CN208125758U - A kind of SAW resonator type bubble type twin-axis accelerometer structure - Google Patents

Abstract

The utility model relates to a kind of SAW resonator type bubble type twin-axis accelerometer structures, including substrate, top surface insulating layer, bottom surface insulating layer, heater, top surface insulating layer, bottom surface insulating layer are separately positioned on the top and bottom on substrate, and the middle part of substrate is arranged in heater；Four side of heater upper surface is symmetrically placed on the insulating layer of top surface equipped with 4 groups of SAW resonators；Bottom surface insulating layer is equipped with input signal electrode, output signal electrode, grounding electrode；Substrate is sealed with sealing cap, and substrate is square substrate；By the utility model, using SAW resonator as sensing element, digital resonance frequency or frequency of oscillation subject to output signal, it is easy to accomplish high-resolution, high-precision measurement, and convenient for making further digitized processing to measurement result；It is suitable for mass production using conventional miromaching, and using the substrate and capping structure of square section convenient for using Wafer-Level Packaging Technology.

Description

A kind of SAW resonator type bubble type twin-axis accelerometer structure

Technical field

The utility model relates to a kind of acceleration sensor structure more particularly to a kind of SAW resonator type bubble types Twin-axis accelerometer structure belongs to micro electronmechanical（MEMS）Field of sensing technologies.

Background technique

Accelerometer is a kind of to convert acceleration to the inertial sensor that electric signal detects.Silicon micro mechanical acceleration Meter is MEMS（MEMS）Technology more successfully using one of.Conventional silicon micromechanical accelerometer is used based on spring- Property amount model carries out acceleration sensing using the solid structure that mass block, spring beam are constituted, the disadvantage is that structural robustness is poor, Under the conditions of large impact, strong vibration, it can be damaged because the presence of mass block generates excessive inertia force, and solid masses block Complex manufacturing technology, high production cost.

Heat convection type accelerometer replaces solid masses block as acceleration sensitive carrier using gas medium, by being wrapped Quality very little containing gas medium avoids the introduced inertia force effect of solid masses block, is suitable for big overload application, And have many advantages, such as that structure is simple, easy to make, at low cost, and can realize combined inertia sense by multiaxis, the combination of more the moment of inertias Brake（Dao, etc., Convective accelerometer and inclinometer, US patent 5581034, 1996；Leung, etc., Micro-machined accelerometer with no proof mass, Technical Digest of Int. Electron Device Meet., 1997, pp.899-902）.

But since the thermal convection of gas medium is in relatively slow, when being responded using the accelerometer of gas thermal convection Between it is long, sensitivity is low.Existing improved method is using the bubble formed in microcavity by liquid gasification as sensitive carrier.Lin Etc. describing the forming process of the bubble in liquid under heat effect（A high-precision, wide-bandwidth micro-machined tunneling accelerometer, Journal of Micro-electromechanical Systems, 1998, vol.3, 425–433）, Liao etc. is devised a kind of with about 1 DEG C/g and 60ms based on this principle The hot bubble type accelerometer of response time（A novel thermal-bubble-based micro-machined accelerometer, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, vol.1, pp. 519–522）, basic structure includes that etching is serving as a contrast Two temperature sensors of microcavity on bottom, the electric heater being suspended above microcavity and the heater two sides that are placed in, in microcavity Inject working fluid.The basic principle is that when heater be powered after, immediately below working fluid gasify to form bubble.When to knot When structure applies certain acceleration, the center of gravity reverse movement of liquid in microcavity, and bubble is then inclined to side along acceleration direction, so that The temperature rise speed of two temperature sensor positions is inconsistent, i.e. two temperature sensors sense a temperature difference, and This temperature difference is proportional to the size of applied acceleration.

The existing thermal convection accelerometer including above-mentioned hot bubble type acceleration sensing structure mostly uses greatly Wheatstone bridge For the thermistor or thermoelectric pile of form as its temperature-sensing element, output sensed quantity is the analog quantitys such as resistance, voltage or electric current, Resolution ratio is not high, and precision is low, is not easy to carry out further digitized processing.

Utility model content

The purpose of the utility model is to overcome deficiencies in the prior art, provide a kind of SAW resonator type gas Bubble twin-axis accelerometer structure has high resolution, precision height, the output of quasi- digital sense amount, is easy to carry out digitized processing The advantages that.

The purpose of this utility model is achieved in that a kind of SAW resonator type bubble type twin-axis accelerometer knot Structure, including substrate, top surface insulating layer, bottom surface insulating layer, heater, top surface insulating layer, bottom surface insulating layer are separately positioned on substrate On top and bottom, the middle part of substrate is arranged in heater；Symmetrically be placed in heater upper surface on the top surface insulating layer Four sides are equipped with 4 groups of SAW resonators；The bottom surface insulating layer is equipped with input signal electrode, output signal electrode, ground connection Electrode；The substrate is sealed with sealing cap, and substrate is square substrate；

The heater includes circular heating plate, heating electrode, heating ground electrode, central electrode, annular electrode, and circle adds Hot plate is set in substrate top surface center and insertion top surface insulating layer, and heating electrode, heating ground electrode are set to bottom surface insulating layer On, central electrode, annular electrode are through substrate and top surface insulating layer, bottom surface insulating layer and connection circular heating plate and heating electricity Pole, heating ground electrode, the annular electrode around central electrode, between central electrode, annular electrode by comprising the first insulating layer, Substrate, second insulating layer compound insulation layer be isolated；Between the annular electrode and substrate side wall by third insulating layer institute every From；First insulating layer, second insulating layer, third insulating layer both ends respectively on substrate top surface insulating layer and bottom surface it is exhausted Edge layer connects；

Each SAW resonator in every group of SAW resonator is laterally arranged side by side, and from inside to outside, each sound table The resonance frequency of surface wave resonator is successively successively decreased, the SAW resonator of same position in each group SAW resonator Resonance frequency is identical；

The SAW resonator include 1 interdigital transducer, the interdigital transducer two sides that are placed in 2 reflectors with And it is covered in the piezoelectric membrane on interdigital transducer and reflector；The interdigital transducer includes the defeated of interdigitated array and its both ends Enter bus electrode, output bus electrode；The reflector includes the ground connection bus electrode that short-circuiting reflection refers to array and its both ends；Institute It states substrate and is equipped with the metallic vias through substrate, top surface insulating layer, bottom surface insulating layer；The input bus electrode, output converge Galvanic electricity pole, ground connection bus electrode through substrate and top surface insulating layer, the metallic vias of bottom surface insulating layer and substrate respectively by carrying on the back Input signal electrode, output signal electrode, the grounding electrode in face are connected；By via insulator between metallic vias and substrate side wall Isolation, the both ends of via insulator connect with substrate top surface insulating layer and bottom surface insulating layer respectively；

The sealing cap is the semi-hollow structure of square section in foreign side, the top surface insulation that the removal of four side of substrate top surface originally covered Floor forms sealing-in area, and the sealing cap lower end surface is bonded with the sealing-in area on four side of substrate top surface, forms the vertical of a square section Body closes microcavity, is equipped with liquid injection hole at the top of the sealing cap, injects working fluid to closing microcavity by liquid injection hole, then glue envelope note Fluid apertures.

The material of the substrate is silicon single crystal.

The top surface insulating layer, bottom surface insulating layer, the first insulating layer, second insulating layer, third insulating layer, via insulator Material be silica or silicon nitride.

The material of the circular heating plate is polysilicon, and central electrode, annular electrode heat electrode and heat ground electrode Material is copper.

The material of the sealing cap is glass or silicon, and working fluid is deionized water or methanol.

Interdigitated array, the short-circuiting reflection of the SAW resonator refer to array and input bus electrode, output confluence electricity Pole, the material for being grounded bus electrode are aluminium, aluminium copper, copper or gold, the material of the piezoelectric membrane be zinc oxide or Aluminium nitride, the material of the input signal electrode, output signal electrode and grounding electrode are copper.

The structurally reasonable simple, manufacturing of the utility model is easy, is easy to use, and by the utility model, this is practical new The technical solutions adopted are as follows for type：

A kind of SAW resonator type bubble type twin-axis accelerometer structure, including square substrate, are produced on substrate On top surface insulating layer and bottom surface insulating layer, the heater being produced in the middle part of substrate, it is on substrate top surface insulating layer and right to be produced on Claim the 4 groups of SAW resonators of four side of heater upper surface of being placed in, the input signal being produced on substrate bottom surface insulating layer Electrode, output signal electrode, grounding electrode, sealing cap of the sealing-in in substrate top surface.

The heater includes the circular heating plate for being made in substrate top surface center and being embedded in substrate top surface insulating layer, system Make in heating electrode on substrate bottom surface insulating layer and heating ground electrode, through substrate and top surface insulating layer, bottom surface insulating layer and The central electrode and annular electrode for connecting circular heating plate and heating electrode, heating ground electrode, the annular electrode is around center Electrode is isolated by the compound insulation layer comprising the first insulating layer, substrate layer, second insulating layer therebetween, the annular electrode and It is isolated between substrate side wall by third insulating layer, first insulating layer, second insulating layer, the both ends difference of third insulating layer Connect with substrate top surface insulating layer and bottom surface insulating layer.

Each SAW resonator in one group of SAW resonator is laterally arranged side by side, and from inside to outside, each The resonance frequency of SAW resonator is successively successively decreased, and the surface acoustic wave of same position is humorous in each group SAW resonator Device resonance frequency of shaking is identical.

The SAW resonator include 1 interdigital transducer, the interdigital transducer two sides that are placed in 2 reflectors with And it is covered in the piezoelectric membrane on interdigital transducer and reflector, the interdigital transducer includes the defeated of interdigitated array and its both ends Enter bus electrode, output bus electrode, the reflector includes the ground connection bus electrode that short-circuiting reflection refers to array and its both ends, institute Input bus electrode, output bus electrode, ground connection bus electrode are stated respectively by insulating through substrate and top surface insulating layer, bottom surface The metallic vias of layer is connected with the input signal electrode of substrate back, output signal electrode, grounding electrode, metallic vias and substrate Be isolated between side wall by via insulator, the both ends of the via insulator respectively with substrate top surface insulating layer and bottom surface insulating layer Connect.

The sealing cap is the semi-hollow structure of square section in foreign side, and four side of substrate top surface removes the top surface originally covered Insulating layer forms sealing-in area, and the sealing cap lower end surface is bonded with the sealing-in area on four side of substrate top surface, forms a square section Three-dimensional closing microcavity, production has liquid injection hole at the top of the sealing cap, injects working fluid to microcavity by liquid injection hole, then glue seals Liquid injection hole.

The material of the substrate is silicon single crystal, each insulating layer（Top surface insulating layer, bottom surface insulating layer, the first insulation Layer, second insulating layer, third insulating layer, via insulator）Material be silica or silicon nitride, the circular heating plate Material be polysilicon, the central electrode, annular electrode, heating electrode and heat ground electrode material be copper, the sealing cap Material be glass or silicon, the working fluid be deionized water or methanol.

Interdigitated array, the short-circuiting reflection of the SAW resonator refer to that array and each interdigitated array, short-circuiting reflection refer to Array and input bus electrode, output bus electrode, be grounded bus electrode material be aluminium, aluminium copper, copper or gold, institute The material for stating piezoelectric membrane is zinc oxide or aluminium nitride, each input signal electrode, output signal electrode and ground connection electricity The material of pole is copper.

The original of two-axis acceleration sensing is carried out using above-mentioned SAW resonator type bubble type twin-axis accelerometer structure Reason is：

Round heating dish is set to generate heat to heater energization by heating electrode and heating ground electrode, working solution above it The bubble for covering round heating dish just is formed in body；

When not applying acceleration to structure, bubble is located at the surface of round heating dish, and 4 groups on the outside of round heating dish SAW resonator is immersed in working fluid, and each SAW resonator loses vibration, the output of resonance free signal；

When there are horizontal cross acceleration, bubble is deviated to the left side of round heating dish or right side, left side sound surface One or more SAW resonators in the SAW resonator group of in wave resonator group or right side are because exposed in bubble And starting of oscillation, generate corresponding resonance signal, and the number of the exposed SAW resonator in bubble and the acceleration applied The size of degree is directly proportional, i.e., the minimum resonance frequency of export resonance signal is directly proportional to the size of the acceleration applied；

When there are horizontal longitudinal acceleration, bubble is deviated to the front side of round heating dish or rear side, front side sound surface One or more SAW resonators in wave resonator group or in rear side SAW resonator group are because exposed in bubble And starting of oscillation, generate corresponding resonance signal, and the number of the exposed SAW resonator in bubble and the acceleration applied The size of degree is directly proportional, i.e., the minimum resonance frequency of export resonance signal is directly proportional to the size of the acceleration applied；

It is made up of the input signal electrode of substrate bottom surface, output signal electrode, grounding electrode rate of connections detecting instrument Frequency detecting circuit, the minimum frequency value according to each SAW resonator group export resonance signal of measurement gained, it may be determined that Acceleration magnitude and the direction of twin-axis accelerometer structure are acted on, measurement accuracy is decided by institute in each group SAW resonator Number and each SAW resonator resonant frequency difference value containing SAW resonator；

Because the exposed SAW resonator in bubble is compared with the SAW resonator induction being immersed in working fluid Resonance frequency to higher temperature, produced resonance signal has certain deviation compared with nominal resonance frequency, can by measurement before Calibration is eliminated；

Further, it is the measurement sensitivity for improving resonance frequency, the input signal electrode of substrate bottom surface, output can be passed through Each SAW resonator is connected structure by signal electrode, grounding electrode with external amplifier, phase shifter and frequency detecting instrument At corresponding oscillating circuit, by the frequency of corresponding oscillating circuit outputting oscillation signal, most according to the oscillator signal exported Small frequency value, it may be determined that the acceleration magnitude being applied in structure and direction；

Compared with prior art, the utility model has the advantages that：

（1）Using SAW resonator as sensing element, digital resonance frequency or frequency of oscillation subject to output quantity, It is easily achieved high-resolution, high-precision measurement, and convenient for making further digitized processing to measurement result；

（2）Using silicon single crystal substrate, convenient for integrated with signal processing circuit；

（3）Using conventional miromaching, and using the substrate and capping structure of square section, convenient for using Wafer-Level Packaging Technology is suitable for mass production.

Detailed description of the invention

Fig. 1 is substrate top surface structural schematic diagram in the utility model；

Fig. 2 is substrate bottom surface structural schematic diagram in the utility model；

Fig. 3 is SAW resonator structural schematic diagram in the utility model；

Fig. 4 is the structure sectional view of SAW resonator region on substrate in the utility model；

Fig. 5 is heater structure schematic diagram in the utility model；

Fig. 6 is the structure sectional view of substrate upper heater region in the utility model；

Fig. 7 is structure sectional view after the utility model encapsulation；

In figure：1 substrate, 2 heaters, 3 SAW resonators, 4 sealing caps, 5 working fluids, 11 top surface insulating layers, 12 bottoms Face insulating layer, 13 sealing-in areas, 21 circular heating plates, 22 central electrodes, 23 annular electrodes, 24 first insulating layers, 25 second insulation Layer, 26 third insulating layers, 27 heating electrodes, 28 heating ground electrodes, 31 interdigital transducers, 32 reflectors, 33 piezoelectric membranes, 34 gold medals Belong to via hole, 35 input signal electrodes, 36 output signal electrodes, 37 grounding electrodes, 41 liquid injection holes, 42 closing microcavitys, 311 interdigital battle arrays Column, 312 input bus electrodes, 313 output bus electrodes, 321 short-circuiting reflections refer to array, 322 ground connection bus electrodes, 341 via holes Insulating layer.

Specific embodiment

The utility model is further described below in conjunction with attached drawing and Detailed description of the invention.

A kind of SAW resonator type bubble type twin-axis accelerometer structure, including substrate 1, top surface insulating layer 11, bottom Face insulating layer 12, heater 2, top surface insulating layer 11, bottom surface insulating layer 12 are respectively set top and bottom on substrate 1, add The middle part of substrate 1 is arranged in hot device 2；2 upper surface of heater, four side that is symmetrically placed on top surface insulating layer 11 is provided with 4 groups of sound tables Surface wave resonator 3；Input signal electrode 35, output signal electrode 36, grounding electrode 37 are set on bottom surface insulating layer 12；Substrate 1 is sealed with sealing cap 4, and substrate 1 is square substrate.

The heater 2 includes circular heating plate 21, heating electrode 27, heating ground electrode 28, central electrode 22, annular electro Pole 23, circular heating plate 21 are set in 1 top surface of substrate center and insertion top surface insulating layer 11, heating electrode 27, heating ground electricity Pole 28 is set on bottom surface insulating layer 12, and central electrode 22, annular electrode 23 are exhausted through substrate 1 and top surface insulating layer 11, bottom surface Edge layer 12 and connection circular heating plate 21 and heating electrode 27, heating ground electrode 28, the annular electrode 23 is around central electrode 22, between central electrode 22, annular electrode 23 by comprising the first insulating layer 24, substrate 1, second insulating layer 25 compound insulation layer It is isolated；It is isolated between 1 side wall of annular electrode 23 and substrate by third insulating layer 26；First insulating layer 24, second insulating layer 25, the both ends of third insulating layer 26 respectively on substrate 1 top surface insulating layer 11 and bottom surface insulating layer 12 connect.

Each SAW resonator 3 in every group of SAW resonator is laterally arranged side by side, and from inside to outside, each sound table The resonance frequency of surface wave resonator 3 is successively successively decreased, the surface acoustic wave resonance of same position in each group SAW resonator Device resonance frequency is identical.

SAW resonator 3 includes 2 reflectors of 1 interdigital transducer 31,31 two sides of interdigital transducer that are placed in 32 and the piezoelectric membrane 33 that is covered on interdigital transducer 31 and reflector 32；Interdigital transducer 31 includes interdigitated array 311 And its input bus electrode 312, the output bus electrode 313 at both ends；Reflector 32 includes that short-circuiting reflection refers to array 321 and its two The ground connection bus electrode 322 at end；Metal mistake of the setting through substrate 1, top surface insulating layer 11, bottom surface insulating layer 12 on substrate 1 Hole 34；The input bus electrode 312, output bus electrode 313, ground connection bus electrode 322 are respectively by through substrate 1 and top Input signal electrode 35, the output signal electrode of face insulating layer 11, the metallic vias 34 of bottom surface insulating layer 12 and 1 back side of substrate 36, grounding electrode 37 is connected；It is isolated between metallic vias 34 and 1 side wall of substrate by via insulator 341, via insulator 341 Both ends connect respectively with 1 top surface insulating layer 11 of substrate and bottom surface insulating layer 12.

Sealing cap 4 is the semi-hollow structure of square section in foreign side, and 1 top surface of substrate, four side removes the top surface insulating layer originally covered 11 form sealing-in area 13, and 4 lower end surface of sealing cap is bonded with 13 phase of sealing-in area on 1 top surface of substrate, four side, form a square section Three-dimensional closing microcavity 42, be provided with liquid injection hole 41 at the top of sealing cap 4, working fluid injected to closing microcavity 42 by liquid injection hole 41 5, then glue seals liquid injection hole 41.

Further, the material of substrate 1 is silicon single crystal.Top surface insulating layer 11, bottom surface insulating layer 12, the first insulating layer 24, Second insulating layer 25, third insulating layer 26, via insulator 341 material be silica or silicon nitride.The circle adds The material of hot plate 21 be polysilicon, central electrode 22, annular electrode 23, heating electrode 27 and heat ground electrode 28 material be Copper.The material of the sealing cap 4 is glass or silicon, and working fluid 5 is deionized water or methanol.The surface acoustic wave resonance Interdigitated array 311, the short-circuiting reflection of device 3 refer to array 321 and input bus electrode 312, output bus electrode 313, ground connection confluence The material of electrode 322 is aluminium, aluminium copper, copper or gold, and the material of the piezoelectric membrane 33 is zinc oxide or aluminium nitride, The material of the input signal electrode 35, output signal electrode 36 and grounding electrode 37 is copper.

As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5, Fig. 6 and Fig. 7, a kind of SAW resonator type bubble type twin shaft acceleration Degree meter structure, including square silicon single crystal substrate, are produced on the silicon dioxide insulating layer of substrate top surface and bottom surface, are produced on substrate The heater at middle part is produced on substrate top surface insulating layer and is symmetrically distributed in 4 groups of surface acoustic waves of four side of heater upper surface Resonator, copper input signal electrode, output signal electrode, grounding electrode, the heating electricity being produced on substrate bottom surface insulating layer Pole, heating ground electrode are produced on the input bus electrode that each SAW resonator is separately connected on substrate, output confluence electricity Pole, ground connection bus electrode and the input signal electrode of substrate bottom surface, output signal electrode, grounding electrode copper via hole, sealing-in In the glass sealing cap of substrate top surface, the glass sealing cap of square section stereo groove and the siliceous sealing-in on four side of substrate top surface are included Area forms the three-dimensional closing microcavity an of square section by anode linkage, and the liquid injection hole for being produced on closing microcavity upper end is used for It injects working fluid and glue seals after injecting working fluid.

Claims (6)

1. a kind of SAW resonator type bubble type twin-axis accelerometer structure, it is characterized in that：Including substrate（1）, top surface it is exhausted Edge layer（11）, bottom surface insulating layer（12）, heater（2）, top surface insulating layer（11）, bottom surface insulating layer（12）It is separately positioned on substrate （1）On top and bottom, heater（2）It is arranged in substrate（1）Middle part；The top surface insulating layer（11）On be symmetrically placed in Heater（2）Four side of upper surface is equipped with 4 groups of SAW resonators（3）；The bottom surface insulating layer（12）It is equipped with input signal Electrode（35）, output signal electrode（36）, grounding electrode（37）；The substrate（1）It is sealed with sealing cap（4）, substrate（1）For pros Shape substrate；

The heater（2）Including circular heating plate（21）, heating electrode（27）, heating ground electrode（28）, central electrode（22）, Annular electrode（23）, circular heating plate（21）It is set to substrate（1）Top surface center and insertion top surface insulating layer（11）It is interior, heating electricity Pole（27）, heating ground electrode（28）It is set to bottom surface insulating layer（12）On, central electrode（22）, annular electrode（23）Through substrate （1）With top surface insulating layer（11）, bottom surface insulating layer（12）And connection circular heating plate（21）With heating electrode（27）, heating ground electricity Pole（28）, the annular electrode（23）Around central electrode（22）, central electrode（22）, annular electrode（23）Between by including One insulating layer（24）, substrate（1）, second insulating layer（25）Compound insulation layer be isolated；The annular electrode（23）And substrate （1）By third insulating layer between side wall（26）It is isolated；First insulating layer（24）, second insulating layer（25）, third insulation Layer（26）Both ends respectively with substrate（1）On top surface insulating layer（11）With bottom surface insulating layer（12）Connect；

Each SAW resonator in every group of SAW resonator（3）Laterally side by side, and from inside to outside, each sound surface Wave resonator（3）Resonance frequency successively successively decrease, the surface acoustic wave resonance of same position in each group SAW resonator Device resonance frequency is identical；

The SAW resonator（3）Including 1 interdigital transducer（31）, be placed in interdigital transducer（31）2 of two sides Reflector（32）And it is covered in interdigital transducer（31）And reflector（32）On piezoelectric membrane（33）；The interdigital transducer （31）Including interdigitated array（311）And its input bus electrode at both ends（312）, output bus electrode（313）；The reflector （32）Refer to array including short-circuiting reflection（321）And its ground connection bus electrode at both ends（322）；The substrate（1）It is equipped with and runs through Substrate（1）, top surface insulating layer（11）, bottom surface insulating layer（12）Metallic vias（34）；The input bus electrode（312）, it is defeated Bus electrode out（313）, ground connection bus electrode（322）Respectively by running through substrate（1）With top surface insulating layer（11）, bottom surface insulation Layer（12）Metallic vias（34）With substrate（1）The input signal electrode at the back side（35）, output signal electrode（36）, grounding electrode （37）It is connected；Metallic vias（34）With substrate（1）By via insulator between side wall（341）Isolation, via insulator（341）'s Both ends respectively with substrate（1）Top surface insulating layer（11）With bottom surface insulating layer（12）Connect；

The sealing cap（4）For the semi-hollow structure of square section in foreign side, substrate（1）The top surface that the removal of four side of top surface originally covered is exhausted Edge layer（11）Form sealing-in area（13）, the sealing cap（4）Lower end surface and substrate（1）The sealing-in area on four side of top surface（13）Bonding, shape At the three-dimensional closing microcavity of a square section（42）, the sealing cap（4）Top is equipped with liquid injection hole（41）, pass through liquid injection hole （41）To closing microcavity（42）Inject working fluid（5）, then glue seals liquid injection hole（41）.

2. a kind of SAW resonator type bubble type twin-axis accelerometer structure according to claim 1, it is characterized in that： The substrate（1）Material be silicon single crystal.

3. a kind of SAW resonator type bubble type twin-axis accelerometer structure according to claim 1, it is characterized in that： The top surface insulating layer（11）, bottom surface insulating layer（12）, the first insulating layer（24）, second insulating layer（25）, third insulating layer （26）, via insulator（341）Material be silica or silicon nitride.

4. a kind of SAW resonator type bubble type twin-axis accelerometer structure according to claim 1, it is characterized in that： The circular heating plate（21）Material be polysilicon, central electrode（22）, annular electrode（23）, heating electrode（27）And heating Ground electrode（28）Material be copper.

5. a kind of SAW resonator type bubble type twin-axis accelerometer structure according to claim 1, it is characterized in that： The sealing cap（4）Material be glass or silicon, working fluid（5）For deionized water or methanol.

6. a kind of SAW resonator type bubble type twin-axis accelerometer structure according to claim 1, it is characterized in that： The SAW resonator（3）Interdigitated array（311）, short-circuiting reflection refer to array（321）And input bus electrode（312）, Export bus electrode（313）, ground connection bus electrode（322）Material be aluminium, aluminium copper, copper or gold, the piezoelectric membrane （33）Material be zinc oxide or aluminium nitride, the input signal electrode（35）, output signal electrode（36）And grounding electrode （37）Material be copper.