CN111451110A

CN111451110A - Baking apparatus and method of operating the same

Info

Publication number: CN111451110A
Application number: CN202010273480.4A
Authority: CN
Inventors: 邹家鹏
Original assignee: TCL Huaxing Photoelectric Technology Co Ltd
Current assignee: TCL Huaxing Photoelectric Technology Co Ltd
Priority date: 2020-04-09
Filing date: 2020-04-09
Publication date: 2020-07-28
Anticipated expiration: 2040-04-09
Also published as: CN111451110B

Abstract

The application discloses toast equipment and operation method thereof, toast equipment includes hot plate, clamping device and moves and carry the device, clamping device set up in the hot plate top to be fixed in the base plate the hot plate top, be provided with a plurality of gas holes and a plurality of supported holes of looks dislocation on the hot plate, a plurality of gas holes be used for to the base plate is blown, forms the air supporting, it passes to move the device a plurality of supported holes are in order to support the base plate compares in prior art, and this application has improved the homogeneity of being heated of base plate through separating base plate and hot plate, has guaranteed the thick homogeneity of membrane that becomes membrane, forms the air supporting in order to improve the flatness of base plate to set up the efficiency of carrying the device in order to improve the operation of toasting that can put the base plate in a flexible way.

Description

Baking apparatus and method of operating the same

Technical Field

The application relates to the technical field of display, in particular to the technical field of display panel manufacturing processes, and specifically relates to baking equipment and an operation method thereof.

Background

At present, in the process of manufacturing a display panel, one of the processes of forming a film by an organic solution is as follows: the solution is applied to a clean substrate, and the solution applied to the substrate is baked to evaporate the solvent in the solution to form a primary film.

However, when the existing baking equipment is used to bake the substrate, the substrate will contact with the carrying mechanism in the baking equipment, so that the substrate is heated unevenly, the evaporation rate of the solvent is affected, the thickness of the organic film layer formed after drying is uneven, and the product quality is affected.

Disclosure of Invention

The embodiment of the application provides a baking equipment, can reduce the area of contact of base plate and baking equipment, can be so that the base plate is heated evenly, can improve the thick homogeneity of membrane of the organic rete on the base plate, promote the product quality.

The embodiment of the application provides a baking equipment, includes:

the heating plate is used for heating the substrate above the heating plate, and a plurality of air blowing holes and a plurality of supporting holes which are mutually staggered are arranged in the heating plate;

the clamping device comprises one or more pairs of clamps arranged on two opposite sides above the heating plate, and is used for fixing the substrate above the heating plate;

the transferring device is arranged below the heating plate and comprises a lifting platform and a plurality of supporting pieces protruding out of the upper surface of the lifting platform and corresponding to the supporting holes.

In one embodiment of the present application, each of the plurality of supports has a height greater than a thickness of the heating plate.

In one embodiment of the present application, the lift table moves up and down a distance less than a height of the plurality of supports.

In an embodiment of the application, a plurality of rows of air blowing holes and a plurality of rows of supporting holes are arranged on the heating plate, and the plurality of rows of air blowing holes and the plurality of rows of supporting holes are distributed alternately.

In an embodiment of this application, a plurality of support piece include with the multiseriate support hole one-to-one's multiseriate support column, each in the multiseriate support hole all includes a plurality of mutual spaced support holes, each in the multiseriate support column all includes a plurality of mutual spaced support columns, when the elevating platform rises, each in the multiseriate support column all passes in a support hole by its correspondence.

In an embodiment of this application, be provided with a plurality of rows of gas holes and extend and a plurality of supporting holes that are parallel to each other in the direction of being listed as on the hot plate, just a plurality of rows of gas holes with a plurality of supporting holes distribute alternately, wherein, a plurality of support piece include with a plurality of rows of support columns that a plurality of supporting holes correspond, and the length in every supporting hole is more than or equal to the length of its a corresponding a row of support column in the direction of being listed as.

In an embodiment of this application, toast equipment still includes air feeder, flow control device and preheating device, wherein, air feeder pass through the air supply pipe with a plurality of gas holes are linked together, just flow control device with preheating device set up in on the air supply pipe, be used for the regulation to let in the flow of gas in a plurality of gas holes to and heat the gas that lets in.

According to the above object of the present application, there is provided a method of operating the toasting device, the method comprising:

the shifting device is lifted to a first position, and the substrate is placed on the shifting device;

the moving and carrying device is lowered to a second position, and the clamping device fixes the edge of the substrate;

the moving and carrying device is lowered to a third position, the heating plate is heated, and the air blowing holes blow air to the substrate to form air flotation;

after the substrate is baked, the transfer device ascends to the second position and supports the substrate, and the clamping device is separated from the substrate; and

the transfer device is raised to the first position, and the substrate is taken out.

In an embodiment of the present application, when the transfer device is raised to the first position or the second position, the support member of the transfer device passes through the support hole of the heating plate to support the substrate.

In one embodiment of the present application, when the transfer device is located at the third position, the top of the support member in the transfer device is lower than the heating plate.

The utility model provides a baking equipment, top through at the hot plate sets up clamping device, be fixed in the hot plate top with the base plate, thereby the area of contact between base plate and the hot plate has been reduced, the homogeneity of being heated of base plate has been increased, and simultaneously, be provided with the hole of blowing in the base plate, blow to the base plate, form the air supporting, the flatness of base plate has been improved, the thick homogeneity of membrane of organic rete on the base plate has further been guaranteed, and be provided with the bearing device of liftable, cooperation clamping device can carry out nimble getting to the base plate and put, time is saved, the productivity is increased, the yields of product has been improved.

Drawings

The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.

Fig. 1 is a schematic structural diagram of a baking apparatus according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram of a baking apparatus according to an embodiment of the present application.

Fig. 3 is a schematic structural diagram of a baking apparatus according to an embodiment of the present application.

Fig. 4 is a schematic structural diagram of a heating plate according to an embodiment of the present application.

Fig. 5 is a schematic structural view of another heating plate according to an embodiment of the present disclosure.

Fig. 6 is a schematic structural diagram of a transfer device according to an embodiment of the present application.

Fig. 7 is a schematic structural view of another transfer device according to an embodiment of the present application.

Fig. 8 is a flowchart of an operation method of the baking apparatus according to an embodiment of the present disclosure.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

In order to solve the above technical problem, an embodiment of the present application provides a baking apparatus, as shown in fig. 1, the baking apparatus 10 includes:

a heating plate 101 for heating a substrate 110 above the heating plate 101, wherein the heating plate 101 is provided with a plurality of gas blowing holes 105 and a plurality of supporting holes 104 which are staggered with each other;

a clamping device 102 comprising one or more pairs of clamps disposed on opposite sides above the heating plate 101, the clamping device 102 being configured to fix the substrate 110 above the heating plate 101;

and a transfer device 103 disposed below the heating plate 101, wherein the transfer device 103 includes a lifting table 1031 and a plurality of supporters 1032 protruding from an upper surface of the lifting table and corresponding to the plurality of support holes 104.

Specifically, the heating plate 101 is provided with a plurality of air blowing holes 105 and a plurality of supporting holes 104, which are staggered with each other, wherein the plurality of air blowing holes 105 are used for blowing air to the substrate 110 to form an air float, and the plurality of supporting members 1032 can pass through the plurality of supporting holes 104 and protrude from the upper surface of the heating plate 101 to support the substrate 110.

The clamping device 102 is disposed above the heating plate 101, and can fix the substrate 110 above the heating plate 101 without contacting the heating plate 101.

In the implementation application process, the base plate will with the hot plate contact among the baking equipment, thereby lead to the base plate to be heated unevenly, influence the evaporation rate of solvent, lead to the thick inhomogeneity of membrane of the organic rete that forms after the drying, and then influence the product quality, and the baking equipment that this application embodiment provided, set up clamping device above the hot plate, in order to be fixed in the hot plate top with the base plate, and not contact with the hot plate, the homogeneity that the base plate was heated has been improved, the membrane thickness homogeneity of filming has been guaranteed, and be provided with the gas blow hole, in order to blow to the base plate, form the air supporting, in order to keep the flatness of base plate, the flatness of filming has been increased, in addition, this application embodiment still is provided with assorted and moves the device of carrying, in order to play the effect of.

Further, as shown in fig. 1, each of the supporting members 1032 has a height greater than a thickness of the heating plate 101, so that the supporting members 1032 can smoothly pass through the supporting holes 104 to support the substrate 110.

In addition, the distance range of the up-and-down movement of the lifting platform 1031 may be smaller than the height of the supporting members 1032, so as to prevent unnecessary loss due to collision or friction between the lifting platform 1031 and the heating plate 101 and between the supporting members 1032 and the heating plate 101 during the lifting process of the lifting platform 1031, and the specific lifting distance range may be adjusted according to practical situations, which is not limited herein.

In the embodiment of the present application, the plurality of air blowing holes 105 and the plurality of support holes 104 are distributed in a staggered manner, so as to prevent the two hole structures from interfering with each other.

And the plurality of air blowing holes 105 may be uniformly distributed on the heating plate 101 to improve the uniformity of air blowing from the plurality of air blowing holes 105 toward the substrate 110, wherein the diameter of the air blowing holes 105 may be between 0.5 and 2 mm.

In one embodiment of the present application, please refer to fig. 1 and 4.

The heating plate 101 is provided with a plurality of rows of air blowing holes 105 and a plurality of rows of support holes 104, the plurality of rows of air blowing holes 105 and the plurality of rows of support holes 104 are distributed at intervals, wherein the shapes of the plurality of rows of air blowing holes 105 and the plurality of rows of support holes 104 respectively and independently include a circle, an ellipse, a triangle, a quadrangle or other polygons, and the shapes are not limited herein.

It should be noted that the cross-sectional shapes and sizes of the supporting members 1032 are matched with the shapes and sizes of the supporting holes 104, so that the supporting members 1032 can smoothly pass through the supporting holes 104.

Correspondingly, in this embodiment, please refer to fig. 1, fig. 4 and fig. 6, the supporting members 1032 include a plurality of rows of supporting columns corresponding to the plurality of rows of supporting holes 104 one by one, each row of the plurality of rows of supporting holes 104 includes a plurality of supporting holes 104 spaced from each other, each row of the plurality of rows of supporting columns includes a plurality of supporting columns spaced from each other, each supporting column corresponds to one supporting hole 104, when the lifting platform 1031 ascends, each row of the plurality of rows of supporting columns passes through one corresponding row of supporting holes 104, that is, each supporting column can pass through one corresponding supporting hole 104.

In another embodiment of the present application, please refer to fig. 1 and 5.

The heating plate 101 is provided with a plurality of rows of air blowing holes 105 and a plurality of rows of support holes 104, the plurality of rows of air blowing holes 105 and the plurality of rows of support holes 104 are distributed at intervals, wherein the shapes of the plurality of rows of air blowing holes 105 respectively and independently include a circle, an ellipse, a triangle, a quadrangle or other polygons, and are not limited herein.

The multiple rows of support holes 104 are multiple support holes 104 extending in the row direction and parallel to each other, that is, each support hole 104 is in a long strip shape, that is, the multiple support holes 104 and the multiple rows of air blowing holes 105 are distributed at intervals and parallel to each other.

Referring to fig. 1, 5 and 6, in the present embodiment, the plurality of supporting members 104 include a plurality of rows of supporting columns parallel to each other, and each row of supporting columns includes a plurality of supporting columns spaced apart from each other, it should be noted that the plurality of rows of supporting columns correspond to the plurality of supporting holes 104, that is, each row of supporting column corresponds to one supporting hole 104, and the length of each supporting hole 104 is greater than or equal to the length of each row of supporting columns in the row direction, so that the plurality of supporting members 1032 can smoothly pass through the plurality of supporting holes 104.

In addition, in another embodiment of the present application, please refer to fig. 1, fig. 5 and fig. 7, which is different from the above embodiment in the shape of the supporting member 1032.

In this embodiment, the supporting members 1032 are spaced apart from each other and parallel to each other, and the supporting plates and the supporting holes 104 are disposed in a one-to-one correspondence, wherein the length of each supporting plate may be smaller than or equal to the length of the corresponding supporting hole 104, so that the supporting members 1032 can smoothly pass through the supporting holes 104.

To sum up, the baking equipment that this application embodiment provided, top through at the hot plate sets up clamping device, be fixed in the hot plate top with the base plate, thereby the area of contact between base plate and the hot plate has been reduced, the homogeneity of being heated of base plate has been increased, and simultaneously, be provided with the hole of blowing in the base plate, blow to the base plate, form the air supporting, the flatness of base plate has been improved, the thick homogeneity of membrane of organic rete on the base plate has further been guaranteed, and be provided with the bearing device of liftable, cooperation clamping device can carry out nimble getting to the base plate and put, the time has been saved, the productivity has been increased, the yields of products has been improved.

In addition, please refer to fig. 1, the baking apparatus 10 provided in the embodiment of the present application further includes an air supply device 106, a flow regulator 108 and a preheating device 107, wherein the air supply device 106 is communicated with the plurality of air blowing holes 105 through an air supply pipe 109, and the air provided by the air supply device 106 can be nitrogen or dry compressed air, and the air provided by the air supply device 106 is preheated by the preheating device 107, and then is regulated by the flow regulator 108, and finally is introduced into the plurality of air blowing holes 105 to blow air to the substrate 110, so as to form air flotation, thereby ensuring the flatness of the substrate 110 and improving the uniformity of film formation.

The flow regulating device 108 may be a flow valve, and the preheating device may be a preheating pump, or other devices that can perform the flow regulating and preheating operations in the embodiments of the present application.

It should be noted that the temperature for preheating the gas by the preheating device 107 can be set according to the heating temperature of the existing baking equipment, and generally can be higher than the room temperature and lower than the heating temperature of the heating plate 101.

Referring to fig. 8, an embodiment of the present application further provides an operating method of a baking apparatus, where the baking apparatus is the baking apparatus 10 in the foregoing embodiment, and the method includes:

Specifically, please refer to fig. 1, fig. 2, fig. 3 and fig. 8.

In the embodiment of the present application, the position where the transfer device 103 is located in fig. 1 is the first position, the position where the transfer device 103 is located in fig. 2 is the second position, and the position where the transfer device 103 is located in fig. 3 is the third position.

When the substrate 110 needs to be baked, the transferring device 103 is lifted to the first position by the lifting platform 1031, and the support 1032 passes through the support hole 104, and the substrate 110 is placed on the support 1032 by a robot or other industrial means.

The lift 1031 begins to descend, and when descending to the second position, the edge of the substrate 110 will contact the clamping device 102, and the clamping device 102 will fix the edge of the substrate 110, so that the substrate 110 is separated from the support 1032.

The lifting platform 1031 continues to descend to the third position, and in the embodiment of the present application, when the lifting platform 1031 descends to the third position, the top of the support member 1032 is lower than the heating plate 101.

When the lifting platform 1031 descends to the third position, the heating plate 101 starts to heat and bake the substrate 110, and the air supply device 106 supplies air to the air blowing holes 105 to form air flotation.

After the substrate 110 is baked, the heating plate 101 stops heating, the air blowing hole 105 stops blowing air, the lifting table 1031 rises to the second position and supports the substrate 110, and the clamping device 102 releases the substrate 110 to separate from the substrate 110.

The lift 1031 continues to rise to the third position and the substrate 110 on the support 1032 is removed by a robotic arm or other industrial means to complete the baking operation on the substrate.

It should be noted that, when the transfer device 103 is raised to the first position or the second position, the support 1032 can pass through the support hole 104 in the heating plate 101 to support the substrate 110, and when the transfer device 103 is located at the third position, the top of the support 1032 is lower than the heating plate 101, and the third position can be adjusted according to actual situations, which is not limited herein.

To sum up, the baking equipment and the operation method thereof provided by the embodiment of the application have the advantages that the clamping device is arranged above the heating plate, the substrate is fixed above the heating plate, so that the contact area between the substrate and the heating plate is reduced, the heating uniformity of the substrate is increased, meanwhile, the air blowing holes are formed in the substrate, air is blown to the substrate, air floatation is formed, the flatness of the substrate is improved, the film thickness uniformity of an organic film layer on the substrate is further ensured, the lifting bearing device is arranged, the substrate can be flexibly taken and placed by matching with the clamping device, the time is saved, the yield is increased, and the yield of products is improved.

In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.

The baking equipment and the operation method thereof provided by the embodiment of the application are described in detail, the principle and the embodiment of the application are explained by applying specific examples, and the description of the embodiment is only used for helping to understand the technical scheme and the core idea of the application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.

Claims

1. A toasting apparatus, comprising:

2. The toasting apparatus according to claim 1, wherein each of the plurality of supports has a height greater than a thickness of the heating plate.

3. The toasting apparatus according to claim 1, wherein the lift moves up and down a distance less than the height of the plurality of supports.

4. The roasting apparatus according to claim 1, wherein a plurality of rows of air blowing holes and a plurality of rows of support holes are formed in the heating plate, and the plurality of rows of air blowing holes and the plurality of rows of support holes are distributed at intervals.

5. The toasting apparatus according to claim 4 wherein the plurality of support members includes a plurality of rows of support posts in a one-to-one correspondence with the plurality of rows of support holes, each of the plurality of rows of support holes including a plurality of spaced support holes, each of the plurality of rows of support posts including a plurality of spaced support posts, each of the plurality of rows of support posts passing through its corresponding row of support holes when the lift platform is raised.

6. The roasting apparatus according to claim 1, wherein a plurality of rows of air blowing holes and a plurality of support holes extending in a row direction and parallel to each other are provided on the heating plate, and the plurality of rows of air blowing holes and the plurality of support holes are distributed at intervals, wherein the plurality of support members include a plurality of rows of support columns corresponding to the plurality of support holes, and the length of each support hole is greater than or equal to the length of the corresponding row of support columns in the row direction.

7. The baking apparatus as claimed in claim 1, further comprising a gas supply device, a flow regulating device and a preheating device, wherein the gas supply device is connected to the plurality of gas blowing holes through a gas supply pipe, and the flow regulating device and the preheating device are disposed on the gas supply pipe for regulating the flow of gas introduced into the plurality of gas blowing holes and heating the introduced gas.

8. A method of operating a toasting device according to claim 1, characterized in that the method comprises:

9. The method of claim 8, wherein when the transfer device is raised to the first position or the second position, the support member of the transfer device passes through the support hole of the heating plate to support the substrate.

10. The method of claim 8, wherein the top of the support member of the transfer device is lower than the heating plate when the transfer device is at the third position.