CN208422893U - 一种晶圆承接台 - Google Patents
一种晶圆承接台 Download PDFInfo
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- CN208422893U CN208422893U CN201821131858.1U CN201821131858U CN208422893U CN 208422893 U CN208422893 U CN 208422893U CN 201821131858 U CN201821131858 U CN 201821131858U CN 208422893 U CN208422893 U CN 208422893U
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000001360 synchronised effect Effects 0.000 claims description 17
- 230000003028 elevating effect Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 description 7
- 238000013461 design Methods 0.000 description 7
- 230000005484 gravity Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
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Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201821131858.1U CN208422893U (zh) | 2018-07-17 | 2018-07-17 | 一种晶圆承接台 |
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CN201821131858.1U CN208422893U (zh) | 2018-07-17 | 2018-07-17 | 一种晶圆承接台 |
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CN208422893U true CN208422893U (zh) | 2019-01-22 |
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CN201821131858.1U Active CN208422893U (zh) | 2018-07-17 | 2018-07-17 | 一种晶圆承接台 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110890311A (zh) * | 2019-11-15 | 2020-03-17 | 重庆电子工程职业学院 | 一种晶圆旋转承载结构及其处理装置 |
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2018
- 2018-07-17 CN CN201821131858.1U patent/CN208422893U/zh active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110890311A (zh) * | 2019-11-15 | 2020-03-17 | 重庆电子工程职业学院 | 一种晶圆旋转承载结构及其处理装置 |
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Legal Events
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220803 Address after: 101300 0146, floor 3, building 1, yard 1, Shuangyu South Street, Shunyi District, Beijing Patentee after: Beijing Ketai optical core semiconductor equipment Technology Co.,Ltd. Address before: Room 1700, No. 75, Xinhua North Street, Tongzhou District, Beijing 101100 Patentee before: BEIJING GUIKE INTELLIGENT TECHNOLOGY Co.,Ltd. |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee after: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region after: China Address before: 101300 0146, floor 3, building 1, yard 1, Shuangyu South Street, Shunyi District, Beijing Patentee before: Beijing Ketai optical core semiconductor equipment Technology Co.,Ltd. Country or region before: China |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240314 Address after: 528248, No. 16 Guangming Avenue, New Light Source Industrial Base, Shishan Town, Nanhai District, Foshan City, Guangdong Province (Residence application, multiple photos for one address) Patentee after: Foshan Xince Technology Co.,Ltd. Country or region after: China Address before: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee before: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region before: China |