light light beam exported by exploring laser light light source 13 reflects through exploring laser light the first angular adjustment apparatus 14, after processing then through exploring laser light cosmetic treatment apparatus 15, focused on sample 10 surface by exploring laser light the first focusing arrangement 16, overlap with the focus of pumping laser light beam.Sequentially passed through after exploring laser light the second focusing arrangement 17 is collected, exploring laser light the second angular adjustment apparatus 18 reflects again by the exploring laser light light beam of sample 10 surface reflection, it is divided into two bundles by exploring laser light light-dividing device 19, wherein the power of exploring laser light is monitored by a branch of entrance exploring laser light power detection device 20, after another Shu Ze sequentially passes through spatial filter arrangement 21 and filtering apparatus 22, enter Electro-Optical Sensor Set 23.
Know-why of the present utility model:
As in figure 2 it is shown, the pumping laser light beam of incidence and exploring laser light light beam focus on sample surfaces, and focus overlaps.Owing to pumping laser excites surface heat " lens " effect caused, the propagation characteristic of the exploring laser light light beam of outgoing can change.When needing to measure the sample surfaces absorption characteristic under different pumping laser incident angle, if rotating sample, now, sample surfaces the exit direction of the exploring laser light light beam reflected also can correspondingly change.In Fig. 1, when sample is rotated in place 2 from position 1, outgoing exploring laser light light beam also correspondingly rotates to direction 2 from direction 1, and the so follow-up device that exploring laser light propagation characteristic is detected is also required to correspondingly move.This not only can make whole exploring laser light light path become very complicated, and can largely effect on the precision of measurement.Therefore, during the sample surfaces absorption characteristic under measuring different pumping laser incident angle, it is desirable to make exploring laser light light beam remain stationary as in whole measurement process.Additionally, due to measurement result also with pumping laser and the relative position of exploring laser light focus, the ratio of focal spot size, focus registration closely related, when measurement process changes pumping laser incident angle, also ensureing the position of pumping laser focus and the invariant position of exploring laser light focus, a kind of feasible way is exactly the incident direction only changing pumping laser.
For free space light path, change the incident direction of pumping laser, also to ensure that the position of focus does not change, it is achieved it is highly difficult for getting up simultaneously.Adopt optical fiber technology can overcome this difficulty, optical fiber technology and Opto-thertnal detection technology are combined by starting point of the present utility model just, utilize the advantage of optical fiber to realize freely regulating of pumping laser incident angle in Opto-thertnal detection, and regulate in process without again light path being recalibrated.
As shown in Figure 3, pumping laser light beam 100 is coupled to inside optical fiber 7 by pumping laser coupling device 6, the tail end of optical fiber 7 is connected with pumping laser output device 8, the pumping laser light beam 101 of pumping laser output device 8 outgoing the surface excitation focusing on sample 10 produces surface heat " lens " effect.Exploring laser light light beam 200 also focuses on the surface of sample 10, overlaps with the focus of pumping laser light beam 101, and surface heat " lens " effect is detected.Pumping laser output device 8 is placed on motion 9, and motion 9 can allow pumping laser output device 8 along circular motion, and the center of circle of this circular trace overlaps in the focus on sample 10 surface with pumping laser light beam 101.So, when pumping laser output device 8 moves on motion 9, the incident angle generation respective change of pumping laser light beam 101, but, pumping laser light beam 101 does not change in the focal position on sample 10 surface.In Fig. 3, when pumping laser output device 8 is from position 1 along circular motion to position 2, the position of exploring laser light light beam 200 does not change, the incident angle of pumping laser light beam 101 there occurs change, and the distance of the focal position of exploring laser light light beam 200 not change from pumping laser output device 8 to sample 10, therefore, pumping laser and exploring laser light be the relative position of focus on sample surfaces, the ratio of focal spot size, the registration of focus is also without change, thus may insure that the reliability of measurement result under different pumping laser incident angles.
The above embodiment is only that preferred implementation of the present utility model is described; not scope of the present utility model is defined; under the premise designing spirit without departing from this utility model; various deformation that the technical solution of the utility model is made by those of ordinary skill in the art and improvement, all should fall in the protection domain that claims of the present utility model are determined.
Claims (8)
1. the optical element surface absorption characteristic measurement apparatus of a variable-angle, it is characterized in that: include the pumping laser light source, exploring laser light light source and the exploring laser light detecting device that are connected respectively with sample arm, it is sequentially provided with pumping laser modulating device, pumping laser coupling device, optical fiber and the pumping laser output device being arranged on motion between described pumping laser light source and sample, between described exploring laser light light source and sample, is provided with exploring laser light the first focusing arrangement；
Described pumping laser light source, is used for exporting pumping laser beam, and described pumping laser light beam is after pumping laser modulating device is modulated, and then through one end of pumping laser coupling device coupled into optical fibres, the other end of described optical fiber is connected with pumping laser output device；
Described pumping laser output device, for the pumping laser light beam of fiber-optic transfer is focused on sample surfaces, and can along circular motion on motion, the center of circle of described circular trace overlaps in the focus of sample surfaces with pumping laser light beam；
Described exploring laser light light source, is used for exporting exploring laser light light beam, and described exploring laser light light beam focuses on sample surfaces through exploring laser light the first focusing arrangement, and it overlaps in the focus of sample surfaces with described pumping laser light beam in the focus of sample surfaces；
Described exploring laser light detecting device, for collecting the exploring laser light light beam from sample surfaces reflection, and detects the change of the exploring laser light beam propagation characteristic collected.
2. the optical element surface absorption characteristic measurement apparatus of variable-angle according to claim 1, it is characterized in that: also include the pumping laser absorption plant being arranged on motion, described pumping laser absorption plant along circular motion, is used for absorbing the pumping laser from sample surfaces reflection under the control of motion.
3. the optical element surface absorption characteristic measurement apparatus of variable-angle according to claim 1, it is characterised in that: also include the sample clamping scanning means for placing sample.
4. the optical element surface absorption characteristic measurement apparatus of variable-angle according to claim 1, it is characterised in that: it is provided with pumping laser angular adjustment apparatus between described pumping laser light source and pumping laser modulating device.
5. the optical element surface absorption characteristic measurement apparatus of variable-angle according to claim 1, it is characterized in that: between described pumping laser modulating device and pumping laser coupling device, be provided with pumping laser light-dividing device, described pumping laser modulating device is positioned in the input path of pumping laser light-dividing device, described pumping laser coupling device is positioned on the reflected light path of pumping laser light-dividing device, and the transmitted light path of described pumping laser light-dividing device is provided with pump laser power detection device.
6. the optical element surface absorption characteristic measurement apparatus of variable-angle according to claim 1, it is characterised in that: it is sequentially provided with exploring laser light angular adjustment apparatus and exploring laser light cosmetic treatment apparatus between described exploring laser light light source and exploring laser light the first focusing arrangement.
7. the optical element surface absorption characteristic measurement apparatus of variable-angle according to claim 1, it is characterised in that: described exploring laser light detecting device includes exploring laser light the second focusing arrangement, exploring laser light the second angular adjustment apparatus, spatial filter arrangement, filtering apparatus and the Electro-Optical Sensor Set that set gradually.
8. the optical element surface absorption characteristic measurement apparatus of variable-angle according to claim 7, it is characterized in that: between described exploring laser light the second angular adjustment apparatus and spatial filter arrangement, be provided with exploring laser light light-dividing device, described exploring laser light the second angular adjustment apparatus is arranged in the input path of exploring laser light light-dividing device, described spatial filter arrangement is arranged on the transmitted light path of exploring laser light light-dividing device, and the reflected light path of described exploring laser light light-dividing device is provided with exploring laser light power detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521120664.8U CN205374277U (en) | 2015-12-31 | 2015-12-31 | Variable angle's optical element surface absorption characteristic measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521120664.8U CN205374277U (en) | 2015-12-31 | 2015-12-31 | Variable angle's optical element surface absorption characteristic measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205374277U true CN205374277U (en) | 2016-07-06 |
Family
ID=56257745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521120664.8U Active CN205374277U (en) | 2015-12-31 | 2015-12-31 | Variable angle's optical element surface absorption characteristic measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205374277U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105424602A (en) * | 2015-12-31 | 2016-03-23 | 合肥知常光电科技有限公司 | Variable-angle optical element surface absorption characteristic measuring device |
| CN106441815A (en) * | 2016-09-07 | 2017-02-22 | 中国科学院长春光学精密机械与物理研究所 | Photoelectric equipment and laser detection adjusting system thereof |
-
2015
- 2015-12-31 CN CN201521120664.8U patent/CN205374277U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105424602A (en) * | 2015-12-31 | 2016-03-23 | 合肥知常光电科技有限公司 | Variable-angle optical element surface absorption characteristic measuring device |
| CN106441815A (en) * | 2016-09-07 | 2017-02-22 | 中国科学院长春光学精密机械与物理研究所 | Photoelectric equipment and laser detection adjusting system thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105705936B (en) | For characterizing the prism-coupled system and method for curved part | |
| CN105181298B (en) | Multiple reflections formula confocal laser Long focal length measurement method and apparatus | |
| CN103900493B (en) | Micro-nano structure topography measurement device and method based on digital scan white light interference | |
| CN107462405B (en) | Broadband differential confocal Infrared Lens element refractive index measurement method and device | |
| CN103477206B (en) | Optical anisotropy's parameter measuring apparatus, measuring method and measurement system | |
| CN102589428B (en) | Asymmetric-incidence-based sample axial position tracking and correcting method and device | |
| CN204831220U (en) | Calcirm -fluoride optical flat two sides depth of parallelism high accuracy testing arrangement | |
| CN103712993B (en) | The detection method of transparent optical material body absorption characteristic distributed in three dimensions and device | |
| CN105424322A (en) | Self-calibration optical axis parallelism detector and detection method | |
| CN104359564A (en) | Pulse laser beam quality synchronous measuring system and synchronous control method thereof | |
| CN202938795U (en) | Laser measuring device for measuring micro angles | |
| CN109186945A (en) | The measuring device and method of heavy-caliber optical grating diffraction efficiency spectrum and its uniformity | |
| CN104833486B (en) | Multiple reflections formula laser differential confocal Long focal length measurement method and apparatus | |
| CN205317659U (en) | Non -linear spectral characteristic measuring device of nonlinearity photonics material | |
| CN102426093A (en) | Microscopic imaging-based polymer planar waveguide optical parameter measuring apparatus | |
| CN104316506A (en) | Raman probe and Raman signal detection system and method capable of focusing automatically | |
| CN104792798A (en) | Total internal reflection illumination technology-based subsurface damage measuring apparatus and method thereof | |
| CN103471524B (en) | Confocal paraboloids vertex curvature radius measuring method | |
| CN205374277U (en) | Variable angle's optical element surface absorption characteristic measuring device | |
| CN103439294A (en) | Angle modulation and wavelength modulation surface plasmon resonance (SPR) sharing system | |
| CN202351017U (en) | Measuring instrument based on microscopic imaging for optical parameters of polymer planar waveguide | |
| CN107782697A (en) | The confocal Infrared Lens element refractive index measurement method of broadband and device | |
| CN105424602A (en) | Variable-angle optical element surface absorption characteristic measuring device | |
| CN108572160B (en) | Refractometer for measuring refractive index distribution | |
| CN204101461U (en) | Raman probe and can the Raman signal sniffer of auto-focusing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |