CN208368548U - The apparatus for baking of glass substrate - Google Patents
The apparatus for baking of glass substrate Download PDFInfo
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- CN208368548U CN208368548U CN201821151053.3U CN201821151053U CN208368548U CN 208368548 U CN208368548 U CN 208368548U CN 201821151053 U CN201821151053 U CN 201821151053U CN 208368548 U CN208368548 U CN 208368548U
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- glass substrate
- baking
- supporting device
- heating plate
- hole
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Abstract
A kind of apparatus for baking of glass substrate of the utility model, including heating plate and supporting device；The top of the heating plate is arranged in the supporting device, and the supporting device is used to support the marginal position of the glass substrate so that the glass substrate is pulled away the heating plate；The heating plate is equipped with multiple gas holes for blowing to the glass substrate.The apparatus for baking of the glass substrate, the edge of glass substrate can be placed on supporting device, so that glass substrate is integrally detached from heating plate, it is blown by multiple gas holes to form the air-flow towards glass substrate between the heating plate and glass substrate, it can avoid convex under glass substrate intermediate region, to improve the flatness of glass substrate in baking process, so improve ink on glass substrate at film uniformity.
Description
Technical field
The utility model relates to material processing plant fields, more particularly to a kind of apparatus for baking of glass substrate.
Background technique
OLED InkJet printing processes process approximately as: substrate is after the pre-treatments such as over cleaning, by functional layer ink printed
It on substrate, is then dried under reduced pressure, then is toasted further to remove the solvent in ink and to functional material solid-state
Pattern is modified.
Each functional layer material is an important factor for influencing device efficiency at film uniformity in OLED device.OLED device system
During work, the volume of ink droplet and the accuracy of ink droplet drops angle control in InkJet printing processes, be dried under reduced pressure in technique it is black
The uniformity that glass substrate is heated in the rate of volatilization of the solvent composition of water and the air pressure in drying chamber and baking process,
Having a major impact at film uniformity to ink material.
Wherein, as shown in Figure 1, usually lying in glass substrate 10 on heating panel 20 when carrying out baking process
It is heated；However, as shown in Fig. 2, when glass substrate 10 and heating panel 20 just contact, since heating panel different location is deposited
It is easy to cause its surrounding that warpage occurs in temperature difference, so that the central area of glass substrate and the temperature of peripheral regions when baking
Difference, and then lead to the variant at film uniformity of ink material between two regions, it will ultimately result in prepared OLED
There is the problem that 32 brightness of glass substrate central area is brighter, 34 brightness of peripheral regions is darker when showing in device 30, such as Fig. 3 institute
Show.
Utility model content
Based on this, it is necessary to a kind of apparatus for baking of glass substrate is provided, with solve in glass substrate baking process due to
There are temperature differences to be easy to cause its surrounding that warpage occurs for heating panel different location, leads to ink asking at film uniformity difference
Topic.
A kind of apparatus for baking of glass substrate, including heating plate and supporting device；The supporting device setting adds described
The top of hot plate, the supporting device are used to support the marginal position of the glass substrate；The heating plate is equipped with multiple use
In the gas hole blown to the glass substrate.
Compared with prior art, the utility model has the following beneficial effects:
The edge of glass substrate can be placed on supporting device by the apparatus for baking of above-mentioned glass substrate, so that glass base
Plate is integrally detached from heating plate, is blown by multiple gas holes to be formed between the heating plate and glass substrate towards glass base
The air-flow of plate, can avoid glass substrate intermediate region under it is convex, to improve the flatness of glass substrate in baking process, Jin Erti
Ink at film uniformity on high glass substrate.
In addition, the marginal position of only glass substrate (belongs to OLED device since glass substrate does not contact directly with heating plate
The noneffective display area of part) it is contacted with supporting device, the intermediate region that can avoid glass substrate generates exception in baking process
, there is the problem of light and shade unevenness in speckle and while causing OLED device to show.
Detailed description of the invention
Fig. 1 is that normal condition lower substrate is placed in the schematic diagram that heating panel is heated；
Fig. 2 is the schematic diagram that warpage occurs for edge when substrate heats；
Fig. 3 is the schematic diagram that display problem of non-uniform occurs in OLED display device；
Fig. 4 is the structural schematic diagram of the apparatus for baking of the glass substrate of an embodiment；
Fig. 5 is the top view of the apparatus for baking of glass substrate shown in Fig. 4.
Specific embodiment
The utility model is more fully retouched below with reference to relevant drawings for the ease of understanding the utility model,
It states.The preferred embodiment of the utility model is given in attached drawing.But the utility model can come in many different forms in fact
It is existing, however it is not limited to embodiment described herein.On the contrary, purpose of providing these embodiments is makes public affairs to the utility model
The understanding for opening content is more thorough and comprehensive.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model
The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein "and/or" includes
Any and all combinations of one or more related listed items.
As shown in Figure 4, Figure 5, the apparatus for baking 100 of the glass substrate of an embodiment of the present invention, including heating plate 120
With supporting device 140.
Wherein, heating plate 120 is for heating glass substrate 200.Heating plate 120 is arranged in supporting device 140
Top, supporting device 140 are used to support the marginal position of glass substrate 200, and glass substrate 200 is pulled away heating plate 120.Add
Hot plate 120 is equipped with multiple gas holes 122, and multiple gas holes 122 are used to blow to the glass substrate 200 in heating plate
The air-flow towards glass substrate 200 is formed between 120 and glass substrate 200.
Specifically, multiple gas holes 122 are distributed in the lower section of 200 placement location of glass substrate.In one embodiment, more
A gas hole 122 is uniformly distributed, equably to blow gas to 200 intermediate region of glass substrate.In baking process, air feeder
The gas that structure is blowed is inert gas, such as nitrogen.
In one embodiment, the apparatus for baking 100 of glass substrate further includes for blowing with what multiple gas holes 122 were connected to
Mechanism of qi structure (not shown).
In one embodiment, the apparatus for baking 100 of glass substrate further includes controller (not shown), controller and air blowing
Mechanism is electrically connected to control the flow velocity for blowing gas.
In one embodiment, multiple aspirating holes 124, multiple aspirating holes 124 and multiple air blowings are additionally provided in heating plate 120
122 interphase distribution of hole, multiple aspirating holes 124 are used to be evacuated between heating plate 120 and glass substrate 200 in heating plate 120
The air-flow backwards to glass substrate 200 is formed between glass substrate 200.It may cause glass base since inflatable body blows gas
The case where intermediate region of plate 200 raises upward, by the first extraction sector in heating plate 120 and glass in the present embodiment
Downward air-flow is formed between substrate 200, and upward air-flow or downward air-flow is made to distribute alternately, and adjusts two kinds of directions
When the flow velocity of air-flow to certain proportion, the occurrence of can raising upward to avoid the intermediate region of glass substrate 200, protect
Demonstrate,prove the flatness of glass substrate 200.
Specifically, 122 interphase distribution of multiple aspirating holes 124 and multiple gas holes can be an aspirating hole 124 and one
Gas hole 122 is alternately arranged, and is also possible to one group of multiple aspirating hole 124 and one group of multiple gas hole 122 is alternately arranged, such as multiple
Gas hole 122 and multiple aspirating holes 124 are all divided into multiple row, 124 interphase distribution of multiple row gas hole 122 and multiple row aspirating hole.
Further, in one embodiment, multiple gas holes 122 and multiple aspirating holes 124 form equally distributed battle array
Column, i.e., the distance between adjacent hole are all the same.
In one embodiment, the apparatus for baking 100 of glass substrate further includes for being connected to multiple aspirating holes 124
One extraction sector (not shown).Further, controller is also electrically connected with the first extraction sector.
In one embodiment, supporting device 140 includes two support portions being oppositely arranged, to be respectively used to place glass
The both ends of substrate 200.
In one embodiment, the end face for being used to support glass substrate 200 of supporting device 140 and heating plate 120 away from
From for 0.5mm~1.0mm.
In one embodiment, the apparatus for baking 100 of glass substrate further includes elevating mechanism 160, elevating mechanism 160 and branch
The connection of mechanism 140 is held to drive supporting device 140 to rise or fall.The present embodiment, can basis by setting elevating mechanism 160
Actual conditions adjust the distance between glass substrate 200 and heating plate 120.Further, in one embodiment, elevating mechanism
160 include lift actuator 162 and lifting arm 164, and lifting arm 164 is connect with supporting device 140, and lift actuator 162 is used for
Lifting arm 164 is driven to act.
Further, in one embodiment, controller is also electrically connected with elevating mechanism 160.
In one embodiment, supporting device 140 is equipped with adsorption hole (not shown), and adsorption hole is for adsorbing glass substrate
200 marginal position.The present embodiment makes the margin location of the glass substrate 200 by the way that adsorption hole is arranged on supporting device 140
It sets and is fitted on supporting device 140, prevent the airflow function between heating plate 120 and glass substrate 200 from influencing glass substrate 200
Shelf-stability.
In one embodiment, the apparatus for baking 100 of glass substrate further includes the second pumping for being connected to adsorption hole
Mechanism 180.
Further, in one embodiment, controller be also electrically connected with the second extraction sector 180 with upward air-flow and to
Under the flow velocity of air-flow be adjusted.
The edge of glass substrate 200 can be placed on supporting device 140, make by the apparatus for baking 100 of above-mentioned glass substrate
The whole disengaging heating plate 120 of glass substrate 200 is obtained, is blown by multiple gas holes 122 in the heating plate 120 and glass base
Between plate 200 formed towards glass substrate 200 air-flow, can avoid 200 intermediate region of glass substrate under it is convex, to improve baking
The flatness of glass substrate 200 in the process, so improve glass substrate 200 on ink at film uniformity.
In addition, since glass substrate 200 does not contact directly with heating plate 120, the only marginal position of glass substrate 200
(noneffective display area for belonging to OLED device) is contacted with supporting device 140, and the intermediate region that can avoid glass substrate 200 is being dried
There is light and shade unevenness when leading to the problem of abnormal speckle during roasting and OLED device being caused to show.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of apparatus for baking of glass substrate, which is characterized in that including heating plate and supporting device；The supporting device setting
In the top of the heating plate, the supporting device is used to support the marginal position of the glass substrate；It is set in the heating plate
There are multiple gas holes for blowing to the glass substrate.
2. the apparatus for baking of glass substrate as described in claim 1, which is characterized in that it further include inflatable body, the air blowing
Mechanism is connected to multiple gas holes.
3. the apparatus for baking of glass substrate as described in claim 1, which is characterized in that multiple gas holes are uniformly distributed.
4. the apparatus for baking of glass substrate as described in claim 1, which is characterized in that be additionally provided with multiple pumpings in the heating plate
Stomata, multiple aspirating holes and multiple gas hole interphase distributions.
5. the apparatus for baking of glass substrate as claimed in claim 4, which is characterized in that it further include the first extraction sector, it is described
First extraction sector is connected to multiple aspirating holes.
6. the apparatus for baking of glass substrate as claimed in claim 4, which is characterized in that multiple gas holes and multiple described
Aspirating hole forms equally distributed array.
7. the apparatus for baking of glass substrate as claimed in claim 4, which is characterized in that multiple gas holes and multiple described
Aspirating hole is all divided into multiple row, aspirating hole interphase distribution described in gas hole described in multiple row and multiple row.
8. the apparatus for baking of glass substrate as described in claim 1, which is characterized in that the supporting device is equipped with absorption
Hole, the adsorption hole is for making the marginal position of the glass substrate be fitted in the supporting device.
9. the apparatus for baking of glass substrate as claimed in claim 8, which is characterized in that it further include the second extraction sector, it is described
Second extraction sector is connected to the adsorption hole.
10. the apparatus for baking of glass substrate as described in any one of claims 1 to 9, which is characterized in that further include elevator
Structure, the elevating mechanism are connect to drive the supporting device to rise or fall with the supporting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821151053.3U CN208368548U (en) | 2018-07-19 | 2018-07-19 | The apparatus for baking of glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821151053.3U CN208368548U (en) | 2018-07-19 | 2018-07-19 | The apparatus for baking of glass substrate |
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| Publication Number | Publication Date |
|---|---|
| CN208368548U true CN208368548U (en) | 2019-01-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821151053.3U Active CN208368548U (en) | 2018-07-19 | 2018-07-19 | The apparatus for baking of glass substrate |
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| CN (1) | CN208368548U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110053369A (en) * | 2019-04-08 | 2019-07-26 | 深圳市华星光电技术有限公司 | A kind of apparatus for baking |
| CN111451110A (en) * | 2020-04-09 | 2020-07-28 | Tcl华星光电技术有限公司 | Baking apparatus and method of operating the same |
-
2018
- 2018-07-19 CN CN201821151053.3U patent/CN208368548U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110053369A (en) * | 2019-04-08 | 2019-07-26 | 深圳市华星光电技术有限公司 | A kind of apparatus for baking |
| CN111451110A (en) * | 2020-04-09 | 2020-07-28 | Tcl华星光电技术有限公司 | Baking apparatus and method of operating the same |
| CN111451110B (en) * | 2020-04-09 | 2022-05-03 | Tcl华星光电技术有限公司 | Method for operating a baking device |
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