CN208239478U - A kind of SAW resonator type heat convection type twin-axis accelerometer structure - Google Patents
A kind of SAW resonator type heat convection type twin-axis accelerometer structure Download PDFInfo
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- CN208239478U CN208239478U CN201820589664.XU CN201820589664U CN208239478U CN 208239478 U CN208239478 U CN 208239478U CN 201820589664 U CN201820589664 U CN 201820589664U CN 208239478 U CN208239478 U CN 208239478U
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Abstract
The utility model relates to a kind of SAW resonator type heat convection type twin-axis accelerometer structures, including substrate, top surface insulating layer, bottom surface insulating layer, heater, top surface insulating layer, bottom surface insulating layer are separately positioned on the upper and lower surfaces of substrate, and the middle part of substrate is arranged in heater；The SAW resonator that four side of heater upper surface is equipped with 4 same frequencys is symmetrically distributed on the substrate top surface insulating layer；The bottom surface insulating layer is equipped with input signal electrode, output signal electrode, grounding electrode；The substrate is sealed with sealing cap, and insulating layer four side in top surface is equipped with sealing-in area, and substrate is square substrate.By the utility model, using SAW resonator as sensing element, digital resonance frequency subject to output signal, high resolution, measurement accuracy are high, convenient for making further digitized processing to measurement result；Using conventional miromaching, and square substrate and sealing cap structure are used, is suitable for mass production.
Description
Technical field
The utility model relates to a kind of acceleration sensor structure more particularly to a kind of SAW resonator type thermal convections
Formula twin-axis accelerometer structure belongs to micro electronmechanical (MEMS) field of sensing technologies.
Background technique
MEMS (micro-electrical mechanical system, MEMS) accelerometer is with its power consumption
Low, small in size, at low cost, the advantages that can be mass, is in numerous necks such as automobile, consumer electronics, medical treatment, robot and national defence
It is widely applied in domain.Conventionally, accelerometer includes an inertial mass, is accelerated outside by measuring mass block
Degree acts on the lower state change generated and senses this acceleration.But the presence of mass block can bring such as impact resistance it is low, system
The disadvantages of making complex process.
Air-flowing type inertial sensor replaces solid masses block as sensitive carrier using gas medium, realizes that acceleration etc. is used
The detection of property amount.By the quality very little of included gas medium, the effect for introducing inertia force is avoided, has structure simple, system
Make the advantages that method is simple, at low cost, is suitable for big overload and equips, and can be realized by the system in combination of multiaxis, more the moment of inertias
Comprehensive sensing function, and heat convection type accelerometer is then wherein widely used one kind.
Dao etc., Luo etc. and Leung etc. propose the sensing using thermal convection principle sensing acceleration or inclination angle in succession
Device structure (Convective accelerometer and inclinometer, US Patent 5581034,1996;
Micro-machined accelerometer with no proof mass, in Technical Digest of
International Electron Device Meeting, pp. 899–902,1997; Study on linearity
of a micro-machined convective accelerometer, Microelectronic Engineering,
65:87-101,2001), primary structure includes the microcavity of an etching on substrate, heater is arranged in the middle part of microcavity, at least
Two temperature sensors are split in the outside of heater.Its cardinal principle is
Now symmetrical Temperature Distribution, and when applying a transverse acceleration, the gas in microcavity generates asymmetrical thermal convection, each
Temperature difference is generated between temperature sensor, which is proportional to the size of applied acceleration.
Existing thermal convection accelerometer, the thermistor or thermoelectric pile for mostly using wheatstone bridge form greatly are as its temperature
Sensing element, the sensed quantity of output are the analogues value such as resistance, voltage or electric current, and resolution ratio is not high, and precision is low, be not easy to carry out into
The digitized processing of one step.
Utility model content
The purpose of this utility model, which is that, overcomes drawbacks described above, and it is double to develop a kind of SAW resonator type heat convection type
Axis accelerometer structure.
The purpose of this utility model is achieved in that a kind of SAW resonator type heat convection type twin-axis accelerometer
Structure, it is characterized in that: including substrate, top surface insulating layer, bottom surface insulating layer, heater, top surface insulating layer, bottom surface insulating layer difference
The upper and lower surfaces of substrate are set, and the middle part of substrate is arranged in heater；Symmetrically divide on the substrate top surface insulating layer
It is distributed in the SAW resonator that four side of heater upper surface is equipped with 4 same frequencys；The bottom surface insulating layer is equipped with input letter
Number electrode, output signal electrode, grounding electrode；The substrate is sealed with sealing cap, and insulating layer four side in top surface is equipped with sealing-in area, substrate
It is square substrate；
The heater includes circular heating plate, heating electrode, heating ground electrode, central electrode, annular electrode, and circle adds
For hot plate in the substrate top surface insulating layer of substrate top surface center, central electrode, annular electrode run through substrate and top surface insulating layer, bottom
Face insulating layer, and annular electrode, around central electrode, heating electrode, heating ground electrode are set on substrate bottom surface insulating layer；Institute
It states circular heating plate and is connected by central electrode and annular electrode with heating electrode and heating ground electrode, the annular electrode is in
It is isolated between heart electrode by the compound insulation layer comprising the first insulating layer, substrate layer, second insulating layer, the annular electrode and base
By third insulator separation between plate side wall, first insulating layer, second insulating layer, third insulating layer both ends respectively with base
The top surface insulating layer and bottom surface insulating layer of plate connect；
The SAW resonator include 1 interdigital transducer, the interdigital transducer two sides that are placed in 2 reflectors and
Piezoelectric membrane block, the interdigital transducer includes the input bus electrode of interdigitated array and its both ends, exports bus electrode, described
Reflector includes the ground connection bus electrode that short-circuiting reflection refers to array and its both ends, and it is exhausted that the piezoelectric membrane block is produced on substrate top surface
In edge layer, the interdigitated array and short-circuiting reflection refer to that array is produced on piezoelectric membrane block, and the input bus electrode, output converge
Galvanic electricity pole and ground connection bus electrode are produced on the substrate top surface insulating layer of piezoelectric membrane block two sides；The substrate, which is equipped with, to be run through
The metallic vias of substrate, top surface insulating layer, bottom surface insulating layer；Input bus electrode, output bus electrode and ground connection bus electrode
Respectively by input signal electrode through substrate and top surface insulating layer, the metallic vias of bottom surface insulating layer and substrate bottom surface, defeated
Signal electrode is connected with grounding electrode out, is isolated between metallic vias and substrate side wall by via insulator, the via hole insulation
The both ends of layer connect with substrate top surface insulating layer and bottom surface insulating layer respectively；
The sealing cap is the semi-hollow structure in square-outside and round-inside section, and four sides of the substrate top surface insulating layer cover metal layer
Sealing-in area, sealing-in area and sealing cap lower end surface similar shape are formed, the lower end surface of sealing cap is bonded with the sealing-in area on four side of substrate top surface, is formed
The three-dimensional closing microcavity of one cylindrical cross-section.
The material of the substrate is silicon single crystal, the top surface insulating layer, bottom surface insulating layer, the first insulating layer, the second insulation
Layer, third insulating layer, via insulator material be silica or silicon nitride.
The material of the circular heating plate is polysilicon.
The central electrode, annular electrode heat electrode and heat the material of ground electrode as copper.
The material of the sealing cap is silicon.
The material in the sealing-in area is gold.
The material of the piezoelectric membrane block is zinc oxide or aluminium nitride.
The interdigital transducer of the SAW resonator and the material of reflector are aluminium, aluminium copper, copper or gold.
The input signal electrode, output signal electrode, grounding electrode material be copper.
The structurally reasonable simple, manufacturing of the utility model is easy, is easy to use, by the utility model, a kind of sound table
Surface wave resonator type heat convection type twin-axis accelerometer structure, including square substrate, are produced on the top surface of substrate upper and lower surface
Insulating layer and bottom surface insulating layer, the heater being produced in the middle part of substrate are produced on substrate top surface insulating layer and are symmetrically distributed in
The SAW resonator of 4 same frequencys of four side of heater upper surface, the input signal being produced on substrate bottom surface insulating layer
Electrode, output signal electrode, grounding electrode are produced on the sealing-in area on four side of substrate top surface insulating layer, and sealing-in is on substrate top surface
Sealing cap；
The heater include circular heating plate in the substrate top surface insulating layer of substrate top surface center, through substrate and
Top surface insulating layer, bottom surface insulating layer central electrode, around central electrode and run through substrate and top surface insulating layer, bottom surface insulating layer
Annular electrode, the heating electrode that is made on substrate bottom surface insulating layer and heating ground electrode, during the circular heating plate passes through
It heart electrode and annular electrode and heating electrode and heats ground electrode and is connected, by including the between the annular electrode and central electrode
The compound insulation layer isolation of one insulating layer, substrate layer, second insulating layer, it is exhausted by third between the annular electrode and substrate side wall
Edge layer isolation, first insulating layer, second insulating layer, third insulating layer both ends respectively with the top surface insulating layer of substrate and bottom
Face insulating layer connects；
The SAW resonator include 1 interdigital transducer, the interdigital transducer two sides that are placed in 2 reflectors and
Piezoelectric membrane block, the interdigital transducer includes the input bus electrode of interdigitated array and its both ends, exports bus electrode, described
Reflector includes the ground connection bus electrode that short-circuiting reflection refers to array and its both ends, and it is exhausted that the piezoelectric membrane block is produced on substrate top surface
In edge layer, the interdigitated array and short-circuiting reflection refer to that array is produced on piezoelectric membrane block, and the input bus electrode, output converge
Galvanic electricity pole and ground connection bus electrode are produced on the substrate top surface insulating layer of piezoelectric membrane block two sides, input bus electrode, output
Bus electrode and ground connection bus electrode are respectively by running through substrate and top surface insulating layer, the metallic vias of bottom surface insulating layer and substrate
Input signal electrode, the output signal electrode of bottom surface are connected with grounding electrode, exhausted by via hole between metallic vias and substrate side wall
Edge layer isolation, the both ends of the via insulator connect with substrate top surface insulating layer and bottom surface insulating layer respectively；
The sealing cap is the semi-hollow structure in square-outside and round-inside section, and four sides of the substrate top surface insulating layer cover metal layer
Form sealing-in area, the sealing-in area and sealing cap lower end surface similar shape, the lower end surface of the sealing cap and the sealing-in area on four side of substrate top surface
Bonding forms the three-dimensional closing microcavity an of cylindrical cross-section；
The material of the substrate is silicon single crystal, the top surface insulating layer, bottom surface insulating layer, the first insulating layer, the second insulation
Layer, third insulating layer, via insulator material be silica or silicon nitride, the material of the circular heating plate is polycrystalline
Silicon, the central electrode, annular electrode heat electrode and heat the material of ground electrode as copper, and the material of the sealing cap is silicon, institute
The material in sealing-in area is stated as gold；
The material of the piezoelectric membrane block is zinc oxide or aluminium nitride, the interdigital transducing of the SAW resonator
The material of device and reflector is aluminium or aluminium copper or copper or gold, the input signal electrode, output signal electrode
(36), the material of grounding electrode is copper.
Two-axis acceleration sensing is carried out using above-mentioned SAW resonator type heat convection type twin-axis accelerometer structure
Principle and method are as follows:
Round heating dish is set to generate heat to heater energization by heating electrode and heating ground electrode, combining silica sealing cap is led
Heat effect forms centrosymmetric hot-fluid and temperature gradient distribution in closing microcavity；
When not applying acceleration to structure, original centrosymmetric temperature gradient distribution is kept not in closing microcavity
Become, 4 SAW resonators for closing four side of substrate top surface insulating layer upper heater that is symmetrically placed in microcavity sense phase
Same temperature, exports the resonance signal of identical frequency；
When applying horizontal cross or horizontal longitudinal acceleration to structure, the gas hot-fluid in microcavity is closed by Ke Liao
The effect of power generates the offset contrary with acceleration, and it is non-right that the transverse temperature gradient or longitudinal temperature gradient in microcavity are presented
Claim distribution, transversely or longitudinally disposed a pair of of SAW resonator senses different temperature, exports different frequency
Resonance signal, difference on the frequency are proportional to the size of applied acceleration；
By the input signal electrode, output signal electrode, grounding electrode of substrate bottom surface by each SAW resonator
Oscillating circuit corresponding with the connected composition of external amplifier, phase shifter and frequency detecting instrument；
Measure the frequency of oscillating circuit outputting oscillation signal corresponding with the SAW resonator at different location, foundation
With transversely or the frequency difference of the corresponding oscillating circuit outputting oscillation signal of longitudinally disposed a pair of of SAW resonator
And its symbol, that is, it can determine the size and Orientation for the two-axis acceleration being applied in structure；
Compared with prior art, the utility model has the following beneficial effects:
(1) using SAW resonator as temperature-sensing element, digital resonance frequency or oscillation subject to output quantity
Frequency, high resolution, measurement accuracy are high, convenient for making further digitized processing to measurement result；
(2) silicon single crystal substrate is used, convenient for integrated with signal processing circuit；
(3) using conventional miromaching, and square substrate and sealing cap structure are used, convenient for using wafer level
Encapsulation technology is suitable for mass production.
Detailed description of the invention
Fig. 1 is substrate top surface structural schematic diagram in the utility model；
Fig. 2 is substrate bottom surface structural schematic diagram in the utility model；
Fig. 3 is SAW resonator structural schematic diagram in the utility model；
Fig. 4 is the structure sectional view of SAW resonator region on substrate in the utility model；
Fig. 5 is heater structure schematic diagram in the utility model；
Fig. 6 is the structure sectional view of substrate upper heater region in the utility model；
Fig. 7 is structure sectional view after the utility model encapsulation.
In figure: 1 substrate, 2 heaters, 3 SAW resonators, 4 sealing caps, 11 top surface insulating layers, 12 bottom surface insulating layers, 13
Sealing-in area, 21 circular heating plates, 22 central electrodes, 23 annular electrodes, 24 heating electrodes, 25 heating ground electrodes, 26 first insulation
Layer, 27 second insulating layers, 28 third insulating layers, 31 interdigital transducers, 32 reflectors, 33 piezoelectric membrane blocks, 34 metallic vias, 35
Input signal electrode, 36 output signal electrodes, 37 grounding electrodes, 41 closing microcavitys, 311 interdigitated arrays, 312 input confluence electricity
Pole, 313 output bus electrodes, 321 short-circuiting reflections refer to array, 322 ground connection bus electrodes.
Specific embodiment
The utility model is further described below in conjunction with attached drawing and Detailed description of the invention.
A kind of SAW resonator type heat convection type twin-axis accelerometer structure, including substrate 1, top surface insulating layer 11,
Bottom surface insulating layer 12, heater 2, top surface insulating layer 11, bottom surface insulating layer 12 are separately positioned on upper surface and the following table of substrate 1
The middle part of substrate 1 is arranged in face, heater 2；2 upper surface of heater, four side is symmetrically distributed on 1 top surface insulating layer 11 of substrate to set
Set the SAW resonator 3 of 4 same frequencys；Input signal electrode 35, output signal electrode are set on bottom surface insulating layer 12
36, grounding electrode 37；Substrate 1 is sealed with sealing cap 4, and insulating layer 11 4 side in top surface is set to sealing-in area 13, and substrate 1 is square base
Plate.
The heater 2 includes circular heating plate 21, heating electrode 24, heating ground electrode 25, central electrode 22, annular electro
Pole 23, in the substrate top surface insulating layer 11 of 1 top surface of substrate center, central electrode 22, annular electrode 23 pass through circular heating plate 21
Substrate 1 and top surface insulating layer 11, bottom surface insulating layer 12 are worn, and annular electrode 23 is around central electrode 22, heating electrode 24, heating
Ground electrode 25 is set on 1 bottom surface insulating layer 12 of substrate；The circular heating plate 21 passes through central electrode 22 and annular electrode 23
It is connected with heating electrode 24 and heating ground electrode 25, by including the first insulating layer between the annular electrode 23 and central electrode 22
26, the compound insulation layer isolation of 1 layer of substrate, second insulating layer 27, it is exhausted by third between 1 side wall of the annular electrode 23 and substrate
Edge layer 28 is isolated, first insulating layer 26, second insulating layer 27, third insulating layer 28 the both ends top surface with substrate 1 respectively
Insulating layer 11 and bottom surface insulating layer 12 connect.
The SAW resonator 3 include 1 interdigital transducer 31,2 of 31 two sides of interdigital transducer that are placed in it is anti-
Emitter 32 and piezoelectric membrane block 33, the interdigital transducer 31 include the input bus electrode at interdigitated array 311 and its both ends
312, bus electrode 313 is exported, the reflector 32 includes the ground connection bus electrode that short-circuiting reflection refers to array 321 and its both ends
322, the piezoelectric membrane block 33 is produced on substrate top surface insulating layer 11, and the interdigitated array 311 and short-circuiting reflection refer to array
321 are produced on piezoelectric membrane block 33, the input bus electrode 312, output bus electrode 313 and ground connection bus electrode 322
It is produced on the substrate top surface insulating layer 11 of 33 two sides of piezoelectric membrane block；It is provided on the substrate 1 exhausted through substrate 1, top surface
Edge layer 11, the metallic vias 34 of bottom surface insulating layer 12；Input bus electrode 312, output bus electrode 313 and ground connection bus electrode
322 pass through the input through substrate 1 and top surface insulating layer 11, the metallic vias 34 of bottom surface insulating layer 12 and 1 bottom surface of substrate respectively
Signal electrode 35, output signal electrode 36 are connected with grounding electrode 37, are insulated between 1 side wall of metallic vias 34 and substrate by via hole
Layer 341 is isolated, and the both ends of the via insulator 341 connect with 1 top surface insulating layer 11 of substrate and bottom surface insulating layer 12 respectively；
The sealing cap 4 is the semi-hollow structure in square-outside and round-inside section, and four sides of the 1 top surface insulating layer 11 of substrate cover gold
Belong to floor and forms sealing-in area 13, sealing-in area 13 and 4 lower end surface similar shape of sealing cap, the sealing-in of the lower end surface and 1 top surface of substrate, four side of sealing cap 4
Area 13 is bonded, and forms the three-dimensional closing microcavity 41 an of cylindrical cross-section.
Further, the material of substrate 1 be silicon single crystal, top surface insulating layer 11, bottom surface insulating layer 12, the first insulating layer 26,
Second insulating layer 27, third insulating layer 28, via insulator 341 material be silica or silicon nitride.Circular heating plate
21 material is polysilicon.Central electrode 22, annular electrode 23 heat electrode 24 and heat the material of ground electrode 25 as copper.
The material of the sealing cap 4 is silicon.The material in the sealing-in area 13 is gold.The material of the piezoelectric membrane block 33 is oxygen
Change zinc or aluminium nitride.The interdigital transducer 31 of the SAW resonator 3 and the material of reflector 32 are aluminium, aluminum bronze conjunction
Gold, copper or gold.The input signal electrode 35, output signal electrode 36, grounding electrode 37 material be copper.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5, Fig. 6 and Fig. 7, a kind of SAW resonator type heat convection type twin shaft adds
Accelerometer structure, including square silicon single crystal substrate, are covered on the silicon dioxide insulating layer of substrate top surface and top surface, are produced on base
Heater in the middle part of plate is produced on substrate top surface insulating layer and is symmetrically distributed in 4 identical resonance of four side of heater upper end
The SAW resonator of frequency, be produced on copper input electrode on substrate bottom surface insulating layer, output electrode, grounding electrode,
Electrode, heating ground electrode are heated, the input bus electrode for being separately connected each SAW resonator on substrate, output are produced on
Bus electrode, ground connection bus electrode and the input signal electrode of substrate bottom surface, output signal electrode, grounding electrode copper metal
Via hole, sealing-in include the golden of the siliceous sealing cap of cylindrical groove and four side of substrate top surface in the siliceous sealing cap of substrate top surface
Sealing-in area eutectic bonding forms a tubular closing microcavity.
Claims (9)
1. a kind of SAW resonator type heat convection type twin-axis accelerometer structure, it is characterized in that: including substrate (1), top surface
Insulating layer (11), bottom surface insulating layer (12), heater (2), top surface insulating layer (11), bottom surface insulating layer (12) are separately positioned on base
The upper and lower surfaces of plate (1), heater (2) are arranged at the middle part of substrate (1)；Substrate (1) the top surface insulating layer (11)
On be symmetrically distributed in four side of heater (2) upper surface be equipped with 4 same frequencys SAW resonator (3)；The bottom surface insulation
Layer (12) is equipped with input signal electrode (35), output signal electrode (36), grounding electrode (37)；The substrate (1) is sealed with
Sealing cap (4), (11) four side of top surface insulating layer are equipped with sealing-in area (13), and substrate (1) is square substrate；
The heater (2) include circular heating plate (21), heating electrode (24), heating ground electrode (25), central electrode (22),
Annular electrode (23), circular heating plate (21) is in substrate (1) top surface center substrate top surface insulating layer (11), central electrode
(22), annular electrode (23) runs through substrate (1) and top surface insulating layer (11), bottom surface insulating layer (12), and annular electrode (23) ring
Around central electrode (22), electrode (24) are heated, heating ground electrode (25) is set on substrate (1) bottom surface insulating layer (12)；It is described
Circular heating plate (21) passes through central electrode (22) and annular electrode (23) and heating electrode (24) and heating ground electrode (25) phase
Even, by including the first insulating layer (26), substrate (1) layer, the second insulation between the annular electrode (23) and central electrode (22)
The compound insulation layer isolation of layer (27), is isolated between the annular electrode (23) and substrate (1) side wall by third insulating layer (28),
First insulating layer (26), second insulating layer (27), third insulating layer (28) both ends respectively with the top surface of substrate (1) insulate
Layer (11) and bottom surface insulating layer (12) connect；
The SAW resonator (3) includes 1 interdigital transducer (31), 2 of the interdigital transducer that is placed in (31) two sides
Reflector (32) and piezoelectric membrane block (33), the interdigital transducer (31) include the input at interdigitated array (311) and its both ends
Bus electrode (312), output bus electrode (313), the reflector (32) includes that short-circuiting reflection refers to array (321) and its both ends
Ground connection bus electrode (322), the piezoelectric membrane block (33) is produced on substrate top surface insulating layer (11), the interdigitated array
(311) and short-circuiting reflection refers to that array (321) is produced on piezoelectric membrane block (33), and the input bus electrode (312), output converge
Galvanic electricity pole (313) and ground connection bus electrode (322) are produced on the substrate top surface insulating layer (11) of piezoelectric membrane block (33) two sides；
The substrate (1) is equipped with the metallic vias (34) through substrate (1), top surface insulating layer (11), bottom surface insulating layer (12)；Input
Bus electrode (312), output bus electrode (313) and ground connection bus electrode (322) are respectively by exhausted through substrate (1) and top surface
Edge layer (11), the metallic vias (34) of bottom surface insulating layer (12) and the input signal electrode (35) of substrate (1) bottom surface, output signal
Electrode (36) is connected with grounding electrode (37), between metallic vias (34) and substrate (1) side wall by via insulator (341) every
From the both ends of the via insulator (341) connect with substrate (1) top surface insulating layer (11) and bottom surface insulating layer (12) respectively；
The sealing cap (4) is the semi-hollow structure in square-outside and round-inside section, the four sides covering of substrate (1) the top surface insulating layer (11)
Metal layer forms sealing-in area (13), sealing-in area (13) and sealing cap (4) lower end surface similar shape, and the lower end surface and substrate (1) of sealing cap (4) are pushed up
The sealing-in area (13) on four side of face is bonded, and forms three-dimensional closing microcavity (41) an of cylindrical cross-section.
2. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the material of the substrate (1) is silicon single crystal, the top surface insulating layer (11), bottom surface insulating layer (12), the first insulating layer
(26), second insulating layer (27), third insulating layer (28), via insulator (341) material be silica or silicon nitride.
3. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the material of the circular heating plate (21) is polysilicon.
4. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the central electrode (22), annular electrode (23) heat electrode (24) and heat the material of ground electrode (25) as copper.
5. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the material of the sealing cap (4) is silicon.
6. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the material of the sealing-in area (13) is gold.
7. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the material of the piezoelectric membrane block (33) is zinc oxide or aluminium nitride.
8. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the material of the interdigital transducer (31) of the SAW resonator (3) and reflector (32) be aluminium, aluminium copper, copper or
Person's gold.
9. a kind of SAW resonator type heat convection type twin-axis accelerometer structure according to claim 1, feature
Be: the input signal electrode (35), output signal electrode (36), grounding electrode (37) material be copper.
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